Three-dimensional FEA allowed prediction of the mechanical deformations and strain distributions of photodetector structures and the entire circuit system enabled by controlled buckling. Eight-node 3D solid elements and four-node shell elements with a multiple stack design (SU-8/MoS2/Graphene/SU-8 or SU-8/Graphene / SU-8) were used to model the silicone substrate and 2D precursors, respectively. Refined meshes of those elements ensured the computational accuracy. The critical buckling strains and corresponding buckling modes determined from linear buckling analyses were implemented as initial imperfections in the postbuckling calculations to obtain the deformed configurations and strain distributions during the pre-strain release. The simulations of postbuckling process were performed using conventional static analysis in the commercial software ABAQUS. The elastic modulus (E) and Poisson’s ratio (ν) are Esubstrate = 166 kPa and νsubstrate = 0.49 for substrate; Egraphene = 500 GPa and νgraphene = 0.15 for graphene; \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${\it{{E}}}_{{\mathrm{MoS}}_2}$$\end{document}EMoS2 = 270 GPa and \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\nu _{{\mathrm{MoS}}_2}$$\end{document}νMoS2 = 0.25 for MoS2; and \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$E_{{\mathrm{SU}} - 8}$$\end{document}ESU-8 = 4.02 GPa and \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\nu _{{\mathrm{SU}} - 8}$$\end{document}νSU-8 = 0.22 for SU-8.