This paper describes those initial results in detail and the current status of the effort as well as our plans. The primary emphasis here is to identify and examine the artifacts that may occur in CD-AFM imaging using CNT tips. The remainder of this paper is organized as follows. In Sec. 2, we describe two types of CNT tips developed by KRISS. The fabrication of these probes is described in Sec. 3. In Sec. 4, we show the measurement results. Our conclusions are summarized in Sec. 5.