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[0102] In a further embodiment, recurring units (d) derived from an onium salt having a polymerizable unsatu› rated bond may be incorporated in the base polymer. The preferred recurring units ( d) are recurring units having the following formulae (dl), (d2) and (d3). These units are simply referred to as recurring units (dl), (d2) and (d3), which may be used alone or in combination of two or more types. 

[0103] In formulae (dl) to (d3), RA is each independently hydrogen or methyl. Z 1 is a single bond, phenylene, ---O-Z 11 -, -C(=0)-0-Z 11 - or -C(=0)-NH› Z11-, wherein Z 11 is a C$_{1}$-C$_{6 }$ alkanediyl group, C$_{2}$-C$_{6 }$ 

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