content_image/933410.jpg content_image/933411.jpg content_image/933412.jpg content_image/933413.jpg content_image/933414.jpg content_image/933415.jpg
2. The act1mc ray-sens1t1ve or radiation-sensitive resin composition according to claim 1, 

wherein the monomer having the salt structure 1s a monomer represented by General Formula (Xl), 

<img src='content_image/933410.jpg'>

in the formula, P$^{11 }$represents a polymerizable group, 11 

y - represents a group selected from the group consist› ing of anionic functional groups represented by General Formulae (Yl) to (YS), 11 

z + represents an actinic ray-sensitive decomposable or radiation-sensitive decomposable cation, 

m represents an integer of 1 or more, 11 

L represents a single bond or an m+l-valent linking group, 11 

provided that in a case where y - is the anionic func› tional group represented by General Formula (Yl ), L 11 represents * $^{1}$-CO---O-Ls$^{1}$-* 2 , 1 

Ls represents a divalent linking group not including ---0-CO-, 2 

* $^{1 }$represents a bonding position to P$^{11 }$and * represents a bonding position to y 11 -, and 11 

in a case where y - is an anionic functional group represented by General Formula (Y2), L 11 includes neither a phenylene group nor a lactone structure, 

<img src='content_image/933411.jpg'>

in General Formula (Yl), * represents a bonding position to L 11 in General Formula (Xl), 

<img src='content_image/933412.jpg'>

in General Formula (Y2), R $^{11 }$and R $^{12 }$each independently represent a hydrogen atom or a monovalent organic group, 

provided that in a case where one of R $^{11 }$and R $^{12 }$repre› sents a fluorine atom or a fluoroalkyl group, the other of R $^{11 }$and R $^{12 }$represents a hydrogen atom or a mon› ovalent organic group different from the fluorine atom and the fluoroalkyl group, 

R$^{11 }$and R$^{12 }$may be bonded to each other to form a ring, 

R$^{11 }$and R$^{12 }$may be each independently bonded to L$^{11 }$in General Formula (Xl) to form a ring, 11 

provided that the ring formed by the bonding of R and L $^{11 }$in General Formula (X 1) and the ring formed by the bonding ofR $^{12 }$and L $^{11 }$in General Formula (X) include no benzene ring, and 11 

* represents a bonding position to L , 

<img src='content_image/933413.jpg'>

in General Formula (Y3), R$^{13 }$represents a monovalent organic group, 

provided that in a case where a group adjacent to a sulfur atom in R$^{13 }$is a carbon atom, the carbon atom has no fluorine atom as a substituent, 11 

R$^{13 }$may be bonded to L in General Formula (Xl) to form a ring, and 

* represents a bonding position to L11, 

<img src='content_image/933414.jpg'>

in General Formula (Y4), L$^{12 }$represents a single bond or a divalent linking group, 14 15 

R , R , and R $^{16 }$each independently represent a hydro› gen atom or a monovalent organic group, 14 15 16 

provided that in a case where two of R , R , and R represent a fluorine atom or a fluoroalkyl group, one of R 14 , R 15 , and R 16 represents a hydrogen atom or a monovalent organic group different from the fluorine atom and the fluoroalkyl group, 14 15 

in a case where two of R , R , and R $^{16 }$each represent a fluorine atom or a fluoroalkyl group, and a group adjacent to an amido group in L $^{12 }$is a carbon atom, the carbon atom does not have two or more fluorine atoms and fluoroalkyl groups as a substituent, 14 15 

R , R , and R $^{16 }$may be bonded to each other to form a ring, 14 15 

R , R , and R $^{16 }$may be each independently bonded to L $^{12 }$to form a ring, 14 15 

R , R , and R $^{16 }$may be each independently bond to L 11 in General Formula (Xl) to form a ring, and 11 

* represents a bonding position to L , 

<img src='content_image/933415.jpg'>

in General Formula (Y5), L $^{13 }$represents a single bond or a divalent linking group, 17 18 

R , R , and R $^{19 }$each independently represent a hydro› gen atom or a monovalent organic group, 17 18 

provided that in a case where two or more ofR , R , or R 19 each represent a fluorine atom or a fluoroalkyl group, and a group adjacent to a sulfonamido group in L 13 is a carbon atom, the carbon atom does not have two or more fluorine atoms and fluoroalkyl groups as a substituent, 17 18 

R , R , and R $^{19 }$may be bonded to each other to form a ring, 

