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additional two hours, cooled to room temperature and pre› cipitated into heptanes (3.8 L). The precipitated polymer was collected by vacuum filtration and vacuum oven dried for 24 hours to afford Polymer 1 (tBMA/MAA/TMSPMA 50/40/10) as a white solid (99 g, 90%). Mw was determined by GPC relative to polystyrene standards and was found to be 7828 Da. 

[0051] A solution of hydrochloric acid (37 wt% in water, 2.93 g) in water (9.8 g) was added over 10 minutes to a mixture oftetraethyl orthosilicate (TEOS) (23.97 g, 50 mo! %) and Polymer 1 from Example 1 (15.0 g, 50 mo! %) in tetrahydrofuran (THF) (81 g) and stirred at room tempera› ture for 1 hour. The reaction mixture was heated to 63° C. for 4 hours and then cooled to room temperature. PGEE (107 g) was added, the volatile species removed under reduced pressure, and the resulting solution was diluted with PGEE to deliver Condensed Polymer 1 (10 wt% in PGEE, 213 g) as a clear solution. Mw was determined by GPC relative to polystyrene standards and was found to be 29,300 Da. 

[0052] A solution of hydrochloric acid (37 wt% in water, 0.92 g) in water (3.06 g) was added over 10 minutes to a mixture ofTEOS (6.85 g, 30 mo!%) and Polymer 1 from Example 1 (10.0 g, 70 mo!%) in THF (39 g) and stirred at room temperature for 1 hour. The reaction mixture was heated to 63° C. for 6 hours and then cooled to room temperature. PGEE (52 g) was added, the volatile species removed under reduced pressure, and the resulting solution was diluted with PGEE to deliver Condensed Polymer 2 (10 wt% in PGEE, 125 g) as a clear solution. Mw was deter› mined by GPC relative to polystyrene standards and was found to be 35,000 Da. 

[0053] A solution of hydrochloric acid (37 wt% in water, 6.56 g) in water (21.9 g) was added over 10 minutes to a mixture ofTEOS (55.93 g, 70 mo!%) and Polymer 1 from Example 1 (15.0 g, 30 mo!%) in THF (81 g) and stirred at room temperature for 1 hour. The reaction mixture was heated to 63° C. for 6 hours and then cooled to room temperature. PGEE (107 g) was added, the volatile species removed under reduced pressure, and the resulting solution was diluted with PGEE to deliver Condensed Polymer 3 (10 wt % in PGEE, 342 g) as a clear solution. Mw was deter› mined by GPC relative to polystyrene standards and was found to be 27,000 Da. 

[0054] A solution of hydrochloric acid (37 wt% in water, 1.08 g) in water (3.61 g) was added over 10 minutes to a mixture of TEOS (7.38 g, 30 mo!%), phenyltrimethoxysi› lane (PTMS) (1.17 g, 5 mo! % ) and Polymer 1 from Example 1 (10.0 g, 65 mo!%) in THF (40.5 g) and stirred at room temperature for 1 hour. The reaction mixture was heated to 63° C. for 6 hours and then cooled to room temperature. PGEE (55 g) was added, the volatile species removed under reduced pressure, and the resulting solution was diluted with PGEE to deliver Condensed Polymer 4 (10 

## EXAMPLE 2 

## EXAMPLE 3 

## EXAMPLE 4 

## EXAMPLE 5 

wt% in PGEE, 121 g) as a clear solution. Mw was deter› mined by GPC relative to polystyrene standards and was found to be 21,000 Da. 

[0055] A solution oftert-butyl methacrylate (tBMA), (173 g), gamma butyrolactone (GBLMA), (166 g) and 3-(trimethoxysilyl)propyl methacrylate (TMSPMA), (60.6 g) dissolved in 1,3-dioxolane (304 g) and a solution ofV-65 initiator (60.6 g) dissolved in 2: 1 v/v tetrahydrofurane/ acetonitrile (60.6 g) were both added dropwise over 2 hours to 3-dioxolane (710 g) at 75° C. under a nitrogen blanket. After addition the reaction solution was held at 75° C. for an additional two hours, cooled to room temperature and pre› cipitated into heptanes:methyl tert-butyl ether (MTBE) (1: 1 v/v, 14 L). The precipitated polymer was collected by vacuum filtration and vacuum oven dried for 24 hours to afford Comparative Polymer 1 (tBMA/GBLMA/TMSPMA 50/40/10) as a white solid (271 g, 68%). Mw was determined by GPC relative to polystyrene standard and was found to be 5700 Da. 

[0056] Formulations were prepared by combining: 1.60 wt % of the condensed polymer indicated in Table 1; 0.004 wt % of a 0.1 wt% solution oftetrabutylammonium chloride in PGEE; 48.95 wt % of PGEE; 49.15 wt % of 2-hydroxy› isobutyric acid methyl ester; 0.009 wt% of malonic acid; 0.085 wt % of acetic acid; and 0.2 wt % of a long chain alcohol coating enhancer. Each formulation was filtered through 0.2 m polytetrafluoroethylene syringe. 

<img src='content_image/943183.jpg'>

[0057] Formulations from Example 7 were spin-coated on a bare 200 mm silicon wafers at 1500 rpm and baked at 240° C. for 60 seconds using an ACT-8 Clean Track (Tokyo Electron Co.). The thickness of each coated film after baking was measured with an OptiProbe™ instrument from Therma-wave Co. Each coated sample was then evaluated for SC-1 wet strippability using an SC-1 solution of 1/8/50 wt/wt/wt mixture of 30% NH$_{4}$OH/30% H$_{2}$O/water. The SC-1 solution was heated to 25° C., and coupons of each coated wafer were immersed into the solution for 1 min. The coupons were removed from the SC-1 solution and rinsed with deionized water, and the film thickness was again measured. The film thickness loss for each sample was calculated as the difference in film thickness before and after contact with the SC-1 solution. A separate film prepared as described above was optionally tested for SC-1 strippability after etching. Etching was performed for 60 seconds using RIE790 from Plasma-Therm Co. with oxygen gas, 25 sscm flow, 180 W of power, and 6 mTorr of pressure. The 

## COMPARATIVE EXAMPLE 1 

## EXAMPLE 7 

## EXAMPLE 8 

