The electrical properties of the IZTO films and TFTs were characterized using Hall effect measurement (Ecopia HMS-5000, Anyang, Republic of Korea) and I–V measurement (Keithley 4200-SCS, Beaverton, OR, USA). The optical transmittance of the films across visible spectrum was observed using ultraviolet-visible spectrophotometer (UV/Vis/NIR spectrophotometer, Cary 5000, Agilent, Santa Clara, CA, USA).