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Herein R 1 is hydroxyl, fluorine, chlorine, bromine, amino, nitro, cyano, or a C 1 -C 6 alkyl group, C 1 -C 6 alkoxy group, C 2 -C 6 acyloxy group or C 1 -C 4 alkylsulfonyloxy group, which may be substituted with halogen, or -NR IA ----C (=O)-R 1$_{B}$ $_{or-NR}$1 A----C(=O)-O-R 1$_{B,}$ $_{R}$1 A is hydro› gen or a C 1 -C 6 alkyl group, RIB is a C 1 -C 6 alkyl group or C 2 -C$_{8 }$ alkenyl group. R 2 is a single bond or a C 1 -C$_{20 }$divalent linking group which may contain ether bond, carbonyl moiety, ester bond, amide bond, sultone moiety, lactam moiety, carbonate moiety, halogen, hydroxyl moiety or carboxyl moiety. R 3 is a C 1 -C$_{10 }$alkyl group or CcC$_{10 }$aryl group, which may be substituted with amino, nitro, cyano, C 1 -C$_{12 }$ alkyl, C 1 -C$_{12 }$ alkoxy, C 2 -C$_{12 }$ alkoxycarbonyl, C 2 -C$_{12 }$ acyl, C 2 -C$_{12 }$ acyloxy, hydroxyl or halogen. R 4 is a C 1 -C$_{20 }$ divalent hydrocarbon group which may contain an ester bond or ether bond. Rs is hydrogen, nitro, or a C 1 -C$_{20 }$ monovalent hydrocarbon group which may contain hydroxyl, carboxyl, ether bond, ester bond, thiol, nitro, cyano, halogen or amino, with the proviso that in case of p=l, groups Rs may bond together to form a ring with the nitrogen atom to which they are attached, the ring optionally containing a double bond, oxygen, sulfur or nitrogen; m is an integer of 1 to 5, n is an integer of O to 4, meeting lsm+ns5, p is 1, 2 or 3, q is 1 or 2. Aq- is a carboxylate anion, fluorine-free sulfonimide anion, sulfonamide anion, or halide ion. x+ is a sulfonium cation having the formula (Aa) or ammonium cation having the formula (Ab): 

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Herein R 6 , R 7 and R 8 are each independently fluorine, chlorine, bromine, iodine, or a C 1 -C$_{20 }$ monovalent hydro› carbon group which may contain a heteroatom, R 6 and R 7 may bond together to form a ring with the sulfur atom to which they are attached. R $^{9 }$to R 12 are each independently hydrogen or a C 1 -C 24 monovalent hydrocarbon group which may contain halogen, hydroxyl, carboxyl, thiol, ether bond, ester bond, thioester bond, thionoester bond, dithioester bond, amino, nitro, sulfone or ferrocenyl, R 9 and R $^{10 }$may bond together to form a ring, R $^{9 }$and R $^{10 }$taken together may form =C(R $^{9}$A)(R 10 A), R 9 A and R lOA are each independently hydrogen or a C 1 -C 16 monovalent hydrocarbon group, R 9 A and R lOA may bond together to form a ring with the carbon and nitrogen atoms to which they are attached, the ring optionally containing a double bond, oxygen, sulfur or nitrogen. 

[0024] The resist composition may further comprise an acid generator capable of generating sulfonic acid, imidic acid or methide acid. 

[0025] In a preferred embodiment, the iodized base poly› mer comprises recurring units having the formula (al) or recurring units having the formula (a2). 

Herein RA is each independently hydrogen or methyl, R 21 is a single bond or methylene, R 22 is hydrogen or a C 1 -C 4 alkyl group, X 1 is a single bond, ether bond, ester bond, amide bond, ----C(=O)---0-R 23 -, phenylene, -Ph-C(=O)› O-R24-, or -Ph-R 2 s-O----C(=O)-R 26 -, wherein Ph stands for phenyl, R 23 is a C 1 -C$_{10 }$ alkanediyl group which may contain an ether bond or ester bond, R 24 , R 2 s and R 26 are each independently a single bond or a C 1 -C 6 straight or 

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