_:naf4a79c7d233452bbe703e0d1498f6d5xb2
<http://schema.org/name>
"Excillum to refine NanoTube technology and apply to MEMS inspection in EU collaboration project CITCOM"
<https://www.excillum.com/excillum-to-refine-nanotube-technology-and-apply-to-mems-inspection-in-eu-collaboration-project-citcom/>