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Target feature for Lithographic Examples Ll-L9, L19-L24 and L31 is LIS (1: 1); Lithographic 

Examples L27-L29, L32-L35 is Trenches 1: 1. 

SB/PEBT: soft bake temperature/post exposure bake temperature Lithographic Examples 1, 6, 

27 and 34 are comparative examples. 

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Lithographic Examples 1, 6, 27 and 34 are comparative examples. 

