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[0134] The "hydrocarbon group having a polar group" includes a group in which a polar group is present between carbon chains (carbon atoms) and a group in which at least one hydrogen atom constituting the hydrocarbon group has been substituted with a polar group. 

[0135] Examples of the "hydrocarbon group having a polar group" include a functional group represented by general formula (a0-pl) shown below. 

In the formula, Ra 04 represents a divalent hydrocarbon group having 2 to 12 carbon atoms; Ra 05 represents a divalent linking group containing a hetero atom; Ra$^{06 }$rep› resents a monovalent hydrocarbon group having 1 to 12 carbon atoms; and npo represents an integer of 1 to 6. 

[0136] In formula (a0-p 1), Ra 04 represents a divalent hydrocarbon group having 2 to 12 carbon atoms. 

[0137] Ra$^{04 }$has 2 to 12 carbon atoms, preferably 2 to 8 carbon atoms, more preferably 2 to 6 carbon atoms, still more preferably 2 to 4 carbon atoms, and most preferably 2 carbon atoms. 

[0138] The hydrocarbon group for Ra 04 is preferably a chain or cyclic aliphatic hydrocarbon group, and more preferably a chain hydrocarbon group. 

[0139] Examples of Ra 04 include a linear alkanediyl group, such as an ethylene group, a propane-1,3-diyl group, butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane- 1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, and a dodecane-1,12-diyl group; a branched alkanediyl group, such as a propane-1,2- diyl group, a l-methylbutane-1,3-diyl group, a 2-methylpro› pane-1,3-diyl group, a pentane-1,4-diyl group, and a 2-meth› ylbutane-1,4-diyl group; a cycloalkanediyl group, such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, and a cyclooctane-1,5-diyl group; and a polycyclic divalent alicyclic hydrocarbon group, such as a norbomane-1,4-diyl group, a norbomane- 2,5-diyl group, an adamantane-1,5-diyl group, and an ada› mantane-2,6-diyl group. 

[0140] Among these examples, an alkanediyl group is preferable, and a linear alkanediyl group is more preferable. 

[0141] In formula (a0-p 1), Ra 05 represents a divalent linking group containing a hetero atom. 

[0142] Examples of Ra 05 include -0-, ----C(=O)-, -C(=O)-, ---O-C(=O)---0-, -C(=O)-NH-, -NH-, -NH-C(=NH)- (H may be substituted with a substituent such as an alkyl group or an acyl group), -S-, -S(=O)$_{2}$-, and -S(=O)$_{2}$---0-. 

[0143] Among these examples, in terms of solubility in a developing solution, -0-, -C(=O)---0-, -C(=O)-, or ---O-C(=O)---0- are preferable, and -0- or ----C(=O)- is most preferable. 

[0144] In formula (a0-pl), Ra$^{06 }$represents a monovalent hydrocarbon group having 1 to 12 carbon atoms. 

[0145] Ra$^{06 }$has 1 to 12 carbon atoms. In terms of solu› bility in a developing solution, Ra$^{06 }$preferably has 1 to 8 carbon atoms, more preferably 1 to 5 carbon atoms, still more preferably 1 to 3 carbon atoms, still more preferably 1 or 2 carbon atoms, and most preferably 1 carbon atoms. 

(aO-pl) 

[0146] Examples of the hydrocarbon group for Ra 06 include a chain hydrocarbon group, a cyclic hydrocarbon group, and a combination of a chain hydrocarbon group and a cyclic hydrocarbon group. 

[0147] Examples of the chain hydrocarbon group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, a 2-ethylhexyl group, an n-octyl group, an n-nonyl group, an n-decyl group, an n-undecyl group and an n-dodecyl group. 

[0148] The cyclic hydrocarbon group may be an alicyclic hydrocarbon group or an aromatic hydrocarbon group. 

[0149] The alicyclic hydrocarbon group may be monocy› clic or polycyclic. Examples of monocyclic alicyclic hydro› carbon groups include cycloalkyl groups, such as a cyclo› propyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a dimethylcyclohexyl group, a cyclohep› tyl group, a cyclooctyl group, a cycloheptyl group, and a cyclodecyl group. Examples of polycyclic alicyclic hydro› carbon groups include a decahydronaphthyl group, an ada› mantyl group, a 2-alkyladamantan-2-yl group, a l-(adaman› tan-1-yl)alkan-l-yl group, a norbomyl group, a methylnorbomyl group, and an isonorbomyl group. 

[0150] Examples of aromatic hydrocarbon groups include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-ada› mantylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a biphenyl group, a phenanthryl group, 2,6-diethylphenyl group, and 2-methyl-6-ethyl phe› nyl group. 06 

[0151] In terms of solubility in a developing solution, Ra is preferably a chain hydrocarbon group, more preferably an alkyl group, and still more preferably a linear alkyl group. 

[0152] In formula (a0-pl), npo is an integer of 1 to 6, preferably an integer of 1 to 3, more preferably 1 or 2, and still more preferably 1. 

[0153] Specific examples of the hydrocarbon group hav› ing a polar group are shown below. 

[0154] In the following formulae, * represents a valence bond which is bonded to the quaternary carbon atom (Ya 0 ). 

<img src='content_image/901921.jpg'>

[0155] In formula (a0-rl-1), at least one of Ra 031 , Ra 032 and Ra 033 is a hydrocarbon group having a polar group. 

