The complexity of simulation models has increased during the last years in semiconductor foundries. Manual and automated decisions have to be modeled in detail to make the right conclusions from them. We describe an approach that uses forward simulation to minimize modeling effort and mimics fab behavior to a high degree. The approach is applied to the problem of controlling time link chains. Results are presented and other applications are discussed.
['Thomas Winkler', 'Paul Barthel', 'Ralf Sprenger']
Modeling of complex decision making using forward simulation