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“Engineering Microscopic Machines”, K.J Gabriel, Scientific American, Vol.273, September 1995 “International Workshop on Micro Electro Mechanical Systems”, Feb 1996. “Laser Processing in Manufacturing”, Crafer, R.C. and Oakley, (Chapman and Hall). “Production of novel 3D microstructures using excimer laser mask projection techniques”, N.H.Rizvi. “Excimer lasers: Principles of operation and equipment”, M.C.Gower. “An introduction to Micro-Electro-Mechanical-System Engineering”, K.Hjort, G.Thornell, R.Spohr, J.A.Schweitz.
53419639-Micro-Machining-Tech.docx