Applied Materials Confidential 1

FishBone

Diagram for DSA Particle

Small Particle 0.08um

Wafer Quality,

Metrology & Protocol

Wafer pre-measurement

Counts Particles are consistent  with tool test conditions

Hardware

Clean and replace

Quartz window

Clean, replace and run

without shadow Ring

Inspect lift assembly

Robot/Aligner/Reflectometer

Cleanliness

Laser, Process &

System Setup

Check laser melt/threshold,

Coordinate & syscon

Check particle

Recipe

Pyro setup

Check Gas flow Clean Heater lower

assembly

Wafer Handoff

Check Slit valve  door and O-ring

Replace Quartz window &

O-rings

EDX)

ICMPS on ball type

particles

Backside Particles

FOUP cleanliness & Wafer

transfer sequence

Oxide particle wafer  & metrology recipe

Si pitting

Check for visible laser

burn marks


Applied Materials Confidential 1 FishBone Diagram for DSA Particle Small Particle 0.08um Wafer Quality , Metrology & Protocol Wafer pre - measurement Counts Particles are consistent with tool test conditions Hardware Clean and replace Quartz window Clean , replace and run without shadow Ring Inspect lift assembly Robot / Aligner / Reflectometer Cleanliness Laser , Process & System Setup Check laser melt / threshold , Coordinate & syscon Check particle Recipe Pyro setup Check Gas flow Clean Heater lower assembly Wafer Handoff Check Slit valve door and O - ring Replace Quartz window & O - rings EDX ) ICMPS on ball type particles Backside Particles FOUP cleanliness & Wafer transfer sequence Oxide particle wafer & metrology recipe Si pitting Check for visible laser burn marks