4-n-butoxynaphthyl-1-thiacyclopentanium, and 2-n-butox› ynaphthyl-1-thiacyclopentanium. Exemplary sulfonates include trifluoromethanesulfonate, pentafluoroethane› sulfonate, heptafluoropropanesulfonate, nonafluoro butane› sulfonate, tridecafluorohexanesulfonate, perfluoro( 4-ethyl- cyclohexane )sulfonate, heptadecafluorooctanesulfonate, 2,2, 2-trifluoroethanesulfonate, pentafluorobenzenesulfonate, 4-(trifluoromethyl)benzenesulfonate, 4-fluorobenzene› sulfonate, mesitylenesulfonate, 2,4,6-triisopropylbenzene› sulfonate, toluenesulfonate, benzenesulfonate, 4-(p-toluene- sulfonyloxy)benzenesulfonate, 6-(p-toluenesulfonyloxy) naphthalene-2-sulfonate, 4-(p-toluenesulfonyloxy) naphthalene-1-sulfonate, 5-(p-toluenesulfonyloxy) naphthalene-1-sulfonate, 8-(p-toluenesulfonyloxy) naphthalene-1-sulfonate, naphthalenesulfonate, camphorsulfonate, octanesulfonate, dodecy lbenzene› sulfonate, butanesulfonate, methanesulfonate, 1, l-difluoro- 2-naphthylethanesulfonate, 1, 1,2,2-tetrafluoro-2-(norbor› nan-2-yl)ethanesulfonate, 1, 1,2,2-tetrafluoro-2-(tetracyclo [ 6.2.1.1 3 • $^{6 }$.02 • $^{7}$]dodec-3-en-8-yl)ethanesulfonate, 2-benzoy loxy-1, 1,3 ,3 ,3-pentafluoropropanesulfonate, 1, 1,3, 3 ,3-pentafluoro-2-( 4-pheny lbenzoy loxy )propanesulfonate, 1, 1,3 ,3 ,3-pentafluoro-2-pivaloy loxypropanesulfonate, 2-cy› clohexanecarbony loxy-1, 1,3 ,3 ,3-pentafluoropropane- sulfonate, 1, 1,3,3,3-pentafluoro-2-furoyloxypropane- sulfonate, 2-naphthoy loxy-1, 1,3 ,3 ,3- pentafluoropropanesulfonate, 2-( 4-tert-buty lbenzoy loxy )-1, 1,3,3,3-pentafluoropropanesulfonate, 2-(1- adamantanecarbony loxy )-1, 1,3 ,3 ,3- pentafluoropropanesulfonate, 2-acety loxy-1, 1,3 ,3 ,3- 1, 1,3 ,3 ,3-pentafluoro-2- 1, 1,3,3,3-pentafluoro-2- 1,1-difluoro-2- pentafluoropropanesulfonate, hydroxypropanesulfonate, tosyloxypropanesulfonate, tosyloxyethanesulfonate, adamantanemethoxycarbonyldifluoromethanesulfonate, 1-(3-hydroxymethyladamantane )methoxycarbonyldifluo› romethanesulfonate, methoxycarbonyldifluo› romethanesulfonate, l-(hexahydro-2-oxo-3,5-methano-2H› cyclopenta[b ]furan-6-yloxy-carbonyl) difluoromethanesulfonate, and 4-oxo-1- adamanty loxycarbony ldifluoromethanesulfonate. Exemplary bis(substituted alkylsulfonyl)imides include bis ( trifluoromethy lsulfony l)imide, bis(pentafluoroethy lsulfo- ny l)imide, bis(heptafluoropropylsulfonyl)imide, and per› fluoro(l ,3-propylenebissulfonyl)imide. A typical tris (substituted alkylsulfonyl)methide is tris (trifluoromethylsulfonyl)methide. Sulfonium salts based on combination of the foregoing examples are included. 

Iodonium salts which can be used herein include those described in US 2008153030 (JP-A 2008-158339, paragraph [0206]). Iodonium salts are salts of iodonium cations with sulfonates, bis(substituted alkylsulfonyl)imides and tris(sub› stituted alkylsulfonyl)methides. Exemplary iodonium cat› ions are aryliodonium cations including diphenyliodinium, bis( 4-tert-butylphenyl)iodonium, 4-tert-butoxyphenylphe- nyliodonium, and 4-methoxyphenylphenyliodonium. Exem› plary sulfonates include pentafluoroethylperfluorocy› clohexanesulfonate, 2,2,2-trifluoroethanesulfonate, pentafluoro benzenesulfonate, 4-trifluoromethy lbenzene› sulfonate, and 4-fluorobenzenesulfonate. Exemplary bis( sub- stituted alkylsulfonyl)imides include bistrifluoromethylsul› fonylimide, bispentafluoroethylsulfonylimide, bisheptafluoropropylsulfonylimide, and perfluoro-1,3-pro› pylenebissulfonylimide. A typical tris(substituted alkylsulfo› nyl)methide is tristrifluoromethylsulfonylmethide. Iodonium salts based on combination of the foregoing examples are included. 

