Ceramic at regional storage/CH U 4.00E-3 kg Lime, hydrated, packed, at U 2.00E-3 kg Transport, lorry >16 t, fleet average/RER U 1.90E-2 tkm Transport, freight, rail/RER U 4.30E-2 tkm Resource Water, cooling, unspecified nature origin/m3 2.50E-2 m3 use Water, river 2.20E-2 m3 Emission Heat, waste 3.32 MJ to air Emission Hydrocarbons, unspecified 2.00E-4 kg to water Acetic acid 5.00E-4 kg BOD 5, Biological Oxygen Demand 1.00E-3 kg COD, Chemical Oxygen Demand 1.00E-3 kg DOC, Dissolved Organic Carbon 4.00E-4 kg TOC, Total Organic Carbon 4.00E-4 kg Nitrogen 1.00E-4 kg 2. ALD chemical reaction inventory (For 1g Al2O3) ALD ( A 30 nm thick Al2O3 film; with 300-cycle ALD processes at 200℃) Input Output TMA 2.80g CH4 0.94g H2O 26.03g 1.00g N2 682.00g N2 682.00g ALD system Cambridge NanoTech Savannah 49.6% 1.39g 200 TMA emissions Reactor 4 inch standard wafer,150mm inner 97.97% 25.48g diameter and 5 mm inner depth Waste water Total energy 1.71GJ 3. Infrastructure, equipment and tools (Economic inventory) (For 1g Al2O3) The economic inventory with Cambridge NanoTech Company data and RS Means 2013 Items Description quantities Total cost ALD system Savannah S100: Standard 4” 0.0282 Piece $3,130 ALD- reactor; S100 Dome Lid w/ cassette: Dome lid with cassette for 10 wafers Roughing pump Alcatel 2005I Fomblin prepped 0.0282 Piece $83 – (Price) Precursor line Hot precursor lines 0.0282 Pieces $479 (Price) Laboratory Area is around 6m2 0.00376 Piece $48 (Cost) Computer Assume 3 years’ service life 0.094 $94 (Williams 2004) (Price) 4. Detailed process-based LCA modeling in Gabi 6.0
Ceramic at regional storage/CH U 4.00E-3 kg Lime, hydrated, packed, at U 2.00E-3 kg Transport, lorry >16 t, fleet average/RER U 1.90E-2 tkm Transport, freight, rail/RER U 4.30E-2 tkm Resource use Water, cooling, unspecified nature origin/m3 2.50E-2 m3 Water, river 2.20E-2 m3 Emission to air Heat, waste 3.32 MJ Emission to water Hydrocarbons, unspecified 2.00E-4 kg Acetic acid 5.00E-4 kg BOD 5, Biological Oxygen Demand 1.00E-3 kg COD, Chemical Oxygen Demand 1.00E-3 kg DOC, Dissolved Organic Carbon 4.00E-4 kg TOC, Total Organic Carbon 4.00E-4 kg Nitrogen 1.00E-4 kg 2. ALD chemical reaction inventory (For 1g Al2O3) ALD ( A 30 nm thick Al2O3 film; with 300-cycle ALD processes at 200℃) Input Output TMA 2.80g CH4 0.94g H2O 26.03g 1.00g N2 682.00g N2 682.00g ALD system Cambridge NanoTech Savannah 200 49.6% TMA emissions 1.39g Reactor 4 inch standard wafer,150mm inner diameter and 5 mm inner depth 97.97% Waste water 25.48g Total energy 1.71GJ 3. Infrastructure, equipment and tools (Economic inventory) (For 1g Al2O3) The economic inventory with Cambridge NanoTech Company data and RS Means 2013 Items Description quantities Total cost ALD system Savannah S100: Standard 4” ALD- reactor; S100 Dome Lid w/ cassette: Dome lid with cassette for 10 wafers 0.0282 Piece $3,130 Roughing pump Alcatel 2005I – Fomblin prepped 0.0282 Piece $83 (Price) Precursor line Hot precursor lines 0.0282 Pieces $479 (Price) Laboratory Area is around 6m2 0.00376 Piece $48 (Cost) Computer Assume 3 years’ service life (Williams 2004) 0.094 $94 (Price) 4. Detailed process-based LCA modeling in Gabi 6.0
1-s2.0-S0959652614002649-mmc1.docx