text: Ellipsometry is an indirect method, i.e. in general the measured  and  cannot be converted directly into the optical constants of the sample. Normally, a model analysis must be performed, for example the Forouhi Bloomer model. This is one weakness of ellipsometry. Models can be physically based on energy transitions or simply free parameters used to fit the data. 
  Direct inversion of  and  is only possible in very simple cases of isotropic, homogeneous and infinitely thick films. In all other cases a layer model must be established, which considers the optical constants (refractive index or dielectric function tensor) and thickness parameters of all individual layers of the sample including the correct layer sequence. Using an iterative procedure (least-squares minimization) unknown optical constants and/or thickness parameters are varied, and  and  values are calculated using the Fresnel equations. The calculated  and  values which match the experimental data best provide the optical constants and thickness parameters of the sample.