content_image/943528.jpg content_image/943529.jpg content_image/943530.jpg content_image/943531.jpg content_image/943532.jpg content_image/943533.jpg content_image/943534.jpg content_image/943535.jpg content_image/943536.jpg content_image/943537.jpg
<img src='content_image/943528.jpg'>

<img src='content_image/943529.jpg'>

<img src='content_image/943530.jpg'>

<img src='content_image/943531.jpg'>

-continued 

PAG-15 

PAG-16 

PAG-17 

PAG-18 

<img src='content_image/943532.jpg'>

<img src='content_image/943533.jpg'>

[0370] [ Acid Diffusion Control Agent (C)] 

[0371] The active light-sensitive or radiation-sensitive resin composition of the present invention preferably con› tains an acid diffusion control agent (C). The acid diffusion control agent acts as a quencher which traps the acid gener› ated from an acid generator or the like at the time of exposure and suppresses the reaction of an acid decomposable resin in the unexposed portion, due to the excessively generated acid. As the acid diffusion control agent, a basic compound, a low molecular compound having a nitrogen atom and a group leaving due to the action of an acid, a basic compound of which the basicity is reduced or lost by irradiation with active light or radiation, or an onium salt which becomes a relatively weak acid with respect to an acid generator can be used. 

[0372] As the basic compound, a compound having a struc› ture represented by any one of the following Formulas (A) to (E) can be preferably exemplified. 

<img src='content_image/943534.jpg'>

<img src='content_image/943535.jpg'>

<img src='content_image/943536.jpg'>

<img src='content_image/943537.jpg'>

-continued 

PAG-19 

PAG-20 

(A) 

(B) 

(C) 

(D) 

