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20 wherein R la is hydrogen, fluorine, methyl ortrifluoromethyl, za is a single bond, phenylene, naphthylene or (backbone)› C(=0)-0-Z’-, Z’ is a straight C$_{1}$-C$_{10 }$ or branched or cyclic C$_{3}$ -C$_{10 }$alkylene group which may contain a hydroxyl radical, ether bond, ester bond or lactone ring, or phenylene 25 or naphthylene group, XA is an acid labile group, and YL is hydrogen or a polar group having at least one structure selected from the group consisting of hydroxyl, cyano, carbonyl, carboxyl, ether bond, ester bond, sulfonate bond, carbonate bond, lactone ring, sultone ring, and carboxylic 30 anhydride. 

2. The resist composition of claim 1 wherein the anion moiety in formula (1) is selected from the following formu- lae (ql) to (q35): 

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(2) 

(3) 

(’13) 50 

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-continued 

(qg) 

