document: MEMS applications in computer disk drive dual-stage servo systems We present a decoupled discrete time pole placement design method , which can be combined with a self-tuning scheme to compensate variations in the microactuator 's -LRB- MA 's -RRB- resonance mode . Section I of the paper describes the design and fabrication of a prototype microactuator with an integrated gimbal structure . Section II presents a decoupled track-following controller design and a self-tuning control scheme to compensate for the MA 's resonance mode variations
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