content_image/898206.jpg content_image/898208.jpg content_image/898207.jpg content_image/898209.jpg
<img src='content_image/898206.jpg'>

[0073] Specific examples of the repeating unit represented by formula (A2) are set forth below, but the present inven› tion is not limited thereto. 

<img src='content_image/898208.jpg'>

<img src='content_image/898207.jpg'>

[0074] The resin (A) preferably further contains a repeat› ing unit represented by formula (A4). 

wherein R$_{2 }$ represents a hydrogen atom, a methyl group, a cyano group, a halogen atom or a perfluoro group having a carbon number of 1 to 4, 

[0075] R$_{3 }$ represents a hydrogen atom, an alkyl group, a halogen atom, an aryl group, an alkoxy group or an acyl group, n represents an integer of O to 4, and 

[0076] W represents a group incapable of decomposing under the action of an acid. 

[0077] W represents a group incapable of decomposing under the action of an acid (sometimes referred to as an "acid-stable group"), and specific examples thereof include a hydrogen atom, a halogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, an aryl group, an acyl group, an alkylamido group, an arylamidomethyl group and an arylamido group. The acid stable group is preferably an acyl group or an alkylamido group, more preferably an acyl group, an alkylcarbonyloxy group, an alkyloxy group, a cycloalkyloxy group or an aryloxy group. 

<img src='content_image/898209.jpg'>

