Sp00 PEM Off The equipment is not Tp01 Request to go to PEM On Set PEMJState to Sp01 operating in PEM state TRUE SetPEMJState service with PEMJState= TRUE Privileged user may trigger this transition. Sp01 PEM On The equipment is Tp02 Request to go to PEM Off Set PEMJState to Sp00 operating in PEM state FALSE SetPEMJState service with PEMJState= FALSE Privileged user may trigger this transition. Numeric portion of the transition numbers in this column shall be used as event numbers. PEMJ State Definition Table PEMJ State Definition Table Num Mnemonic State Definition Comments Sp00 PEM Off This state indicates that the equipment is not operating in PEM. Recipes in Conventional Recipe Space shall be used for process execution. PRC may be used for reference or setting only. Sp01 PEM On This state indicates that the equipment is operating in PEM. Recipes in PRC shall be used for process execution. Recipes in Conventional Recipe Space shall not be used for process execution. PEMJ State Transition Table PEMJ State Transition Table Previous State Trigger New State Actions Comments Tp00 (No state) Start-up of the equipment PEM Off None. Tp01 PEM Off Request to go to PEM On state PEM On Set PEMJState to TRUE SetPEMJState service with PEMJState= TRUE Privileged user may trigger this transition. Set PEMJState Tp02 PEM On Request to go to PEM Off state PEM Off to FALSE SetPEMJState service with PEMJState= FALSE Privileged user may trigger this transition. Numeric portion of the transition numbers in this column shall be used as event numbers. This section defines the message services required to support PEMJ State Management PEMJ Services — functionalities. The following table is a list of PEMJ services. PEMJ Service Message Description —
Sp00 PEM Off The equipment is not operating in PEM Tp01 Request to go to PEM On state SetPEMJState service with PEMJState= TRUE Privileged user may trigger this transition. Set PEMJState to TRUE Sp01 Sp01 PEM On The equipment is operating in PEM Tp02 Request to go to PEM Off state SetPEMJState service with PEMJState= FALSE Privileged user may trigger this transition. Set PEMJState to FALSE Sp00 Numeric portion of the transition numbers in this column shall be used as event numbers. PEMJ State Definition Table PEMJ State Definition Table Num Mnemonic State Definition Comments Sp00 PEM Off This state indicates that the equipment is not operating in PEM. Recipes in Conventional Recipe Space shall be used for process execution. PRC may be used for reference or setting only. Sp01 PEM On This state indicates that the equipment is operating in PEM. Recipes in PRC shall be used for process execution. Recipes in Conventional Recipe Space shall not be used for process execution. PEMJ State Transition Table PEMJ State Transition Table Previous State Trigger New State Actions Comments Tp00 (No state) Start-up of the equipment PEM Off None. Tp01 PEM Off Request to go to PEM On state SetPEMJState service with PEMJState= TRUE Privileged user may trigger this transition. PEM On Set PEMJState to TRUE Tp02 PEM On Request to go to PEM Off state SetPEMJState service with PEMJState= FALSE Privileged user may trigger this transition. PEM Off Set PEMJState to FALSE Numeric portion of the transition numbers in this column shall be used as event numbers. PEMJ Services — This section defines the message services required to support PEMJ State Management functionalities. PEMJ Service Message Description — The following table is a list of PEMJ services.
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