CLJState The main state of CLJ State Model RO Y Enumerated: LoadQueued, LoadRequest, CarrierValid, UnloadRequest LRPState Optional RO O Enumerated: Current state of LR Prediction parallel LRNotPredicted, LRPredicted state LRPTime Optional RO O Uses format defined for TimeReport Predicted time of LR Prediction LSPState Optional RO O Enumerated: Current state of LS Prediction parallel LSNotPredicted, LSPredicted state LSPTime Optional RO O Uses format defined for TimeReport Predicted time of LS Prediction URPState Current state of UR Prediction parallel RO Y Enumerated: state URNotPredicted, URPredicted URPTime Predicted time of UR Prediction RO Y Uses format defined for TimeReport USPState Optional RO O Enumerated: Current state of US Prediction parallel USNotPredicted, USPredicted state USPTime Optional RO O Uses format defined for TimeReport Predicted time of US Prediction CLJCarrierType Optional RO O Enumerated: Type of carrier ProcessCarrier, EmptyCarrier, NPWCarrier CLJCarrierID ID of carrier which is dealt with the RO Y Text 0–80 characters CLJ. Carrier ID may not be assigned Identifier of a carrier. The CLJCarrierID shall be until a carrier is loaded and confirmed. same as the CarrierID defined in SEMI E87. When carrier ID is not specified yet, A zero length is used for is not yet ‘CarrierID this attribute shall inform it. specified’ CLJLPID Load port ID RO Y Unsigned integer. ID of load port which will be used by 0 = Load port is not assigned the CLJ Non 0 = Load port number The CLJLPID is compatible with the load port number defined in SEMI E87 which says “The load port number shall be assigned incrementally from the bottom left to bottom right, then top left to top right when facing the front of the equipment.” Even though a value may be marked as RO (read only), the initial value for the attribute may be provided by the host. The following diagrams and tables define the state model of CLJ object. Equipment shall CLJ State Model — maintain appropriate number of CLJs to achieve continuous substrate processing. CLJ State Model Diagram CLJ State Model Diagram CLJ State Model Definition
CLJState The main state of CLJ State Model RO Y Enumerated: LoadQueued, LoadRequest, CarrierValid, UnloadRequest LRPState Optional Current state of LR Prediction parallel state RO O Enumerated: LRNotPredicted, LRPredicted LRPTime Optional Predicted time of LR Prediction RO O Uses format defined for TimeReport LSPState Optional Current state of LS Prediction parallel state RO O Enumerated: LSNotPredicted, LSPredicted LSPTime Optional Predicted time of LS Prediction RO O Uses format defined for TimeReport URPState Current state of UR Prediction parallel state RO Y Enumerated: URNotPredicted, URPredicted URPTime Predicted time of UR Prediction RO Y Uses format defined for TimeReport USPState Optional Current state of US Prediction parallel state RO O Enumerated: USNotPredicted, USPredicted USPTime Optional Predicted time of US Prediction RO O Uses format defined for TimeReport CLJCarrierType Optional Type of carrier RO O Enumerated: ProcessCarrier, EmptyCarrier, NPWCarrier CLJCarrierID ID of carrier which is dealt with the CLJ. Carrier ID may not be assigned until a carrier is loaded and confirmed. When carrier ID is not specified yet, this attribute shall inform it. RO Y Text 0–80 characters Identifier of a carrier. The CLJCarrierID shall be same as the CarrierID defined in SEMI E87. A zero length is used for ‘CarrierID is not yet specified’ CLJLPID Load port ID ID of load port which will be used by the CLJ RO Y Unsigned integer. 0 = Load port is not assigned Non 0 = Load port number The CLJLPID is compatible with the load port number defined in SEMI E87 which says “The load port number shall be assigned incrementally from the bottom left to bottom right, then top left to top right when facing the front of the equipment.” Even though a value may be marked as RO (read only), the initial value for the attribute may be provided by the host. CLJ State Model — The following diagrams and tables define the state model of CLJ object. Equipment shall maintain appropriate number of CLJs to achieve continuous substrate processing. CLJ State Model Diagram CLJ State Model Diagram CLJ State Model Definition
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