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# (12) United States Patent 

# Jung et al. 

# (54) PHOTORESIST CROSS-LINKER AND PHOTORESIST COMPOSITION COMPRISING THE SAME 

(75) Inventors: Jae Chang Jung; Keun Kyu Kong; Myoung Soo Kim; Hyoung Gi Kim; Hyeong Soo Kim; Ki Ho Baik; Jin Soo Kim, all of Kyoungki-do (KR) 

(73) Assignee: Hyundai Electronics Industries Co., Ltd. (KR) 

( *) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by O days. 

(21) Appl. No.: 09/448,916 

(22) Filed: Nov. 24, 1999 

## (30) Foreign Application Priority Data 

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(51) Int. Cl.7 ................................................ G03F 7/027 

(52) U.S. Cl. ................................ 430/281.1; 430/270.1; 430/325 

(58) Field of Search ........................... 430/270.1, 281.1, 430/325; 526/271, 317.1, 333; 568/594, 596 

## (56) References Cited 

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Academic Press Dictionary of Science and Technology definitions of acetal, alkyl, carboxylic acid, ester and ketone.* 

## U.S. PATENT DOCUMENTS 

## FOREIGN PATENT DOCUMENTS 

## OIBER PUBLICATIONS 

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# (10) Patent No.: US 6,368,773 Bl 

# (45) Date of Patent: Apr. 9, 2002 

CA90:138248, Sastre et al,Angew. Makromol. Chem. 1978, 73, 25-33.* 

U.S. application No. 09/448,964, Jung et al., filed Nov. 24, 1999. 

Chemical Abstract No. 110:96578. 

* cited by examiner 

Primary Examiner-Rosemary Ashton 

(74) Attorney, Agent, or Firm-Townsend and Townsend and Crew LLP 

## (57) ABSTRACT 

The present invention relates to a cross-linker for photoresist compositions which is suitable for a photolithography pro› cess using KrF (248 mn), ArF (193 mn), E-beam, ion beam or EUV light sources. Preferred cross-linkers, according to the present invention, comprise a copolymer of (i) a com› pound represented by following Chemical Formula 1 and/or (ii) one or more compound(s) selected from the group consisting of acrylic acid, methacrylic acid and maleic anhydride. 

wherein, R$_{1 }$ and R$_{2 }$ individually represent straight or branched C$_{1}$_$_{10 }$alkyl, straight or branched C$_{1}$_$_{10 }$ester, straight or branched C$_{1}$ _ $_{10 }$ketone, straight or branched C$_{1}$ _ $_{10 }$carboxylic acid, straight or branched C$_{1}$ _ $_{10 }$acetal, straight or branched C$_{1}$ _ $_{10 }$alkyl including at least one hydroxyl group, straight or branched C$_{1}$ _ $_{10 }$ester includ› ing at least one hydroxyl group, straight or branched C$_{1}$ _ 10 ketone including at least one hydroxyl group, straight or branched C$_{1}$ _ $_{10 }$carboxylic acid including at least one hydroxyl group, and straight or branched C$_{1}$ _ $_{10 }$acetal including at least one hydroxyl group; and R$_{3 }$ represents hydrogen or methyl. 

US006368773Bl 

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## 10 Claims, 12 Drawing Sheets 

