nanoscale mechanical testing In situ Figure S2. TEM setup. Both TEM foil and chemical etched W tip are loaded into the In situ Nanofactory TEM-STM platform. And the cross-sectional TEM micrograph of the Al/AlN multilayered thin film in contact with the W tip inside the TEM column during the in situ nanoindenation experiments is presented. The atomic configuration of the region immediately preceding the formation of wz-AlN, and the corresponding strain distribution. Figure S3. Strain analysis. (a) The atomic configuration of the region immediately before the formation of wurtzite AlN. (b)-(d) The strain and distributions with an average εxx, εxy, εyy value of 2%, 1.6%, and -7%, respectively.
In situ nanoscale mechanical testing Figure S2. In situ TEM setup. Both TEM foil and chemical etched W tip are loaded into the Nanofactory TEM-STM platform. And the cross-sectional TEM micrograph of the Al/AlN multilayered thin film in contact with the W tip inside the TEM column during the in situ nanoindenation experiments is presented. The atomic configuration of the region immediately preceding the formation of wz-AlN, and the corresponding strain distribution. Figure S3. Strain analysis. (a) The atomic configuration of the region immediately before the formation of wurtzite AlN. (b)-(d) The strain εxx, εxy, and εyy distributions with an average value of 2%, 1.6%, and -7%, respectively.
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