Referenced Standards and Documents SEMI Standards and Safety Guidelines SEMI E15 Specification for Tool Load Port — SEMI E15.1 Specification for 300 mm Tool Load Port — SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) — SEMI E39 Object Services Standard: Concepts, Behavior, and Services (OSS) — SEMI E40 Standard for Processing Management (PM) — SEMI E62 Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) — SEMI E84 Specification for Enhanced Carrier Handoff Parallel I/O Interface — SEMI E87 Specification for Carrier Management (CMS) — SEMI E94 Specification for Control Job Management (CJM) — ISO Standard ISO 8601:2004 Internet Standard for Date/Time Format — NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. Terminology Abbreviations and Acronyms automated material handling system AMHS — Carrier Exchange Window CEW — Carrier Flow Job CFJ — Carrier Logistics Job CLJ — front-opening interface mechanical standard FIMS — front opening unified pod FOUP — generic equipment model GEM — Predictive Carrier Logistics PCL — Load Request LR — Load Stagnation LS — Unload Request UR — Unload Stagnation US — Definitions an automated system to store and transport materials within automated material handling system (AMHS) — the factory. a set of one or more locations for holding carriers at or inside the production equipment. buffer — a container, such as a FOUP or open cassette, with one or more positions for holding substrates. carrier — a time slot which is allowed for a load port to unload a used carrier and Carrier Exchange Window (CEW) — then load a new carrier between AMHS without disturbing the continuous wafer processing of the equipment. Internal Buffer Equipment may have a CEW with multiple load ports to unload multiple used carriers and load multiple new carriers.
Referenced Standards and Documents SEMI Standards and Safety Guidelines SEMI E15 — Specification for Tool Load Port SEMI E15.1 — Specification for 300 mm Tool Load Port SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS) SEMI E40 — Standard for Processing Management (PM) SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface SEMI E87 — Specification for Carrier Management (CMS) SEMI E94 — Specification for Control Job Management (CJM) ISO Standard ISO 8601:2004 — Internet Standard for Date/Time Format NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. Terminology Abbreviations and Acronyms AMHS — automated material handling system CEW — Carrier Exchange Window CFJ — Carrier Flow Job CLJ — Carrier Logistics Job FIMS — front-opening interface mechanical standard FOUP — front opening unified pod GEM — generic equipment model PCL — Predictive Carrier Logistics LR — Load Request LS — Load Stagnation UR — Unload Request US — Unload Stagnation Definitions automated material handling system (AMHS) — an automated system to store and transport materials within the factory. buffer — a set of one or more locations for holding carriers at or inside the production equipment. carrier — a container, such as a FOUP or open cassette, with one or more positions for holding substrates. Carrier Exchange Window (CEW) — a time slot which is allowed for a load port to unload a used carrier and then load a new carrier between AMHS without disturbing the continuous wafer processing of the equipment. Internal Buffer Equipment may have a CEW with multiple load ports to unload multiple used carriers and load multiple new carriers.
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