content_image/928639.jpg content_image/928638.jpg content_image/928635.jpg content_image/928633.jpg content_image/928634.jpg content_image/928637.jpg content_image/928631.jpg content_image/928632.jpg
<img src='content_image/928639.jpg'>

is bonded directly to the norbornene backbone. 

The norbornene derivative is one having a fluorine-con- taining alcohol structure represented by the formula (8): 

<img src='content_image/928638.jpg'>

wherein Z $^{4 }$is the same or different and each is: 

<img src='content_image/928635.jpg'>

in which R:t4 is the same or different and each is a fluorine› containing alkyl group having 1 to 10 carbon atoms or a fluorine-containing alkyl group which has 1 to 10 carbon atoms and ether bond, R $^{3 }$is Hor a hydrocarbon group having 1 to 10 carbon atoms; Y is the same or different and each is H, F, Cl, an alky 1 group having 1 to 10 carbon atoms or a fluorine› containing alkyl group which has 1 to 10 carbon atoms and may have ether bond; R is the same or different and each is H or an alkyl group having 1 to 10 carbon atoms; n is 0 or an integer of from 1 to 5; mis an integer of from 1 to 5; nl is an integer of from 1 to 5; m +nl =6. 

In the norbornene derivative may be contained one or a plurality of moieties Z $^{4 }$of fluorine-containing alcohol, and it is generally preferable that one or two moieties are bonded. Examples thereof are: 

<img src='content_image/928633.jpg'>

wherein Y, Rf\ R 3 , Rand n are as defined in the formula (8). 

In those norbomene derivatives having fluorine-containing alcohol structure, it is preferable that Y is selected from those of the above-mentioned norbornene derivatives having ketone structure, and particularly preferably is F, a fluorine- 

<img src='content_image/928634.jpg'>

containing alkyl group or a fluorine-containing alkyl group having ether bond because transparency can be enhanced when used for a resist. 

For example, preferred are norbornene derivatives repre› sented by the formula (18): 

<img src='content_image/928637.jpg'>

wherein Y1, Y$^{2 }$and Y$^{3 }$are the same or different and each is H, F, Cl, an alkyl group having 1 to 10 carbon atoms or a fluorine› containing alkyl group which has 1 to 10 carbon atoms and may have ether bond; Rf\ R 3 , R and n are as defined above. 

In the norbomene derivatives of the formula (18), it is preferable that Y$^{1 }$and Y$^{2 }$are H and Y$^{3 }$is F or CF 3 , or Y$^{1 }$and Y$^{2 }$are F andY$^{3 }$is For CF$_{3}$ . 

Examples of the norbomene derivative having fluorine- containing alcohol structure of the present invention are: 

<img src='content_image/928631.jpg'>

<img src='content_image/928632.jpg'>

