Standard Operating Procedure Samco Ozone Cleaner Overview Ozone (O3) gas is used to clean surfaces, descum samples, and even remove resist. The Samco Ozone Cleaner contains a UV producing light bulb and molecular ozone source (which can be operated independently or together) to generate ozone which reacts with and volatilizes organic molecules on the surface of a substrate. A nitrogen purge clears the chamber of residual ozone. Caution: Ozone is hazardous and care should be taken to minimize your exospore. Operations Turn on green button. “Main” Remove the lid clamps. Open lid and place your sample on the platen samples must be less than 12mm thick to avoid – hitting the UV bulb. Close lid carefully. Slamming the lid down will damage the bulb. Re-attach the lid clamps. Set Substrate Heater temperature if desired (max temp 300°C). Turn on the red button. “Heater” Press on the temperature controller and then use the arrow buttons to set the “Set” desired temperature on the bottom, orange indicator. Press again to start the heater. Measured temperature will be on the top, green “Set” indicator. Give it 10-15 minutes to temperature stabilize. (cooling the plate down is similarly slow). Select Ozone Source Button(s). Generator” produces molecular ozone and flows it over your sample. “Ozone Lamp” irradiates your sample with UV, producing ozone at the surface. “UV Both sources can be selected and run at the same time. Set Process time: use the buttons (4,3,2,1) the timer indicator. Double check your settings and press the white button to run your process. “Start” O2 flow rate should be set to 0.5 L/min (you should not have to set this). – The process will run for the set time.
Standard Operating Procedure Samco Ozone Cleaner Overview Ozone (O3) gas is used to clean surfaces, descum samples, and even remove resist. The Samco Ozone Cleaner contains a UV producing light bulb and molecular ozone source (which can be operated independently or together) to generate ozone which reacts with and volatilizes organic molecules on the surface of a substrate. A nitrogen purge clears the chamber of residual ozone. Caution: Ozone is hazardous and care should be taken to minimize your exospore. Operations Turn on green “Main” button. Remove the lid clamps. Open lid and place your sample on the platen – samples must be less than 12mm thick to avoid hitting the UV bulb. Close lid carefully. Slamming the lid down will damage the bulb. Re-attach the lid clamps. Set Substrate Heater temperature if desired (max temp 300°C). Turn on the red “Heater” button. Press “Set” on the temperature controller and then use the arrow buttons to set the desired temperature on the bottom, orange indicator. Press “Set” again to start the heater. Measured temperature will be on the top, green indicator. Give it 10-15 minutes to temperature stabilize. (cooling the plate down is similarly slow). Select Ozone Source Button(s). “Ozone Generator” produces molecular ozone and flows it over your sample. “UV Lamp” irradiates your sample with UV, producing ozone at the surface. Both sources can be selected and run at the same time. Set Process time: use the buttons (4,3,2,1) the timer indicator. Double check your settings and press the white “Start” button to run your process. O2 flow rate should be set to 0.5 L/min – (you should not have to set this). The process will run for the set time.
SOP_UVOzoneCleaner.docx