SEMI M74 Specification for 450 mm Diameter Mechanical Handling Polished Wafers — SEMI is developing a Standard for 450 mm Wafer Shipping System intended to be used in conjunction with this Document. ISO ISO 4287 Geometrical Product Specifications (GPS) Surface Texture: Profile Method Terms, Definitions and — – – Surface Texture Parameters ISO/IEC 16022 Information Technology International Symbology Specification Data Matrix — – – Other Documents SEMI AUX016 List of Carrier Maker Identification Codes — NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. Terminology Abbreviations and Acronyms two dimensional 2D — bilateral plane BP — center line CL — end effector EE — front-opening shipping box FOSB — facial plane FP — horizontal plane HP — kinematic coupling KC — kinematic coupling pin KCP — overhead hoist transport OHT — radio frequency identification RFID — total indicator runout TIR — Definitions a code identifying elements such as maker, model, version and serial number of a 450 FOSB, by 2D code — using a data matrix ECC200 symbol according to ISO/IEC 16022. an area on the door and another area on top of the shell, where a 2D code can be 2D code placement area — placed. used generally as a only within this document to identify the front opening shipping box. 450 FOSB — ‘term’ Unless otherwise specified, the or used herein means 450 FOSB. word ‘shipping box’ ‘carrier’ a vertical plane, defining of a system with three orthogonal planes (HP, BP, FP), bilateral plane (BP) — x=0 coincident with nominal location of the rear primary kinematic coupling pin (KCP), and midway between the nominal location of the front primary KCPs. [SEMI E154] Carrier-Related Definitions a protective portable container for a cassette and/or substrate(s). [SEMI E1.9] box — any cassette, box, or pod that is used to transport and store substrates. carrier — an open structure that holds one or more substrates. [SEMI E1.9] cassette — a box having a standardized mechanical interface. [SEMI E19] pod —
SEMI M74 — Specification for 450 mm Diameter Mechanical Handling Polished Wafers SEMI is developing a Standard for 450 mm Wafer Shipping System intended to be used in conjunction with this Document. ISO ISO 4287 — Geometrical Product Specifications (GPS) – Surface Texture: Profile Method – Terms, Definitions and Surface Texture Parameters ISO/IEC 16022 — Information Technology – International Symbology Specification – Data Matrix Other Documents SEMI AUX016 — List of Carrier Maker Identification Codes NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. Terminology Abbreviations and Acronyms 2D — two dimensional BP — bilateral plane CL — center line EE — end effector FOSB — front-opening shipping box FP — facial plane HP — horizontal plane KC — kinematic coupling KCP — kinematic coupling pin OHT — overhead hoist transport RFID — radio frequency identification TIR — total indicator runout Definitions 2D code — a code identifying elements such as maker, model, version and serial number of a 450 FOSB, by using a data matrix ECC200 symbol according to ISO/IEC 16022. 2D code placement area — an area on the door and another area on top of the shell, where a 2D code can be placed. 450 FOSB — used generally as a ‘term’ only within this document to identify the front opening shipping box. Unless otherwise specified, the word ‘shipping box’ or ‘carrier’ used herein means 450 FOSB. bilateral plane (BP) — a vertical plane, defining x=0 of a system with three orthogonal planes (HP, BP, FP), coincident with nominal location of the rear primary kinematic coupling pin (KCP), and midway between the nominal location of the front primary KCPs. [SEMI E154] Carrier-Related Definitions box — a protective portable container for a cassette and/or substrate(s). [SEMI E1.9] carrier — any cassette, box, or pod that is used to transport and store substrates. cassette — an open structure that holds one or more substrates. [SEMI E1.9] pod — a box having a standardized mechanical interface. [SEMI E19]
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