PJ Completed 77 D PJ Creation 78 LQ LQ LQ LQ N E CLJ13~16 LS FE LSP Event 79 LSP LSP LSP LSP Predicted Time = T9 CLJ9~12 FE URP Event 80 URP URP URP URP UR Predicted Time = T10 CLJ5 Unload FE CLJ Event 81 RU UR Request CLJ6 Unload FE CLJ Event 82 RU UR Request FE Start of E84 83 TB CLJ5 Deleted 84 RL D (Unloaded) CLJ13 Load FE CLJ Event 85 LR N Request CLJ7 Unload FE CLJ Event 86 RU UR Request FE Start of E84 87 TB CLJ6 Deleted 88 RL D (Unloaded) CLJ14 Load FE CLJ Event 89 LR N Request CLJ8 Unload FE CLJ Event 90 RU UR Request FE Start of E84 91 TB CLJ7 Deleted 92 RL D (Unloaded) CLJ15 Load FE CLJ Event 93 LR N Request FE Start of E84 94 TB CLJ8 Deleted 95 RL D (Unloaded) CLJ16 Load FE CLJ Event 96 LR N Request FE Start of E84 97 TB CV CLJ13 Carrier FE CLJ Event 98 Valid (Loaded) (@ End of E84) CLJ13 99 Recognition of Carrier and Wafer CLJ13 Carrier 100 RL Move to IB FE Start of E84 101 TB CV CLJ14 Carrier FE CLJ Event 102 Valid (Loaded) (@ End of E84)
77 PJ Completed D 78 PJ Creation LQ LQ LQ LQ N 79 CLJ13~16 LS Predicted FE LSP Event Time = T9 LSP LSP LSP LSP 80 CLJ9~12 UR Predicted FE URP Event Time = T10 URP URP URP URP 81 CLJ5 Unload Request FE CLJ Event RU UR 82 CLJ6 Unload Request FE CLJ Event RU UR 83 FE Start of E84 TB 84 CLJ5 Deleted (Unloaded) RL D 85 CLJ13 Load Request FE CLJ Event LR N 86 CLJ7 Unload Request FE CLJ Event RU UR 87 FE Start of E84 TB 88 CLJ6 Deleted (Unloaded) RL D 89 CLJ14 Load Request FE CLJ Event LR N 90 CLJ8 Unload Request FE CLJ Event RU UR 91 FE Start of E84 TB 92 CLJ7 Deleted (Unloaded) RL D 93 CLJ15 Load Request FE CLJ Event LR N 94 FE Start of E84 TB 95 CLJ8 Deleted (Unloaded) RL D 96 CLJ16 Load Request FE CLJ Event LR N 97 FE Start of E84 TB CV 98 CLJ13 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 99 CLJ13 Recognition of Carrier and Wafer 100 CLJ13 Carrier Move to IB RL 101 FE Start of E84 TB CV 102 CLJ14 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) E
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