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As the solvent having a hydroxyl group, alkylene glycol monoalkyl ether is preferred, and as the solvent not having a hydroxyl group, alkylene glycol monoalkyl ether carboxylate is preferred. 

[ 4] Basic Compounds 

It is preferred that the electron beam sensitive or extreme ultraviolet radiation-sensitive resin composition in the inven› tion contains a basic compound. 

The basic compound is preferably a nitrogen-containing organic basic compound. 

Usable compounds are not especially limited and, for example, compounds classified into the following (1) to (4) are preferably used. 

( 1) Compound Represented by the Fallowing Formula (BS-1) 

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In formula (BS-1 ), each of R$_{651 }$ independently represents any of a hydrogen atom, an alkyl group (straight chain or branched), a cycloalkyl group (monocyclic or polycyclic), an aryl group and an aralkyl group. However, not all R$_{651 }$repre› sent a hydrogen atom. 

The carbon atom number of the alky I group represented by R$_{651 }$ is not especially restricted and is generally 1 to 20, and preferably 1 to 12. 

The carbon atom number of the cycloalkyl group repre› sented by R$_{651 }$is not especially restricted and is generally 3 to 20, and preferably 5 to 15. 

The carbon atom number of the aryl group represented by R$_{651 }$ is not especially restricted and is generally 6 to 20, and preferably 6 to 10. Specifically a phenyl group and a naphthyl group are exemplified. 

The carbon atom number of the aralkyl group represented by R$_{651 }$is not especially restricted and is generally 7 to 20, and preferably 7 to 11. Specifically a benzyl group is exemplified. 

The hydrogen atom of each of the alkyl group, cycloalkyl group, aryl group or aralkyl group represented by R$_{651 }$may be substituted with a substituent. As the substituents, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, a hydroxyl group, a carboxyl group, an alkoxy group, an ary› loxy group, an alkylcarbonyloxy group and an alkyloxycar› bonyl group are exemplified. 

It is preferred that, in the compound represented by for› mula (BS-1 ), one alone of three R$_{651 }$ represents a hydrogen atom, or not all R$_{6}$ s $_{1 }$represent a hydrogen atom. 

As the specific examples of the compound represented by formula (BS-1), tri-n-butylamine, tri-n-pentylamine, tri-n› octylamine, tri-n-decylamine, triisodecyl-amine, dicyclo- hexylmethylamine, tetradecylamine, pentadecylamine, hexa› decylamine, octadecylamine, didecylamine, methyloctadecylamine, dimethylundecylamine, N,N-dim› ethy ldodecy !amine, methy ldioctadecy !amine, N,N-dibuty !a› niline, and N,N-dihexylaniline are exemplified. 

Further, in formula (BS-1 ), a compound in which at least one R$_{651 }$is an alkyl group substituted with a hydroxyl group is exemplified as a preferred embodiment. As the specific compounds, triethanolamine and N,N-dihydroxyethylaniline are exemplified. 

Further, the alkyl group represented by R$_{651 }$ may have an oxygen atom in the alkyl chain to form an oxyalkylene chain. As the oxyalky lene chain, -CH$_{2}$CH$_{2 }$0-is preferred. As the specific examples, tris(methoxyethoxyethyl)amine and the compounds disclosed in U.S. Pat. No. 6,040,112, column 3, line 60 and after, are exemplified. 

Further, as a preferred basic compound represented by formula (BS-1 ), a compound having an alkyl group in which at least one R is substituted with a hydroxyl group is exem› plified. Specifically, for example, triethanolamine and N,N- dihydroxyethylaniline are exemplified. 

As the basic compounds represented by formula (BS-1 ), for example, the following compounds are exemplified. 

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