content_image/892618.jpg content_image/892620.jpg content_image/892619.jpg content_image/892623.jpg content_image/892622.jpg content_image/892621.jpg
<img src='content_image/892618.jpg'>

wherein R 1 is hydrogen, hydroxy, carboxy, nitro, cyano, fluorine, chlorine, bromine, amino group, or a straight, branched or cyclic, C$_{1 }$-C$_{20 }$ alkyl, C$_{1 }$-C$_{20 }$ alkoxy, C$_{2}$-C$_{20 }$alkoxycarbonyl, C$_{2}$-C$_{20 }$acyloxy or C$_{1}$-C$_{4 }$ alkyl- sulfonyloxy group, which may contain fluorine, chlo› rine, bromine, hydroxy, amino or alkoxy moiety, or -NR’----C(=0)-R $^{8 }$or-NR$^{7}$-C(=0)---0-R8 , R 7 is hydrogen, or a straight, branched or cyclic C$_{1 }$-C$_{6 }$ alkyl group which may contain halogen, hydroxy, alkoxy, acyl or acyloxy moiety, R 8 is a straight, branched or cyclic, C$_{1 }$-C$_{16 }$ alkyl or C$_{2}$-C$_{16 }$ alkenyl group, or CcC$_{12 }$ aryl group, which may contain halo› gen, hydroxy, alkoxy, acyl or acyloxy moiety, 

X 1 is a single bond or a C$_{1}$-C$_{20 }$ divalent linking group when p=l, or a C$_{1}$-C$_{20 }$ tri- or tetravalent linking group when p=2 or 3, the linking group optionally containing an oxygen, sulfur or nitrogen atom, 

Rf$^{1 }$to Rf4 are each independently hydrogen, fluorine or 30 trifluoromethyl, at least one of Rf 1 to Rf4 being fluorine or trifluoromethyl, or Rf 1 and Rf 2 , taken together, may form a carbonyl group, 

R 2 , R 3 , R 4 , R 5 and R$^{6 }$are each independently a C$_{1}$-C$_{12 }$ straight, branched or cyclic alkyl group which may contain an oxo moiety, C$_{2}$ -C$_{12 }$straight, branched or cyclic alkenyl group which may contain an oxo moiety, C$_{2}$-C$_{12 }$ straight, branched or cyclic alkynyl group, CcC$_{20 }$ aryl group, C$_{7}$-C$_{12 }$ aralkyl group or C$_{7}$ -C$_{12 }$ aryloxyalkyl group, in which at least one hydrogen may be substituted by a hydroxy, carboxy, halogen, cyano, amide, nitro, sultone, sulfone or sulfonium salt-containing moiety, or in which an ether, ester, carbonyl, carbonate or sulfonic acid ester moiety may intervene between carbon atoms, or R 2 and R 3 may bond together to form a ring with the sulfur atom to which they are attached, 

m is an integer of 1 to 5, n is an integer of O to 3, and p is an integer of 1 to 3. 

2. The resist composition of claim 1, further comprising an organic solvent. 

3. The resist composition of claim 1 wherein the base polymer comprises recurring units having the formula (al) or recurring units having the formula (a2): 

<img src='content_image/892620.jpg'>

-continued 

(A-2) 

(al) 

<img src='content_image/892619.jpg'>

wherein RA is each independently hydrogen or methyl, Y 1 is a single bond, C$_{1 }$-C$_{12 }$ linking group containing ester group or lactone ring, phenylene group or naphthylene group, Y 2 is a single bond or ester group, and R $^{12 }$each are an acid labile group, R $^{13 }$is fluorine, trifluoromethyl, cyano, a C$_{1 }$-C$_{6 }$ straight, branched or cyclic alkyl or alkoxy group, or a C$_{2}$ -C$_{7 }$ straight, branched or cyclic acyl, acyloxy or alkoxycarbonyl group, R$^{14 }$is a single bond or C$_{1 }$-C$_{6 }$ straight or branched alkylene group in which at least one carbon atom may be substituted by an ether or ester moiety, q is 1 or 2, and r is an integer of Oto 4. 

4. The resist composition of claim 3, further comprising a dissolution inhibitor. 

5. The resist composition of claim 3 which is a chemically amplified positive resist composition. 

6. The resist composition of claim 1 wherein the base polymer is free of an acid labile group. 

7. The resist composition of claim 6, further comprising a crosslinker. 

8. The resist composition of claim 6 which is a chemically amplified negative resist composition. 

9. The resist composition of claim 1, further comprising a surfactant. 

10. The resist composition of claim 1 wherein the base polymer further comprises recurring units of at least one type selected from the formulae (fl) to (f3): 

<img src='content_image/892623.jpg'>

<img src='content_image/892622.jpg'>

<img src='content_image/892621.jpg'>

-continued 

(a2) 

(fl) 

(f2) 

(fJ) 

