USPState Optional RO O Enumerated: Current state of US Prediction parallel USNotPredicted, USPredicted state USPTime Optional RO O Uses format defined for TimeReport Predicted time of US Prediction CLJCarrierType Optional RO O Enumerated: Type of carrier ProcessCarrier, EmptyCarrier, NPWCarrier CLJCarrierID ID of carrier which is dealt with the RO Y Text 0–80 characters CLJ. Carrier ID may not be assigned Identifier of a carrier. The CLJCarrierID shall be until a carrier is loaded and confirmed. same as the CarrierID defined in SEMI E87. When carrier ID is not specified yet, A zero length is used for is not yet ‘CarrierID this attribute shall inform it. specified’ CLJLPID Load port ID RO Y Unsigned integer. ID of load port which will be used by 0 = Load port is not assigned the CLJ Non 0 = Load port number The CLJLPID is compatible with the load port number defined in SEMI E87 which says “The load port number shall be assigned incrementally from the bottom left to bottom right, then top left to top right when facing the front of the equipment.” Even though a value may be marked as RO (read only), the initial value for the attribute may be provided by the host. The following diagrams and tables define the state model of CLJ object. Equipment shall CLJ State Model — maintain appropriate number of CLJs to achieve continuous substrate processing. CLJ State Model Diagram CLJ State Model Diagram CLJ State Model Definition CLJ State Model Definition State Transition No. Name Abstract of No.#1 Abstract of Abstract of New Comments Definition Trigger Action#2 State New CLJ demand without Early creation of - - (No state) Tc00 Create CLJ Sc01 load request CLJ CLJ Event Tc02 New CLJ demand with Create CLJ Sc02 Normal creation load request CLJ Event Tc04 New CLJ demand Create CLJ Sc03 For Interim triggered by AMHS solution use only CLJ Event Sc00 CLJ Created A CLJ is created and Tc07 Any fatal error occurred. Delete CLJ -(No CLJ is aborted active. state) CLD Event Sc30 UR Start of Unload Request - - - - A state for parallel Predictable is predictable state definition
USPState Optional Current state of US Prediction parallel state RO O Enumerated: USNotPredicted, USPredicted USPTime Optional Predicted time of US Prediction RO O Uses format defined for TimeReport CLJCarrierType Optional Type of carrier RO O Enumerated: ProcessCarrier, EmptyCarrier, NPWCarrier CLJCarrierID ID of carrier which is dealt with the CLJ. Carrier ID may not be assigned until a carrier is loaded and confirmed. When carrier ID is not specified yet, this attribute shall inform it. RO Y Text 0–80 characters Identifier of a carrier. The CLJCarrierID shall be same as the CarrierID defined in SEMI E87. A zero length is used for ‘CarrierID is not yet specified’ CLJLPID Load port ID ID of load port which will be used by the CLJ RO Y Unsigned integer. 0 = Load port is not assigned Non 0 = Load port number The CLJLPID is compatible with the load port number defined in SEMI E87 which says “The load port number shall be assigned incrementally from the bottom left to bottom right, then top left to top right when facing the front of the equipment.” Even though a value may be marked as RO (read only), the initial value for the attribute may be provided by the host. CLJ State Model — The following diagrams and tables define the state model of CLJ object. Equipment shall maintain appropriate number of CLJs to achieve continuous substrate processing. CLJ State Model Diagram CLJ State Model Diagram CLJ State Model Definition CLJ State Model Definition State Transition No. Name Abstract of Definition No.#1 Abstract of Trigger Abstract of Action#2 New State Comments - - (No state) Tc00 New CLJ demand without load request Create CLJ CLJ Event Sc01 Early creation of CLJ Tc02 New CLJ demand with load request Create CLJ CLJ Event Sc02 Normal creation Tc04 New CLJ demand triggered by AMHS Create CLJ CLJ Event Sc03 For Interim solution use only Sc00 CLJ Created A CLJ is created and active. Tc07 Any fatal error occurred. Delete CLJ CLD Event -(No state) CLJ is aborted Sc30 UR Predictable Start of Unload Request is predictable - - - - A state for parallel state definition