In this paper, a multi-level force-feedback analog sensing circuits with delta-sigma modulator for CMOS micro-accelerometers is newly designed. The proposed circuits are attractive due to that the multi-level force-feedback circuits are proposed to null the sensor and all the analog and digital block circuits for CMOS micro-accelerometers are robust and compact to be integrated. Based upon the device parameters of 0.35 µm 2P4M CMOS technology with 3 V power supply, all the functions and performance of the proposed circuits for CMOS micro-accelerometers are successfully tested and proven through SPICE simulations. The proposed circuits with CMOS micro-accelerometer is suitable for automobiles, consumer electronics, such as Wii game player.
['Cheng-Ta Chiang', 'Ci-Ruei Peng']
A multi-level force-feedback CTV-based analog sensing circuits with delta-sigma modulator for CMOS micro-accelerometers