100 1.92 0.92 150 2.88 1.4 200 3.86 1.9 250 4.85 2.38 300 (do not exceed 300 W) 5.84 2.87 On the computer monitor, click on PLASMA to begin sputtering. See . Look through the chamber porthole to see if plasma is formed. The plasma is a purple or blue glow also the Voltage should drop when the plasma ignites. If yes proceed to next step, otherwise click on PLASMA again (to Stop) and go to section Troubleshooting. Pre-sputter for desired time (usually 2 min). The Voltage should read between 200-700 and the Current should read between 0.1-0.5 Amps. Adjust Gas Pressure to desired level. Table 2, Cathode Materials Set timer to the desired sputter time. See . Press CATHODE SHUTTER button on the front Target Cathode panel. See . Shutter # Shutter should be opened manually from the front Cr 1 panel and not from the software. TiW 2 Start the timer. Ir 2 Check inside the chamber from the window if Ti 3 shutter is open fully and if chuck is rotating. Au 4 Any abnormalities need to written on the log book (in comment section). Pt 4 When the desired time has elapsed, press CATHODE SHUTTER on the panel manually to close the shutter. See . If more samples on other chucks need to be sputtered with the same target then do the following: Turn OFF the Rotation Control. Click MAIN MENU. Click SUBSTRATE INDEX ROTATION CONTROL.
100 1.92 0.92 150 2.88 1.4 200 3.86 1.9 250 4.85 2.38 300 (do not exceed 300 W) 5.84 2.87 On the computer monitor, click on PLASMA to begin sputtering. See . Look through the chamber porthole to see if plasma is formed. The plasma is a purple or blue glow also the Voltage should drop when the plasma ignites. If yes proceed to next step, otherwise click on PLASMA again (to Stop) and go to section Troubleshooting. Pre-sputter for desired time (usually 2 min). The Voltage should read between 200-700 and the Current should read between 0.1-0.5 Amps. Table 2, Cathode Materials Target Cathode Shutter # Cr 1 TiW 2 Ir 2 Ti 3 Au 4 Pt 4 Adjust Gas Pressure to desired level. Set timer to the desired sputter time. See . Press CATHODE SHUTTER button on the front panel. See . Shutter should be opened manually from the front panel and not from the software. Start the timer. Check inside the chamber from the window if shutter is open fully and if chuck is rotating. Any abnormalities need to written on the log book (in comment section). When the desired time has elapsed, press CATHODE SHUTTER on the panel manually to close the shutter. See . If more samples on other chucks need to be sputtered with the same target then do the following: Turn OFF the Rotation Control. Click MAIN MENU. Click SUBSTRATE INDEX ROTATION CONTROL.
TMV+SOP+in+Word+Format.docx