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Tertiary Alkyloxycarbonyl Acid Dissociable Group: 

Of the above-described polar groups, examples of the acid dissociable group which protects a hydroxyl group include an acid dissociable group represented by the following general formula (al-r-3) (hereinafter, sometimes referred to as "ter- tiary alkyloxycarbonyl acid dissociable group" for the sake of convenience). 

[Chemical formula 26] 

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In the formula, each of Ra 0 to Ra’ 9 represents an alkyl group. 0 

In the formula (al-r-3), eachofRa to Ra’$^{9 }$is preferably an alkyl group having 1 to 5 carbon atoms, and more preferably an alkyl group having 1 to 3 carbon atoms. 

In addition, the total number of carbon atoms of the respec- tive alkyl groups is preferably 3 to 7, more preferably 3 to 5, and most preferably 3 to 4. 

Examples of the constituent unit (al) include a constituent unit derived from an acrylic ester in which the hydrogen atom 

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(al-r-3) 

