CLJ1~8 LSP Event 3 FE LSP LSP LSP LSP LS Predicted Time CLJ1~4= Now 4 FE Start of E84 TB CLJ1 Carrier FE CLJ Event 5 CV Valid (Loaded) (@ End of E84) CLJ1 6 Recognition of Carrier and Wafer CLJ1 Carrier 7 RL Move to IB FE Start of E84 8 TB CLJ2 Carrier FE CLJ Event 9 CV Valid (Loaded) (@ End of E84) CLJ2 10 Recognition of Carrier and Wafer CLJ2 Carrier 11 RL Move to IB FE Start of E84 12 TB CLJ3 Carrier FE CLJ Event 13 CV Valid (Loaded) (@ End of E84) CLJ3 14 Recognition of Carrier and Wafer CLJ3 Carrier 15 RL Move to IB FE Start of E84 16 TB CLJ4 Carrier FE CLJ Event 17 CV Valid (Loaded) (@ End of E84) CLJ4 18 Recognition of Carrier and Wafer CLJ4 Carrier 19 RL Move to IB PJ Creation 20 CLJ1~4 UR FE URP Event 21 URP URP URP URP Predicted Time = T2 CLJ5~8 LS FE LSP Event Time 22 LSP LSP LSP LSP Predicted CLJ5~8 =T1 FE Start of E84 23 TB CLJ5 Carrier FE CLJ Event 24 CV Valid (Loaded) (@ End of E84)
3 CLJ1~8 LS Predicted FE LSP Event Time CLJ1~4= Now LSP LSP LSP LSP 4 FE Start of E84 TB 5 CLJ1 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 6 CLJ1 Recognition of Carrier and Wafer 7 CLJ1 Carrier Move to IB RL 8 FE Start of E84 TB 9 CLJ2 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 10 CLJ2 Recognition of Carrier and Wafer 11 CLJ2 Carrier Move to IB RL 12 FE Start of E84 TB 13 CLJ3 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 14 CLJ3 Recognition of Carrier and Wafer 15 CLJ3 Carrier Move to IB RL 16 FE Start of E84 TB 17 CLJ4 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV 18 CLJ4 Recognition of Carrier and Wafer 19 CLJ4 Carrier Move to IB RL 20 PJ Creation 21 CLJ1~4 UR Predicted FE URP Event Time = T2 URP URP URP URP 22 CLJ5~8 LS Predicted FE LSP Event Time CLJ5~8 =T1 LSP LSP LSP LSP 23 FE Start of E84 TB 24 CLJ5 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) CV
5829B.docx