The spincoated results in Table 23 show the films are not ALD grade but do have low leakage current values and thickness ranges that make it attractive to move towards inkjet printing. Some sol-gel processed semiconductors have similarly moved from spin coating to inkjet, as well as zirconia oxide dielectric [39],[15]. The sol-gel inkjet work demonstrates that creating quality films and printed features challenging. However, it really seems as if it should be attainable. Current inkjetprinted alumina The overall idea is to inkjet print alumina and demonstrate capacitors. A depiction of the process is shown in Figure 21. Figure 21: Inkjet printing of alumina dielectric for MIM capacitors To date, only printed films have been shown with particlebased inks [40], [41]. These provide a rough and thick film 15um, where the use of binders affects the dielectric properties. However, they were able to demonstrate MIM apacitors with Qs of 400 at 1 MHz. Another approach is to use nanoparticles of Al2O3 which has been investigated in [42] although MIM devices were not fabricated. ssues with nozzle clogging from the nanoparticles and difficulties creating thin uniform films with these aqueous solutions appear to be . It is likely that thin nanoparticle films would be inferior to the sol-gel approach due to porosity and grain boundaries. Overall, there have been two demonstrations of inkjet alumina MIM capacitors (low frequency) but non-particle based printing or thinfilm printing of alumina has never been reported to my knowledge. Next, RF MIM capacitors using printed alumina have never een demonstrated for GHz operation. He also used equations for the onset of splashing at Oh = 50/Re5/4 and Oh =2/Re. Figure 35 (c) the operating point (blue dot) where the Dimatix model inkjet fluid fits [72] shows the parameters for the fluid.
The spincoated results in Table 23 show the films are not ALD grade but do have low leakage current values and thickness ranges that make it attractive to move towards inkjet printing. Some sol-gel processed semiconductors have similarly moved from spin coating to inkjet, as well as zirconia oxide dielectric [39],[15]. The sol-gel inkjet work demonstrates that creating quality films and printed features challenging. However, it really seems as if it should be attainable. Current inkjetprinted alumina The overall idea is to inkjet print alumina and demonstrate capacitors. A depiction of the process is shown in Figure 21. Figure 21: Inkjet printing of alumina dielectric for MIM capacitors To date, only printed films have been shown with particlebased inks [40], [41]. These provide a rough and thick film 15um, where the use of binders affects the dielectric properties. However, they were able to demonstrate MIM apacitors with Qs of 400 at 1 MHz. Another approach is to use nanoparticles of Al2O3 which has been investigated in [42] although MIM devices were not fabricated. ssues with nozzle clogging from the nanoparticles and difficulties creating thin uniform films with these aqueous solutions appear to be . It is likely that thin nanoparticle films would be inferior to the sol-gel approach due to porosity and grain boundaries. Overall, there have been two demonstrations of inkjet alumina MIM capacitors (low frequency) but non-particle based printing or thinfilm printing of alumina has never been reported to my knowledge. Next, RF MIM capacitors using printed alumina have never een demonstrated for GHz operation. He also used equations for the onset of splashing at Oh = 50/Re5/4 and Oh =2/Re. Figure 35 (c) the operating point (blue dot) where the Dimatix model inkjet fluid fits [72] shows the parameters for the fluid.
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