4.4 Travel 360° 4.5 Drive System Brushless DC motor 4.6 Axial Stiffness ≥ 875 N/μm 4.7 Radial Stiffness (at nose) ≥ 260 N/μm 4.8 Moment Stiffness ≥ 15N-m/micro rad 4.9 Positioning Accuracy ≤ ± 1.0 arc seconds 4.10 Feedback Resolution ≤ ± 0.005 arc seconds Maximum Speed 4.11 ≥ 10 RPM (Positioning Mode) 4.12 Motion Accuracy Axial/Radial : ≤ 0.1μm 4.13 Coning error ≤ 1 nm/mm 5 Rotational Axes C Axis Air Bearing (liquid cooled) / 5.1 Type Slot type thrust bearing ( Steel shaft, bronze journal) 5.2 Travel 360° (Bi-directional) 5.3 Drive System Brushless motor 5.4 Positioning Accuracy ≤ ± 2.0 arc seconds 5.5 Feedback Resolution ≤ 0.026 arc seconds Maximum Speed 5.6 ≥ 3,000 rpm (Positioning Mode) 6 Work holding Spindle 6.1 Type Air bearing type
4.4 Travel 360° 4.5 Drive System Brushless DC motor 4.6 Axial Stiffness ≥ 875 N/μm 4.7 Radial Stiffness (at nose) ≥ 260 N/μm 4.8 Moment Stiffness ≥ 15N-m/micro rad 4.9 Positioning Accuracy ≤ ± 1.0 arc seconds 4.10 Feedback Resolution ≤ ± 0.005 arc seconds 4.11 Maximum Speed (Positioning Mode) ≥ 10 RPM 4.12 Motion Accuracy Axial/Radial : ≤ 0.1μm 4.13 Coning error ≤ 1 nm/mm 5 Rotational Axes C Axis 5.1 Type Air Bearing (liquid cooled) / Slot type thrust bearing ( Steel shaft, bronze journal) 5.2 Travel 360° (Bi-directional) 5.3 Drive System Brushless motor 5.4 Positioning Accuracy ≤ ± 2.0 arc seconds 5.5 Feedback Resolution ≤ 0.026 arc seconds 5.6 Maximum Speed (Positioning Mode) ≥ 3,000 rpm 6 Work holding Spindle 6.1 Type Air bearing type
IDT00276900000000000isro05401.docx