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20 In formulae (3-1) and (3-2), R$^{401 }$is hydrogen, hydroxyl, carboxyl, nitro, cyano, fluorine, chlorine, bromine, amino group, or a C$_{1 }$-C$_{20 }$alkyl, C$_{1 }$-C$_{20 }$alkoxy, C$_{2}$-C$_{20 }$alkoxycar› bonyl, C$_{2}$ -C$_{20 }$ acyloxy or C$_{1 }$-C$_{4 }$ alkylsulfonyloxy group, which may contain fluorine, chlorine, bromine, hydroxy, amino or alkoxy moiety, or -NR 407 -C(=O)-R 408 or 25 -NR$^{407}$C(=O)-O-R 408 , wherein R $^{407 }$is hydrogen, or a C$_{1 }$-C$_{6 }$ alkyl group which may contain halogen, hydroxy, alkoxy, acyl or acyloxy moiety, R$^{408 }$is a C$_{1 }$-C$_{16 }$ alkyl or C$_{2}$-C$_{16 }$ alkenyl group, or CcC$_{12 }$ aryl group, which may contain halogen, hydroxy, alkoxy, acyl or acyloxy moiety. 11 30 

X is a single bond or a C$_{1}$-C$_{20 }$ divalent linking group when r=l, or a C$_{1}$-C$_{20 }$tri- or tetravalent linking group when r=2 or 3, the linking group optionally containing an oxygen, sulfur or nitrogen atom. Rf$^{11 }$to Rf$^{14 }$are each independently hydrogen, fluorine or trifluoromethyl, at least one of Rf$^{11 }$to Rf 14 being fluorine or trifluoromethyl, or Rf 11 and Rf 12 , taken together, may form a carbonyl group. 402 403 404 

R , R , R , R $^{405 }$and R$^{406 }$are each independently a C$_{1 }$-C$_{12 }$ alkyl group, C$_{2}$-C$_{12 }$ alkenyl group, C$_{2}$ -C$_{12 }$ alkynyl group, CcC$_{20 }$ aryl group, C$_{7}$-C$_{12 }$ aralkyl group or C$_{7}$ -C$_{12 }$ aryloxyalkyl group, in which at least one hydrogen (one or more or even all hydrogen atoms) may be substituted by a hydroxy, carboxy, halogen, cyano, oxo, amide, nitro, sul› tone, sulfone or sulfonium salt-containing moiety, or in which at least one carbon may be substituted by an ether, ester, carbonyl, carbonate or sulfonic acid ester moiety. R 402 and R$^{403 }$may bond together to form a ring with the sulfur atom to which they are attached. The subscript r is an integer of 1 to 3, s is an integer of 1 to 5, and t is an integer of Oto 3. 

The foregoing alkyl, alkoxy, alkoxycarbonyl, alkylsulfonyloxy, alkenyl and alkynyl groups straight, branched or cyclic. acyloxy, may be 

Further, sulfonium and iodonium salts of iodized ben› zene-containing fluorinated sulfonic acid having the formu- lae (3-3) and (3-4) are useful as the PAG. 

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In formulae (3-3) and (3-4). R$^{411 }$is each independently a hydroxyl, C$_{1 }$-C$_{20 }$ alkyl or alkoxy group, C$_{2}$-C$_{20 }$ acyl or acyloxy group, fluorine, chlorine, bromine, amino, or alkoxycarbonyl-substituted amino group. R $^{412 }$is each inde› pendently a single bond or C$_{1 }$-C$_{4 }$ alkylene group. R$^{413 }$is a single bond or C$_{1}$-C$_{20 }$divalent linking group when u=l, or a C$_{1}$-C$_{20 }$tri- or tetravalent linking group when u=2 or 3, the linking group optionally containing an oxygen, sulfur or nitrogen atom. 

Rf$^{21 }$to Rf$^{24 }$are each independently hydrogen, fluorine or trifluoromethyl, at least one ofR:f2$^{1 }$to Rf$^{24 }$being fluorine or trifluoromethyl, or Rf2 $^{1 }$and Rf2 2 , taken together, may form a carbonyl group. 414 415 416 

R , R , R , R $^{417 }$and R$^{418 }$are each independently a C$_{1 }$-C$_{12 }$alkyl group, C$_{2}$-C$_{12 }$alkenyl group, CcC$_{20 }$ aryl group or C$_{7}$-C$_{12 }$ aralkyl or aryloxoalkyl group, in which at least one hydrogen ( one or more or even all hydrogen atoms) may be substituted by a hydroxyl, carboxyl, halogen, cyano, oxo, amide, nitro, sultone, sulfone, or sulfonium salt-containing moiety, or in which at least one carbon may be substituted by an ether, ester, carbonyl, carbonate or sulfonic acid ester moiety. R$^{414 }$and R$^{415 }$may bond together to form a ring to with the sulfur atom to which they are attached. The subscript u is an integer of 1 to 3, v is an integer of 1 to 5, and w is an integer of 0 to 3. 

The foregoing alkyl, alkoxy, acyl, acyloxy and alkenyl groups may be straight, branched or cyclic. 

The cation moiety in the sulfonium salt having formula (3-1) or (3-3) is as exemplified above for the cation moiety in formula (d4). The cation moiety in the iodonium salt having formula (3-2) or (3-4) is as exemplified above for the cation moiety in formula ( d5). 

Examples of the anion moiety in the onium salts having formulae (3-1) to (3-4) are given below, but not limited thereto. 

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