Surface and Bulk Defect Limits Item Characteristics 50.8 mm 76.2 mm 100 mm 150 mm Test Condition / Note (property type) wafers wafers wafers wafers Region #2 #4 0 edge exclusion 1 mm 1 mm 3 mm 3 mm (definition) (see § 4.1.4) #2 Front Surface visible scratches none none 5 scratches, cumulative high intensity, unaided #1 1 (number/length) cumulative length eye / FQA length < 150 mm < 100 mm pits (area) Treated as Treated Treated as Treated as high intensity + diffuse, #1 2 (individual pits + area as area area area unaided eye / FQA orange peel) surface and crystal unaided eye / 10% 10% 10% 10% 3 imperfection (area) FQA by applying a border of 2mm around each defect particles (number) 4 6 10 15 high intensity, unaided #1 4 eye / FQA edge chips and 3 with 3 with 2 with 2 with unaided eye 5 indents (number) maximum maximum maximum length and length length and length and width 1.0 and width width width mm 1.0 mm 0.5mm 0.5mm surface roughness Defined Defined Defined by Defined by Defined by customer 6 (rms) by by customer customer and supplier customer customer and and and and supplier supplier supplier supplier #3 Back surface 7 edge chips (number) 3 with unaided eye 3 with 2 with 2 with maximum maximum maximum maximum length and length and length and length and width 1.0 width 1.0 width width mm mm 0.5mm 0.5mm visible scratches defined by customer and supplier 8 high intensity, unaided (number) eye / FQA visible surface defined by customer 9 defined by customer and supplier #1 inhomogeneity and supplier Bulk cracks (number) none diffuse, unaided eye / 10 full wafer 11 micropipes (mean 100/cm2 defined defined by defined by defined by customer #4 density) by customer customer and supplier / FQA / customer and and pinholes and supplier supplier supplier 12 planar defects, 10% 10% 10% 10% diffuse, unaided eye / #1 spacing FQA 13 crystallite (area) 5% 5% 5% 5% diffuse, polarizers / #1 FQA
Surface and Bulk Defect Limits Item Characteristics (property type) 50.8 mm wafers 76.2 mm wafers 100 mm wafers 150 mm wafers Test Condition / Region #2 Note #4 0 edge exclusion 1 mm 1 mm 3 mm 3 mm (definition) (see § 4.1.4) #2 Front Surface 1 visible scratches (number/length) none none 5 scratches, cumulative length < 100 mm cumulative length < 150 mm high intensity, unaided eye / FQA #1 2 pits (area) (individual pits + orange peel) Treated as area Treated as area Treated as area Treated as area high intensity + diffuse, unaided eye / FQA #1 3 surface and crystal imperfection (area) by applying a border of 2mm around each defect 10% 10% 10% 10% unaided eye / FQA 4 particles (number) 4 6 10 15 high intensity, unaided eye / FQA #1 5 edge chips and indents (number) 3 with maximum length and width 1.0 mm 3 with length and width 1.0 mm 2 with maximum length and width 0.5mm 2 with maximum length and width 0.5mm unaided eye 6 surface roughness (rms) Defined by customer and supplier Defined by customer and supplier Defined by customer and supplier Defined by customer and supplier Defined by customer and supplier Back surface #3 7 edge chips (number) 3 with maximum length and width 1.0 mm 3 with maximum length and width 1.0 mm 2 with maximum length and width 0.5mm 2 with maximum length and width 0.5mm unaided eye 8 visible scratches (number) defined by customer and supplier high intensity, unaided eye / FQA 9 visible surface inhomogeneity defined by customer and supplier defined by customer and supplier #1 Bulk 10 cracks (number) none diffuse, unaided eye / full wafer 11 micropipes (mean density) / pinholes 100/cm2 defined by customer and supplier defined by customer and supplier defined by customer and supplier defined by customer and supplier / FQA #4 12 planar defects, spacing 10% 10% 10% 10% diffuse, unaided eye / FQA #1 13 crystallite (area) 5% 5% 5% 5% diffuse, polarizers / FQA #1