Figure 6(a) shows the geometries of the J-tip and the same grating sample as in Fig. 4. Figure 6(b) is the CD-AFM1 image obtained. The length of the trace is nominally 5 µm, and each trace is offset by ~250 nm from the next. The trace and retrace are quite different, each having different artifacts, indicating that the tip operation was abnormal. To look more closely at the artifacts, both the trace and retrace profiles are shown in Fig. 7.