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isomer is mainly used, the optical purity ( ee) thereof is pref› erably 90 or higher, more preferably 95 or higher. 

The content ratio of the repeating unit (D) based on all the repeating units of the resin (P) is preferably in the range of0.5 to 80 mo! %, more preferably 1 to 60 mo! % and still more preferably 2 to 40 mo! %. The repeating unit (D) can be used either individually or in combination. The use of specified lactone structures would ensure improvement in the line edge roughness and development defect. 

Specific examples of the repeating units (D) of the resin (P) will be shown below, which however inno way limit the scope of the present invention. In the formulae, Rx represents H, CH$_{3}$ , CH$_{2}$0H or CF$_{3}$ . 

<img src='content_image/895327.jpg'>

<img src='content_image/895328.jpg'>

