Processing State Transition Table # Current State Trigger New State Action Comments 1 INIT Equipment initialization complete. IDLE None. None. 2 IDLE Commit has been made to set up. SETUP None. None. All setup activity has completed and This activity is 3 SETUP READY None. the equipment is ready to receive a equipment-specific. START command. Equipment has received a START This activity is 4 READY EXECUTING None. command from the host or operator equipment-specific. console. 5 EXECUTING The processing task has been IDLE None. None. completed. 6 PROCESSING Equipment has received a STOP IDLE None. None. ACTIVE command from host or operator console. 7 PROCESSING Equipment has received an ABORT IDLE This activity is None. ACTIVE command from host or operator equipment-specific. console. 8 PROCESS The equipment decides to PAUSE PAUSE This activity is For this type of due to a condition such as alarm. equipment-specific. problem, an operator assist is usually required. 9 PROCESS Equipment has received a PAUSE PAUSE This activity is None. command from host or operator equipment-specific. console. 10 PAUSE Equipment has received a RESUME Previous PROCESS This activity is None. command from host or operator substate equipment-specific. console. Equipment Capabilities and Scenarios This section describes the details of the capabilities required by GEM and provides scenarios for their use. Capabilities are operations performed by semiconductor manufacturing equipment. These operations are initiated through the communications interface using SECS-II messages. A scenario is a group of SECS-II messages arranged in a sequence to perform a capability. Other information may be included with the scenario for clarity. For each capability, the reader is provided with a statement of purpose, pertinent definitions, a detailed description, requirements, and scenarios. The following capabilities are discussed: Establish Communications Event Notification Dynamic Event Report Configuration Variable Data Collection Trace Data Collection Limits Monitoring Status Data Collection On-line Identification Alarm Management
Processing State Transition Table # Current State Trigger New State Action Comments 1 INIT Equipment initialization complete. IDLE None. None. 2 IDLE Commit has been made to set up. SETUP None. None. 3 SETUP All setup activity has completed and the equipment is ready to receive a START command. READY This activity is equipment-specific. None. 4 READY Equipment has received a START command from the host or operator console. EXECUTING This activity is equipment-specific. None. 5 EXECUTING The processing task has been completed. IDLE None. None. 6 PROCESSING ACTIVE Equipment has received a STOP command from host or operator console. IDLE None. None. 7 PROCESSING ACTIVE Equipment has received an ABORT command from host or operator console. IDLE This activity is equipment-specific. None. 8 PROCESS The equipment decides to PAUSE due to a condition such as alarm. PAUSE This activity is equipment-specific. For this type of problem, an operator assist is usually required. 9 PROCESS Equipment has received a PAUSE command from host or operator console. PAUSE This activity is equipment-specific. None. 10 PAUSE Equipment has received a RESUME command from host or operator console. Previous PROCESS substate This activity is equipment-specific. None. Equipment Capabilities and Scenarios This section describes the details of the capabilities required by GEM and provides scenarios for their use. Capabilities are operations performed by semiconductor manufacturing equipment. These operations are initiated through the communications interface using SECS-II messages. A scenario is a group of SECS-II messages arranged in a sequence to perform a capability. Other information may be included with the scenario for clarity. For each capability, the reader is provided with a statement of purpose, pertinent definitions, a detailed description, requirements, and scenarios. The following capabilities are discussed: Establish Communications Event Notification Dynamic Event Report Configuration Variable Data Collection Trace Data Collection Limits Monitoring Status Data Collection On-line Identification Alarm Management
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