धातु
यदि हम विद्युत-चालकता पर ध्यान दें, तो ज्ञात होगा कि अधातुओं के विपरीत धातुएँ उत्तम चालक हैं। धातुओं में सबसे श्रेष्ठ विद्युच्चालक रजत है। यदि तुलना के लिए उसकी चालकता 100 मान ली जाए तो कुछ अन्य साधारण धातुओं की चालकता निम्नलिखित सारणी के अनुसार होगी-
इलेक्ट्रॉन किरण अश्मलेखन
Since electrons are charged particles, they tend to charge the substrate negatively unless they can quickly gain access to a path to ground. For a high-energy beam incident on a silicon wafer, virtually all the electrons stop in the wafer where they can follow a path to ground. However, for a quartz substrate such as a photomask, the embedded electrons will take a much longer time to move to ground. Often the negative charge acquired by a substrate can be compensated or even exceeded by a positive charge on the surface due to secondary electron emission into the vacuum. The presence of a thin conducting layer above or below the resist is generally of limited use for high energy (50 keV or more) electron beams, since most electrons pass through the layer into the substrate. The charge dissipation layer is generally useful only around or below 10 keV, since the resist is thinner and most of the electrons either stop in the resist or close to the conducting layer.