Sl No. Specification Remarks Whether the 3D optical profilometer has a fast 12. Yes/ No acquisition system What is the Scanning rate = At least 12. Suitable certificate 47 µm/s or supporting What is the Acquisition rate = Up to document for these 13. 2,000 points per value is to be given second. Time required to scan an ‘O’ Ring At lateral resolution surface of 9.5 mm cross sectional of 10 µm diameter and axial length of 20 mm is to be given. At lateral resolution 14. of 1 µm (These values must be demonstrated at the time of At lateral resolution inspection and after of 0.1 µm installation of the equipment) Whether Noise isolation platform is provided 15. Yes/ No with the profilometer Whether the maximum sample size of at least 16. 20 mm (X-axis), 20 mm (Y-axis) and 20 mm Yes/ No be characterised by the profilometer Whether hardware / a joystick for manual Only manual or automated control of X-Y-Z and focusing or both is provided. Size of X - Y Stage 17. Does the profilometer has a stationary base (Can the probe (optical pen) / profilometer Yes/ No move in X-Y directions and scan the defective portion (alone) of ‘O’ Ring for characterisation Whether high precision closed loop and 18. autofocus capability is possible on surfaces with Yes/ No varying reflectivity and curvature Whether focusing can be both manual 19. controlled or automated and program Yes/ No controlled. Vertical measurement range; up to 20 mm without the 20. need of refocusing 21. Vertical resolution; at least 0.3 µm 22. Accuracy; To be specified by the manufacturer 23. Repeatability of surface RMS; at least 0.02 nm Step height repeatability; at least 0.1% at 1 sigma 24. repeatability 25. Maximum sample slope; Up to 87 0
Sl No. Specification Remarks 12. Whether the 3D optical profilometer has a fast acquisition system Yes/ No 12. What is the Scanning rate = At least 47 µm/s Suitable certificate or supporting document for these value is to be given 13. What is the Acquisition rate = Up to 2,000 points per second. 14. Time required to scan an ‘O’ Ring surface of 9.5 mm cross sectional diameter and axial length of 20 mm is to be given. (These values must be demonstrated at the time of inspection and after installation of the equipment) At lateral resolution of 10 µm At lateral resolution of 1 µm At lateral resolution of 0.1 µm 15. Whether Noise isolation platform is provided with the profilometer Yes/ No 16. Whether the maximum sample size of at least 20 mm (X-axis), 20 mm (Y-axis) and 20 mm be characterised by the profilometer Yes/ No 17. Whether hardware / a joystick for manual or automated control of X-Y-Z and focusing is provided. Only manual or both Size of X - Y Stage Does the profilometer has a stationary base (Can the probe (optical pen) / profilometer move in X-Y directions and scan the defective portion (alone) of ‘O’ Ring for characterisation Yes/ No 18. Whether high precision closed loop and autofocus capability is possible on surfaces with varying reflectivity and curvature Yes/ No 19. Whether focusing can be both manual controlled or automated and program controlled. Yes/ No 20. Vertical measurement range; up to 20 mm without the need of refocusing 21. Vertical resolution; at least 0.3 µm 22. Accuracy; To be specified by the manufacturer 23. Repeatability of surface RMS; at least 0.02 nm 24. Step height repeatability; at least 0.1% at 1 sigma repeatability 25. Maximum sample slope; Up to 87 0
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