Tetrafluorosilane;7783-61-1;InChI=1/F4Si/c1-5(2,3);463019_ALDRICH;EINECS 232-015-5;HSDB 684;Perfluorosilane;SILICON TETRAFLUORIDE;Silane, tetrafluoro-;Silicon(IV) fluoride;Silicon fluoride (SiF4);Silicon tetrafluoride, compressed [UN1859]  [Poison gas];Tetrafluorosilane;UN1859
Tetrafluorosilane