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As for the acid generator, one kind of an acid generator may be used alone, or two or more kinds of acid generators may be used in combination. In the case of using two or more kinds of acid generators in combination, for example, (1) an embodi- 55 ment where two kinds of PA Gs differing in the acid strength are used in combination, and (2) an embodiment where two kinds of acid generators differing in the size (molecular weight or carbon number) of the generated acid are used in combination, are preferred. 60 

Examples of the embodiment (1) include a combination use of a sulfonic acid generator having fluorine and a tris (fluoroalkylsulfonyl)methide acid generator, a combination use of a sulfonic acid generator having fluorine and a sulfonic acid generator having no fluorine, and a combination use of an alkylsulfonic acid generator and an arylsulfonic acid genera- tor. 

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Examples of the embodiment (2) include a combination use of two kinds of acid generators differing in the carbon number of the generated acid anion by 4 or more. 

The content of the acid generator (in the case of using a plurality of acid generators in combination, the total amount) in the composition is preferably from 0.1 to 30 mass %, more preferably from 0.5 to 20 mass%, still more preferably from 1 to 15 mass %, based on the entire solid content of the composition. 

[ 4] Basic Compound 

The resist composition of the present invention preferably contains a basic compound. 

The basic compound is preferably a nitrogen-containing organic basic compound. 

