In our initial effort, we used two different generations of CD-AFM instruments to evaluate ball-capped and bent-type CNT tips by imaging line/space gratings and a programmed line edge roughness specimen. We concluded that these CNT tips are capable of scanning the profiles of these features including re-entrant sidewalls, but there remain important challenges to address, including tighter control of tip geometry and careful optimization of scan parameters and algorithms for using CNT tips.