Standard : B B 20-Jul-1999 12:00 AM O SiO2 1-Jun-1999 12:00 AM Al Al2O3 1-Jun-1999 12:00 AM Si SiO2 1-Jun-1999 12:00 AM Ni Ni 1-Jun-1999 12:00 AM Ga GaP 1-Jun-1999 12:00 AM Zr Zr 1-Jun-1999 12:00 AM In InAs 1-Jun-1999 12:00 AM Au Au 1-Jun-1999 12:00 AM Element Weight% Atomic% B K 26.66 65.80 O K 1.44 2.41 Al K 4.52 4.47 Si K 4.99 4.75 Ni K 34.77 15.81 Ga L 2.21 0.85 Zr L 0.78 0.23 In L 24.34 5.66 Au M 0.28 0.04 Totals 100.00 Figure . EDX Spectra from spectrum point 3 taken inside the Indium layer and away from the UBM. Spectrum 3 processing : No peaks omitted Processing option : All elements analyzed (Normalised) Number of iterations = 3
Standard : B B 20-Jul-1999 12:00 AM O SiO2 1-Jun-1999 12:00 AM Al Al2O3 1-Jun-1999 12:00 AM Si SiO2 1-Jun-1999 12:00 AM Ni Ni 1-Jun-1999 12:00 AM Ga GaP 1-Jun-1999 12:00 AM Zr Zr 1-Jun-1999 12:00 AM In InAs 1-Jun-1999 12:00 AM Au Au 1-Jun-1999 12:00 AM Element Weight% Atomic% B K 26.66 65.80 O K 1.44 2.41 Al K 4.52 4.47 Si K 4.99 4.75 Ni K 34.77 15.81 Ga L 2.21 0.85 Zr L 0.78 0.23 In L 24.34 5.66 Au M 0.28 0.04 Totals 100.00 Figure . EDX Spectra from spectrum point 3 taken inside the Indium layer and away from the UBM. Spectrum 3 processing : No peaks omitted Processing option : All elements analyzed (Normalised) Number of iterations = 3
Report_on_SEM_Secondary_electron_images_and_EDX_measurements_on_In_bumps_from_RAL.docx