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[0480] The hydrophobic resin (D) may be used singly or in combination of two or more kinds thereof. 

[0481] It is preferable to use a mixture of two or more kinds of hydrophobic resins (D) having different levels of surface energy from the viewpoint of satisfying both the immersion liquid tracking properties and the devel› opment characteristics upon liquid immersion expo› sure. 

[0482] A content of the hydrophobic resin (D) in the composition is preferably 0.01 % to 10.0% by mass, and more preferably 0.05% to 8.0% by mass, with respect to the total solid content in the composition. 

[0483] <Solvent (E)> 

[0484] The composition of the embodiment of the pres› ent invention may include a solvent. 

[0485] In the composition of the embodiment of the present invention, a known resist solvent can be appro› priately used. For example, the known solvents dis› closed in paragraphs [0665] to [0670] of the specifica› tion of US2016/0070167Al, paragraphs [0210] to [0235] of the specification of US2015/0004544Al, paragraphs [0424] to [0426] of the specification of US2016/0237190Al, and paragraphs [0357] to [0366] of the specification of US2016/0274458Al can be suitably used. 

[0486] Examples of the solvent which can be used in preparation of the composition include organic solvents such as alkylene glycol monoalkyl ether carboxylate, alkylene glycol monoalkyl ether, alkyl lactate, alkyl alkoxypropionate, a cyclic lactone (preferably having 4 to 10 carbon atoms), a monoketone compound (pref- 

erably having 4 to 10 carbon atoms) which may have a ring, alkylene carbonate, alkyl alkoxyacetate, and alkyl pyruvate. 

[0487] As the organic solvent, a mixed solvent obtained by mixing a solvent having a hydroxyl group in the structure and a solvent having no hydroxyl group may be used. As the solvent having a hydroxyl group and the solvent having no hydroxyl group, the above-exempli› fied compounds can be appropriately selected, but as the solvent having a hydroxyl group, alkylene glycol monoalkyl ether or alkyl lactate is preferable, and propylene glycol monomethyl ether (PGME), propyl› ene glycol monoethyl ether (PGEE), methyl 2-hy› droxyisobutyrate, or ethyl lactate is more preferable. Further, as the solvent having no hydroxyl group, alkylene glycol monoalkyl ether acetate, alkylalkoxy› propionate, a monoketone compound which may have a ring, a cyclic lactone, alkyl acetate, or the like is preferable, and among these, propylene glycol monom› ethyl ether acetate (PGMEA), ethyl ethoxypropionate, 2-heptanone, y-butyrolactone, cyclohexanone, cyclo› pentanone, or butyl acetate is more preferable, and propylene glycol monomethyl ether acetate, y-butyro› lactone, ethyl ethoxypropionate, cyclohexanone, cyclo› pentanone, or 2-heptanone are more preferable. As a solvent having no hydroxyl group, propylene carbonate is also preferable. 

[0488] A mixing ratio (mass ratio) of the solvent having a hydroxyl group to the solvent having no hydroxyl group is 1/99 to 99/1, preferably 10/90 to 90/10, and more preferably 20/80 to 60/40. A mixed solvent including 50% by mass or more of the solvent having no hydroxyl group is preferable from the viewpoint of coating evenness. 

[0489] The solvent preferably includes propylene gly› col monomethyl ether acetate, and may be a single solvent of propylene glycol monomethyl ether acetate or a mixed solvent of two or more kinds including propylene glycol monomethyl ether acetate. 

[0490] <Crosslinking Agent (F)> 

[0491] The composition of the embodiment of the pres› ent invention may include a compound (hereinafter also referred to as a crosslinking agent (F)) which crosslinks a resin by the action of an acid. As the crosslinking agent (F), a known compound can be appropriately used. For example, the known compounds disclosed in paragraphs [0379] to [0431] of the specification of US2016/0147154Al and paragraphs [0064] to [0141] of the specification of US2016/0282720Al can be suitably used as the crosslinking agent (F). 

[0492] The crosslinking agent (F) is a compound having a crosslinkable group capable of crosslinking a resin, and examples of the crosslinkable group include a hydroxymethyl group, an alkoxymethyl group, an acy› loxymethyl group, an alkoxymethyl ether group, an oxirane ring, and an oxetane ring. 

[0493] The crosslinkable group is preferably a hydroxymethyl group, an alkoxymethyl group, an oxi› rane ring, or an oxetane ring. 

[0494] The crosslinking agent (F) is preferably a com› pound (also including a resin) having two or more crosslinking groups. 

[0495] The crosslinking agent (F) is more preferably a phenol derivative having a hydroxymethyl group or an 

