content_image/934180.jpg content_image/934177.jpg content_image/934178.jpg content_image/934179.jpg content_image/934181.jpg content_image/934182.jpg content_image/934183.jpg
represents an integer of 0 to 3; f represents an integer of 1 to 20; and R 7 ’ represents a substituent, 7 

[0367] As the substituent for R ’, the same groups as those which the aforementioned aliphatic hydrocarbon group or aromatic hydrocarbon group for Rx may have as a substituent can be used. 7 

[ 03 68] If there are two or more of the R ’ group, as indicated bythevaluerl, then the two or more of the R 7 ’ groups maybe the same or different from each other. 

[0369] tis preferably 1 or 2. 

[0370] v0 is preferably Oto 2, more preferably 0 or 1, and still more preferably 0. 

[0371] It is preferable that each of q 1 and q2 independently represent 1 to 5, and more preferably 1 to 3. 

[0372] rl is preferably an integer of Oto 2, and more pref› erably 0 or 1. 

[0373] f is preferably 1 to 15, and more preferably 1 to 10. 

[Chemical Formula 50] 

<img src='content_image/934180.jpg'>

In the formula, A+ is the same as defined above; t represents an integer of 1 to 3; q3 represents an integer of 1 to 12; r2 represents an integer of0 to 3; and R 7 ’ represents a substitu› ent. 7 

[0374] The substituent for R ’ is the same as defined above. 7 

[0375] If there are two or more of the R ’ group, as indicated bythevaluer2, then the two or more of the R 7 ’ groups maybe the same or different from each other. 

[0376] tis preferably 1 or 2. 

[0377] q3 is preferably 1 to 5, and more preferably 1 to 3. 

[0378] r2 is preferably an integer of Oto 2, and more pref› erably 0 or 1. 

[0379] As the component (Bl), one type of acid generator may be used alone, or two or more types may be used in combination. 

[0380] In the resist composition of the present invention, the amount of the component (Bl) within the component (B) is preferably 50% by weight or more, more preferably 60% by weight or more, still more preferably 7 5% by weight or more, and most preferably 100% by weight. When the amount of the component (B 1) is at least as large as the lower limit of the above-mentioned range, the effects of the present invention can be improved. 

[0381] The component (Bl) can be produced by a conven› tional method. 

[0382] As the component (Bl), for example, a compound represented by the aforementioned general formula (bl-1) and a compound represented by the aforementioned general formula (bl-2) can be produced as follows. 

[0383] [Production Method of Compound Represented by General Formula (bl-1)] 

[0384] A compound represented by general formula (bl-1) above can be produced by a method including reacting a compound (b0-1) represented by general formula (b0-1) shown below with a compound (b0-2) represented by general formula (b0-2) shown below. 

(bl-3-1) 

[Chemical Formula 51] 

<img src='content_image/934177.jpg'>

<img src='content_image/934178.jpg'>

<img src='content_image/934179.jpg'>

[0385] In general formulas (b0-1) and (b0-2), X, Q 2 , m0, Y 1 and A+ are respectively the same as defined for X, Q 2 , m0, Y 1 and gin general formula (bl-1). 

[0386] M+ represents an alkali metal ion. Examples of alkali metal ions include a sodium ion, a lithium ion and a potassium ion, and a sodium ion or a lithium ion is preferable. 

[0387] z- represents a non-nucleophilic 

[0388] Examples of non-nucleophilic ions include a halo› gen ion such as a bromine ion or a chlorine ion; an ion capable of forming an acid exhibiting a lower acidity than the com› pound (b0-1); BF 4 -, AsF 6 -, SbF 6 -, PF 6 - and ClO$_{4}$ -. 

[0389] Examples of ions for which are capable of forming an acid exhibiting a lower acidity than the compound (b0-1) include sulfonic acid ions such as a p-toluenesulfonate ion, a methanesulfonate ion and a benzenesulfonate ion. 

[0390] As the compound (b0-1) and the compound (b0-2), commercially available compounds may be used, or the com› pounds may be synthesized by a conventional method. 

[0391] The method of producing the compound (b0-1) is not particularly limited. For example, a compound repre› sented by general formula (b0-1-11) shown below can be dissolved in a solvent such a tetrahydrofuran or water, and the resulting solution can be subjected to a reaction in an aqueous solution of an alkali metal hydroxide such as sodium hydrox› ide or lithium, hydroxide, thereby obtaining a compound represented by general formula (b0-1-12) shown below. Then, the compound represented by general formula (b0-1- 12) can be subjected to a dehydration/condensation reaction with an alcohol represented by general formula (b0-1-13) shown below in an organic solvent such as benzene or dichlo› roethane in the presence of an acidic catalyst, thereby obtain› ing a compound represented by general formula (b0-1) above in which m0 is 1 (i.e., a compound represented by general formula (b0-1-1) shown below). 

[Chemical Formula 52] 

<img src='content_image/934181.jpg'>

<img src='content_image/934182.jpg'>

<img src='content_image/934183.jpg'>

(b0-1) 

(b0-2) 

(bl-1) 

(b0-1-11) 

(b0-1-12) 

(b0-1-13) 

