Nonequilibrium self-consistent RF discharge simulations which use a Cray X-MP/24 supercomputer to increase the computation rate are described. The fluid transport equations are solved by a more accurate flux corrected transport (MAFCT) algorithm. A staggered-mesh method is used for the arrangement of distribution functions. Vectorization and multitasking methods are used to optimize the computation time required by the simulation. Consequently, the simulation code is fully vectorized and the speedup ratio between the original code and the fully vectorized code approaches 11.7. Moreover, the multitasking has a speedup ratio of 1.988 on the two-processor Cray X-MP/24. The simulation results are compared with other model results to demonstrate the advantage of MAFCT. These results are also compared with experimental results. A better understanding of RF discharge mechanisms is accomplished through the use of a Cray X-MP supercomputer, which provides a solution within a reasonable amount of turnaround time. >
['Fongray Frank Young', 'Chwan-Hwa John Wu']
A fully-vectorized code for nonequilibrium RF glow discharge modeling and its parallel processing on a Cray X-MP