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more preferably, the repeating unit contains no fluorine atom. In the case where the resin (Ab) has a repeating unit (B), the repeating unit is a repeating unit other than the repeating unit (B), and the content of the fluorine atom-containing repeating unit is more preferably 1 % by mole or less, and most prefer- ably, the repeating unit contains no fluorine atom. 

[3] Compound Capable of Generating an Acid by Irradia› tion with Actinic Rays or Radiation 

The composition of the present invention may further 10 include a compound capable of generating an acid by irradia› tion with actinic rays or radiation ( also hereinafter referred to a "photo-acid generator"). 

As such a photo-acid generator, photoinitiators for photo› cation polymerization, photoinitiators for photo-radical poly› merization, photodecoloring agents, photo-discoloring agents, known compounds that generate an acid by irradiation with actinic rays or radiation, which are used in microresists, or the like, mixtures thereof may be suitably selected and used. Examples thereof include onium salts such as a sulfo› nium salt and an iodonium salt, and diazodisulfone com› pounds such as bis(alkylsulfonyl)diazomethane. 

Preferred examples of the photo-acid generator include the compounds represented by the following general formulae (ZI), (ZII) and (ZIII). 

[Chem. 33] 

In the general formula (ZI), R$_{201}$, R$_{202 }$and R$_{203 }$each inde› pendently represent an organic group. The number of carbon atoms of the organic group as R$_{20}$ i, R $_{202 }$and R$_{203 }$ is, for example, from 1 to 30, and preferably from 1 to 20. 

Two members out of R$_{201 }$to R$_{203 }$may be bonded to each other via a single bond or a connecting group to form a ring structure. In this case, examples of the connecting group include an ether bond, a thioether bond, an ester bond, an amide bond, a carbonyl group, a methylene group, and an ethylene group. Examples of the group formed by combining two members out of R$_{20}$1 to R$_{203 }$ include alkylene groups such as a butylene group and a pentylene group. 

x- represents a non-nucleophilic anion. Examples of x- include a sulfonate anion, a bis(alkylsulfonyl)amide anion, a tris(alkylsulfonyl)methide anion, BF 4 -, PF 6 -, and SbF 6 -. x- is preferably an organic anion containing a carbon atom. Preferred examples of the organic anions include organic anions represented by the following AN! to AN3. 

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In the formulae AN! to AN3, Rc$_{1 }$ to Rc$_{3 }$ each indepen› dently represent an organic group. Examples of the organic group include an organic group having 1 to 30 carbon atoms, and the organic group is preferably an alkyl group, an aryl group, or a group formed by connecting a plurality of these groups through a connecting group. Examples of the connect› ing group include a single bond, -0-, -CO$_{2}$ -, -S-, -SO$_{3}$-and-SO$_{2}$N(Rd$_{1}$)-. Here, Rd$_{1 }$represents a hydro› gen atom or an alkyl group and may form a ring structure together with the alkyl group or aryl group to which Rd$_{1 }$ is bonded. 

The organic group of Rc$_{1 }$ to Rc$_{3 }$ may be an alkyl group substituted with a fluorine atom or a fluoroalkyl group at the I-position, or a phenyl group substituted with a fluorine atom or a fluoroalkyl group. By containing a fluorine atom or a fluoroalkyl group, the acidity of an acid generated by irradia› tion with light can be increased. This can improve the sensi› tivity of an actinic ray-sensitive or radiation-sensitive resin composition. Incidentally, each ofRc$_{1 }$to Rc$_{3 }$ may be bonded to another alkyl group, aryl group, or the like to form a ring structure. 

Furthermore, preferred examples ofx- include a sulfonate anion represented by the following general formula (SAi) or (SA2). 

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In the formula (SAi ), 

Ar $_{1 }$represents an aryl group, and may further have a sub› stituent other than a -(D-B) group. 

n represents an integer of 1 or more. n is preferably from 1 to 4, more preferably from 2 to 3, and most preferably 3. 

D represents a single bond or a divalent connecting group. This divalent connecting group is an ether group, a thio› ether group, a carbonyl group, a sulfoxide group, a sul› fone group, a sulfonic acid ester group, or an ester group. 

B represents a hydrocarbon group. 

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In the formula (SA2), 

Xf’ s each independently represent a fluorine atom, or an alkyl group with at least one hydrogen atom being sub› stituted with a fluorine atom. 

-continued 

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