## Unlabelled Far-field Deeply Subwavelength Superoscillatory Imaging (DSSI)

T. Pu 1$ , V. Savinov 1 , G. Yuan 2 , N. Papasimakis 1 , N. I. Zheludev 1,2*

1 Optoelectronics Research Centre and Centre for Photonic Metamaterials, University of Southampton, Southampton SO17 1BJ, United Kingdom

2 Centre for Disruptive Photonic Technologies, The Photonics Institute, School of Physical and Mathematical Sciences, Nanyang Technological University, 637371 Singapore

*Correspondence to: zheludev@soton.ac.uk

$ On leave from: Key Laboratory of Microelectronics Devices &amp; Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.

Abstract: Recently  it  was  reported  that  deeply  subwavelength  features  of  free  space superoscillatory  electromagnetic  fields  can  be  observed  experimentally  and  used  in  optical metrology with nanoscale resolution ( 1 ). Here we introduce a new type of imaging, termed Deeply Subwavelength Superoscillatory Imaging (DSSI), that reveals the fine structure of a physical object through its far-field scattering pattern under superoscillatory illumination. The object is reconstructed from intensity profiles of scattered light recorded for different positions of the object in the superoscillatory field. The reconstruction is performed with a convolutional neural  network  trained  on  a  large  number  of  scattering  events.  We  show  that  DSSI  offers resolution far beyond the conventional Òdiffraction limitÓ even if low dynamic range optical detection is used. In modelling experiments, a dimer comprising two subwavelength opaque particles is imaged with a resolution exceeding λ /200. We show that such resolution levels are tolerant to noise and achievable with low-dynamic range photo-detectors.

The development of label-free far-field super-resolution imaging, beyond the half-wavelength limit  of  the  conventional  microscope,  remains  one  of  the  main  challenges  for  science  and technology. Indeed, the ability to image at the nanometer scale using visible light will open unprecedented opportunities in the study of biochemical, biomedical, and material sciences, as well  as  nanotechnology.  However,  despite  persistent  research  efforts,  deep  subwavelength resolution is only possible using techniques, such as STED ( 2 ) and SMLM/STORM ( 3, 4 ) that require  labelling  of  samples  with  luminescent  material  that  is  not  acceptable  for  many biomedical and nanotechnology applications (e.g. imaging of semiconductor chips).  Here we introduce  a  non-invasive  optical  imaging  technique  with  resolution  exceeding λ /100.  Our method  allows  far-field,  non-contact,  label-free  optical  imaging  with  close  to  molecular resolution  by  exploiting  advances  in  singularity optics  and  machine  learning.  We  term  our method Deeply Subwavelength Superoscillatory Imaging (DSSI). The extreme resolution of our technique comes from the analysis of a large amount of information about the object that is gathered by registering the results of multiple interactions with highly structured light beams at different illumination conditions.

Recent interferometric experiments ( 5 ) confirmed the long existing theoretical observations ( 6 ) that  complex  coherent  optical  beams  could  contain  highly  localized  intensity  hotspots  and zones of energy backflow. They also revealed that phase in such optical fields could change on a  distance  orders  of  magnitude  smaller  than  the wavelength  of  light.  Such  complex  optical fields,  known  as  superoscillatory  fields,  can  be  generated  through  interference  of  multiple waves diffracted on a grating ( 7 ) or purposely designed masks ( 8 ). Here we show that DSSI can reveal the fine subwavelength structure of an object through recording intensity profiles of a large number of far-field scattering patterns taken under superoscillatory illumination. Our approach exploits the rapid spatial variations of the illuminating optical field as even small displacements  of  a  deeply  subwavelength  object  placed  near  a  phase  singularity  can significantly  change  the  far-field  pattern  of  light  scattered  by  the  object  (see  Fig.  S1  in Supplementary Information).

In  contrast  to  the  conventional  microscope  that  forms  the  image  of  the  object  in  a  single exposure and is limited in resolution at about half wavelength of the light used for illuminating the object, the DSSI technique requires post-processing of multiple scattering field patterns for imaging. We show that a convolutional neural network trained on a large number of scattering events prior to the imaging act is a very powerful tool that can reliably retrieve information about the object with deeply subwavelength resolution. Moreover, our analysis shows that high resolution is tolerant to noise and achievable with low-dynamic range photo-detectors.

