Semiconductors, Moores Law, Integrated Circuits, Image Resolution, Nanoelectronics.
NA= numerical aperture of the objective lens; k1= measure of RET aggressiveness The contribution of OPC gets absorbed into the k1 factor. The lower the k1 factor better is the resolution. Therefore, k1 is referred to as the measure of RET aggressiveness. Smaller the k1 factor, more aggressive is