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Herein R$^{325 }$is a C$_{6}$-C$_{20 }$aryl group or C$_{4}$ -C$_{20 }$hetero-aromatic group, in which some or all hydrogen atoms may be replaced by halogen atoms, straight, branched or cyclic C$_{1 }$-C$_{20 }$alkyl groups, CcC$_{20 }$ aryl groups, C$_{7}$ -C$_{20 }$aralkyl groups, C$_{1 }$-C$_{10 }$ alkoxy groups, C$_{1 }$-C$_{10 }$ acyloxy groups or C$_{1 }$-C$_{10 }$ alkylthio groups. R$^{326 }$is CO$_{2}$R 327 , OR $^{328 }$or cyano group. R$^{327 }$is a C$_{1 }$-C$_{10 }$alkyl group, in which some methylene groups may be replaced by oxygen atoms. R$^{328 }$is a C$_{1 }$-C$_{10 }$ alkyl or acyl group, in which some methylene groups may be replaced by oxygen atoms. R$^{329 }$is a single bond, methylene, ethylene, sulfur atom or---O(CH$_{2}$CH$_{2}$O)h-group whereinh is 0, 1, 2, 3 or 4. R 330 is hydrogen, methyl, ethyl or phenyl. T is a nitrogen atom or CR 331 . U is a nitrogen atom or CR 332 . V is a nitrogen atom or CR 333 . R 331 , R $^{332 }$and R$^{333 }$are each inde› pendently hydrogen, methyl or phenyl. Alternatively, a pairof R$^{331 }$andR$^{332 }$or a pairofR$^{332 }$and R$^{333 }$may bond together to form a C$_{6}$-C$_{20 }$aromatic ring or C$_{2}$-C$_{20 }$hetero-aromatic ring with the carbon atoms to which they are attached. 

Further included are amine compounds of 7-oxanorbor› nane-2-carboxylic ester structure, represented by the general formula (Am-15). 

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Herein R$^{334 }$is hydrogen or a straight, branched or cyclic C$_{1 }$-C$_{10 }$alkyl group. R$^{335 }$and R$^{336 }$are each independently a C$_{1 }$-C$_{20 }$ alkyl group, C$_{6}$-C$_{20 }$ aryl group or C$_{7}$-C$_{20 }$ aralkyl group, which may contain one or more polar functional groups selected from among ether, carbonyl, ester, alcohol, sulfide, nitrile, amine, imine, and amide and in which some hydrogen atoms may be replaced by halogen atoms. R$^{335 }$and R 336 , taken together, may form a C $_{2}$-C$_{20 }$heterocyclic or het› ero-aromatic ring with the nitrogen atom to which they are attached. 

The quenchers may be used alone or in admixture of two or more. The quencher is preferably formulated in an amount of 0.001 to 2 parts, and especially 0.01 to 1 part by weight, per 100 parts by weight of the base resin. Less than 0.001 phr of the quencher may achieve no addition effect whereas more than 2 phr may lead to too low a sensitivity. 

ComponentE 

In one preferred embodiment, the resist composition fur› ther contains (E) an auxiliary photoacid generator other than the photoacid generator of formula (la). It may be any com› pound capable of generating an acid upon exposure to high› energy radiation such as UV, deep UV, electron beam, EUV, x-ray, excimer laser beam, gamma-ray or synchrotron radia- 

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tion. Suitable auxiliary photoacid generators include sulfo› nium salts, iodonium salts, sulfonyldiazomethane, N-sulfo› nyloxydicarboxyimide, O-arylsulfonyloxime and O-alkylsulfonyloxime photoacid generators. Exemplary aux- iliary photoacid generators are given below while they may be used alone or in admixture of two or more. 

