Implementation CNF staff will evaluate new projects and process flows, highlighting possible conflicts with materials and tool usages. CNF tool managers will communicate the required sample characteristics during training the equipment. Researches are obliged to follow the stated guidelines and should consult the tool managers if there is any uncertainty to the categorization of the sample. Many processes in the CNF are highly sensitive to metallic contamination, particularly Alkali and Alkaline elements and some organics compounds that have been fixed with alkali buffer solutions. Those elements are outlined as Class A and Class B Metals in the Periodic Table image below and are restricted in a number of tool classifications. Additionally, a majority of operate at elevated temperatures in medium to high vacuum environments with plasma exposure. Materials with a high vapor pressure can contaminate these chambers impacting subsequent process runs, and need to be restricted. Films and substrates with high vapor pressure components may be restricted from a number of tools. Class A, Class B and CNF Refractory Metal Groups Class A Metals- Alkali and Alkaline Substrates and Thin Films Containing the following: Lithium (Li), Sodium (Na), Potassium (K), Rubidium (Rb), Cesium (Cs), Francium (Fr),Beryllium (Be), Magnesium (Mg), Calcium (Ca), Strontium (Sr), Barium (Ba), Radium (Ra) Class B Metals Substrates and Thin Films Containing the following: Silver (Ag), Gold (Ag), Copper (Cu), Indium (In), Tin (Sn), Zinc (Zn), Cadmium (Cd), Mercury (Hg), Lead (Pb)
Implementation CNF staff will evaluate new projects and process flows, highlighting possible conflicts with materials and tool usages. CNF tool managers will communicate the required sample characteristics during training the equipment. Researches are obliged to follow the stated guidelines and should consult the tool managers if there is any uncertainty to the categorization of the sample. Many processes in the CNF are highly sensitive to metallic contamination, particularly Alkali and Alkaline elements and some organics compounds that have been fixed with alkali buffer solutions. Those elements are outlined as Class A and Class B Metals in the Periodic Table image below and are restricted in a number of tool classifications. Additionally, a majority of operate at elevated temperatures in medium to high vacuum environments with plasma exposure. Materials with a high vapor pressure can contaminate these chambers impacting subsequent process runs, and need to be restricted. Films and substrates with high vapor pressure components may be restricted from a number of tools. Class A, Class B and CNF Refractory Metal Groups Class A Metals- Alkali and Alkaline Substrates and Thin Films Containing the following: Lithium (Li), Sodium (Na), Potassium (K), Rubidium (Rb), Cesium (Cs), Francium (Fr),Beryllium (Be), Magnesium (Mg), Calcium (Ca), Strontium (Sr), Barium (Ba), Radium (Ra) Class B Metals Substrates and Thin Films Containing the following: Silver (Ag), Gold (Ag), Copper (Cu), Indium (In), Tin (Sn), Zinc (Zn), Cadmium (Cd), Mercury (Hg), Lead (Pb)
CNF%20Tool%20and%20Material%20Compatibility%20Policy%203_21_18.docx