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In the Table, abbreviations indicate specific examples above or the followings. 

<Organic Basic Compound> 

D-1: Tetra-(n-butyl)ammonium hydroxide 

D-2: 1,8-Diazabicyclo[5.4.0]-7-undecene 

D-3: 2,4,5-Triphenylimidazole 

D-4: Tridodecylamine 

<Other Components> 

F-1: Benzoic acid 

F-2: 2-Naphthoic acid 

<Resist Solvent, Developer, Rinsing Solution> 

S-1: Propylene glycol monomethyl ether acetate (PGMEA) 

S-2: Propylene glycol monomethyl ether (PGME) 

S-3: Cyclohexanone 

S-4: Butyl acetate 

S-5: Dodecane 

S-6: Tetrahydrofuran 

S-7: 1-Hexanol 

S-8: Methyl amyl ketone 

S-9: Ethyl lactate 

S-10: Decane 

S-11: Isopropyl alcohol 

<Surfactant> 

W-1: PF6320 (produced by OMNOVA) 

W-2: Megaface Fl 76 (produced by Dainippon Ink & Chemi› cals, Inc.) 

<Resin> 

PMMA: Polymethyl methacrylate 

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l"nk" <Cross 1 mg Agent> 

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-continued 

