Cr-Al-O-N thin film SEM surface microstructure images
<|begin_of_text|><|start_header_id|>system<|end_header_id|> You are a research archivist expert in dataset metadata. Answer the question truthfully.  <|eot_id|><|start_header_id|>user<|end_header_id|> Here is the Description of a dataset. Description:'This dataset contains SEM surface microstructure images of Cr-Al-O-N thin films that were deposited by sputter deposition for a variation of process parameters and chemical composition. The CSV-file contains chemical composition and sputter deposition process data for the individual SEM images. The image scale is 0.538 pixels/nm. For further information view the related publication' . Please return only a json list of at most 3 Keywords corresponding to the Description:.<|eot_id|><|start_header_id|>assistant<|end_header_id|> {"Answer" : ["hard coatings","magnetron sputtering","thin film microstructure"]} <|eot_id|>
 Here is the Description of a dataset. Description:'This dataset contains SEM surface microstructure images of Cr-Al-O-N thin films that were deposited by sputter deposition for a variation of process parameters and chemical composition. The CSV-file contains chemical composition and sputter deposition process data for the individual SEM images. The image scale is 0.538 pixels/nm. For further information view the related publication' . Please return only a json list of at most 3 Keywords corresponding to the Description:.
This dataset contains SEM surface microstructure images of Cr-Al-O-N thin films that were deposited by sputter deposition for a variation of process parameters and chemical composition. The CSV-file contains chemical composition and sputter deposition process data for the individual SEM images. The image scale is 0.538 pixels/nm. For further information view the related publication
hard coatings; magnetron sputtering; thin film microstructure