A J-tip image of the LER sample taken using CD-AFM2 is shown in Fig. 10, along with the SEM images of the J-tip and schematics of the tip and sample geometries. The actual image is composed of 25 traces and retraces, and it is shown in both top-down and perspective views in Fig. 10(b). The length of each scan line is 10 µm, and each scan line is offset by 20 nm in the slow scan axis. The image shows that the performance of the tip during scanning was reasonably stable, and this is further seen in the extracted profile from the image shown in Fig. 11. The apparent rounding of the left edge is due to the tip–sample dilation. Since the leftward foot of the J-tip has a height which is comparable to the pattern height, most of the apparent left sidewall is a mirror image of the bent side of the J-tip. There is also no discernible difference between the trace and retrace profiles which was problematic for much of the CD-AFM1 data.