In our continuing work, we plan to test CNT tips of these types with dimensions optimized for more challenging samples, including different materials and narrower trenches. Using the flexible fabrication techniques described here, we also plan to develop new kinds of nanoprobes that can address CD and LER measurements for current technology nodes. Although our fabrication method is not compatible with the requirements of mass production, we believe that a demonstration of effective tip geometries will motivate the development of alternative wafer-scale production techniques by other laboratories and will enable the advancement of CD-AFM capability.