text: Microelectromechanical systems (MEMS) are used in a number of different applications and have become increasingly more prevalent in nanoscale applications.  However, due to their small size they run into problems with stiction, caused by capillary condensation among other forces.  Intense research in the area of Microelectromechanical systems has been focused on finding ways to reduce stiction in the fabrication of Microelectromechanical systems and when they are being used.  Srinivasan et al. did a study in 1998 looking at applying different types of Self-assembled monolayers (SAMs) to the surfaces of Microelectromechanical systems in hopes of reducing stiction or getting rid of it altogether.  They found that using OTS (octadecyltrichlorosilane) coatings reduced both types of stiction.