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[0084] In formulae (ZII) and (ZIII), each of Zi, Z$_{2}$ , Z$_{3}$ , Z$_{4 }$ and Z$_{5 }$ independently represents -CO- or -S0$_{2}$-, and more preferably -S0$_{2}$ -. 

[0085] Each ofRzi, Rz$_{2 }$ and Rz$_{3 }$ independently represents an alkyl group, a monovalent aliphatic hydrocarbon cyclic group, an aryl group, or an aralkyl group. An embodiment in which a part or all of the hydrogen atoms of these groups are substituted with a fluorine atom or a fluoroalkyl group (more preferably a perfluoroalkyl group) is more preferable, and an embodiment in which 30% to 100% of the number of the hydrogen atoms are substituted with fluorine atoms is espe› cially preferable. 

[0086] * represents a bonding position toAr2 in formula (I). 

[0087] The above alkyl group may be linear or branched, and the preferred examples thereof include an alkyl group having 1 to 8 carbon atoms, e.g., a methyl group, an ethyl group, a propyl group, a butyl group, a hexyl group and an octyl group, more preferably an alkyl group having 1 to 6 carbon atoms, and especially preferably an alkyl group hav› ing 1 to 4 carbon atoms. 

[0088] The monovalent aliphatic hydrocarbon cyclic group is preferably a cycloalkyl group, more preferably a monova› lent cycloalkyl group having 3 to 10 carbon atoms, e.g., a cyclobutyl group, a cyclopentyl group, or a cyclohexyl group, and still more preferably a cycloalkyl group having 3 to 6 carbon atoms. 

[0089] The aryl group is preferably an aryl group having 6 to 18 carbon atoms, more preferably anaryl group having 6 to 10 carbon atoms, and especially preferably a phenyl group. 

[0090] The aralkyl group is preferably an aralkyl group obtained by bonding an alkylene group having 1 to 8 carbon atoms and the above aryl group, more preferably an aralkyl group obtained by bonding an alkylene group having 1 to 6 carbon atoms and the above aryl group, and especially pref› erably an aralkyl group obtained by bonding an alkylene group having 1 to 4 carbon atoms and the above aryl group. 

[0091] Each of Rzi, Rz$_{2 }$ and Rz$_{3 }$ is preferably an alkyl group in which a part or all of the hydrogen atoms are sub› stituted with a fluorine atom or a fluoroalkyl group (more preferably a perfluoroalkyl group), and especially preferably an alkyl group in which 30% to 100% of the number of the hydrogen atoms are substituted with fluorine atoms. 

[0092] In the above formulae (ZI) to (ZIII), A+ represents a sulfonium cation or an iodonium cation, and the structure represented by the following formula (ZA-1) or (ZA-2) is preferred. 

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(ZA-1) 

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[0093] In formula (ZA-1), each of R$_{201}$, R 202 and R$_{203 }$ independently represents an organic group. The number of carbon atoms of the organic group as R$_{201}$, R$_{202 }$and R$_{203 }$is generally 1 to 30, and preferably 1 to 20. 

[0094] Any two of R$_{201 }$ to R$_{203 }$may be bonded to form a cyclic structure (including a condensed ring), and an oxygen atom, a sulfur atom, an ester bond, an amido bond, or a carbony 1 group may further be contained in the ring other than the sulfur atom in the formula. As the group formed by bond› ing two ofR$_{201 }$ to R$_{203}$ , an alkylene group (e.g., a butylene group or a pentylene group) can be exemplified. 

[0095] As the organic group represented by R$_{201}$, R$_{202 }$and R$_{203}$, the corresponding groups in the groups represented by formula (ZA-1-1), (ZA-1-2) or (ZA-1-3) described later as the preferred group of the groups represented by formula (ZA-1) can be exemplified, and the especially preferred organic groups are the corresponding groups in the groups represented by formula (ZA-1-1) or (ZA-1-3). 

[0096] In the first place, the group represented by formula (ZA-1-1) is described. 

[0097] The group (ZA-1-1) is such a group that at least one ofR$_{201 }$to R$_{203 }$in formula (ZA-1) is an aryl group, that is, a group having arylsulfonium as a cation. 

[0098] All ofR$_{201 }$to R$_{203 }$may be aryl groups, or a part of R$_{201 }$ to R$_{203 }$ is an aryl group and the remainder may be an alkyl group or a monovalent aliphatic hydrocarbon cyclic group. 

[0099] For example, a group corresponding to triarylsulfo› nium, diarylalkylsulfonium, aryldialkylsulfonium, diarylcy› cloalkylsulfonium, or aryldicycloalkylsulfonium can be exemplified. 

[0100] The aryl group in the arylsulfonium is preferably a phenyl group or a naphthyl group. The aryl group may be an aryl group having a heterocyclic structure having an oxygen atom, a nitrogen atom, a sulfur atom or the like. As the heterocyclic structure, structures such as pyrrole, furan, thiophene, indole, benzofuran and benzothiophene are exem› plified. 

[0101] When the arylsulfonium has two or aryl groups, the two or more aryl groups may be the same with or different from every other aryl group. 

[0102] The alkyl group or monovalent aliphatic hydrocar› bon cyclic group that the arylsulfonium contains according to necessity is preferably a linear or branched alkyl group hav› ing 1 to 15 carbon atoms or a monovalent aliphatic hydrocar› bon cyclic group having 3 to 15 carbon atoms, and the examples thereof include a methyl group, an ethyl group, a propyl group, an n-butyl group, a sec-butyl group, a t-butyl group, a cyclopropyl group, a cyclobutyl group and a cyclo› hexyl group. The monovalent aliphatic hydrocarbon cyclic group is preferably a cycloalkyl group. 

[0103] The aryl group, alkyl group and monovalent ali› phatic hydrocarbon cyclic group ofR$_{201 }$to R$_{203 }$may have, as a substituent, an alkyl group (e.g., having 1 to 15 carbon atoms), a monovalent aliphatic hydrocarbon cyclic group (e.g., having 3 to 15 carbon atoms, preferably a cycloalkyl group having 3 to 15 carbon atoms), an aryl group (e.g., having 6 to 14 carbon atoms), an alkoxy group ( e.g., having 1 to 15 carbon atoms), a halogen atom, a hydroxyl group, or a 

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