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PAG-K: compound described in JP-A 2008-268744 

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Alkali-Soluble Surfactant (SF-1): 

poly(2,2,3,3,4,4,4-heptafluoro- l-isobutyl-1-butyl metha› orylate/9-(2,2,2-trifluoro-l-trifluoroethyloxy-carbo- nyl)-4-oxatricyclo[ 4.2. l .0 $^{3}$-7Jnonan-5-on-2-yl meth- acrylate) 

Mw=7,700 

Mw/Mn=l.82 

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Surfactant A: 

3-methy 1-3-(2,2,2-trifluoroethoxymethy l)oxetane/tetra› hydrofuran/2,2-dimethyl-1, 3-propanediol copolymer (Onmova Solutions, Inc.) 

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a:(b+b’):(c+c’)=l:4-7:0.01-1 (molar ratio) 

Mw=l,500 

