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preferably 3% by mole to 98% by mole, and still more pref› erably 5% by mole to 95% by mole, with respect to all the repeating units in the hydrophobic resin. 

[0437] With respect to the hydrophobic resin, examples of the repeating unit having a group (z) capable of decomposing by the action of an acid include the same ones as the repeating units having an acid-decomposable group, as mentioned with respect to the resin (A). The repeating unit having a group (z) capable of decomposing by the action of an acid may have at least one of a fluorine atom or a silicon atom. With respect to the hydrophobic resin, the content of the repeating units hav› ing a group (z) capable of decomposing by the action of an acid is preferably 1 % by mole to 80% by mole, more prefer› ably 10% by mole to 80% by mole, and still more preferably 20% by mole to 60% by mole, with respect to all the repeating units in the hydrophobic resin. 

[0438] The hydrophobic resin may further have a repeating unit represented by the following General Formula (III). 

<img src='content_image/930960.jpg'>

[0439] In General Formula (III), 

[0440] Rc3$_{1 }$ represents a hydrogen atom, an alkyl group (which may be substituted with a fluorine atom or the like), a cyano group, or a -CH$_{2}$-0-Rac$_{2 }$ group, in which Rac$_{2 }$ represents a hydrogen atom, an alkyl group, or an acyl group, and Rc3$_{1 }$ is preferably a hydrogen atom, a methyl group, a hydroxymethyl group, or a trifluoromethyl group, and more preferably a hydrogen atom or a methyl group, 

[0441] Rc3$_{2 }$ represents a group having an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, or an aryl group, each of which may be substituted with a group containing a fluorine atom or a silicon atom, and 

[0442] Lc3 represents a single bond or a divalent linking group. 

[0443] In General Formula (III), the alkyl group ofRc3$_{2 }$ is preferably a linear or branched alkyl group having 3 to 20 carbon atoms. 

[0444] The cycloalkyl group is preferably a cycloalkyl group having 3 to 20 carbon atoms. 

[0445] The alkenyl group is preferably an alkenyl group having 3 to 20 carbon atoms. 

[0446] The cycloalkenyl group is preferably a cycloalkenyl group having 3 to 20 carbon atoms. 

[0447] The aryl group is preferably an aryl group having 6 to 20 carbon atoms, and more preferably a phenyl group or a naphthyl group, and these groups may have a substituent. 

[0448] Rc3$_{2 }$is preferably an unsubstituted alkyl group or an alkyl group substituted with a fluorine atom. 

[0449] The divalent linking group of Lc3 is preferably an alkylene group (preferably having 1 to 5 carbon atoms), an ether bond, a phenylene group, or an ester bond (a group represented by----COO-). 

[0450] The content of the repeating units represented by Formula (III) is preferably 1 % by mole to 100% by mole, more preferably 10% by mole to 90% by mole, and still more 

preferably 30% by mole to 70% by mole, with respect to all the repeating units in the hydrophobic resin. 

[0451] It is also preferable that the hydrophobic resin fur› ther has a repeating unit represented by the following General Formula (CII-AB). 

<img src='content_image/930959.jpg'>

[0452] In Formula (CII-AB), 

[0453] Rc$_{11}$’ and Rc1 2 ’ each independently represent a hydrogen atom, a cyano group, a halogen atom, or an alkyl group, and 

[0454] Zc’ represents an atomic group for forming an alicy› clic structure containing two carbon atoms (C----C) to which Zc’ is bonded. 

(III) 

[0455] The content of the repeating units represented by General Formula (CII-AB) is preferably 1 % by mole to 100% by mole, more preferably 10% by mole to 90% by mole, and still more preferably 30% by mole to 70% by mole, with respect to all the repeating units in the hydrophobic resin. 

[0456] Specific examples of the repeating units represented by General Formulae (III) and (CII-AB) are set forth below, but the present invention is not limited thereto. In the formu› lae, Ra represents H, CH$_{3}$ , CH$_{2}$OH, CF$_{3}$ , or CN. 

<img src='content_image/930961.jpg'>

(CII-AB) 

