Until now, the method of using nanomanipulation in an SEM chamber is considered to produce the most accurate CNT tips. The mounting of the CNT is performed with the manipulator installed in an SEM, where a CNT is placed on the rear surface of the pyramidal silicon AFM mother tip, and then is glued using electron beam induced deposition of hydrocarbon. While the manipulation has sufficient resolution in the horizontal plane, normal to the e-beam direction, the vertical position cannot be distinguished within 1 µm or so because of the large depth of field of the SEM image. This makes impossible the precise 3-D manipulation of the CNT and AFM tip in space, resulting in a wide distribution of CNT attachment angles. One can improve this method by enabling the rotational motion of either or both the AFM tip and the CNT, with respect to the axis of the AFM tip, achieving an angle alignment precision as small as about 10 deg.33