text: Defects due to both external and intrinsic factors may appear. External factors include the cleanliness of the substrate, method of preparation, and purity of the adsorbates. SAMs intrinsically form defects due to the thermodynamics of formation, e.g. thiol SAMs on gold typically exhibit etch pits (monatomic vacancy islands) likely due to extraction of adatoms from the substrate and formation of adatom-adsorbate moieties. Recently, a new type of fluorosurfactants have found that can form nearly perfect monolayer on gold substrate due to the increase of mobility of gold surface atoms.