content_image/920981.jpg content_image/920966.jpg content_image/920980.jpg content_image/920987.jpg content_image/920988.jpg
# c19) United States c12) Patent Application Publication 

# NAKAMURA et al. 

# (54) NEGATIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIST FILM, PATTERN FORMING METHOD, CURED FILM, AND METHOD OF PRODUCING CURED FILM 

(71) Applicant: TOKYO OHKA KOGYO CO., LTD., kawasaki-shi (JP) 

(72) Inventors: Ryosuke NAKAMURA, Kawasaki-shi (JP); Tomoyuki ANDO, Kawasaki-shi (JP); Tokunori YAMADAYA, Kawasaki-shi (JP) 

(21) Appl. No.: 16/326,865 

(22) PCT Filed: Aug. 28, 2017 

(86) PCT No.: PCT/JP2017/030721 § 371 (c)(l), (2) Date: Feb. 20, 2019 

## (30) Foreign Application Priority Data 

Aug. 31, 2016 (JP) ................................. 2016-170206 

(51) Int. Cl. 

<img src='content_image/920981.jpg'>

## Publication Classification 

<img src='content_image/920966.jpg'>

US 20190235380Al 

# c10) Pub. No.: US 2019/0235380 Al 

# (43) Pub. Date: Aug. 1, 2019 

<img src='content_image/920980.jpg'>

(52) U.S. Cl. CPC ............ G03F 71038 (2013.01); G03F 710385 (2013.01); C09D 163/00 (2013.01); C09D 163/04 (2013.01); G03F 7111 (2013.01); G03F 7140 (2013.01); G03F 71168 (2013.01); G03F 712004 (2013.01); G03F 7138 (2013.01); G03F 71325 (2013.01); G03F 7116 (2013.01) 

## (57) ABSTRACT 

A negative type photosensitive resin composition containing an epoxy group-containing resin; a metal oxide; and a cationic polymerization initiator (I). The cationic polymer› ization initiator (I) contains one or more of a compound represented by Formula (Il) and a compound represented by Formula (I2). In Formula (Il ), R$^{601 }$to R$^{604 }$represent an aryl group which may have a substituent or a fluorine atom. In Formula (I2), R$^{605}$represents a fluorinated alkyl group which may have a substituent or a fluorine atom. A plurality of R$^{605}$’s may be the same as or different from one another. q represents an integer of 1 or greater, and Q $^{1}$+’s each inde› pendently represent a q-valent organic cation. 

<img src='content_image/920987.jpg'>

<img src='content_image/920988.jpg'>

