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[0221] Specific examples of the constitutional unit repre› sented by Formula (al-2) are shown below. 

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[0222] The constitutional unit (al) included in the com› ponent (Al) may be used alone or two or more kinds thereof. 

[0223] Since the lithography characteristics (the sensitiv› ity, the shape, and the like) are easily improved using electron beams or EUV, a constitutional unit represented by Formula (al-1) is preferable as the constitutional unit (al). 

[0224] Further, from the viewpoint of reducing the rough› ness, an acid dissociable group represented by Formula (al-r2-11) or (al-r2-21) is preferable as the acid dissociable group as Ra 1 in Formula (al-1). 

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<img src='content_image/889491.jpg'>

