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Plasma spray can be used to produce coatings. of virtually any metallic, cermet, or ceramic ma-. terial. The coatings are used for most of the types. of applications described in a subsequent section. The transferred plasma-arc process adds to. plasma spray the capability of substrate surface heat-. ing and melting. Figure 7 is a schematic repre-. sentation of the process.
The etch is a dry plasma etch and uses a high density plasma to alternately etch the silicon and deposit an etch resistant polymer layer on the sidewalls. The etching of the silicon is performed using a SF6 chemistry whereas the deposition of the etch resistant polymer layer on the sidewalls uses a C4F8 chemistry.