A direct reconstruction of an imaging target is possible only if the intensity and phase of the scattered field is known on a closed surface encompassing the object with infinite precision (KirchhoffÐHelmholtz integral). Recently developed monolithic optical micro-interferometry ( 5 )  can,  in  principle,  detect  the  phase  of  the  field  everywhere  around  an  isolated  scattering object, but the technique is extremely challenging for routine microscopy ( 9 ).  Although the field intensity of scattered light is much easier to measure, as no interferometry is required, image  reconstruction  from  only  the  intensity  profiles  is  an  ill-posed  inverse  problem  ( 9 ). Different iterative feedback algorithms have been developed enabling the reconstruction of an image  from  intensity  of  scattering  patterns  of  optical,  deep  UV  and  X-ray  radiation  with resolution essentially limited by the wavelength of the illuminating light in most cases ( 10-15 ), and around 5-times higher when compressed sensing techniques for imaging sparse objects are used ( 16-18 ). Also, images taken by machine vision cameras have been enhanced by artificial intelligence algorithms but without demonstrating subwavelength resolution( 19, 20 ).

Here we show that object reconstruction with deep subwavelength resolution and high finesse is achievable by detecting only the intensity profile of the scattered light. We also show that higher  resolution  is achievable  if instead of conventional  plane  wave  illumination  a superoscillatory illumination is used. We reconstruct the key spatial parameters of the object from the intensity profiles of scattered light with a deep learning neural network trained on a large number of scattering events. We illustrate the Deeply Subwavelength Superoscillatory Imaging  (DSSI)  by  modelling  the  imaging  of  a  dimer,  a  pair  of  randomly  positioned subwavelength particles. Imaging a dimer is a simple, but important task that appears often in bio-imaging and nanotechnology (e.g. imaging of cell division or nanoantennas).

In our modelling of proof-of-principle one-dimensional imaging experiments (see Fig. 1), we image a dimer consisting of two totally absorbing, non-scattering elements of widths A and C with  gap  B  between  them.  The  dimerÕs  location  from  the  center  of  the  object  plane  is represented by distance D. The scattered light is detected by an intensity detector array that is placed at a distance of 10 λ from the object plane, over its center. Here λ is the wavelength of the free-space radiation used in the modelling.  We assume that the detector array is 10 λ long. Since the scattered field reaching the detector array is formed by free-space propagating waves, in a real experiment it can be imaged at any magnification without loss of resolution, by simply adjusting  the  magnification  to  ensure  that  the  detector  pixels  smaller  than  the  required resolution, as has already been demonstrated in a real experiment ( 5 ). We therefore assume that  the  array  can  image  the  intensity  profile  of  the  diffracted/scattered  light  without  any limitations to spatial resolution and conduct our modelling for a detector array containing five thousand pixels.

We consider two closely related situations, where the position of the dimer at the imaging plane is  either  known  or  unknown.  We  assume  that  the  dimer  with  unknown  position  is  located anywhere  within  a  chosen  interval.    In  the  former  case,  the  imaging  process  returns  the dimensions of A, B, C of the dimer, whereas in the latter the position D is returned in addition to the dimer dimensions. We used illumination with a superoscillatory wavefront generated by a planar Pancharatnam-Berry phase metasurface that was developed in the experimental work reported in Ref. ( 1 ). It creates a superoscillatory subwavelength hotspot at a distance z=12.5 λ from the plane of the metasurface. The hotspots are flanked by zones of high phase gradient (see Fig. 1). For comparison, we also used plane wave illumination.

In  the  imaging  process,  the  superoscillatory field  generator  is  scanned  across  the  object  by steadily moving the superoscillatory hotspot, at intervals of λ /5, from the λ position to the + λ position in the object plane. For each position of the hotspot the detector records a diffraction pattern. The full set of diffraction patterns is analyzed by a Convolutional Neural Network ( 21 ) to retrieve information about the object. The network contains three convolution layers with 32-5 × 5, 32-3 × 3, 64-3 × 3 and 32-1 × 1 kernels, correspondingly, and three fully connected layers with 128, 32, 4 neurons, respectively. The first three convolution layers are separately followed by a pooling layer with 1 × 4, 1 × 8, 1 × 4 kernels with Rectified Linear Unit activation function. The  network  was  trained  with  the  Adam  stochastic  optimization  method  ( 22 )  and  mean absolute  error  loss  function,  aimed  at  improving  the  retrieval  of  the  dimer  geometrical parameters, i.e. constants A, B, C and D. The training data set contained 20,000 samples. It was generated by creating dimers of random sizes and placing them on the object plane with the dimer center coordinate D randomly chosen in the interval from Ð λ /2 to λ /2 (in the case of unknown dimer position).  The widths of the dimer components (A and C) and the gap between them  (B)  were  independently  and  randomly  chosen  between  0.002 λ and λ .  The  diffraction pattern on the detector array was then calculated by the Fourier propagation method ( 23 ) for the transverse component of the electric field.

