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[1171] The obtained acid generator (B14) was analyzed by $^{1}$H-NMR and $^{19}$F-NMR. $^{1}$H-NMR (DMSO-d6, 400 MHz): Ii (ppm)=0.87 (t, 3H, Ha), 1.29 (m, 4H, He, Hd), 1 .45 (m, 2H, Hd), 1.65-1.95 (m, 17H, He, Hk), 2.33 (s, 6H, Hg), 3.83 (t, 2H, Hf), 4.54 (t, 2H, Hj), 7.59 (s, 2H, Hh), 7.73-7.85 (m, l0H, Hi) 

[1172] $^{19}$F-NMR (DMSO-d6, 400 MHz): Ii (ppm)=-111.5 ( t, 2F, Fa) (potassium nonafluoro-n-butanesulfonate was used as an internal standard, and the peak of hexafluorobenzene was regarded as -160 ppm.) 

[1173] From the results shown above, it was confirmed that the acid generator (B14) had a structure shown below. Fur› thermore, from the results of $^{19}$F-NMR analysis, it was con› firmed that the purity was 99.7 wt%. 

[Chemical Formula 115] 

<img src='content_image/946932.jpg'>

[1174] (i) Synthesis of Compound (8) 

[1175] 21.7 g of a compound (6) (Br:Cl=85.2:14.2) was dissolved in 108.5 g of acetonitrile, and 6.00 g of triethy› lamine was further added to obtain a uniform solution. Then, 57 .6 g of a 25 wt % acetonitrile solution of a compound (7) was dropwise added thereto, and a reaction was effected at a reflux temperature for 2 hours. Subsequently, acetonitrile was removed, and the resultant was dissolved in 300 g of pure water, followed by washing twice with 150 g of a mixed solvent containing n-hexane and TBME (1: 1 wt/wt). 

[1176] Thereafter, 300 g of methylene chloride and 30 g of sodium chloride were added and stirred. The organic phase 

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## Acid-Generator Synthesis Example 6 

## Synthesis of Acid Generator (B 15) 

was collected, and washed once with 150 g of a 10% aqueous solution of sodium chloride and once with pure water. Then, the organic phase was concentrated and solidified, thereby obtaining 20.9 g of a compound (8) in the form of a white solid (Br:Cl=15.4:84.6). 

[Chemical Formula 116] 

<img src='content_image/946929.jpg'>

[1177] (ii) Synthesis of Acid Generator (B 15) 

[1178] 5.00 g of the compound (8) (Br:Cl=15.4:84.6) was mixed with 3 .25 g ofa compound (2), and 50.0 g of pure water and 50.0 g of methylene chloride were added thereto, fol› lowed by stirring at room temperature for 4 hours. Thereafter, the organic phase was collected, and washing was conducted twice with 25.0 g of a 1 % aqueous hydrochloric acid solution and 4 times with 25 .0 g of pure water. Then, the organic phase was concentrated and solidified, thereby obtaining 5.00 g of an acid generator (B 15) in the form of a white solid. 

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