Table 2. Atomic percent of fluorinated sample. Sample name Water wash Si 2p3/2 C 1s O 1s F 1s No 28.98 6.888 63.07 1.064 F-SiC-A Yes 28.67 8.346 62.41 0.575 No 28.57 22.70 46.85 1.877 F-SiC-B Yes 28.78 18.54 51.55 1.130 No 29.36 8.273 61.69 0.678 F-SiC-C Yes 27.91 11.66 59.98 0.454 test
Table 2. Atomic percent of fluorinated sample. Sample name Water wash Si 2p3/2 C 1s O 1s F 1s F-SiC-A No 28.98 6.888 63.07 1.064 Yes 28.67 8.346 62.41 0.575 F-SiC-B No 28.57 22.70 46.85 1.877 Yes 28.78 18.54 51.55 1.130 F-SiC-C No 29.36 8.273 61.69 0.678 Yes 27.91 11.66 59.98 0.454 test
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