CLJ State Transition Table No.#1 Previous State Trigger New State Actions#2 Comments Tc00 (No state) New Carrier Logistics demand occurred. Load Queued Create CLJ Early creation of CLJ CLJ Event Tc01 Load Queued Request loading of a carrier. Load Request CLJ Event Tc02 (No state) New Carrier Logistics demand occurred Load Request Create CLJ Normal creation of CLJ and is requesting load of a carrier. CLJ Event Tc03 Load Request A carrier is loaded and SEMI E84 Carrier Valid CLJ Event Factory level timing which sequence is completed. indicates that the carrier is under control of equipment Tc04 (No state) New Carrier Logistics demand occurred Carrier Valid Create CLJ For Interim solution only by arrival of AMHS while no CLJ is CLJ Event assigned on the load port. Tc05 Carrier Valid The carrier is ready to unload. Carrier Unload CLJ Event Load port may not be door shall be closed and undocked before Request assigned yet this transition. In case the load port has a purge capability, it shall also be done before this transition. Tc06 Unload Request The carrier is unloaded. (No state) Delete CLJ Normal completion CLD Event Tc07 CLJ Created Any fatal error. (No state) Delete CLJ Abnormal end CLD Event Error report Tc10 LR Prediction None. LR Not None Predicted Tc11 LR Not Start timing of Load Request state is LR Predicted LRP Event Predicted predicted. Tc12 LR Predicted Predicted start timing of Load Request LR Predicted LRP Event state is changed. Tc13 LR Predicted Predicted start timing of Load Request LR Not LRP Event state is withdrawn. Predicted Tc20 LS Prediction None LS Not None Predicted Tc21 LS Not Start timing of Load Stagnation is LS Predicted LSP Event Predicted predicted. Predicted start timing of Load Stagnation Tc22 LS Predicted LS Predicted LSP Event is changed. Tc23 LS Predicted Predicted start timing of Load Stagnation LS Not LSP Event is withdrawn. Predicted Tc30 UR Prediction None UR Not None Predicted Tc31 UR Not Start timing of Unload Request state is UR Predicted URP Event Predicted predicted. Tc32 UR Predicted Predicted start timing of Unload Request UR Predicted URP Event state is changed. Tc33 UR Predicted Predicted start timing of Unload Request UR Not URP Event state is withdrawn. Predicted
CLJ State Transition Table No.#1 Previous State Trigger New State Actions#2 Comments Tc00 (No state) New Carrier Logistics demand occurred. Load Queued Create CLJ CLJ Event Early creation of CLJ Tc01 Load Queued Request loading of a carrier. Load Request CLJ Event Tc02 (No state) New Carrier Logistics demand occurred and is requesting load of a carrier. Load Request Create CLJ CLJ Event Normal creation of CLJ Tc03 Load Request A carrier is loaded and SEMI E84 sequence is completed. Carrier Valid CLJ Event Factory level timing which indicates that the carrier is under control of equipment Tc04 (No state) New Carrier Logistics demand occurred by arrival of AMHS while no CLJ is assigned on the load port. Carrier Valid Create CLJ CLJ Event For Interim solution only Tc05 Carrier Valid The carrier is ready to unload. Carrier door shall be closed and undocked before this transition. In case the load port has a purge capability, it shall also be done before this transition. Unload Request CLJ Event Load port may not be assigned yet Tc06 Unload Request The carrier is unloaded. (No state) Delete CLJ CLD Event Normal completion Tc07 CLJ Created Any fatal error. (No state) Delete CLJ CLD Event Error report Abnormal end Tc10 LR Prediction None. LR Not Predicted None Tc11 LR Not Predicted Start timing of Load Request state is predicted. LR Predicted LRP Event Tc12 LR Predicted Predicted start timing of Load Request state is changed. LR Predicted LRP Event Tc13 LR Predicted Predicted start timing of Load Request state is withdrawn. LR Not Predicted LRP Event Tc20 LS Prediction None LS Not Predicted None Tc21 LS Not Predicted Start timing of Load Stagnation is predicted. LS Predicted LSP Event Tc22 LS Predicted Predicted start timing of Load Stagnation is changed. LS Predicted LSP Event Tc23 LS Predicted Predicted start timing of Load Stagnation is withdrawn. LS Not Predicted LSP Event Tc30 UR Prediction None UR Not Predicted None Tc31 UR Not Predicted Start timing of Unload Request state is predicted. UR Predicted URP Event Tc32 UR Predicted Predicted start timing of Unload Request state is changed. UR Predicted URP Event Tc33 UR Predicted Predicted start timing of Unload Request state is withdrawn. UR Not Predicted URP Event
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