Sulfonyldiazomethane compounds which can be used herein include those described in U.S. Pat. No. 7,498,126 (JP-A 2007-333933, paragraph [0073]). Exemplary sulfonyl› diazomethane compounds include bissulfonyldiazomethane compounds and sulfonylcarbonyldiazomethane compounds such as bis( ethylsulfonyl)diazomethane, bis(l-methylpro- py lsulfony l)diazomethane, bis(2-methy lpropy lsulfony I )dia› zomethane, bis( 1, 1-dimethylethy lsulfony I )diazomethane, bis(cyclohexylsulfonyl)diazomethane, bis(perfluoroisopro› pylsulfonyl)diazomethane, bis(phenylsulfonyl)diaz› omethane, bis( 4-methylphenylsulfonyl)diazomethane, bis(2, 4-dimethylphenylsulfonyl)diazomethane, bis( 4- acetyloxyphenylsulfonyl)diazomethane, bis( 4- methanesulfonyloxyphenylsulfonyl)diazomethane, bis( 4-( 4- toluenesulfonyloxy)phenylsulfonyl)diazomethane, bis(2- naphthylsulfonyl )diazomethane, 4-methylphenylsulfonylbenzoyldiazomethane, tert-butylcar› bonyl-4-methylphenylsulfonyldiazomethane, 2-naphthylsul› fony lbenzoy ldiazomethane, 4-methy lpheny lsulfony 1-2- naphthoyldiazomethane, methylsulfonylbenzoyldiazomethane, and tert-butoxycarbo› ny 1-4-methy lphenylsulfony ldiazomethane. 

N-sulfonyloxyimide photoacid generators which can be used herein include those described in U.S. Pat. No. 7,498, 126 (JP-A 2007-333933, paragraph [0074]). N-sulfonyloxy› dicarboxyimide photoacid generators include combinations of imide skeletons with sulfonates. Exemplary imide skel› etons are succinimide, naphthalenedicarboxyimide, phthal› imide, cyclohexyldicarboxyimide, 5-norbomene-2,3-dicar- boxyimide, and 7-oxabicyclo[2.2.1]-5-heptene-2,3- dicarboxyimide. Exemplary sulfonates include trifluoromethanesulfonate, pentafluoroethanesulfonate, hep› tafluoropropanesulfonate, nonafluorobutanesulfonate, dode› cafluorohexanesulfonate, pentafluoroethylperfluorocy- clohexanesulfonate, heptadecafluorooctanesulfonate, 2,2,2- trifluoroethanesulfonate, pentafluorobenzenesulfonate, 4-trifluoromethylbenzenesulfonate, 4-fluorobenzene› sulfonate, mesity lenesulfonate, 2,4, 6-triisopropy lbenzene- sulfonate, toluenesulfonate, benzenesulfonate, naphthalene› sulfonate, camphorsulfonate, octanesulfonate, dodecylbenzenesulfonate, butanesulfonate, methane- sulfonate, 1,1-difluoro-2-naphthyl-ethanesulfonate, 1,1,2,2- tetrafluoro-2-(norbornan-2-yl)ethanesulfonate, and 1,1,2,2- tetrafluoro-2-(tetracyclo[ 4.4.0.1 2 • $^{5 }$.l 7•$^{10}$]dodec-3-en-8-yl) ethanesulfonate. 

Suitable O-arylsulfonyloxime compounds and O-alkylsul› fonyloxime compounds (oxime sulfonates) include photo› acid generators in the form of glyoxime derivatives; photo› acid generators in the form of oxime sulfonates with a long conjugated system separated by thiophene or cyclohexadi› ene; oxime sulfonates having an electron withdrawing group such as trifluoromethyl incorporated for increased stability; oxime sulfonates using phenylacetonitrile or substituted acetonitrile derivatives; and bisoxime sulfonates. Photoacid generators in the form of glyoxime derivatives which can be used herein include those described in JP-A 2006-178317, paragraph [0131]. Suitable glyoxime deriva› tives include bis-O-(p-toluenesulfonyl)-a-dimethylgly› oxime, bis-O-(p-toluenesulfonyl)-a-diphenylglyoxime, bis› O-(p-toluenesulfonyl)-a-dicyclohexylglyoxime, bis-O-(p› toluenesulfonyl)-2,3-pentanedionedioxime, bis-O-(p- toluenesulfonyl)-2-methyl-3,4-pentanedionedioxime, bis-O- (n-butanesulfonyl)-a-dimethylglyoxime, bis-O-(n- butanesulfonyl)-a-diphenylglyoxime, bis-O-(n- butanesulfonyl)-a-dicyclohexylglyoxime, bis-O-(n- butanesulfonyl)-2,3-pentanedioneglyoxime, bis-O-(n- butanesulfonyl)-2-methyl-3,4-pentanedioneglyoxime, bis- 

