Figure 5 is the plot of one of the profiles from the image in Fig. 4(b). It has four typical artifacts found in CD-AFM profiles obtained with CNT tips. Artifact A in Fig. 5 is readily apparent. It is the rounding of the top corner, mostly or partly due to dilation from the interaction of the ball and the top corner. Artifact B is that the sampling interval is not uniform. This is because CD-AFMs operate using an adaptive scan mode, in which data are only taken when the surface sensing signal meets the condition set by the system. When the tip and sample are undergoing an abnormal or unstable interaction, such as that involved with flexing and sticking of the CNT tip, there will be significant portions of the profile for which there is no recorded data. In contrast, a typical CD-AFM flared tip shows more uniform sampling throughout most of the profile. Artifacts C and D are regarded as CNT tip-sample sticking either within or out of the range of modest control. The backtracking of the data as the tip scans up the sidewall (Artifact C) is extensively found in CD-AFM1 profiles, while artifact D is a rather typical distortion appearing in the profile when tip jumping occurs.