The results of our imaging experiments are presented in Fig. 2. They demonstrate that the dimensions of the dimer and its position can be retrieved accurately. Indeed, on Fig. 2 the solid red and blue lines correspond to the median of the true values as a function of the retrieved value, whereas the black solid line is the bisector of the first quadrant ( y=x ) representing perfect agreement between true and retrieved values. A departure of the median from the bisector represents a systematic bias in the retrieval process. When the position of the dimer is known, we obtain remarkably accurate retrieval of all dimensions both for plane wave (red lines) and superoscillatory illumination (blue lines), with the systematic bias of ~ λ /100 or smaller. Here, superoscillatory illumination gives similar results to plane wave illumination for the size of dimerÕs element A, but provides over a factor of x2 smaller systematic bias for dimer gap B. When the dimer position is a priori unknown, the systematic bias increases but remains subλ /100 with superoscillatory illumination still giving better results for retrieval of dimer gap B and position D than plane wave illumination. See Supplementary Information for more details.

A parameter that is of most interest in real experiments is the spread of true values for a given measurement result, which defines the resolving power of the method. Here, we quantify the resolving power of DSSI by calculating the interquartile range (IQR) of the distribution of true values given a retrieved value (see Fig. 3). We found that the IQR does not vary significantly with the dimensions of the dimer and use its mean value as resolution. Remarkably, in the case of  known  position  and  superoscillatory  illumination,  the  resolution  of  the  imaging  process exceeds λ /200 for all  dimer  parameters.  When the position of the dimer is not known, the resolution decreases to ~ λ /80 for superoscillatory illumination. In both cases, superoscillatory illumination provides a resolution enhancement of &gt;50% over plane wave illumination (see Supplementary Information). The imaging results presented on Fig. 3 were obtained by using the intensity of the diffracted pattern resolved with 16-bit precision corresponding to a dynamic range of 96dB. Here the dynamic range is defined as 10 log10(Imax/Imin), where Imin and Imax are · the  minimum  and  maximum  intensity  levels  that  can  be  recorded.  Although  such  dynamic range is achievable with high-quality photodetectors, the resolution of the method is weakly dependent on the dynamic range of the detectors. To illustrate this, the detectorÕs dynamic range was deliberately reduced by rounding readings to lower values (Fig. 3f). Nevertheless, resolution  at  the λ /100  scale  is  achieved  even  for  40  dB  dynamic  range,  whereas  typical photodiode values are well above the 60 dB level.

The extraordinary deeply subwavelength level of resolution reported here, at the level better than λ /100,  exceeds  the  Abbe  Òdiffraction  limitÓ  of  resolution  (~ λ /2)  by  two  orders  of magnitude.  We argue that several factors contribute to this improvement:

- 1. Recording  of  multiple  scattering  patterns  provides  much  more  information  on  the imaged object  for  the  retrieval  process  than  what  is  available  in  the  lens-generated single image for which the Abbe limit has been derived;
- 2. The deep learning process involving a neural network trained on a large data set creates a powerful and accurate deconvolution mechanism without using explicit information on the phase of the detected signals;
- 3. Sparsity of the object and prior knowledge about the object (dimer of unknown size and location) help the retrieval process, similarly to how sparsity helps ÔblindÕ compressed sensing techniques ( 17 );
- 4. Superoscillatory illumination ensures much higher sensitivity of the pattern of scattered light to small features of the imaged object than conventional illumination.

