Bonded Pair Wafer Thickness Map (Five Repeats) Bonded Wafer Pair 25 Site Thickness Map (Five Repeats) Bonded Wafer Pair 25 Site Thickness Map (3 Std. Dev., Five Repeats)  Bonded Pair Wafer Bow Map (Five Repeats) 825 µm Bonded Pair Wafer Warp Maps (Five Repeats) Electrical Technique for Measuring Proximity Capacitance Displacement Metrology Capacitive sensors can be divided into two categories based upon their performance and intended use. High resolution sensors are typically used in displacement and position monitoring applications where high accuracy, stability and low temperature drift are required. Quite frequently, these sensors are used in process monitoring and closed-loop feedback control systems. Proximity type capacitive sensors are typically used to detect the presence of a part or used in counting applications. The following describes characteristics of high resolution systems, their operating principle and application. The capacitance sensor shown in Figure 27 is used throughout a variety of industries to provide highly stable, accurate measurements of displacement, vibration, position, thickness and runout. Capacitance probes are typically modeled as a parallel plate capacitor. If two conductive surfaces are separated by a distance and a voltage is applied to one of the surfaces, an electric field is created. This occurs due to the different charges stored on each of the surfaces.
Bonded Pair Wafer Thickness Map (Five Repeats) Bonded Wafer Pair 25 Site Thickness Map (Five Repeats) Bonded Wafer Pair 25 Site Thickness Map (3  Std. Dev., Five Repeats) Bonded Pair Wafer Bow Map (Five Repeats) 825 µm Bonded Pair Wafer Warp Maps (Five Repeats) Electrical Technique for Measuring Proximity Capacitance Displacement Metrology Capacitive sensors can be divided into two categories based upon their performance and intended use. High resolution sensors are typically used in displacement and position monitoring applications where high accuracy, stability and low temperature drift are required. Quite frequently, these sensors are used in process monitoring and closed-loop feedback control systems. Proximity type capacitive sensors are typically used to detect the presence of a part or used in counting applications. The following describes characteristics of high resolution systems, their operating principle and application. The capacitance sensor shown in Figure 27 is used throughout a variety of industries to provide highly stable, accurate measurements of displacement, vibration, position, thickness and runout. Capacitance probes are typically modeled as a parallel plate capacitor. If two conductive surfaces are separated by a distance and a voltage is applied to one of the surfaces, an electric field is created. This occurs due to the different charges stored on each of the surfaces.
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