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Each of R 1 and R 2 is preferably a fluorine atom or CF 3 . 

xis preferably 1 to 10, and more preferably 1 to 5. 

y is preferably 0 to 4, and more preferably 0. 

z is preferably Oto 5, and more preferably 0 to 3. 

The divalent connecting group represented by L is not 

particularly limited, and examples thereof can include -COO-, ---OCO-, -CO-, ---0-, -S-, -SO-, -SO$_{2}$ -, an alkylene group, a cycloalkylene group, an alkenylene group, and a connecting group obtained by connecting a plurality of these, and a connecting group having 12 or less total carbon atoms is preferable. Among these, -COO-, -OCO-, -CO-, or ---0- is prefer› able, and --COO- or ---OCO- is more preferable. 

The cyclic organic group represented by A is not particu› larly limited as long as it has a ring structure, and examples 15 thereof include an alicyclic group, an aryl group, and a heterocyclic group (which includes not only a heterocyclic group having aromaticity but also a heterocyclic group having no aromaticity). 

The alicyclic group may be monocyclic or polycyclic, and as the alicyclic group, a monocyclic cycloalkyl group such as a cyclopentyl group, a cyclohexyl group, or a cyclooctyl group, or polycyclic cycloalkyl groups such as a norbomyl group, a tricyclodecanyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, or an adamantyl group is pref- erable. Among these, an alicyclic group with a bulky struc› ture having 7 or greater carbon atoms such as a norbomyl group, a tricyclodecanyl group, a tetracyclodecanyl group, a tetracyclododecanyl group, or an adamantyl group is pref› erable from the viewpoint of being capable of suppressing in-film diffusibility in a heating step after exposure and MEEF improvement. 

Examples of the aryl group include a benzene ring, a naphthalene ring, a phenanthrene ring, and an anthracene ring. 

Examples of the heterocyclic group include groups derived from a furan ring, a thiophene ring, a benzofuran ring, a benzothiophene ring, a dibenzofuran ring, a diben› zothiophene ring, and a pyridine ring. Among these, a group derived from a furan ring, a thiophene ring, or a pyridine ring is preferable. 

In addition, as the cyclic organic group, a lactone structure can also be exemplified, and specific examples thereof can include the lactone structures represented by General For› mulas (LCl-1) to (LCl-17), which the resin (A) may have. 

The above-describedcyclic organic group may has a sub› stituent, and regarding the substituent, the description in paragraph "0251" ofJP2013-76991A can be referred to, and the contents thereof are incorporated in the present specifi› cation. 

Examples of the organic group represented by R$_{201}$ , R 202 , or R$_{203 }$ include an aryl group, an alkyl group, and a cycloalkyl group. 

Preferably, at least one of R$_{20}$ $^{i, R}$202, and R $_{203 }$is an aryl group, and more preferably, all of three are aryl groups. Regarding the aryl group, the alkyl group, and the cycloalkyl group, the description in paragraph "0252" of JP2013- 76991A can be referred to, and the contents thereof are incorporated in the present specification. 

Regarding the structure represented by General Formula 60 (Al) in a case where two of R$_{201 }$to R$_{203 }$are bonded to each other to form a ring structure, the description in paragraphs "0253" to "0257" of JP2013-76991A can be referred to, and the contents thereof are incorporated in the present specifi- cation. 65 

Moreover, when at least one ofR$_{201}$, R 202 , and R $_{203 }$is not an aryl group, examples of a preferable structure can include 

cationic structures of compounds exemplified in paragraphs "0046" to "0048" of JP2004-233661A, paragraphs "0040" to "0046" of JP2003-35948A, and exemplified as Formulas (I-1) to (I-70) in the specification ofUS2003/0224288A, and compounds exemplified as Formulas (IA-1) to (IA-54), and Formulas (IB-1) to (IB-24) in the specification ofUS2003/ 0077540Al. 

In General Formulas (ZII) and (ZIII), each ofR$_{204 }$to R$_{207 }$ independently represents an aryl group, an alkyl group, or a cycloalkyl group. 

The aryl group, the alkyl group, and the cycloalkyl group represented by each ofR$_{204 }$to R$_{207 }$are the same as the aryl group described as the aryl group, the alkyl group, and the cycloalkyl group represented by each of R$_{201 }$ to R$_{203 }$in the compound (ZI). 

The aryl group, the alkyl group, and the cycloalkyl group represented by each of R$_{204 }$to R$_{207 }$may have a substituent. Examples of the substituent include the substituents that the aryl group, the alkyl group, and the cycloalkyl group rep› resented by each ofR$^{201 }$to R$_{203 }$in the compound (ZI) may have. 

z- represents a non-nucleophilic anion, and as z-, the same as the non-nucleophilic anion in General Formula (ZI) can be exemplified. 

As the acid generator, the compounds represented by General Formula (ZIV), (ZV), or (ZVI) described in para› graphs "0262" to "0264" of JP2013-76991A are also exem› plified. 

Particularly preferable examples of the acid generator are shown below. 

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