X-ray diffraction (Panalytical X’Pert PRO MRD) 2θ-ω and reciprocal space mapping (RSM) scans were employed to obtain information on the orientation, lattice parameters and epitaxial quality of the thin films. Dielectric measurements (E4980A Precision LCR meter) were performed in the temperature range of 120 K–300 K by using a physical property measurement system to produce the cryogenic environment. An MIM (Au/SFO/Nb:STO) structure was used for dielectric measurements, with positive bias applied indicating the high potential applied to the Nb:STO substrate and low potential at the Au electrode.