text: a process for providing a very thin led on a package substrate , without any growth substrate or support substrate , is described with respect to fig1 – 16 . as a preliminary matter , a conventional led is formed on a growth substrate . in the example used , the led is a gan - based led , such as an alingan led . the term gan will be used to represent any gan - based material . typically , a relatively thick ( approx . 1 – 2 micron ) undoped or n - type gan layer is grown on a sapphire growth substrate using conventional techniques . other substrates may also be used , such as sic , si , sicoi , and zno . in the case of gallium - phosphide ( iii - p ) leds , the growth substrate is typically gaas or ge . the relatively thick gan layer typically includes a low temperature nucleation layer and one or more additional layers so as to provide a low - defect lattice structure for the n - type cladding layer and active layer . one or more n - type cladding layers are then formed over the thick n - type layer , followed by an active layer , one or more p - type cladding layers , and a p - type contact layer ( for metallization ). various techniques are used to gain electrical access to the n - layers . in a flip - chip example , portions of the p - layers and active layer are etched away to expose an n - layer for metallization . in this way the p contact and n contact are on the same side of the chip and can be directly electrically attached to the package substrate contact pads . current from the n - metal contact initially flows laterally through the n - layer . in contrast , in a vertical injection ( non - flip - chip ) led , an n - contact is formed on one side of the chip , and a p - contact is formed on the other side of the chip . electrical contact to one of the p or n - contacts is typically made with a wire bond or a metal bridge , and the other contact is directly bonded to a package substrate contact pad . examples of forming leds are described in u . s . pat . nos . 6 , 649 , 440 and 6 , 274 , 399 , both assigned to lumileds and incorporated by reference . a wire - bond led version is described with respect to fig1 – 13a . flip - chip devices may be extensively tested before dicing . test parameters include color and brightness . devices may then be binned ( grouped with leds having similar attributes ). fig1 is a cross - sectional view of two led dice 10 mounted on a package substrate 12 . each led die 10 includes a sapphire growth substrate 14 , n - type layers 16 , an active layer 18 , and p - type layers 20 . the p - layer surface is highly doped to form an ohmic contact with a die metallization layer ( e . g ., niag ). it is preferable if the metallization is highly reflective to light emitted by the active layer . the metallization layer is then bonded to a metal contact pad 22 on the package substrate 12 . the bond technology may be solder , thermocompression , interdiffusion , or a au stud bump array bonded by an ultrasonic weld . the combination of the die metallization and bond material is shown as metal 24 and may include a diffusion barrier or other layers to protect the optical properties of the metallization layer adjacent the p - layer 20 . the led dice 10 are typically from the same wafer but can , instead , be different types and colors . the package substrate 12 may be an array of package elements that will later be separated . fig1 shows two package elements that will later be separated . any arrangement of leds may be used such as arrays of leds or groups of arrays . the package substrate 12 may be formed of the electrically insulating material aln , with gold contact pads 22 connected to solderable electrodes 26 using vias and / or metal traces . alternatively , the package substrate 12 may be formed of a conducting material if passivated to prevent shorting , such as anodized alsic . in one embodiment , the package substrate 12 is thermally conductive to act as a heat sink or to conduct heat to a larger heat sink . ultimately the leds may have a lens cap attached to them , or be coated with a phosphor ( for converting blue or uv light to create a white light ), or be further processed , and the package may be soldered to a printed circuit board , if appropriate for the particular application . fig2 illustrates the growth substrate being removed using an excimer laser beam 30 . the laser beam 30 melts the gan material at its interface with the growth substrate , allowing the growth substrate to then be lifted off . fig3 and 4 illustrate an alternative technique for growth substrate removal using etching . the growth substrate 32 may be silicon based ( e . g ., sic , sic - on - insulator , sic - on - quartz , si , etc .) so that it is etchable using conventional etching techniques , such as reactive ion etching ( rie ). the etchant is shown as etchant 34 . additional non - laser liftoff techniques can be used to remove the growth substrate . such a liftoff technique may etch away a layer between the growth substrate and the led layers . for example , the growth substrate may be sicoi , and an etchant solution etches away the insulator material . the remainder of the growth substrate may then be lifted off . a sapphire substrate with an undercut etch layer may also be used . the growth substrate 32 may also be removed by lapping . in such a case , the top surface of the package substrate 12 with the dice bonded thereto must be planar . depositing a filler between the dice may serve to mechanically support the dice during the lapping process . an unusual aspect of the process