The last argument requires a more detailed comment. It shall be noted that superoscillatory fields contain zones of rapid phase gradient and high local wave vectors leading to high spatial resolution through Fourier connection between spatial and reciprocal space. Although this fact is reassuring, its full implication is difficult to analyze in the context of the multiple exposures and  the  neural  network  deconvolution  used  in  the  DSSI  technique.  Instead,  on  Fig.  4  we illustrate the sensitivity of the scattered field pattern on placing a small absorbing nanoparticle in the illuminating field. The nanoparticle, only λ /1000 in size, is positioned on the object plane at coordinate x0 (see Fig. 1 and Figs. 4e-f) and illuminated with coherent light of wavelength λ . The intensity of the scattered light is detected at a distance z = 10 λ from the nanoparticle at points with coordinates ( x, z =10 λ ). Maps (a) and (c) illustrate sensitivity of scattering to the presence  of  the  particle  in  the  illuminating  field  for  plane  wave  and  superoscillatory illumination, respectively. They show the normalized change of the intensity of scattered light (colormap, logarithmic scale) as a function of the particle position x0 on the object plane and the  detectorÕs  coordinate x .  Maps  (b)  and  (d)  illustrate  sensitivity  of  scattering  to  small displacements of the particle. They show the normalized change of the scattered field intensity (colormap, logarithmic scale) on displacing the particle with step of λ /2000 along the object plane  with  the  particle  initially  located  at x0 .  From  Fig.  4  it  follows  that  scattering  of  the superoscillatory  field  is  two  to  three  orders  more  sensitive  than  in  the  case  of  plane  wave illumination to the presence and repositioning of the nanoparticle, which we attribute to the presence of high intensity and phase gradients in the superoscillatory field.  In particular (see Fig 4c), placing the particle anywhere apart from the very narrow subwavelength singularity zone (black horizontally extended area indicated by green dotted line) results in strong change of intensity across the detector plane. Fig. 4d shows that when the nanoparticle is repositioned away from the singularity point in the object plane, a very narrow, deeply subwavelength zone is created on the detector plane where no change of intensity is taking place. These features can be used to accurately retrieve the particle position.

The DSSI reported here shall be compared with the superoscillatory imaging technique that uses  a subwavelength  intensity  hotspot  for  illumination  of  the  object.  The  image  is reconstructed point-by-point by scanning the hotspot against the object while the scattered light is  detected  with  a  lens  through  a  confocal  aperture  ( 24 ).  In  the  superoscillatory  imaging technique, the size of the superoscillatory hotspot determines the resolution of the technique ( 25 ).  Although, in principle, the superoscillatory hotspot can be arbitrary small, intensity in the  hotspot  rapidly  drops  with  its  size,  and  resolution  better  than λ /6  has  never  been experimentally  demonstrated.  As  we  have  shown  here,  the  resolution  of  DSSI  is  orders  of magnitude better than imaging based on superoscillatory illumination with confocal detection, which is explainable by the availability of additional information for the imaging process.

In practical terms, the main challenge in experimental implementation of Deeply Subwavelength Superoscillatory Imaging would be in creating reliable and trustworthy training sets for the neural network.  Such training sets can be generated by computer modelling and great care shall be needed to accurately match characteristics of the imaging apparatus to the model. Alternatively, the training set can be generated in situ of the microscope, which will require a large physical library of random objects to be generated and imaged.  Resolution will also be constrained by the signal to noise ratio at the detector. However, our results (see Fig. S3 in Supplementary Information) indicate a remarkable resilience of the method, where even in the case of 5% noise, a dimer can be imaged at a resolution of ~ λ /71 for the element size, ~ /77 for the gap, and ~ λ λ /92 for the position. Finally, an additional restriction is imposed by stability  and  the  precision  of  optomechanical  components,  which  will  have  to  be  in  the Angstrom scale (as is the case for atomic force microscopy).

In conclusion, we have introduced the new concept of Deeply Subwavelength Superoscillatory Imaging (DSSI), which employs artificial intelligence to retrieve, with resolution exceeding

λ /200,  parameters  of  a  physical  object  from  its  scattering  pattern  upon  superoscillatory illumination. Although so far the concept has been demonstrated for one-dimensional imaging, it can be extended to two- and three-dimensional objects, as well as objects of a priori unknown shape. The technique does not require labelling of the sample with luminescent materials nor intense  laser  illumination  and  is  resilient  to  noise.  The  technique  promises  far-reaching consequences across a number of disciplines, such as biomedical sciences, materials science and nanotechnology.

