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1 to 4 carbon atoms), a halogen atom, a hydroxyl group, an alkoxy group (having 1 to 4 carbon atoms), a carboxy group, and an alkoxycarbonyl group (having 2 to 6 carbon atoms), and a group having 8 or less carbon atoms is preferable. 

[0207] The content of the sum of the repeating units having acid-decomposable groups is preferably 20 to 90 mo! %, more preferably 25 to 85 mo! %, and even more preferably 30 to 80 mo! % with respect to the all repeating units in the resin (A). 

[0208] Specific examples of the repeating unit having an acid-decomposable group are provided below, but the pres› ent invention is not limited thereto. 

[0209] In the specific examples, Rx and Xa$_{1 }$ each inde› pendently represent a hydrogen atom, CH$_{3}$ , CF $_{3}$ , or CH$_{2}$0H. Rxa and Rxb each represent an alkyl group having 1 to 4 carbon atoms. Z represents a substituent including a polar group, and in a case where there are a plurality of Z’s, Z’s each independently represent a substituent including a polar group. p represents 0 or a positive integer. Examples of the substituent including a polar group represented by Z include a linear or branched alkyl group having a hydroxyl group, a cyano group, an amino group, an alkylamido group, or a sulfonamide group, or a cycloalkyl group, and the substitu› ent is preferably an alkyl group having a hydroxyl group. The branched alkyl group is more preferably an isopropyl group. 

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