Sulfonium salts are salts of sulfonium cations with sul› fonates, bis(substituted alkylsulfonyl)imides and tris(substi› tuted alkylsulfonyl)methides. Exemplary sulfonium cations include triphenylsulfonium, ( 4-tert-butoxyphenyl)diphenyl› sulfonium, bis( 4-tert-butoxyphenyl)phenylsulfonium, tris( 4- tert-butoxyphenyl )sulfonium, (3-tert-butoxypheny l)diphe› ny lsulfonium, bis(3-tert-butoxyphenyl)phenylsulfonium, tris (3-tert-butoxypheny l)sulfonium, (3 ,4-di-tert-butoxyphenyl) dipheny lsulfonium, bis(3 ,4-di-tert-butoxyphenyl) pheny lsulfonium, tris(3 ,4-di-tert-butoxyphenyl )sulfonium, diphenyl( 4-thiophenoxyphenyl)sulfonium, ( 4-tert-butoxy› carbony lmethy loxypheny I )dipheny lsulfonium, tris( 4-tert› butoxycarbony lmethy loxyphenyl )sulfonium, ( 4-tert-butox- yphenyl)bis( 4-dimethylaminophenyl)sulfonium, tris( 4- dimethylaminophenyl)sulfonium, 4-methylphenyldiphenylsulfonium, 4-tert-butylphenylsulfo› nium, bis( 4-methylphenyl)phenylsulfonium, bis( 4-tert-bu› ty !phenyl )pheny lsulfonium, tris( 4-methy !phenyl )sulfonium, tris( 4-tert-butylphenyl)sulfonium, tris(phenylmethyl)sulfo› nium, 2-naphthyldiphenylsulfonium, dimethyl(2-naphthyl) sulfonium, 4-hydroxyphenyldimethylsulfonium, 4-methox› yphenyldimethylsulfonium, trimethylsulfonium, 2-oxocyclohexy lcyclohexy lmethy lsulfonium, trinaphthyl- sulfonium, tribenzylsulfonium, diphenylmethylsulfonium, dimethylphenylsulfonium, 2-oxopropylthiacyclopentanium, 2-oxobuty lthiacyclopentanium, 2-oxo-3 ,3-dimethy lbuty lthi› acyclopentanium, 2-oxo-2-phenylethylthiacyclopentanium, 4-n-butoxynaphthyl-1-thiacyclopentanium, and 2-n-butox- ynaphthyl-1-thiacyclopentanium. Exemplary sulfonates include trifluoromethanesulfonate, pentafluoroethane› sulfonate, heptafluoropropanesulfonate, nonafluoro butane› sulfonate, tridecafluorohexanesulfonate, perfluoro( 4-ethyl› cyclohexane )sulfonate, heptadecafluorooctanesulfonate, 2,2, 2-trifluoroethanesulfonate, pentafluorobenzenesulfonate, 4-(trifluoromethyl)benzenesulfonate, 4-fluorobenzene› sulfonate, mesity lenesulfonate, 2,4, 6-triisopropy lbenzene› sulfonate, toluenesulfonate, benzenesulfonate, 4-(p-toluene- sulfonyloxy)benzenesulfonate, 6-(p-toluenesulfonyloxy) naphthalene-2-sulfonate, 4-(p-toluenesulfonyloxy) naphthalene-1-sulfonate, 5-(p-toluenesulfonyloxy) naphthalene-1-sulfonate, 8-(p-toluenesulfonyloxy) naphthalene-1-sulfonate, naphthalenesulfonate, camphorsulfonate, octanesulfonate, dodecy lbenzene- sulfonate, butanesulfonate, methanesulfonate, 1, l-difluoro- 2-naphthylethanesulfonate, 1, 1,2,2-tetrafluoro-2-(norbor› nan-2-yl)ethanesulfonate, 1, 1,2,2-tetrafluoro-2-(tetracyclo [ 6.2.1.1 3 • $^{6 }$.02 • $^{7}$]dodec-3-en-8-yl)ethanesulfonate, 2-benzoy loxy-1, 1,3 ,3 ,3-pentafluoropropanesulfonate, 1, 1,3, 3 ,3-pentafluoro-2-( 4-pheny lbenzoy loxy )propanesulfonate, 1, 1,3,3,3-pentafluoro-2-pivaloyloxypropanesulfonate, 2-cy› clohexanecarbony loxy-1, 1,3 ,3 ,3-pentafluoropropane- sulfonate, 1, 1,3,3,3-pentafluoro-2-furoyloxypropane- sulfonate, 2-naphthoy loxy-1, 1,3,3 ,3- pentafluoropropanesulfonate, 2-( 4-tert-buty lbenzoy loxy )-1, 1,3 ,3 ,3-pentafluoropropanesulfonate, 2-( 1- adamantanecarbony loxy )-1, 1,3 ,3 ,3- pentafluoropropanesulfonate, pentafluoropropanesulfonate, hydroxypropanesulfonate, tosyloxypropanesulfonate, tosyloxyethanesulfonate, 2-acetyloxy-l, 1,3,3,3- 1, 1,3,3,3-pentafluoro-2- 1, 1,3,3,3-pentafluoro-2- 1, l-difluoro-2- 

