This paper describes the frequency mixing operation of a micro electro mechanical system device designed and fabricated in a CMOS commercial technology (AMS 0.35mum). The theory of the MEMS is summarized and a CMOS fully integrated MEMS is characterized as a mixer. The designed MEMS is a polysilicon clamped-clamped beam that presents a resonance frequency in the VHF range. CMOS-MEMS based mixer limitations are treated and a technique based on differential amplification to improve performance is given.
['J.L. Lopez', 'J. Teva', 'A. Uranga', 'Francesc Torres', 'J. Verd', 'G. Abadal', 'N. Barniol', 'J. Esteve', 'F. Perez-Murano']
Mixing in a 220MHz CMOS-MEMS