High-Speed SECS Message Services
The High-Speed SECS Message Services (HSMS) protocol is a standard transport protocol for communication between production equipment and factory control systems in semiconductor factories. HSMS defines a TCP/IP based Ethernet connection and is intended as a high speed alternative to the serial (RS-232 based) SECS-I protocol. HSMS is defined in the SEMI standard E37. External links 
Latest version of the HSMS standard

Semiconductor device fabrication

de:SEMI Equipment Communication Standard