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one of R 14 , R 15 , and R 16 represents a hydrogen atom or represents a monovalent organic group different from the fluorine atom and the fluoroalkyl group. In addition, in a case where two ofR 14 , R 15 , and R $^{16 }$each represent a fluorine atom or a fluoroalkyl group, and a group adjacent to an amido group (intended to mean an amido group linked to L 12 , which is specified in General Formula (Y4)) in L $^{12 }$is a carbon atom, the carbon atom does not have two or more fluorine atoms and fluoroalkyl groups as the substituent. 14 15 

[0097] In addition, R , R , and R $^{16 }$may be bonded to each other to form a ring. Further, R 14 , R 15 , and R 16 may be each independently bonded to L $^{12 }$to form a ring. In addition, R 14 , R 15 , and R 16 may be each independently bond to L$^{11 }$in General Formula (Xl) to form a ring. 11 

* represents a bonding position to L . 

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[0098] In General Formula (Y5), L $^{13 }$represents a single bond or a divalent linking group. 

[0099] Examples of the divalent linking group repre› sented by L 13 include the same ones as those of the divalent linking group represented by L $^{12 }$in General Formula (Y4). Among these, as the divalent linking group represented by L 13 , a ----CO---0-alkylene group is preferable. 17 18 

[0100] R , R , and R $^{19 }$each independently represent a hydrogen atom or a monovalent organic group. 

[0101] Examples of the monovalent organic group rep› resented by each ofR 17 , R 18 , and R $^{19 }$include the same ones as those of the monovalent organic group repre› sented by each ofR $^{11 }$and R $^{12 }$in General Formula (Y2), and among these, an alkyl group (which may be in any of linear, branched, and cyclic forms, and preferably has 1 to 20 carbon atoms, more preferably has 1 to 10 carbon atoms, and still more preferably has 1 to 6 carbon atoms) is preferable. 17 18 

[0102] It should be noted that two or more of R , R , or R$^{19 }$each represent a fluorine atom or a fluoroalkyl group, and a group adjacent to a sulfonamido group (intended to mean a sulfonamido group linked to L1 3 , which is specified in General Formula (Y5)) in L $^{13 }$is a carbon atom, the carbon atom does not have two or more fluorine atoms and fluo› roalkyl groups as a substituent. 17 18 19 

[0103] Moreover, R , R , and R may be bonded to each other to form a ring. Further, R 17 , R 18 , and R $^{19 }$may be each independently bonded to L $^{13 }$to form a ring. In addition, R 17 , R 18 , and R $^{19 }$may be each independently bonded to L11 in General Formula (Xl) to form a ring. * represents a bonding position to L 11 . 

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(Y5) 

(Y6) 

[0104] In General Formula (Y6), R$^{20 }$represents a mon› ovalent organic group. 

[0105] Examples of the monovalent organic group rep› resented by R $^{20 }$include the same ones as those of the monovalent organic group represented by each of R 11 and R$^{12 }$in General Formula (Y2), and among these, an alkyl group (which may be in any of linear, branched, and cyclic forms, and preferably has 1 to 20 carbon atoms, more preferably has 1 to 10 carbon atoms, and still more preferably has 1 to 6 carbon atoms) is preferable. 

[0106] In addition, R$^{20 }$may be bonded to L $^{11 }$in General Formula (Xl) to form a ring. * represents a bonding position to L 11 . 

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[0107] In General Formula (Y7), * represents a bonding position to L 11 . It should be noted that the atom bonded to * in L $^{11 }$is a carbon atom which is not a carbonyl group. 

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[0108] In General Formula (YS), L $^{14 }$represents a single bond or a divalent linking group. 

[0109] Examples of the divalent linking group repre› sented by L $^{14 }$include the same ones as those of the divalent linking groups represented by L $^{12 }$in General Formula (Y 4). Among those, the divalent linking group represented by L $^{14 }$is preferably a ----CO-O-alkylene group. 21 22 23 24 25 

[0110] R , R , R , R , and R each independently represent a hydrogen atom or a monovalent organic group. 

[0111] Examples of the monovalent organic group rep› resented by each ofR 21 , R 22 , R 23 , R 24 , and R $^{25 }$include the same ones as those of the monovalent organic group represented by each ofR$^{11 }$and R$^{12 }$in General Formula (Y2), and among these, an alkyl group (which may be in any of linear, branched, and cyclic forms, and preferably has 1 to 20 carbon atoms, more preferably has 1 to 10 carbon atoms, and still more preferably has 1 to 6 carbon atoms) is preferable. 23 24 25 

[0112] Moreover, R , R , and R may be bonded to each other to form a ring. Furthermore, R 23 , R 24 , and R 25 may be each independently bonded to L1 4 , R 21 , and R $^{22 }$to form a ring. Incidentally, R 21 , R 22 , and L $^{14 }$may be bonded to each other to form a ring. In addition, R 23 , R 24 , and R 25 may be each independently bonded to L 11 in General For› mula (Xl) to form a ring. 11 

[0113] z + represents an actinic ray-sensitive decompos› able or radiation-sensitive decomposable cation. 

[0114] The actinic my-sensitive decomposable or radia› tion-sensitive decomposable cation is not particularly limited as long as it can convert the salt structure in the repeating unit A into the above-mentioned acid struc› ture upon irradiation with actinic rays or radiation. 

(Y7) 

(YS) 

