Since the early 2000s, the Korea Research Institute for Standards and Science (KRISS) has invested considerable effort in the controlled fabrication of CNT tips.21,23 Progress by KRISS in the precise control of CNT orientation, length, and end modification, using manipulation and focused ion beam processes, has allowed the implementation of ball-capped CNT tips and bent CNT tips for CD-AFM. Because the National Institute of Standards and Technology (NIST) has experience with CD-AFM metrology, the two organizations began collaborating during the mid-2000s on the application of CNT tips for CD-AFM metrology, and the initial results of this collaboration were published.27