Acknowledgments. This work was supported by the Singapore Ministry of Education (Grant No.  MOE2016-T3-1-006),  the  Agency  for  Science,  Technology  and  Research  (A*STAR) Singapore (Grant No. SERC A1685b0005), the Engineering and Physical Sciences Research Council UK (Grants No. EP/N00762X/1 and No. EP/M0091221), and the European Research Council  (Advanced  grant  FLEET-786851).  T.P.  acknowledges  the  support  of  the  Chinese Scholarship Council (CSC No. 201804910540).

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Fig. 1. Deeply Subwavelength Superoscillatory Imaging (DSSI) schematics. The imaged object (a dimer A-B-C) is illuminated with a superoscillatory light field. The intensity profile of the diffraction pattern resulting from scattering of the superoscillatory light field on the imaged object is detected by the detector array. A number of different diffraction patterns are recorded when the illuminating field is scanned against the object. Left and right panels show maps of intensity and phase profiles of the illuminating field and indicate the presence of hotspots and phase singularities, where m indicates the winding number of the singularity.

![image](https://ac.marcodsn.me/arxiv-markdown-images/1908.00946v2-figure-e51d01bd-b079-425b-ae87-aac5505072dd.jpg)

Fig.  2. Deeply Subwavelength Superoscillatory Imaging of a dimer. The dimer consists  of  two elements with different sizes A and C separated by a gap (edge-to-edge) B (panel (a)). It is positioned in the object plane at distance D from the x =0 points of the object plane (see Fig. 1). Two different regimes  are  presented,  where  the  dimer  position  is  either known (fixed  at  D=0)  (panels  (b,c)),  or unknown (panels (d-f)). Panels (b, c) show the retrieved values of A, B and D presented against their actual values, when D is known. Solid blue and red lines correspond to the median of the true values under superoscillatory (blue squares) and plane wave illumination (red circles), while the red and blue colored  bands  indicate the corresponding  interquartile (IQR)  ranges  (see  also  Supplementary Information). In the case of unknown position, panels (d-f) show the retrieved values of A, B and D presented against their actual values. Retrieved values for size C are similar to size A.

![image](https://ac.marcodsn.me/arxiv-markdown-images/1908.00946v2-figure-46a3dc5e-1a63-48bc-b8d5-f85863ee4b3e.jpg)

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Fig 3.  Resolution of the Deeply Subwavelength Superoscillatory Imaging. IQRs of measured values of  the  dimer  parameters,  gap, B (a,d),  element  size, A (b,e),  and  position, D (c),  during  numerical imaging experiments with unknown (a-c) and known (d-e) dimer position. Red and blue colored regions correspond to plane wave and superoscillatory illumination, respectively, while red and blue solid lines mark the first and the third quartiles of the corresponding error distributions. The horizontal dotted lines indicate the average value of the IQRs over the range of the true values of the respective parameter. The vertical dotted lines in panels (a) and (b) indicate the parameter true value below which the network returns predominantly negative, non-physical values. (f) Dependence of resolution (in dimer gap B ) as a function of the dynamic range of the photodetector.

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Fig. 4. Sensitivity of far-field intensity  patterns  on  presence  and  position  of  absorbing nanoparticle. Plates (a) and (c) show normalized change of the scattered field intensity profile caused by  presence  of  the  nanoparticle. Plates  (b)  and  (d)  show  normalized  change  of  the  scattered  field intensity  profile  caused  by  shift  of  the  nanoparticle  on λ /2000  along x direction. Plates  (a)  and  (b) correspond to a plane wave illumination; plates (c) and (d) illustrate illumination with superoscillatory field. Maps (e) and (f) show intensity and phase profiles of the illuminating superoscillatory field, where light propagates along the positive z-axis.

