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[0198] Intermediate 8 was obtained by the same procedure as in Synthesis Examples 1-1-1 to 1-1-2 aside from using Reactant 7 instead of Reactant 2. 

[0199] Intermediate 9 was obtained by the same procedure as in Synthesis Example 1-1-3 aside from using Reactant 8 instead of Reactant 3. 

[0200] PAG-5 was synthesized by the same procedure as in Synthesis Examples 1-1-4 to 1-1-6 aside from using Intermediate 9 instead of Intermediate 3, and benzyltrim› ethy !ammonium 1, 1,3 ,3 ,3-pentafluoro-2-hydroxypropane› l -sulfonate instead of benzyltrimethylammonium 1,1-dif› luoro-2-hydroxyethane-l-sulfonate. 

[0201] PAG-5 was analyzed by IR spectroscopy and LC› MS, with the data shown below. FIG. 4 is the $^{1}$H-NMR/ DMSO-d$_{6 }$ spectrum of PAG-5. 

[0202] IR (D-ATR): v=3486, 3097, 2976, 1587, 1493, 1448, 1401, 1369, 1318, 1245, 1161, 1107, 1087, 1060, 1012, 998,913,884,834,751,741,690,642,593,553,525 cm- 1 

[0203] LC-MS: positive [M+Ht 713 

## Synthesis Example 1-5-1 

## Synthesis of Intermediate 8 

## Synthesis Example 1-5-2 

## Synthesis of Intermediate 9 

## Synthesis Example 1-5-3 

## Synthesis of PAG-5 

## Synthesis of Additional Acid Generators PAG-6 to PAG-11 

[0204] 

<img src='content_image/914028.jpg'>

<img src='content_image/914029.jpg'>

<img src='content_image/914030.jpg'>

## Synthesis Examples 1-6 to 1-11 

