The "organic compound having a molecular weight of 500 or more" which can be used as a base component is broadly classified into non-polymers and polymers. 

In general, as a non-polymer, any of those which have a molecular weight in the range of 500 to less than 4,000 is used Hereafter, a non-polymer having a molecular weight in the range of 500 to less than 4,000 is referred to as a low molecu› lar weight compound. 

As a polymer, any of those which have a molecular weight of 1,000 or more is generally used. Hereafter, a polymer having a molecular weight of 1,000 or more is referred to as a polymeric compound. With respect to a polymeric com› pound, the "molecular weight" is the weight average molecu- lar weight in terms of the polystyrene equivalent value deter- mined by gel permeation chromatography (GPC). Hereafter, a polymeric compound is frequently referred to simply as a "resin". 

<Component (A’)> 

[Component (Al’)] 

The polymeric compound (Al’) (hereafter, referred to as "component (Al’)") includes a structural unit (a5-l) repre› sented by the aforementioned general formula ( a5- l ), a struc› tural unit (a0-1) represented by the aforementioned general formula (a0-1) and a structural unit (a0-2) that generates acid upon exposure. 

The component (Al’) may include a structural unit (al) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group, as well as the aforementioned structural units (a5-l), (a0-1) and (a0-2). 

The component (Al’) may further include a structural unit (a2) derived from an acrylate ester containing a lactone-con› taining cyclic group. 

The component (Al’) may further include a structural unit (a3) derived from an acrylate ester containing a polar group› containing aliphatic hydrocarbon group. 

(Structural Unit (a5-l)) 

The structural unit ( a5- l) is a structural unit represented by the aforementioned general formula (a5-l). 

In general formula (a5-l), R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms. 

As the alky I group of 1 to 5 carbon atoms represented by R, a linear or branched alkyl group is preferable, and specific 45 examples include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group and a neopentyl group. 50 

The halogenated alkyl group of 1 to 5 carbon atoms repre- sented by R is a group in which part or all of the hydrogen atoms of the aforementioned alkyl group of 1 to 5 carbon atoms have been substituted with halogen atoms. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom, and a fluorine atom is particularly desirable. 

As R, a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a fluorinated alkyl group of 1 to 5 carbon atoms is preferable, and a hydrogen atom or a methyl group is particu- larly desirable in terms of industrial availability. 

In general formula (a5-l), a represents an integer of0 to 4, preferably 0 or 1, and most preferably 0 from an industrial viewpoint. 

Further, a in general formula (a5-l) may be the same or different from a in general formula ( a0-1) described later or a in general formula (a0-2’) described later. 

In general formula ( a5-l ), examples of the substituent rep› resented by Rs include a halogen atom, an alkyl group of 1 to 5 carbon atoms and a halogenated alkyl group ofl to 5 carbon atoms. 

Examples of the halogen atom for Rs include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom, and a fluorine atom is preferable. 

Examples of the alkyl group of 1 to 5 carbon atoms repre› sented by Rs include the same alkyl group of 1 to 5 carbon atoms as those described above for R. 

Examples of the halogenated alkyl group of 1 to 5 carbon atoms represented by Rs include the same halogenated alkyl group of 1 to 5 carbon atoms as those described above for R, and a fluorinated alkyl group is particularly desirable. 

When a represents 1, the substitution position of Rs may be any of a-position, m-position or p-position. 

When a represents 2, a desired combination of substitution positions can be used, and the plurality of Rs may be the same or different from each other. 

Further, Rs in general formula (a5-l) may be the same or different from Rs in general formula ( a0-1) described later or Rs in general formula (a0-2’) described later. 

As the structural unit ( a5-l ), one type of structural unit may be used alone, or two or more types of structural units may be used in combination. 

In the component (Al’) the amount of the structural unit (a5-l) based on the combined total of all structural units constituting the component (Al’) is preferably 30 to 90 mo! %, more preferably 50 to 90 mo! %, and still more preferably 60 to 85 mo! %. 

By ensuring the above-mentioned range, an excellent con› trast can be obtained, and lithography properties are improved. 

(Structural Unit (a0-1)) 

The structural unit ( a0-1) is a structural unit represented by the aforementioned general formula (a0-1). 

In general formula ( a0-1 ), R is the same as defined for R in general formula (a5-l). 

In general formula ( 4-1 ), a and Rs are respectively the same as defined for a and Rs in general formula (a5-l), and may be the same or different from a and Rs in the aforementioned general formula (a5-l) or a and Rs in general formula (a0-2’) described later. 

In general formula (a0-1), R $^{7 }$represents a hydrogen atom or an alky I group ofl to 5 carbon atoms. Examples of the alky I group of 1 to 5 carbon atoms represented by R 7 include the same alkyl group of 1 to 5 carbon atoms as those described above for Ritz general formula ( a5-l ), and a hydrogen atom or a methyl group is preferable. 

Further, R $^{7 }$may be the same or different from R $^{7 }$in general formula (a0-2’) described later. 1 

In general formula (a0-1), R represents a hydrocarbon group of at least 10 carbon atoms which may have a substitu› ent. 

A hydrocarbon "has a substituent" means that part or all of the hydrogen atoms within the hydrocarbon group is substi› tuted with groups or atoms other than hydrogen. 

The hydrocarbon group may be either an aliphatic hydro› carbon group or an aromatic hydrocarbon group. An "ali› phatic hydrocarbon group" refers to a hydrocarbon group that has no aromaticity. 

The aliphatic hydrocarbon group may be saturated or unsaturated. In general, the aliphatic hydrocarbon group is preferably saturated. 

Specific examples of the aliphatic hydrocarbon group include a linear or branched aliphatic hydrocarbon group, an 