described herein is that the led - forming process is continued after the led is mounted on the package substrate 12 . in conventional designs , the led is completely fabricated before being mounted on a support substrate . a wide array of semiconductor processing may be applied to the transferred led layers in order to enhance optical extraction and establish electrical contact ( for vertical injection devices only ). first , however , the package substrate 12 must be protected from the effects of the processing . note that precise placement (± 2 microns ) of the dice is typically necessary to allow reliable lithographic process steps . in fig5 , a protective layer 36 of , for example , polyimide is deposited to protect the package substrate 12 during subsequent processes , such as etching . the protective layer is removed from the top of the led by a simple planarization step or mask / etch step . as an alternative to forming the protective layer of fig5 , a thin (& lt ; 15 micron ) layer of uv transparent material ( e . g ., aluminum oxide ) may be deposited over the structure of fig1 prior to the uv excimer laser lift off step . the lifting off the growth substrate ( fig2 ) would then lift off the aluminum oxide only over the growth substrate , providing a self - aligned protective layer for the package substrate 12 . if the thickness of the transparent layer is approximately matched to the led transferred layers , then planarization of the surface may be achieved . in fig6 , the exposed , relatively thick , gan layer 16 is thinned by etching using a dry etch 38 such as rie . in one example , the thickness of the gan layer 16 being etched is 7 microns , and the etching reduces the thickness of the gan layer 16 to approximately 1 micron . if the initial thickness of all the epitaxial led layers is 9 microns , in this case the etching causes the total thickness of the led layers to be 3 microns . the thinning process removes any damage caused by the laser lift off process , as well as reduces the thickness of the optically absorbing layers that are no longer needed , such as a low temperature gan nucleation layer and adjacent layers . all or a portion of the n - type cladding layer adjacent to the active layer is left intact . for vertical injection type devices , planarization may be required to enable successful lithography . in fig7 , the structure is planarized in preparation for a metallization step . planarization and top metallization is not needed if the led is a flip - chip type , discussed with respect to fig1 and 15 . planarization may be performed with a simple mechanical polishing step . in fig9 , the photoresist is selectively exposed by uv radiation through a mask and developed to leave mask portions 42 , where it is desired to contact the exposed n - layer 16 with metal . the subsequent metal layer may form fingers or another pattern to distribute the current while providing space for light to pass . alternatively , the metal layer can be made very thin so as to be transparent . alternatively , a transparent conductor such as indium tin oxide ( ito ) may be employed to spread current . in fig1 , a metal 44 is deposited . the metal may be any conventional metal used in leds , such as au , ni , ag , and combinations of metals for forming metal alloys . the metal may be deposited by sputtering or evaporation . in fig1 , a metal liftoff process is performed by dissolving the underlying photoresist and lifting off the metal . as an alternative to fig8 – 10 , the metal layer ( s ) may be deposited first , and lithographic patterning of the metals can be achieved with metal etching using a photoresist mask . in fig1 , the light - emitting top surface of the led ( n - layer 16 ) is roughened for increased light extraction . in one embodiment , layer 16 is photo - electrochemically etched using a koh solution 46 . this forms a “ white ” roughness in the gan surface ( having n - type si doping ). this etching process can be used to further thin the n - layer 16 and stop at a predetermined thickness using an etch stop layer grown during the led formation process . this latter approach is useful for resonant device designs . for such devices , a mirror stack ( e . g ., a bragg reflector ) may now be deposited on the top surface of the led . additional light extraction techniques could include micron or nanometer scale patterned etching ( dimple or photonic crystal ). forming patterns such a dimples or photonic crystals are well known . if desired , a phosphor material may be deposited over the led die for wavelength shifting the light . the phosphor may be deposited using an electro - phoretic deposition ( epd ) or screen - printing technique . in fig1 a , a wire 48 is bonded to the top metal 44 and a package substrate contact pad 22 . alternatively , a rigid metal bridge 47 , shown in fig1 b , may be deposited between the metal 44 and the pad 22 . the resulting package substrate 12 is then diced using conventional techniques ( e . g ., scribe - and - break or sawing ). each package substrate die may contain one or more leds , either of the same color or of different colors . each package substrate die may contain other circuitry , such as detectors , multiplexers , regulators , etc . the resulting package element may be further processed by , for example , receiving an led lens cap , mounting on a printed circuit board , etc . the resulting package element of fig1 a or 13 b has a very thin led directly mounted on a package substrate that extends beyond the boundaries of the led . no support substrate