Section 4: Work in Process Storage (specific to wafer cassettes) Acceptance Criteria Reference Actual/ Section Indicator Metric Units Pictogram Conforms? (US Customary Units) 4.1 Integral wafer cassette/lot Maximum (1 item deep) 1520 mm Actual box storage shelf height (60 in.) (150 and 200 mm [6 and Maximum (2 items deep) 1220 mm 8 in.] wafer cassette/lot Conforms? (48 in.) boxes only). Yes Minimum 460 mm (18 in.) No N/A Section 5: Manual Wafer Cassette Rotation Device Design Acceptance Criteria Reference Actual/ Section Indicator Metric Units Pictogram Conforms? (US Customary Units) 5.1 Handle height, couple Maximum 1206 mm (47.5 in.) Actual point for hand(s) from Minimum 838 mm (33 in.) standing surface. Conforms? Yes No N/A 5.2 Hand grip(s) shall allow Allows for a full power grip in Actual for a full either pronated (palm facing down) “power grip” similar to grabbing a rung or neutral (handshake position) on a ladder or holding a posture. Conforms? pistol. Yes No N/A 5.3 Single hand lift force Maximum 37.8 N (8.5 lbf). This Actual value includes a 15% capacity reduction due to cleanroom glove use. Conforms? — Wrist deviation reduces further Yes strength capacity by 15%. No N/A 5.4 Two hand lift force Maximum 64.5 N (14.5 lbf). This Actual value includes a 15% capacity reduction due to cleanroom glove use. Conforms? — Wrist deviation reduces further Yes strength capacity by 15%. No N/A
Section 4: Work in Process Storage (specific to wafer cassettes) Section Indicator Acceptance Criteria Metric Units (US Customary Units) Reference Pictogram Actual/ Conforms? 4.1 Integral wafer cassette/lot box storage shelf height (150 and 200 mm [6 and 8 in.] wafer cassette/lot boxes only). Maximum (1 item deep) 1520 mm (60 in.) Maximum (2 items deep) 1220 mm (48 in.) Minimum 460 mm (18 in.) Actual Conforms? Yes No N/A Section 5: Manual Wafer Cassette Rotation Device Design Section Indicator Acceptance Criteria Metric Units (US Customary Units) Reference Pictogram Actual/ Conforms? 5.1 Handle height, couple point for hand(s) from standing surface. Maximum 1206 mm (47.5 in.) Minimum 838 mm (33 in.) Actual Conforms? Yes No N/A 5.2 Hand grip(s) shall allow for a full “power grip” similar to grabbing a rung on a ladder or holding a pistol. Allows for a full power grip in either pronated (palm facing down) or neutral (handshake position) posture. Actual Conforms? Yes No N/A 5.3 Single hand lift force Maximum 37.8 N (8.5 lbf). This value includes a 15% capacity reduction due to cleanroom glove use. Wrist deviation reduces further strength capacity by 15%. — Actual Conforms? Yes No N/A 5.4 Two hand lift force Maximum 64.5 N (14.5 lbf). This value includes a 15% capacity reduction due to cleanroom glove use. Wrist deviation reduces further strength capacity by 15%. — Actual Conforms? Yes No N/A
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