Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator
['Arpys Arevalo', 'David Conchouso', 'David Castro', 'Nizar Jaber', 'Mohammad I. Younis', 'Ian G. Foulds']
Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator