content_image/914734.jpg content_image/914735.jpg content_image/914736.jpg content_image/914737.jpg content_image/914738.jpg content_image/914739.jpg content_image/914740.jpg content_image/914742.jpg content_image/914743.jpg content_image/914744.jpg content_image/914745.jpg
components becomes 3% by mass to 20% by mass. By doing this, the coating properties of the composition can be further improved. 

(E) Hydrophobic Resin 

The active light-sensitive or radiation-sensitive resin composition of the present invention may have a hydropho› bic resin (E) separately from the resin (A). 

The hydrophobic resin (E) preferably contains a group having a fluorine atom, a group having a silicon atom, or a hydrocarbon group having 5 or more carbon atoms, in order to be unevenly distributed on a film surface. These groups may be contained in the main chain of the resin or may be substituted in the side chain. Specific examples of the hydrophobic resin (E) will be described below. 

<img src='content_image/914734.jpg'>

<img src='content_image/914735.jpg'>

<img src='content_image/914736.jpg'>

<img src='content_image/914737.jpg'>

<img src='content_image/914738.jpg'>

<img src='content_image/914739.jpg'>

<img src='content_image/914740.jpg'>

<img src='content_image/914742.jpg'>

<img src='content_image/914743.jpg'>

<img src='content_image/914744.jpg'>

<img src='content_image/914745.jpg'>

-continued 

