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In the case where the polar group contained in the repeating unit having a polar group is an alcoholic hydroxy group or a cyano group, one preferred embodiment of the repeating unit is a repeating unit having an alicyclic hydro- carbon structure substituted with a hydroxyl group or a cyano group. At this time, the repeating unit preferably has 

no acid-decomposable group. The alicyclic hydrocarbon structure in the alicyclic hydrocarbon structure substituted with a hydroxyl group or a cyano group is preferably an adamantyl group, a diamantyl group or a norbomane group. The alicyclic hydrocarbon structure substituted with a hydroxyl group or a cyano group is preferably a partial structure represented by the following formulae (VIIa) to (Vlk). Thanks to this repeating unit, adherence to substrate and affinity for developer are enhanced. 

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In formulae (VIIa) to (Vlk), each of R$_{2}$c to Ric inde› pendently represents a hydrogen atom, a hydroxyl group or a cyano group, provided that at least one of R$_{2}$c to Ric represents a hydroxyl group. A structure where one or two members of R$_{2}$c to R$_{4}$ c are a hydroxyl group with the remaining being a hydrogen atom is preferred. In formula (VIIa), it is more preferred that two members ofR$_{2}$c to Ric are a hydroxyl group and the remaining is a hydrogen atom. 

The repeating unit having a partial structure represented by formulae (VIIa) to (Vlk) includes repeating units rep› resented by the following formulae (Alla) to (AIIc): 

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