In this paper, the synthesis process of TiC+TiN multiple films on super-low-carbon stainless steels is reported.The TiC layer is coated as the first layer in the multiple film, the change of growth rate of the film on the 316L Stainless steel is not same as the one on carbides substrates, while the mole ratio of CH4 to TiCl4 (mCH4/TiCl4) is changed from 1.2to 2.0. The Ti [C, N], as a kind of inter-layer between TiC and TiN layers, is helpful to improve the adhesion between the TiC and TiN layer. The cooling rate greatly influences the quality of the adhesion between the TiC+TiN film and substrates.