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represented by formulas (al-1-16), (al-1-17) and (al-1-20) to (al-1-23), structural units represented by general formula (al-3-01) shown below which include the structural units represented by formulas (al-3-25) and (al-3-26), and struc› tural units represented by general formula (al-3-02) shown below which include the structural units represented by for› mulas (al-3-27) and (al-3-28) are also preferable. 

[Chemical Formula 23] 

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In the formula, R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; and R$^{11 }$represents an alkyl group of 1 to 5 carbon atoms. 

[Chemical Formula 24] 

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In the formula, R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; R $^{12 }$represents an alkyl group of 1 to 5 carbon atoms; and h represents an integer of 1 to 6. 

[0168] In general formula (al-1-01), R is the same as defined above. 

[0169] The alkyl group for R$^{11 }$is the same as defined for the alkyl group represented by R, and is preferably a methyl group or an ethyl group. 

[0170] In general formula (al-1-02), R is the same as defined above. 

[0171] The alkyl group for R$^{12 }$is the same as defined for the alkyl group represented by R, preferably a methyl group or an ethyl group, and most preferably an ethyl group. 

[0172] his preferably 1 or 2, and most preferably 2. 

(al-1-01) 

(al-1-02) 

[Chemical Formula 25] 

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In the formula, R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; R $^{14 }$represents an alkyl group; R $^{13 }$represents a hydrogen atom or a methyl group; and a represents an integer of 1 to 10. 

[Chemical Formula 26] 

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In the formula, R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; R $^{14 }$represents an alkyl group; R $^{13 }$represents a hydrogen atom or a methyl group; a represents an integer of 1 to 1 0; and g represents an integer of 0 to 8. 13 

[0173] In general formulas (al-3-01) and (al-3-02), R, R , R 14 , a and g are the same as defined above. 

[0174] R$^{13 }$is preferably a hydrogen atom. 

[0175] The alkyl group for R $^{14 }$is preferably a linear or branched alkyl group, more preferably a linear alkyl group, and most preferably a methyl group or an ethyl group, 

[0176] a is preferably an integer of 1 to 8, more preferably 1 to 5, and most preferably 1 or 2. 

[0177] g is preferably an integer of0 to 3, more preferably 1 to 3, and still more preferably 1 or 2. 

[0178] In the component (Al), the amount of the structural unit (al) based oil the combined total of all structural units constituting the component (Al) is preferably 3 to 80 mo! %, more preferably 5 to 70 mo!%, and still more preferably 10 to 50 mo!%. When the amount of the structural unit (al) is at least as large as the lower limit of the above-mentioned range, a pattern can be easily formed using a resist composition prepared from the component (Al). On the other hand, when the amount of the structural unit ( a 1) is no more than the upper limit of the above-mentioned range, a good balance can be achieved with the other structural units. 

[0179] The monomers for deriving the structural units rep› resented by general formulas (al-3-01) and (al-3-02) above (hereafter, these monomers are collectively referred to as "monomer W") can be produced by a production method shown below 

(al-3-01) 

(al-3-02) 

