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In the case of irradiating the composition of the present invention with ArF excimer laser light, the resin preferably has a monocyclic or polycyclic alicyclic hydrocarbon struc- ture. Hereinafter, this resin is referred to as "alicyclic hydro- carbon-based acid-decomposable resin". 

The alicyclic hydrocarbon-based acid-decomposable resin is preferably a resin containing at least one repeating unit selected from the group consisting of a repeating unit having an alicyclic hydrocarbon-containing partial structure repre- sented by the following formulae (pl) to (p V), and a repeating unit represented by the following formula (II-AB): 

[Chem.42] 

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