SEMI Draft Document 5750 REVISION TO ADD A NEW SUBORDINATE STANDARD: SPECIFICATION FOR PRODUCT TIME MEASUREMENT FOR MATERIAL CONTROL SYSTEMS TO SEMI E168-1114, SPECIFICATION FOR PRODUCT TIME MEASUREMENT Contents Purpose SEMI E168 defines the concepts for creating an analysis-ready set of time elements. The purpose of this Specification is to apply the concepts of SEMI E168 to define the standard product time measurement (PTM) method for product units in the domain of a material control system (MCS) as it relates to a semiconductor automated material handling system (AMHS). Scope This Document specifies the details needed to apply the PTM method to the MCS. It utilizes messages and data exchanged between the MCS and the factory information and control system (FICS). NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. Limitations This Specification is limited to the time substrates spend within the domain of a MCS. factory’s A primary objective of this Specification is to support analysis of time periods that are routine. Most error situations and infrequently occurring scenarios in the MCS are not addressed. However, these are not specifically
SEMI Draft Document 5750 REVISION TO ADD A NEW SUBORDINATE STANDARD: SPECIFICATION FOR PRODUCT TIME MEASUREMENT FOR MATERIAL CONTROL SYSTEMS TO SEMI E168-1114, SPECIFICATION FOR PRODUCT TIME MEASUREMENT Contents Purpose SEMI E168 defines the concepts for creating an analysis-ready set of time elements. The purpose of this Specification is to apply the concepts of SEMI E168 to define the standard product time measurement (PTM) method for product units in the domain of a material control system (MCS) as it relates to a semiconductor automated material handling system (AMHS). Scope This Document specifies the details needed to apply the PTM method to the MCS. It utilizes messages and data exchanged between the MCS and the factory information and control system (FICS). NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. Limitations This Specification is limited to the time substrates spend within the domain of a factory’s MCS. A primary objective of this Specification is to support analysis of time periods that are routine. Most error situations and infrequently occurring scenarios in the MCS are not addressed. However, these are not specifically
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