We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
['J.C. Lötters', 'Theo S. J. Lammerink', 'J. Groenesteijn', 'Haneveld Jk', 'R.J. Wiegerink']
Integrated thermal and microcoriolis flow sensing system with a dynamic flow range of more than five decades