is required , thus eliminating the thermal and electrical resistance introduced by a support substrate . since the led is very thin , there is little optical absorption by the layers . light extraction features may be provided in the top layer surface . in the case of roughening the surface , high surface randomization is provided , and photons generated within the epitaxial layers experience a high frequency of randomizing events . the short path length between events and the absence of absorbing regions of epitaxial material ( e . g ., the absence of a low - temperature gan nucleation layer and adjacent high defect density regions ) ensure a high light extraction efficiency . the resulting thin film ( tf ) leds are also advantageous for resonant structures such as resonant cavity and photonic - crystal based leds , since the reduced thickness of high refractive index material substantially reduces the number of optical modes and allows for designs with higher extraction efficiency and radiance . in one embodiment , the distance between the primary emission surface ( the top surface ) and the package substrate surface is less than 50 microns , although typically the distance will be much less ( e . g ., 20 microns or less ). the thickness of the led layers may be 10 microns or less and typically less than 3 microns . fig1 and 15 illustrate the use of a flip - chip led 49 in the above described packaging method . a flip - chip led does not require any wire bond for contacting the n or p - layers so that it has a lower profile and is less fragile . in fig1 , all elements are the same as fig1 except portions of the p - layer 20 and active layer 18 are etched away during the led forming process , and metal 50 ( metallization layer plus bonding metal ) contacts the n - layer 16 on the same side as the p - contact metal 24 . an underfill material 52 may be deposited in the voids beneath the led to reduce thermal gradients across the led , add mechanical strength to the attachment , and prevent contaminants from contacting the led material . since no top metal layer needs to be formed , the steps shown in fig7 – 11 may be skipped . the n - metal 50 and p - metal 24 are bonded to the pads 22 on the package substrate 12 . fig1 illustrates a flip chip led 54 where the metal electrode 56 for the n - layer 16 is formed in a pattern across the n - layer to distribute the current . the metal electrode 56 is insulated from the p - contact metallization 58 by an insulating material 60 . the pattern of metal electrode 56 may be like fingers , a polka dot pattern , or any other pattern . non - contiguous metal patterns require an additional insulating and conducting layer to make contact to all the metal portions . an alternate process flow that would eliminate the need to dice the sapphire substrate wafer and allow for reuse of the sapphire substrate is also possible and described below . after fabrication of the flip - chip leds but before dicing , the leds are wafer - level tested and mapped according to their performance . an array of separated package substrates 12 are prepared by surrounding the metal bonding regions on each package substrate with regions that are not affected by the led bonding process , such that the portion of the package substrate extending beyond the led die of interest does not damage or become bonded to adjacent led dies on the wafer during the bonding process . methods to render areas unaffected by the bonding process include a reduced height or coating with an inert film such as sio 2 . the wafer with the leds is placed in contact with a separated package substrate such that the first desired led die is attached to the package substrate in a manner similar to the previously described method , using a combination of localized pressure , heat , and ultrasonic agitation . the separation of the growth substrate from the bonded device ( by pulling the package substrate from the sapphire substrate ) follows , using the laser lift off method , localized to the die area . an optical pathway through the device attachment system would be required for the laser beam . an additional advantage of this substrate - reuse technique is that the pulling force could be maintained on the device during the growth substrate separation , increasing the led &# 39 ; s capacity for absorbing thermal shock associated with laser liftoff . the led structures of fig1 a , 13 b , 15 , and 16 may be directly soldered to a circuit board or other connectors . alternatively , the led structures may be encapsulated in a secondary housing . fig1 is an exploded view of one embodiment of the package substrate 12 with an led die 10 mounted in a package . a heat - sinking slug 60 is placed into an insert - molded leadframe 62 . the insert - molded leadframe 62 is , for example , a filled plastic material molded around metal leads 64 that provide an electrical path . slug 60 may include an optional reflector cup 66 . the led die 10 attached to the package substrate 12 is mounted directly or indirectly to slug 60 . the metal leads 64 are bonded to the electrodes 26 ( fig1 a ) on the package substrate 12 . an optical lens 68 may be added . while particular embodiments of the present invention have been shown and described , it will be obvious to those skilled in the art that changes and modifications may be made without departing from this invention in its broader aspects and , therefore , the appended claims are to encompass within their scope all such changes and modifications as fall within the true spirit and scope of this invention .