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[0096] Examples of the monomer from which the recur› ring units having an acid labile group of formula (AL-3) are derived include (meth)acrylates having a furandiyl, tetrahy› drofurandiyl or oxanorbornanediyl group as represented by the following formula (AL-3)-22. 

[0097] In formula (AL-3)-22, RA is as defined above. RLc1 2 and RLc1 3 are each independently a C$_{1 }$-C$_{10 }$hydrocar› byl group, or RLc1 2 and RLc1 3 , taken together, may form an aliphatic ring with the carbon atom to which they are attached. RLc1 4 is furandiyl, tetrahydrofurandiyl or oxanor- 

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