Dimensional and Tolerance Characteristics of 2-inch and 3-inch Silicon Carbide wafers with Secondary Flat Nominal Diameter 50.8mm (2 inch) 76.2mm (3 inch) Property Dimension Tolerance Dimension Tolerance Units Note 76.2 0.25 mm Diameter 50.8 0.25 22.0 2.0 mm Primary Flat Length 15.8 1.6 11.0 1.5 mm 8.0 1.6 Secondary Flat Length 0 25 µm GMLYMER (Warp) 0 25 0 15 µm GBIR (Total Thickness 0 10 Variation) 0 5 µm 0 5 SBIR (Local Thickness Variation) For Thickness 250 25 n.a. n.a. µm applications (OP) for high power and high 380 25 350 25 µm frequency applications (HP & HF) For 250µm Edge profile Coordinate Cy 83 83 µm thickness (T/3 template) (see table For 380µm 126 126 µm thickness #1 Edge profile Coordinate T/4 Template is not specified Dimensional and Tolerance Characteristics of 100-mm Silicon Carbide wafers with Secondary Flat Property Dimension Tolerance Units Note 100.0 +0/-0.5 mm Option 1 Diameter mm 0.5 Option 2 2.0 mm 32.5 Primary Flat Length 2.0 mm 18.0 Secondary Flat Length 40 0 µm GMLYMER (Warp) 0 15 µm GBIR (Total Thickness Variation) 0 5 µm On 10x10mm field, SBIR (Local Thickness variation) edge exclusion to be agreed by customer and supplier 350 25 µm for high power applications Thickness (HP) 500 25 µm for high frequency applications (HF) 116 µm For 350µm thickness Edge profile Coordinate Cy 166 µm For 500µm thickness (T/3 template) (see table #1 Edge profile Coordinate T/4 Template is not specified
Dimensional and Tolerance Characteristics of 2-inch and 3-inch Silicon Carbide wafers with Secondary Flat Nominal Diameter 50.8mm (2 inch) 76.2mm (3 inch) Property Dimension Tolerance Dimension Tolerance Units Note Diameter 50.8 0.25 76.2 0.25 mm Primary Flat Length 15.8 1.6 22.0 2.0 mm Secondary Flat Length 8.0 1.6 11.0 1.5 mm GMLYMER (Warp) 0 25 0 25 µm GBIR (Total Thickness Variation) 0 10 0 15 µm SBIR (Local Thickness Variation) 0 5 0 5 µm Thickness 250 25 n.a. n.a. µm For applications (OP) 380 25 350 25 µm for high power and high frequency applications (HP & HF) Edge profile Coordinate Cy (T/3 template) (see table 83 83 µm For 250µm thickness 126 126 µm For 380µm thickness #1 Edge profile Coordinate T/4 Template is not specified Dimensional and Tolerance Characteristics of 100-mm Silicon Carbide wafers with Secondary Flat Property Dimension Tolerance Units Note Diameter 100.0 +0/-0.5 mm mm Option 1 0.5 Option 2 Primary Flat Length 32.5 2.0 mm Secondary Flat Length 18.0 2.0 mm GMLYMER (Warp) 0 40 µm GBIR (Total Thickness Variation) 0 15 µm SBIR (Local Thickness variation) 0 5 µm On 10x10mm field, edge exclusion to be agreed by customer and supplier Thickness 350 25 µm for high power applications (HP) 500 25 µm for high frequency applications (HF) Edge profile Coordinate Cy (T/3 template) (see table 116 µm For 350µm thickness 166 µm For 500µm thickness #1 Edge profile Coordinate T/4 Template is not specified
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