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hydroxymethyl group. Specific examples and preferable examples of the monovalent organic group represented by R$_{11 }$ include the same as those described as R$_{11 }$ in General Formula (AI). 

[0183] The alkyl group represented by R$_{2 }$ may be linear or branched, and may have a substituent. 

[0184] The cycloalkyl group represented by R$_{2 }$ may be monocyclic or polycyclic, and may have a substituent. 

[0185] R$_{2 }$ is preferably an alkyl group, more preferably an alkyl group having 1 to 10 carbon atoms, and still more preferably an alkyl group having 1 to 5 carbon atoms, and examples thereof include a methyl group and an ethyl group. 

[0186] R represents an atomic group necessary to form an alicyclic structure together with a carbon atom. The alicyclic structure formed by R together with a carbon atom is prefer› ably a monocyclic alicyclic structure, and the alicyclic struc› ture preferably has 3 to 7 carbon atoms, and more preferably 5 or 6 carbon atoms. 

[0187] R$_{3 }$ is preferably a hydrogen atom or a methyl group, and more preferably a methyl group. 

[0188] The alkyl group represented by R$_{4}$ , Rs, or R$_{6 }$may be linear or branched, and may have a substituent. The alkyl group is preferable an alkyl group having 1 to 4 carbon atoms such as a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, or a t-butyl group. 

[0189] The cycloalkyl group represented by R$_{4}$ , Rs, or R$_{6 }$ may be monocyclic or polycyclic, and may have a substituent. The cycloalkyl group is preferably a monocyclic cycloalkyl group such as a cyclopentyl group or a cyclohexyl group, or a polycyclic cycloalkyl group such as a norbornyl group, a tricyclodecanyl group, a tetracyclodecanyl group, or an ada› mantyl group. 

[0190] Examples of the substituent which each group described above can have include the same as the substituents described as the substituent which each group in General Formula (AI) can have. 

[0191] The acid decomposable resin is more preferably a resin having the repeating unit represented by General For› mula (I), and still more preferably a resin having the repeating unit represented by General Formula (I) or the repeating unit represented by General Formula (II), as the repeating unit represented by General Formula (AI). 

[0192] In addition, in another aspect, the acid decompos› able resin is more preferably a resin including at least two types ofrepeating units represented by General Formula (I), as the repeating unit represented by General Formula (AI). In the case of including two or more types of repeating units represented by General Formula (I), both a repeating unit in which the alicyclic structure formed by R together with a carbon atom is a monocyclic alicyclic structure and a repeat› ing unit in which the alicyclic structure formed by R together with a carbon atom is a polycyclic alicyclic structure are preferably included. The monocyclic alicyclic structure pref› erably has 5 to 8 carbon atoms, more preferably 5 or 6 carbon atoms, and particularly preferably 5 carbon atoms. The poly› cyclic alicyclic structure is preferably a norbornyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, or an adamantyl group. 

[0193] The repeating unit having an acid-decomposable group contained in the resin (A) may be one type, or two or more types thereof may be used in combination. In the case of being used in combination, specific examples disclosed in 

paragraph "0287" of US2012/0135348Al can be used, but the present invention is not limited thereto. 

[0194] In one aspect, the resin (A) preferably contains a repeating unit having a cyclic carbonic acid ester structure. The cyclic carbonic acid ester structure is a structure having a ring including a bond represented by -0----C( =0 )-0-as an atom group configuring a ring. The ring including a bond represented by -0----C(=0)-0- as an atom group con› figuring a ring is preferably a 5- to 7-membered ring, and most preferable a 5-membered ring. Such a ring may be condensed with another ring to form a condensed ring. 

[0195] The resin (A) preferably contains a repeating unit having at least one type of a lactone structure and a sultone ( cyclic sulfonic acid ester) structure. 

[0196] As the lactone group or the sultone group, any group can be used as long as the group has a lactone structure or a sultone structure, and the group preferably has a lactone structure or a sultone structure having a 5- to 7-membered ring, and another ring structure is preferably condensed in a form of forming a bicyclo structure or a spiro structure in a lactone structure or a sultone structure having a 5- to 7-mem› bered ring. The group more preferably has a repeating unit having a lactone structure or a sultone structure represented by any one of General Formulas (LCl-1) to (LCl-17) dis› closed in paragraph "0318" ofUS2012/0135348Al and the following General Formulas (SLl-1) and (SLl-2). In addi› tion, a lactone structure or a sultone structure may be directly bonded to the main chain. As the lactone structure or sultone structure, (LCl-1), (LCl-4), (LCl-5), or (LCl-8) is prefer› able, and (LCl-4) is more preferable. LWR and development defect are decreased by using a specific lactone structure or sultone structure. 

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LCl-1 

LCl-2 

LCl-3 

LCl-4 

