Referenced Standards and Documents Definitions or descriptions of the following terms used in this specification may be found in the SEMI Compilation of Abbreviations and Acronyms, available on the SEMI web site, . SEMI Standards SEMI E133 Provisional Specification for Automated Process Control Systems Interface — OMG Standards Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67; W3C Standards Extensible Markup Language (XML) 1.0 (Second Edition) W3C, 6 October 2000; – Namespaces in XML W3C, 14 January 1999; – XML Schema Part 0: Primer W3C, 2 May 2001; – XML Schema Part 2: Datatypes W3C, 2 May 2001; – XML Schema Part 0: Primer W3C, 2 May 2001; – XML Path Language (Xpath) W3C, 16 November 1999; – NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
Referenced Standards and Documents Definitions or descriptions of the following terms used in this specification may be found in the SEMI Compilation of Abbreviations and Acronyms, available on the SEMI web site, . SEMI Standards SEMI E133 — Provisional Specification for Automated Process Control Systems Interface OMG Standards Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67; W3C Standards Extensible Markup Language (XML) 1.0 (Second Edition) – W3C, 6 October 2000; Namespaces in XML – W3C, 14 January 1999; XML Schema Part 0: Primer – W3C, 2 May 2001; XML Schema Part 2: Datatypes – W3C, 2 May 2001; XML Schema Part 0: Primer – W3C, 2 May 2001; XML Path Language (Xpath) – W3C, 16 November 1999; NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.