CLJ6 Carrier FE CLJ Event 28 CV Valid (Loaded) (@ End of E84) CLJ6 29 Recognition of Carrier and Wafer CLJ6 Carrier 30 RL Move to IB FE Start of E84 31 TB CLJ7 Carrier FE CLJ Event 32 CV Valid (Loaded) (@ End of E84) CLJ7 33 Recognition of Carrier and Wafer CLJ7 Carrier 34 RL Move to IB FE Start of E84 35 TB CLJ8 Carrier FE CLJ Event 36 CV Valid (Loaded) (@ End of E84) CLJ8 37 Recognition of Carrier and Wafer CLJ8 Carrier 38 RL Move to IB PJ Completed 39 D (Job1) PJ Creation 40 N (Job2) E CLJ9~12 Load 41 LQ LQ LQ LQ Queued CLJ9~12 LS FE LSP Event Time 42 LSP LSP LSP LSP Predicted = T5 CLJ5~8 FE URP Event 43 URP URP URP URP UR Predicted Time = T6 CLJ1 Unload FE CLJ Event 44 RU UR Request CLJ2 Unload FE CLJ Event 45 RU UR Request FE Start of E84 46 TB CLJ1 Deleted 47 RL D LR (Unloaded) CLJ9 Load FE CLJ Event 48 N Request CLJ3 Unload FE CLJ Event 49 RU UR Request FE Start of E84 50 TB CLJ2 Deleted 51 RL D LR (Unloaded)
28 CLJ6 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 29 CLJ6 Recognition of Carrier and Wafer 30 CLJ6 Carrier Move to IB RL 31 FE Start of E84 TB 32 CLJ7 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 33 CLJ7 Recognition of Carrier and Wafer 34 CLJ7 Carrier Move to IB RL 35 FE Start of E84 TB 36 CLJ8 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 37 CLJ8 Recognition of Carrier and Wafer 38 CLJ8 Carrier Move to IB RL 39 PJ Completed (Job1) D 40 PJ Creation (Job2) N 41 CLJ9~12 Load Queued LQ LQ LQ LQ 42 CLJ9~12 LS Predicted FE LSP Event Time = T5 LSP LSP LSP LSP 43 CLJ5~8 UR Predicted FE URP Event Time = T6 URP URP URP URP 44 CLJ1 Unload Request FE CLJ Event RU UR 45 CLJ2 Unload Request FE CLJ Event RU UR 46 FE Start of E84 TB 47 CLJ1 Deleted (Unloaded) RL D LR 48 CLJ9 Load Request FE CLJ Event N 49 CLJ3 Unload Request FE CLJ Event RU UR 50 FE Start of E84 TB 51 CLJ2 Deleted (Unloaded) RL D LR E
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