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In the formulas, X’ represents a tertiary alkyl ester-type acid dissociable, dissolution inhibiting group; Y represents a lower alkyl group of 1 to 5 carbon atoms or an aliphatic cyclic group; n represents an integer of 0 to 3; Y 2 represents a divalent linking group ( excluding divalent hydrocarbon groups which may have a substituent); R is the same as defined above; and each ofR 1 ’ and R 2 ’ independently repre› sents a hydrogen atom or a lower alkyl group of 1 to 5 carbon atoms. 

[0160] Examples of the tertiary alkyl ester-type acid disso› ciable, dissolution inhibiting group for X’ include the same tertiary alkyl ester-type acid dissociable, dissolution inhibit› ing groups as those described above for X 1 . 1 2 

[0161] As R ’, R ’, n and Y are respectively the same as defined for R 1 ’, R 2 ’, n and Yin general formula (p 1) described above in connection with the "acetal-type acid dissociable, dissolution inhibiting group". 2 

[0162] As examples of Y , the same groups as those described above forY 2 in general formula (al-O-2) can be given. 

[0163] Specific examples of structural units represented by general formula (al-1) to (al-4) are shown below. 

-continued 

(al-2) 

(al-3) 

(al-4) 

[0164] In the formulas shown below, Ra represents a hydro› gen atom, a methyl group or a trifluoromethyl group. 

[Chemical Formula 17] 

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(al-1-1) 

(al-1-2) 

(al-1-3) 

(al-1-4) 

(al-1-5) 

(al-1-6) 

