This Standard covers specifications for services to and events from CLJ and CFJ models. This Standard covers PCL specifications for both Fixed Buffer Equipment and Internal Buffer Equipment. This Standard covers compatibility with non-slot-integrity operation. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. Limitations This Standard is not for metrics (especially not for postmortem analysis) of On the Fly Control Purpose — waste times that may be contained in several time slots defined in this Standard due to the design of equipment and/or fab system. It only cares about synchronization between equipment and fab system. Those metrics should be standardized separately if needed. The requirements regarding prediction are on a best effort basis, as a prediction has limited Best Effort Basis — accuracy in nature; moreover, in some cases prediction itself might not be provided. This Standard does not cover calculation algorithms for predictions. No Prediction Algorithm Covered — This Standard is intended to be used for equipment for which carrier logistics Only for Critical Equipment — are critical, and, application of this Standard especially prediction portions may not be needed for equipment to which carrier logistics are not critical. This Standard is not intended to provide physical status of Not for Physical Synchronization of Load Port — load ports. Referenced Standards and Documents SEMI Standards and Safety Guidelines SEMI E15 Specification for Tool Load Port — SEMI E15.1 Specification for 300 mm Tool Load Port — SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) — SEMI E39 Object Services Standard: Concepts, Behavior, and Services (OSS) — SEMI E40 Standard for Processing Management (PM) — SEMI E62 Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) — SEMI E84 Specification for Enhanced Carrier Handoff Parallel I/O Interface — SEMI E87 Specification for Carrier Management (CMS) — SEMI E94 Specification for Control Job Management (CJM) — ISO Standard ISO 8601:2004 Internet Standard for Date/Time Format — Unless otherwise indicated, all documents cited shall be the latest published versions. NOTICE: Terminology Abbreviations and Acronyms automated material handling system AMHS — Carrier Exchange Window CEW — Carrier Flow Job CFJ — Carrier Logistics Job CLJ —
This Standard covers specifications for services to and events from CLJ and CFJ models. This Standard covers PCL specifications for both Fixed Buffer Equipment and Internal Buffer Equipment. This Standard covers compatibility with non-slot-integrity operation. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. Limitations On the Fly Control Purpose — This Standard is not for metrics (especially not for postmortem analysis) of waste times that may be contained in several time slots defined in this Standard due to the design of equipment and/or fab system. It only cares about synchronization between equipment and fab system. Those metrics should be standardized separately if needed. Best Effort Basis — The requirements regarding prediction are on a best effort basis, as a prediction has limited accuracy in nature; moreover, in some cases prediction itself might not be provided. No Prediction Algorithm Covered — This Standard does not cover calculation algorithms for predictions. Only for Critical Equipment — This Standard is intended to be used for equipment for which carrier logistics are critical, and, application of this Standard especially prediction portions may not be needed for equipment to which carrier logistics are not critical. Not for Physical Synchronization of Load Port — This Standard is not intended to provide physical status of load ports. Referenced Standards and Documents SEMI Standards and Safety Guidelines SEMI E15 — Specification for Tool Load Port SEMI E15.1 — Specification for 300 mm Tool Load Port SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS) SEMI E40 — Standard for Processing Management (PM) SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface SEMI E87 — Specification for Carrier Management (CMS) SEMI E94 — Specification for Control Job Management (CJM) ISO Standard ISO 8601:2004 — Internet Standard for Date/Time Format NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. Terminology Abbreviations and Acronyms AMHS — automated material handling system CEW — Carrier Exchange Window CFJ — Carrier Flow Job CLJ — Carrier Logistics Job
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