AnalysisParameters Aux[] Example: Aux[] are auxiliary C N Array of name/value Pos.X identifiers, which the pairs of auxiliary = SPC AE stores together identifiers. 204, with the sample data, but they are not used for Pos.Y associations and = groupings. These could 25 contain detailed information; e.g., the location on the wafer. AnalysisParameters Comment External comment C N String. attached to the sample and displayed in the charts. AnalysisParameters DistributionType Normal, Distribution type to base C N String. Poisson etc. limits. AnalysisParameters DisplayRule 0 never This is used to override D N Enumeration. – display charts the display rules for charts. 1 display – affected charts always 2 display – affected charts only in the case that a violation was detected If true, this sample is not AnalysisParameters RejectFromEval D N Boolean. taken into SPC evaluations, like a repeated measurement, or a false measurement. An array of all An array of structured AnalysisParameters ParamDef D Y parameters with their elements from table statistical values for this SPC2. sample. Where, in the Role column D indicates and C indicates ‘ ‘ SPC2 Examples of Structured Elements for ParamDef DataItem — Element Name#3 Element Value Description Role#1 Reqd Form Examples Thickness, Name Parameter name. D Y String. FT-Oxid Index 1, 2, Parameter index. D #2 Integer. … #2 Unit Parameter unit. D String. ‘nm’, ‘in’ MeanUCL Externally provided upper control limit for D #2 Floating point real. sample mean value. MeanCenter Externally provided center line (expectation D #2 Floating point real. value) of sample mean value. MeanLCL Externally provided lower control limit for D #2 Floating point real. sample mean value.
AnalysisParameters Aux[] Example: Pos.X = 204, Pos.Y = 25 Aux[] are auxiliary identifiers, which the SPC AE stores together with the sample data, but they are not used for associations and groupings. These could contain detailed information; e.g., the location on the wafer. C N Array of name/value pairs of auxiliary identifiers. AnalysisParameters Comment External comment attached to the sample and displayed in the charts. C N String. AnalysisParameters DistributionType Normal, Poisson etc. Distribution type to base limits. C N String. AnalysisParameters DisplayRule 0 – never display charts 1 – display affected charts always 2 – display affected charts only in the case that a violation was detected This is used to override the display rules for charts. D N Enumeration. AnalysisParameters RejectFromEval If true, this sample is not taken into SPC evaluations, like a repeated measurement, or a false measurement. D N Boolean. AnalysisParameters ParamDef An array of all parameters with their statistical values for this sample. D Y An array of structured elements from table SPC2. Where, in the Role column D indicates ‘ and C indicates ‘ SPC2 — Examples of Structured Elements for ParamDef DataItem Element Name#3 Element Value Examples Description Role#1 Reqd Form Name Thickness, FT-Oxid Parameter name. D Y String. Index 1, 2, … Parameter index. D #2 Integer. Unit ‘nm’, ‘in’ Parameter unit. D #2 String. MeanUCL Externally provided upper control limit for sample mean value. D #2 Floating point real. MeanCenter Externally provided center line (expectation value) of sample mean value. D #2 Floating point real. MeanLCL Externally provided lower control limit for sample mean value. D #2 Floating point real.
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