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$^{19}$F-NMR (500 MHz, in DMSO-d$_{6}$ ): o=-76.1 (6F, m), - 74.5 (6F, m) ppm 

Time-of-flight mass spectrometry (TOFMS; MALDI) POSITIVE M+459 (equivalent to C$_{22}$H$_{17}$F$_{6}$ 0 $_{2}$S+) NEGATIVE M-211 (equivalent to C$_{4}$HF$_{6}$ 0 3 -) 

## [Synthesis Example 1-10] Synthesis of PAG-10 for Comparison 

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A mixed solution of a photo acid generator (PAG-3) (7.8 40 g), a sulfonate salt (6-1) (8.6 g), methylisobutylketone (50 g), and pure water (30 g) was stirred for 10 minutes to dispense an organic layer. The obtained organic layer was cleaned with pure water ( 40 g) 4 times, and concentrated under reduced pressure to remove a solvent by evaporation. 45 By silica gel column chromatography and purification, a target photo acid generator (PAG-10) (9.5 g) was synthe› sized as an amorphous solid (yield: 87%). The PAG-10 is a 

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sulfonium salt having a cation represented by the general formula (1’), not the sulfonium salt of the present invention. <PAG-10> 

$^{1 }$H-NMR (500 MHz, in DMSO-d$_{6}$ ): o=l.64 (6H, m), 1.83 (6H, d), 1.95 (3H, s), 3.54 (2H, s), 4.55 (2H, s), 7.41 (2H, m), 7.74-7.79 (SH, m), 7.81-7.86 (4H, m), 8.56 (lH, s) ppm 

$^{19}$F-NMR (500 MHz, in DMSO-d$_{6}$ ): o=-76.1 (6F, s), -72.3 (6F, s) ppm 

Time-of-flight mass spectrometry (TOFMS; MALDI) POSITIVE M+459 (equivalent to C$_{22}$H$_{17}$F$_{6}$ 0 $_{2}$S+) NEGATIVE M-423 (equivalent to C$_{15}$H$_{17}$F$_{6}$ 0 $_{5}$S-) 

## [Synthesis Example 1-11] Synthesis of PAG-11 for Comparison 

