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[0061] The acid labile groups represented by R$^{11 }$and R 12 may be selected from a variety of such groups, for example, groups of the following formulae (AL-1) to (AL-3). 

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[0062] In formula (AL-1), RL 1 is a C$_{4}$ -C$_{20}$, preferably C$_{4}$ -C$_{15 }$ tertiary hydrocarbon group, a trialkylsilyl group in which each alkyl moiety has 1 to 6 carbon atoms, a C$_{4}$ -C$_{20 }$ alkyl group containing a carbonyl moiety or ester bond, or a group of formula (AL-3). Al is an integer of Oto 6. 

[0063] The tertiary hydrocarbon group may be branched or cyclic, and examples thereof include tert-butyl, tert› pentyl, 1,1-diethylpropyl, 1-ethylcyclopentyl, 1-butylcyclo› penty I, 1-ethy lcyclohexy I, 1-buty lcyclohexy I, l -ethyl-2-cy› clopenteny I, 1-ethy 1-2-cyclohexeny I, 2-methy 1-2- adamantyl, 2-tetrahydropyranyl, and 2-tetrahydrofuranyl. Examples of the trialkylsilyl group include trimethylsilyl, triethylsilyl, and dimethyl-tert-butylsilyl. The alkyl group containing a carbonyl moiety or ester bond may be straight, branched or cyclic, preferably cyclic and examples thereof include 3-oxocyclohexyl, 4-methyl-2-oxooxan-4-yl, and 5-methyl-2-oxooxolan-5-yl. 

[0064] Examples of the acid labile group having formula (AL-1) include tert-butoxycarbonyl, tert-butoxycarbonylm› ethyl, tert-pentyloxycarbonyl, tert-pentyloxycarbonylm› ethyl, 1, 1-diethylpropyloxycarbonyl, 1, 1-diethylpropyloxy› carbonylmethyl, 1-ethylcyclopentyloxycarbonyl, 1-ethy lcyclopenty loxycarbony lmethy I, 1-ethy 1-2-cyclopen› tenyloxycarbonyl, 1-ethy 1-2-cyclopenteny loxycarbony !m› ethyl, 1-ethoxyethoxycarbonylmethyl, 2-tetrahydropyrany› loxycarbonylmethyl, and 2-tetrahydrofuranyloxycarbonylmethyl. 

[0065] Other examples of the acid labile group having formula (AL-1) include groups having the formulae (AL› I )-1 to (AL-1 )-10. 

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