Plasma. The physics and chemistry of the plasma changes drastically with pressure22,24. For instance, the oxidation state of the plasma upon arriving at the substrate can be different for similar pO2, while the total pressure influences the arrival time and plasma temperature. For this reason, 2 different total pressures were examined, i.e. 2*10−2 and 1*10−1 mbar. The resulting physics and chemistry of the plasma were examined with self-emission spectroscopy.