as applied to fire detection or suppression systems; an alarm indicating a supervisory supervisory alarm — condition. as applied to fire detection or suppression systems; condition in which action or supervisory condition — maintenance is needed to restore or continue proper function. local exhaust ventilation that is used intermittently for a specific task of finite supplemental exhaust — duration. party that provides equipment to, and directly communicates with, the user. A supplier may be a supplier — manufacturer, an equipment distributor, or an equipment representative. See also the definition for user. the term is used to describe measurements or observations used to validate and document testing — ‘testing’ conformance to designated criteria. as applied to fire detection or suppression systems; an alarm indicating a trouble condition. trouble alarm — as applied to fire detection or suppression systems; a condition in which there is a fault trouble condition — in a system, subsystem, or component that may interfere with proper function. party that acquires equipment for the purpose of using it to manufacture semiconductors. See also the user — definition for supplier. the pressure required to accelerate air from zero velocity to some velocity V. velocity pressure (VP) — Velocity pressure is proportional to the kinetic energy of the air stream. Associated equation: = (V/4.043)2 (1) VP where: = air velocity in m/s V = velocity pressure in mm water gauge (w.g.) VP U.S. units: = (V/4005)2 (2) VP where: = velocity in feet per second V = velocity pressure in inches water gauge (w.g.) VP in the context of § 22 of this Safety Guideline, = the volume of air exhausted volumetric flow rate (Q) — Q per unit time. Associated equation: = (3) Q VA where: = air flow velocity V = the cross-sectional area of the duct or opening through which the air is flowing at standard conditions. A open surface tanks, enclosed in a housing, containing chemical materials used in the wet station — manufacturing of semiconductor materials. Synonyms: wet sink, wet bench, wet deck. the stress at which a material exhibits a specified permanent deformation or set. This is the yield strength — stress at which, the strain departs from the linear portion of the stress-strain curve by an offset unit strain of 0.002.
supervisory alarm — as applied to fire detection or suppression systems; an alarm indicating a supervisory condition. supervisory condition — as applied to fire detection or suppression systems; condition in which action or maintenance is needed to restore or continue proper function. supplemental exhaust — local exhaust ventilation that is used intermittently for a specific task of finite duration. supplier — party that provides equipment to, and directly communicates with, the user. A supplier may be a manufacturer, an equipment distributor, or an equipment representative. See also the definition for user. testing — the term ‘testing’ is used to describe measurements or observations used to validate and document conformance to designated criteria. trouble alarm — as applied to fire detection or suppression systems; an alarm indicating a trouble condition. trouble condition — as applied to fire detection or suppression systems; a condition in which there is a fault in a system, subsystem, or component that may interfere with proper function. user — party that acquires equipment for the purpose of using it to manufacture semiconductors. See also the definition for supplier. velocity pressure (VP) — the pressure required to accelerate air from zero velocity to some velocity V. Velocity pressure is proportional to the kinetic energy of the air stream. Associated equation: VP = (V/4.043)2 (1) where: V = air velocity in m/s VP = velocity pressure in mm water gauge (w.g.) U.S. units: VP = (V/4005)2 (2) where: V = velocity in feet per second VP = velocity pressure in inches water gauge (w.g.) volumetric flow rate (Q) — in the context of § 22 of this Safety Guideline, Q = the volume of air exhausted per unit time. Associated equation: Q = VA (3) where: V = air flow velocity A = the cross-sectional area of the duct or opening through which the air is flowing at standard conditions. wet station — open surface tanks, enclosed in a housing, containing chemical materials used in the manufacturing of semiconductor materials. Synonyms: wet sink, wet bench, wet deck. yield strength — the stress at which a material exhibits a specified permanent deformation or set. This is the stress at which, the strain departs from the linear portion of the stress-strain curve by an offset unit strain of 0.002.
5556A.docx