Operating Procedure, continued Set the output Press the modify button on the power supply. Use the to select point.” “set Press the modify button again. Turn the wheel knob to set the wattage. Using over 200 W is not permitted without permission from the machine administrator. the enter button to confirm and set the wattage. Set the gas flow Enable the flow: Press the button on the argon MFC. the button twice. Use the and buttons until the screen option Valve Operation” is shown. “Change Press the button. Use the button to select “Automatic.” Press the button. Use the button to select “Yes.” Press the button. Using the menu, set the desired flow of argon using the Setpoint” option. “Change the button to exit the menu. Disable the air flow: Press the button on the air MFC. Press the button twice. Use the and buttons until the screen option Valve Operation” is shown. “Change If the Valve Operation is already set to closed,” skip to step 5.3.10. “Valve the button. Use the button to select closed.” “Valve Press the button. Use the button to select “Yes.” Press the button. the button to exit the menu. Operating Procedure, continued
Operating Procedure, continued Set the output Press the modify button on the power supply. Use the to select “set point.” Press the modify button again. Turn the wheel knob to set the wattage. Using over 200 W is not permitted without permission from the machine administrator. the enter button to confirm and set the wattage. Set the gas flow Enable the flow: Press the button on the argon MFC. the button twice. Use the and buttons until the screen option “Change Valve Operation” is shown. Press the button. Use the button to select “Automatic.” Press the button. Use the button to select “Yes.” Press the button. Using the menu, set the desired flow of argon using the “Change Setpoint” option. the button to exit the menu. Disable the air flow: Press the button on the air MFC. Press the button twice. Use the and buttons until the screen option “Change Valve Operation” is shown. If the Valve Operation is already set to “Valve closed,” skip to step 5.3.10. the button. Use the button to select “Valve closed.” Press the button. Use the button to select “Yes.” Press the button. the button to exit the menu. Operating Procedure, continued
Standard%20Operating%20Procedures%20for%20Small%20Sputtering%20Machine.docx