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In the formula, 

each ofXf s independently represents a fluorine atom or an alkyl group substituted with at least one fluorine atom, and 

z is preferably an integer of0 to 5, more preferably Oto 3. 

G represents a single bond, an alkylene group (including a cycloalkylene group) or arylene group optionally containing an ether oxygen, or a group constituted of a combination thereof. The combined groups may be connected to each other through an oxygen atom. When G is a group other than a single bond, the group preferably has 1 to 10 carbon atoms, more preferably 1 to 5 carbon atoms. 

As the bivalent connecting group represented by L, there can be mentioned, for example, --COO-, ---OCO-, -CO-, -0-, -S-, -SO-, -SO$_{2}$-, -SO 3 -, -NH-, an alkylene group, a cycloalkylene group or an alkenylene group. Of these, -COO-, -OCO-, --CO-, -0-, -S-, -SO-, -SO$_{2}$ - and -SO$_{3}$ - are pre› ferred. -COO-, ---OCO-, -SO$_{2}$ - and -SO$_{3}$ - are more preferred. 

In the formula, y is preferably an integer of 0 to 4, more preferably 0 to 2. 

As the optionally substituted organic group represented by D, there can be mentioned an optionally substituted aromatic group or aliphatic group. The aromatic group or aliphatic group may contain a heteroatom. The organic group repre› sented by D preferably has 1 to 50 carbon atoms, more pref› erably 1 to 30 carbon atoms. 

It is preferred for the optionally substituted aromatic group represented by D to be any of groups of general formula (V) below. 

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In the formula, 

Ar represents an aromatic ring, in which a substituent other than -(A-B) groups may further be introduced, and 

p is an integer of 1 or greater. 

A represents a single bond or any one, or a combination of two or more members selected from among an alkylene group, ---0-, -S-, ----C(=O)-, ----C(=O)O-, -S(=O)-, -S(=O)$_{2}$ - and---OS(=O)$_{2}$-. 

B represents a group containing an aliphatic group having 3 or more carbon atoms. 

When pis 2 or greater, a plurality of -(A-B) groups may be identical to or different from each other. 

* represents a site of connection to L of general formula (II). 

The aromatic ring represented by Ar $^{2 }$preferably has 6 to 30 carbon atoms, and may contain a heteroatom. A substituent other than -(A-B) groups may further be introduced in the aromatic ring represented by Ar. 

As the aromatic ring, there can be mentioned, for example, a benzene ring, a naphthalene ring, a pentalene ring, an indene ring, an azulene ring, a heptalene ring, an indecene ring, a perylene ring, a pentacene ring, an acenaphthalene ring, a 

phenanthrene ring, an anthracene ring, a naphthacene ring, a chrysene ring, a triphenylene ring, a fluorene ring, a biphenyl ring, a pyrrole ring, a furan ring, a thiophene ring, an imida› zole ring, an oxazole ring, a thiazole ring, a pyridine ring, a pyrazine ring, a pyrimidine ring, a pyridazine ring, an iodoliz› ine ring, an indole ring, a benzofuran ring, a benzothiophene ring, an isobenzofuran ring, a quinolizine ring, a quinoline ring, a phthalazine ring, a naphthyridine ring, a quinoxaline ring, a quinoxazoline ring, an isoquinoline ring, a carbazole ring, a phenanthridine ring, an acridine ring, a phenanthroline ring, a thianthrene ring, a chromene ring, a xanthene ring, a phenoxathiin ring, a phenothiazine ring, a phenazine ring and the like. Of these, a benzene ring, a naphthalene ring and an anthracene ring are preferred from the viewpoint of simulta- neous attainment of roughness enhancement and sensitivity increase. A benzene ring is more preferred. 

When a substituent other than -(A-B) groups is further introduced in the aromatic ring, as such a substituent, there can be mentioned, for example, a halogen group such as a fluorine atom, a chlorine atom, a bromine atom or an iodine atom; a methoxy group or an ethoxy group; an aryloxy group such as a phenoxy group or a p-tolyloxy group; a methylth› ioxy group or an ethylthioxy group; an arylthioxy group such as a phenylthioxy group or a p-tolylthioxy group; a methoxy- carbonyl group or an ethoxycarbonyl group; an aryloxycar› bonyl group such as a phenoxycarbonyl group; an acetoxy group; a methyl group or an ethyl group; a vinyl group; an acetylene group; an aryl group such as a phenyl group or a tolyl group; a non-acetyl acyl group such as a benzoyl group or a toluoyl group; a hydroxyl group; a carboxyl group; a sulfonate group and the like. Of these, a methyl group, an ethyl group and a hydroxyl group are preferred from the viewpoint of roughness improvement. 

It is preferred for A to be constituted of fewer atoms from the viewpoint of resolution and roughness. Preferably, A rep› resents a single bond, ---0-, -S- or --CO$_{2}$ -. A single bond is most preferred. 

As the aliphatic group having 3 or more carbon atoms represented by B, there can be mentioned a noncyclic hydro› carbon group or a cycloaliphatic group. 

As the noncyclic hydrocarbon group having 3 or more carbon atoms, there can be mentioned an isopropyl group, a t-butyl group, a t-pentyl group, a neopentyl group, ans-butyl group, an isobutyl group, an isohexyl group, a 3,3-dimethyl- pentyl group, a 2-ethylhexyl group and the like. The noncyc› lic hydrocarbon group more preferably has 3 to 20 carbon atoms. A substituent may be introduced in the noncyclic hydrocarbon group. 

As the cycloaliphatic group having 3 or more carbon atoms, there can be mentioned a cycloalkyl group such as a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group or a cyclooctyl group, anadamantyl group, a norbomyl group, a bomyl group, a camphenyl group, a decahydronaphthyl group, a tricyclodecanyl group, a tetracy- clodecanyl group, a camphoroyl group, a dicyclohexyl group, a pinenyl group and the like. The cycloaliphatic group pref› erably has 5 to 20 carbon atoms. A substituent may be intro› duced in the cycloaliphatic group. 

When a substituent is introduced in the noncyclic hydro- carbon group or cycloaliphatic group, as such a substituent, there can be mentioned, for example, a halogen group such as a fluorine atom, a chlorine atom, a bromine atom or an iodine atom; an alkoxy group such as a methoxy group, an ethoxy group or a tert-butoxy group; an aryloxy group such as a phenoxy group or a p-tolyloxy group; an alkylthioxy group such as a methylthioxy group, an ethylthioxy group or a tert-butylthioxy group; an arylthioxy group such as a phe- 

