41 25 HP Edge of human readable label area on z73 door 40 43 HP Edge of human readable label area on z74 rear 40 100 HP Edge of human readable label area on z75 rear Regarding the wafer plane tolerance of ±0.50 mm is selected as a starting point for FOSB manufactured prototypes. Future system z21, capability data may result in actual wafer plane tolerance of ±0.75 mm. Users are notified of this possibility. All linear dimensions are in mm, all angular dimensions are in degrees. Unless otherwise noted, all dimensions are in mm. Reference dimensions are in parentheses and are not requirements. Measured values for dimensions without specified tolerance should be rounded up or down to the last significant figure of the dimension in accordance with good engineering practice. Measured values for dimensions with specified tolerances should be rounded up or down to the last significant figure of the tolerance in accordance with good engineering practice. Derivation of Reference Dimensions Symbol Used Value Formula + + (x1) (≤555) x2 x2 (≤277.5 ≤277.5) + + 246.75) (y1) y2 y4max (≤486.75) (≤240 + (383 + (z1) z8max z11max (≤404) ≤21) (21 (z42) z12max z10 (≤13) − − ≥8) + (≤181 + (z44) z34 z34 (≤362) ≤181) + (≤13 + 377) (z45) (≤390) z42 z43max Related Documents SEMI Standards and Safety Guidelines SEMI E158 Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 ― FOUP) and Kinematic Coupling SEMI M76 Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers ― ISTA Packaging Performance Testing Standards ISTA-2A Individual Packaged Products 68kg or Less ― ISTA-3E Unitized Loads of the Same Product ―
z73 41 25 HP Edge of human readable label area on door z74 40 43 HP Edge of human readable label area on rear z75 40 100 HP Edge of human readable label area on rear Regarding z21, the wafer plane tolerance of ±0.50 mm is selected as a starting point for FOSB manufactured prototypes. Future system capability data may result in actual wafer plane tolerance of ±0.75 mm. Users are notified of this possibility. All linear dimensions are in mm, all angular dimensions are in degrees. Unless otherwise noted, all dimensions are in mm. Reference dimensions are in parentheses and are not requirements. Measured values for dimensions without specified tolerance should be rounded up or down to the last significant figure of the dimension in accordance with good engineering practice. Measured values for dimensions with specified tolerances should be rounded up or down to the last significant figure of the tolerance in accordance with good engineering practice. Derivation of Reference Dimensions Symbol Used Value Formula (x1) (≤555) x2 + x2 (≤277.5 + ≤277.5) (y1) (≤486.75) y2 + y4max (≤240 + 246.75) (z1) (≤404) z8max + z11max (383 + ≤21) (z42) (≤13) z12max − z10 (21 − ≥8) (z44) (≤362) z34 + z34 (≤181 + ≤181) (z45) (≤390) z42 + z43max (≤13 + 377) Related Documents SEMI Standards and Safety Guidelines SEMI E158 ― Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling SEMI M76 ― Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers ISTA Packaging Performance Testing Standards ISTA-2A ― Individual Packaged Products 68kg or Less ISTA-3E ― Unitized Loads of the Same Product