The etch rate of rest two samples are tested and recorded continuously with the above steps. Average value of three samples is calculated. Calculations The etch rate of sample is calculated according to the formula (5): (5) Where: Average value of etch rate, — μm/s; Etch rate of 3 test sample, — μm/s； —3. Report A title; Name and address of the; Description and identification of the item tested, including the specimen size; Characterization and condition of the test item; Date of receipt of test item and date of test, where appropriate; Identification of test method used; Reference to sampling procedure, where relevant. NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to product data sheets, and other relevant literature, manufacturer’s instructions, product labels, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.
The etch rate of rest two samples are tested and recorded continuously with the above steps. Average value of three samples is calculated. Calculations The etch rate of sample is calculated according to the formula (5): (5) Where: — Average value of etch rate, μm/s; — Etch rate of 3 test sample, μm/s； —3. Report A title; Name and address of the; Description and identification of the item tested, including the specimen size; Characterization and condition of the test item; Date of receipt of test item and date of test, where appropriate; Identification of test method used; Reference to sampling procedure, where relevant. NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.
5727.docx