This paper presents an innovative conditioning and read-out interface for resistive MEMS sensors. The proposed structure includes a digital offset compensation for robustness to process and temperature variations. Simulation results demonstrate an impressive resolution to power consumption ratio and a good immunity to environmental parameters. Experimental results finally demonstrate the efficiency of this promising read-out architecture.
['El Mehdi Boujamaa', 'Boris Alandry', 'Souha Hacine', 'Laurent Latorre', 'F. Mailly', 'Pascal Nouet']
A low power interface circuit for resistive sensors with digital offset compensation