![image](https://ac.marcodsn.me/arxiv-markdown-images/1908.00946v2-figure-a35ef86f-1e8a-4a8a-b4b1-c72fbdc32439.jpg)

## Supplementary Information for

## Unlabelled Far-field Deeply Subwavelength Superoscillatory Imaging (DSSI)

T. Pu, V. Savinov, G. Yuan, N. Papasimakis, N. I. Zheludev

Correspondence to: zheludev@soton.ac.uk

## Error evaluation

We quantify the error in the estimation of each of the four geometric parameters of the dimer (A,B,C,D) based on a large number (770,000) of scattering events. In each scattering event, the dimer parameters are selected in the range λ /500&lt;A,B,C&lt; λ and  λ /2&lt;D&lt; /2 λ according to a random  uniform  distribution.  We  consider  two  closely  related  but  distinct  approaches  of defining  errors  of  the  retrieval  process,  see  Fig.  S1.  In  both  cases,  a  retrieval  event  is represented by the true gap value of the measured parameter, e.g. B ,  and its retrieved value B+ B. δ

In the first approach, we examine the spread of measured values of the dimer parameter for a given  true  value  of  the  parameter   Here  we  define  bins  for  true  values  and  examine  the . distribution  of  retrieved  values, B+ δ B, and corresponding errors, δ B, within  each  bin . An example of the distribution is presented in Fig. S1a where the true gap value B is around λ /50. The distribution of the errors for the retrieval attempts can be characterized by the median value 𝛿𝐵 $ # and the corresponding interquartile range IQR R δ B, defined as the range between the second and third quartiles of the distribution containing 50% of all attempts. This procedure is repeated for all bins of true gap size, B . A similar procedure is followed for the dimer parameters A, C and D .

In the second approach, we examine the spread of true values of the dimer parameter for a given retrieved value of this parameter  Here we define the bins along the retrieved values and . examine the distribution of true values, B, and corresponding errors, δ B, within each bin  The . distribution is characterized by the median 𝛿𝐵 % # and IQR T δ B , see Fig. S1b. The corresponding resolution  is  defined  as IQR T δ B /2.  Again,  a  similar  procedure  is  followed  for  the  dimer parameters A, C and D .

Medians and IQRs calculated according to the first approach are presented in Fig. S2, while results presented in the main text are calculated according to the second approach, see Figs. 23 in the main text. From these graphs one can see that both approaches return similar systematic offsets and resolution powers.

## Deeply Subwavelength Superoscillatory Imaging through noise

Here we examine sensitivity of the DSSI method to noise. In a practical implementation of the method, noise can arise either as detection noise or due to unwanted scattering and interference effects. We model both of these effects by introducing an effective Ònoise fieldÓ, 𝐸' ,  at  the detector  plane,  which  takes  values  according  to  a  zero  mean  Gaussian  distribution  with standard deviation σ .  Thus, in the scenario of imaging a dimer, the total electric field at the detector plane will be the sum of the field, 𝐸( , scattered by the dimer and the effective noise field, 𝐸' .  The  corresponding  total  light  intensity  will  be: 𝐼 = |𝐸 ( +𝐸'| ,  or  equivalently 𝐼 = |𝐸 ( | -+|𝐸'| +2𝑅𝑒[𝐸(𝐸' ∗ ] .  The first term in this equation is the intensity of the field scattered by the dimer, the second term represents the detectorÕs noise, while the third term accounts for the interference effects between light scattered from the dimer and any unwanted scattering. Assuming 𝐸( ≫𝐸' ,  we quantify the noise level by the ratio 𝜂 = 6 789	(|&lt; = |) ,  where max(|𝐸( |) is the maximum value of the modulus of the electric field at the detector plane.

Figure S3 shows the effect of noise on the retrieval of the dimer geometrical parameters. The noise results in the increase of divergence (bias) of the median lines (Fig. S3a&amp;b) from the line of perfect imaging (black line in Figs. S3). In the case of 5% noise, substantial divergence occurs for A &lt; /77 and λ B &lt; /65, while for noise levels of 10%, the median diverges for λ A &lt; /45 λ and B &lt; /60. λ

The effects of noise on resolving power is presented in Figs. S3d-f. Here, increasing the noise level leads to gradual decrease of resolution. However, for all measured parameters resolution at 5% and 10% noise level remains at deeply subwavelength level, i.e. better than ~ λ /70 and ~ /55 correspondingly. This illustrates a remarkable resilience of the deconvolution process λ considering  that  we  account  for  the  interference  phase  related  effects  in  the  noise  without providing any phase information to the network.

