Microfluidic Interface Pitch Design Using this Standard NOTICE: The material in this Appendix is an official part of SEMI [designation number] and was approved by full letter ballot procedures on [A&R approval date]. Examples Figures in these as specified by this Standard. examples exhibit ‘loose tolerances’ Square Port Array with 4.00 mm Pitch Square Port Array with 2.00 mm Pitch Interleaved Port Array with Pitch = 4.00 mm and Pitch = 4.00 mm X Y Interleaved Port Array with Pitch = 2.00 mm and Pitch = 2.00 mm X Y Rectangular Port Array with Pitch = 2.00 mm and Pitch = 4.00 mm X Y Mixed Density Port Array with Pitch = 2.00 mm and Pitch = 4.00 mm X Y NOTICE: SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to product labels, manufacturer’s instructions, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility.
Microfluidic Interface Pitch Design Using this Standard NOTICE: The material in this Appendix is an official part of SEMI [designation number] and was approved by full letter ballot procedures on [A&R approval date]. Examples Figures in these examples exhibit ‘loose tolerances’ as specified by this Standard. Square Port Array with 4.00 mm Pitch Square Port Array with 2.00 mm Pitch Interleaved Port Array with X Pitch = 4.00 mm and Y Pitch = 4.00 mm Interleaved Port Array with X Pitch = 2.00 mm and Y Pitch = 2.00 mm Rectangular Port Array with X Pitch = 2.00 mm and Y Pitch = 4.00 mm Mixed Density Port Array with X Pitch = 2.00 mm and Y Pitch = 4.00 mm NOTICE: SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility.
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