CLJ10 Load FE CLJ Event 52 N Request CLJ4 Unload FE CLJ Event 53 RU UR Request FE Start of E84 54 TB CLJ3 Deleted 55 RL D LR (Unloaded) CLJ11 Load FE CLJ Event 56 N Request FE Start of E84 57 TB CLJ4 Deleted 58 RL D LR (Unloaded) CLJ12 Load FE CLJ Event 59 N Request FE Start of E84 60 TB CV CLJ9 Carrier FE CLJ Event 61 Valid (Loaded) (@ End of E84) CLJ9 62 Recognition of Carrier and Wafer CLJ9 Carrier 63 RL Move to IB FE Start of E84 64 TB CV CLJ10 Carrier FE CLJ Event 65 Valid (Loaded) (@ End of E84) CLJ10 66 Recognition of Carrier and Wafer CLJ10 Carrier 67 RL Move to IB FE Start of E84 68 TB CV CLJ11 Carrier FE CLJ Event 69 Valid (Loaded) (@ End of E84) CLJ11 70 Recognition of Carrier and Wafer CLJ11 Carrier 71 RL Move to IB FE Start of E84 72 TB CV CLJ13~16 Load 73 Queued CLJ12 Carrier FE CLJ Event 74 Valid (Loaded) (@ End of E84) CLJ12 75 Recognition of Carrier and Wafer
52 CLJ10 Load Request FE CLJ Event N 53 CLJ4 Unload Request FE CLJ Event RU UR 54 FE Start of E84 TB 55 CLJ3 Deleted (Unloaded) RL D LR 56 CLJ11 Load Request FE CLJ Event N 57 FE Start of E84 TB 58 CLJ4 Deleted (Unloaded) RL D LR 59 CLJ12 Load Request FE CLJ Event N 60 FE Start of E84 TB CV 61 CLJ9 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 62 CLJ9 Recognition of Carrier and Wafer 63 CLJ9 Carrier Move to IB RL 64 FE Start of E84 TB CV 65 CLJ10 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 66 CLJ10 Recognition of Carrier and Wafer 67 CLJ10 Carrier Move to IB RL 68 FE Start of E84 TB CV 69 CLJ11 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 70 CLJ11 Recognition of Carrier and Wafer 71 CLJ11 Carrier Move to IB RL 72 FE Start of E84 TB CV 73 CLJ13~16 Load Queued 74 CLJ12 Carrier Valid (Loaded) FE CLJ Event (@ End of E84) 75 CLJ12 Recognition of Carrier and Wafer
5829.docx