In this study, the electrical and optical properties of IZTO thin films were examined for the films deposited from a ceramic target with the nominal chemical composition corresponding to 40 at % indium, 50 at % zinc, and 10 at % tin on the metallic component basis. The deposition of IZTO thin films was conducted using radio frequency (RF) magnetron sputtering as reported earlier by our group . The variation of the electrical properties and TFT performance with annealing treatment was investigated in detail.