EDS analysing the elemental composition

Just wondering if I'm interpreting this correctly. So in SEM, and particularly the EDS mode, the beam irradiation refers to the beam irradiation from the thermionic emission gun. This paper measures the EDS spectra with varying degrees of irradiation in a 2D structure of BiOCl, noting that the structure of the compound changes under high beam irradiation to disintegrated domains of bismuth nanoparticles. I'm wondering is this a problem that is often encountered in EDS when trying to analyse the elemental composition of a sample in many other compounds?
Many Thanks


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