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Preferable examples of the oxime sulfonate-based acid generator include compounds represented by general formula (B-2) or (B-3) shown below. 

[Chemical Formula 98] 

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In the formula (B-2), R$^{33 }$represents a cyano group, an alkyl group having no substituent or a halogenated alkyl group; R 34 represents an aryl group; and R$^{35 }$represents an alkyl group having no substituent or a halogenated alkyl group. 

[Chemical Formula 99] 

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In the formula (B-3), R$^{36 }$represents a cyano group, an alkyl group having no substituent or a halogenated alkyl group; R 37 represents a divalent or trivalent aromatic hydrocarbon group; R$^{38 }$represents an alkyl group having no substituent or a halogenated alkyl group; and p" represents 2 or 3. 

In general formula (B-2), the alkyl group having no sub› stituent or the halogenated alkyl group for R$^{33 }$preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, and most preferably 1 to 6 carbon atoms. 33 

As R , a halogenated alkyl group is preferable, and a fluorinated alkyl group is more preferable. 

The fluorinated alkyl group for R$^{33 }$preferably has 50% or more of the hydrogen atoms thereof fluorinated, more pref› erably 70% or more, and most preferably 90% or more. 

Examples of the aryl group for R$^{34 }$include groups in which one hydrogen atom has been removed from an aromatic hydrocarbon ring, such as a phenyl group, a biphenyl group, a fluorenyl group, a naphthyl group, an anthryl group, and a phenantryl group, andheteroaryl groups in which some of the carbon atoms constituting the ring(s) of these groups are substituted with hetero atoms such as an oxygen atom, a sulfur atom, and a nitrogen atom. Of these, a fluorenyl group is preferable. 

The aryl group for R$^{34 }$may have a substituent such as an alkyl group of 1 to 10 carbon atoms, a halogenated alkyl group, or an alkoxy group. The alkyl group and halogenated alkyl group as the substituent preferably has 1 to 8 carbon atoms, and more preferably 1 to 4 carbon atoms. Further, the halogenated alkyl group is preferably a fluorinated alkyl group. 

The alkyl group having no substituent or the halogenated alkyl group for R$^{35 }$preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, and most preferably 1 to 6 carbon atoms. 35 

As R , a halogenated alkyl group is preferable, and a fluorinated alkyl group is more preferable. 

In terms of enhancing the strength of the acid generated, the fluorinated alkyl group for R$^{35 }$preferably has 50% or more of the hydrogen atoms fluorinated, more preferably 70% or more, still more preferably 90% or more. A com› pletely fluorinated alkyl group in which 100% of the hydro› gen atoms are substituted with fluorine atoms is particularly desirable. 

(B-2) 

(B-3) 

In general formula (B-3), as the alkyl group having no substituent and the halogenated alkyl group for R 36 , the same alkyl group having no substituent and the halogenated alkyl group described above for R$^{33 }$can be used. 

Examples of the divalent or trivalent aromatic hydrocarbon group for R$^{37 }$include groups in which one or two hydrogen atoms have been removed from the aryl group for R 34 . 

As the alkyl group having no substituent or the halogenated alkyl group for R 38 , the same one as the alkyl group having no substituent or the halogenated alkyl group for R 35 can be used. 

p" is preferably 2. 

Specific examples of suitable oxime sulfonate-based acid generators include a-(p-toluenesulfonyloxyimino )-benzyl cyanide, a-(p-chlorobenzenesulfonyloxyimino )-benzyl cya› nide, a-( 4-nitrobenzenesulfonyloxyimino )-benzyl cyanide, a-( 4-nitro-2-trifluoromethy lbenzenesulfony loxyimino )- benzyl cyanide, a-(benzenesulfonyloxyimino )-4-chloroben› zyl cyanide, a-(benzenesulfonyloxyimino )-2,4-dichloroben› zyl cyanide, a-(benzenesulfonyloxyimino )-2,6- dichlorobenzyl cyanide, a-(benzenesulfonyloxyimino )-4- methoxybenzyl cyanide, a-(2- chloro benzenesulfony loxyimino )-4-methoxybenzy 1 cyanide, a-(benzenesulfonyloxyimino )-thien-2-yl acetoni› trile, a-( 4-dodecylbenzenesulfonyloxyimino )benzyl cya› nide, a-[ (p-toluenesulfony loxyimino )-4-methoxypheny l] ac- etonitrile, a-[ ( dodecylbenzenesulfonyloxyimino )-4- methoxypheny l] acetonitrile, a-( tosy loxyimino )-4-thieny 1 cyanide, a-(methylsulfonyloxyimino )-1-cyclopentenyl acetonitrile, a-( methy lsulfony loxyimino )-1-cyclohexeny 1 acetonitrile, a-(methylsulfonyloxyimino )-1-cycloheptenyl acetonitrile, a-(methylsulfonyloxyimino )-1-cyclooctenyl acetonitrile, a-(trifluoromethylsulfonyloxyimino )-1-cyclo› pentenyl acetonitrile, a-(trifluoromethylsulfonyloxyimino )› cyclohexyl acetonitrile, a-( ethylsulfonyloxyimino )-ethyl acetonitrile, a-(propyl sulfonyloxyimino)-propyl acetoni› trile, a-( cyclohexylsulfonyloxyimino )-cyclopentyl acetoni- trile, a-( cyclohexylsulfonyloxyimino )-cyclohexyl acetoni› trile, a-( cyclohexylsulfonyloxyimino )-1-cyclopentenyl acetonitrile, a-( ethylsulfonyloxyimino )-1-cyclopentenyl acetonitrile, a-(isopropylsulfonyloxyimino )-1-cyclopente› nyl acetonitrile, a-(n-butylsulfonyloxyimino )-1-cyclopente- nyl acetonitrile, a-( ethylsulfonyloxyimino )-1-cyclohexenyl acetonitrile, a-(isopropylsulfonyloxyimino )-1-cyclohexenyl acetonitrile, a-( n-buty lsulfony loxyimino )-1-cyclohexeny 1 acetonitrile, a-(methylsulfonyloxyimino )-phenyl acetoni- trile, a-(methylsulfonyloxyimino )-p-methoxyphenyl aceto› nitrile, a-(trifluoromethylsulfonyloxyimino )-phenyl acetoni- trile, a-(trifluoromethylsulfonyloxyimino )-p- methoxyphenyl acetonitrile, a-( ethylsulfonyloxyimino )-p› methoxyphenyl acetonitrile, a-(propylsulfonyloxyimino )-p› methylphenyl acetonitrile, and a-(methyl sulfonyl oxyimino )-p-bromophenyl acetonitrile. 

Further, oxime sulfonate-based acid generators disclosed in Japanese Unexamined Patent Application, First Publica› tion No. Hei 9-208554 (Chemical Formulas 18 and 19 shown in paragraphs [0012] to [0014]) and oxime sulfonate-based acid generators disclosed in WO 2004/074242A2 (Examples 1 to 40 described at pages 65 to 86) may be preferably used. 

Furthermore, as preferable examples, the following can be used. 

