content_image/901576.jpg
group, and more preferably an adamantylene group, a nor› bomylene group, a cyclohexylene group, a cyclopentylene group, a tetracyclododecanylene group, or a tricyclodecan› ylene group. 

[0351] The non-aromatic hydrocarbon group represented by R$_{1 }$and/or R$_{2 }$may have a substituent.As the substituent, an alkyl group having 1 to 4 carbon atoms, a halogen atom, a hydroxyl group, an alkoxy group having 1 to 4 carbon atoms, a carboxyl group, and an alkoxycarbonyl group having 2 to 6 carbon atoms are exemplified. Each of these alkyl group, alkoxy group and alkoxycarbonyl group may further have a substituent. As such further substituent, e.g., a hydroxyl group, a halogen atom and an alkoxy group are exemplified. 

[0352] L$_{1 }$ represents a linking group represented by for› mula -COO-, ---OCO-, -CONH-, ---0-, -Ar-, -SO$_{3}$-, or -SO$_{2}$NH-, wherein Ar represents a divalent aromatic ring group. L$_{1 }$preferably represents a linking group represented by --COO-, -CONH-or -Ar-, and more preferably a linking group represented by -COO- or -CONH-. 

[0353] R represents a hydrogen atom or an alkyl group. The alkyl group may be a straight chain or a branched chain. The carbon atom number of the alkyl group is preferably 1 to 6, and more preferably 1 to 3. R preferably represents a hydro› gen atom or a methyl group, and more preferably a hydrogen atom. 

[0354] R$_{0 }$ represents a hydrogen atom or an organic group. As the organic group, e.g., an alkyl group, a cycloalkyl group, an aryl group, an alkynyl group and an alkenyl group are exemplified. R$_{0 }$ preferably represents a hydrogen atom or an alkyl group, and more preferably a hydrogen atom or a methyl group. 

[0355] L$_{3 }$ represents an (m+2)-valent linking group. That is, L$_{3 }$ represents a trivalent or higher linking group. As such linking groups, for example, corresponding groups in the later-described specific examples are exemplified. 

[0356] RL represents an (n+ 1 )-valent linking group. That is, RL represents a divalent or higher linking group. As such linking groups, for example, an alkylene group, a cycloalky› lene group, and corresponding groups in the later-described specific examples are exemplified. RL may be bonded to each other or bonded to Rs to form a cyclic structure. 

[0357] Rs represents a substituent. As the substituents, e.g., an alkyl group, an alkenyl group, an alkynyl group, an aryl group, an alkoxy group, an acyloxy group, an alkoxycarbonyl group and a halogen atom are exemplified. 

[0358] n represents an integer of 1 or more, preferably an integer of 1 to 3, and more preferably 1 or 2. When n is 2 or higher, it becomes possible to further improve contrast of dissolution in a developer containing an organic solvent. Accordingly, limiting resolution and roughness characteris› tics can further be improved by the above constitution. 

[0359] m represents an integer of 1 or more, preferably 1 to 3, and more preferably 1 or 2. 

[0360] 1 represents an integer of0 or more, and preferably 0 or 1. 

[0361] p represents an integer of0 to 3. 

[0362] The specific examples of the repeating units having a group capable of decomposing by the action of an acid to generate an alcoholic hydroxyl group are shown below. In the specific examples, Ra and OP are respectively the same with those in formulae (I-1) to (I-3). When two or more OP’s are bonded to each other to form a ring, the corresponding cyclic structure is inscribed as "O-P-O" for conveniences’ sake. 

<img src='content_image/901576.jpg'>

