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can be mentioned those similar to the repeating units having an acid decomposable group set forth with respect to the resin (B). The content ofrepeating units having a group (z) that is decomposed by the action of an acid in the hydrophobic resin (HR) is preferably in the range of 1 to 80 mo! %, more preferably 10 to 80 mo!% and still more preferably 20 to 60 mo!% based on all the repeating units of the polymer. 

The hydrophobic resin (HR) may further have any of the repeating units of general formula (III) below. 

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In general formula (III), 

Rc3$_{1 }$ represents a hydrogen atom, an alkyl group, an alkyl group substituted with a fluorine atom, a cyano group or -CH$_{2}$---0-Rac$_{2 }$ group, wherein Rac$_{2 }$ represents a hydrogen atom, an alkyl group or an acyl group. Rc3$_{1 }$ is preferably a hydrogen atom, a methyl group, a hydroxymethyl group or a trifluoromethyl group, especially preferably a hydrogen atom or a methyl group. 

Rc3$_{2 }$ represents a group having any of an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group and an aryl group. These groups may optionally be substituted with a fluorine atom or a silicon atom. 

Lc3 represents a single bond or a bivalent connecting group. 

In general formula (III), the alkyl group represented by Rc3$_{2 }$is preferably a linear or branched alkyl group having 3 to 20 carbon atoms. 

The cycloalkyl group is preferably a cycloalkyl group hav› ing 3 to 20 carbon atoms. 

The alkenyl group is preferably an alkenyl group having 3 to 20 carbon atoms. 

The cycloalkenyl group is preferably a cycloalkenyl group having 3 to 20 carbon atoms. 

The aryl group is preferably a phenyl group or a naphthyl group having 6 to 20 carbon atoms. These groups may have a substituent. 

Preferably, Rc3$_{2 }$represents an unsubstituted alkyl group or an alkyl group substituted with a fluorine atom. 

The bivalent connecting group represented by Lc3 is pref› erably an alkylene group (preferably having 1 to 5 carbon atoms), an oxy group, a phenylene group or an ester bond (group of the formula -COO-). 

Further, the hydrophobic resin (HR) may preferably have any of the repeating units of general formula (CII-AB) below. 

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In the general formula (CII-AB), 

each of Rell’ and Rc1$_{2}$ , independently represents a hydro› gen atom, a cyano group, a halogen atom or an alkyl group. 

Zc’ represents an atomic group for forming an alicyclic structure which contains two bonded carbon atoms (C-C). 

Specific examples of the repeating units of the general formula (III) and general formula (CII-AB) will be shown below, which however in no way limit the scope of the present invention. In the formulae, Ra represents H, CH$_{3}$ , CH$_{2}$OH, CF$_{3 }$ orCN. 

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