[dimethyl-(trimethylsilyl-trimethylsilyloxyamino)silyl]methane;[dimethyl-(trimethylsilyl-trimethylsilyloxy-amino)silyl]methane;bis(trimethylsilyl)-trimethylsilyloxy-amine;Tris(trimethylsilyl)hydroxylamine;O-Trimethylsiloxy-N,N-bis(trimethylsilyl)amine
[dimethyl-(trimethylsilyl-trimethylsilyloxyamino)silyl]methane