content_image/943942.jpg content_image/943949.jpg content_image/943950.jpg content_image/943955.jpg
<img src='content_image/943942.jpg'>

[0256] In addition to these, specific examples of the repeating unit D include the repeating units disclosed in paragraphs [0415] to [0433] of the specification ofUS2016/ 0070167Al. 

[0257] The resin (AXl) may have the repeating unit D singly or in combination or two or more kinds thereof. 

[0258] A content of the repeating unit D (in a case where the repeating units D are present in a plural number, a total content thereof) is preferably 5% to 60% by mole with respect to all the repeating units in the resin (AXl). 

[0259] • Repeating Unit E 

[0260] The resin (AXl) preferably further includes a repeating unit (hereinafter also referred to as a "repeat› ing unit E") having a fluorine atom or an iodine atom. Further, the repeating unit E does not include the above-mentioned repeating unit A, repeating unit B, repeating unit C, and repeating unit D. Particularly, in a case of pattern formation by EUV exposure, it is preferable that the resin (AXl) includes the repeating unit E. 

[0261] Specific examples of a monomer corresponding to the repeating unit E are shown below, but the present invention is not limited to these specific examples. 

<img src='content_image/943949.jpg'>

<img src='content_image/943950.jpg'>

[0262] • Repeating Unit F 

[0263] The resin (AXl) further contains a repeating unit (hereinafter also referred to as a "repeating unit F") other than the above-described repeating unit A, repeat› ing unit B, repeating unit C, repeating unit D, and repeating unit E. 

[0264] The repeating unit F preferably has an alicyclic hydrocarbon structure. Examples of the repeating unit F include the repeating units described in paragraphs [0236] and [0237] of the specification of US2016/ 0026083Al. 

[0265] Preferred examples of a monomer corresponding to the repeating unit F are shown below. 

<img src='content_image/943955.jpg'>