Fig S1. Evaluation of imaging errors. Panels (a) and (b) illustrate the two different ways in which errors of measuring the dimer gap B can be defined, namely given a true parameter value (panel (a)) or a retrieved parameter value (panel (b)). The measurement events are placed in the bins of corresponding true value in panel (a) and corresponding retrieved value in panel (b). The panels show histograms of characteristic distributions of errors for B ~ λ /50. The solid black line marks the median ( 𝛿𝐵 $ , # ) of the error distribution. The interquartile ranges IQR R δ B and IQR T δ B are defined as the ranges between the corresponding first and third quartiles, which include 50% of the error values.

![image](https://ac.marcodsn.me/arxiv-markdown-images/1908.00946v2-figure-770d11ce-8717-4a8f-b3a8-4bdfdf936efd.jpg)

Fig S2. Imaging errors for dimer imaging . The retrieved values of the dimer parameter for a given true value of the parameters are presented . (a) Schematic of the dimer and its geometric parameters. Panels (b) and (c) show measurement results if location D of the dimer is known. Solid blue and red lines correspond to the median of the retrieved values under superoscillatory (blue squares) and plane wave  illumination  (red  circles),  while  the  red  and  blue  colored  bands  indicate  the  corresponding interquartile (IQR) ranges. In the case of unknown position of the dimer, panels (d) and (f) show the retrieved  values  of A , B and D against  their  actual  values.  Median  values  and  IQRs  are  calculated according to the first approach as described in the Supplemenetary Information.

![image](https://ac.marcodsn.me/arxiv-markdown-images/1908.00946v2-figure-53191e03-4d75-418e-b4bd-88ebc50d4dc6.jpg)

Fig S3. Resilience of Deeply Subwavelength Superoscillatory Imaging to noise. The figure shows the effects of different levels of noise 𝜂 on the retrieved dimer element size A (a,b), gap B (b,e), and position D (c,f). Panels (a-c) show the median of retrieved values for 𝜂 = 0% (red circles), 5% (blue triangles) and 10% (green squares). Red, blue, and green colored regions in panels (d), (e) and (f) show the  spread  (IQR)  of  errors  for 𝜂 =  0%,  5%,  and  10%,  respectively.  Median  values  and  IQRs  are calculated according to the second approach as described in Supplementary Information.

![image](https://ac.marcodsn.me/arxiv-markdown-images/1908.00946v2-figure-9ddb7bc9-f99b-4b6a-94f7-af990b6fe50b.jpg)

Table S1. Resolution under superoscillatory and plane wave illumination. The values in square brackets (for unknown position and under superoscillatory illumination) correspond to the resolution in the presence of 5% noise.

|                                     | Superoscillatory illumination       | Superoscillatory illumination   | Plane wave illumination   | Plane wave illumination   |
|-------------------------------------|-------------------------------------|---------------------------------|---------------------------|---------------------------|
|                                     | Unknown position                    | Known position                  | Unknown position          | Known position            |
| Resolution in dimer element size, A | 0.0133 λ ( λ /75) [0.0142 ( λ /71)] | 0.0045 λ ( λ /222)              | 0.0214 λ ( λ /47)         | 0.0064 λ ( λ /156)        |
| Resolution in dimer gap, B          | 0.0122 λ ( λ /82) [0.0130 ( λ /77)] | 0.0042 λ ( λ /238)              | 0.0192 λ ( λ /52)         | 0.0061 λ ( λ /164)        |
| Resolution in position, D           | 0.0111 λ ( λ /90) [0.0108 ( λ /92)] |                                 | 0.0297 λ ( λ /34)         |                           |
T. Pu V. Savinov G. Yuan N. Papasimakis N. I. Zheludev
Unlabelled Far-field Deeply Subwavelength Superoscillatory Imaging (DSSI)
Recently it was reported that deeply subwavelength features of free space
superoscillatory electromagnetic fields can be observed experimentally and used
in optical metrology with nanoscale resolution [Science 364, 771 (2019)]. Here
we introduce a new type of imaging, termed Deeply Subwavelength
Superoscillatory Imaging (DSSI), that reveals the fine structure of a physical
object through its far-field scattering pattern under superoscillatory
illumination. The object is reconstructed from intensity profiles of scattered
light recorded for different positions of the object in the superoscillatory
field. The reconstruction is performed with a convolutional neural network
trained on a large number of scattering events. We show that DSSI offers
resolution far beyond the conventional 'diffraction limit'. In modelling
experiments, a dimer comprising two subwavelength opaque particles is imaged
with a resolution exceeding ${\lambda}/200$.