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# c12) United States Patent 

# Inasaki et al. 

# (54) ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, AND ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM AND PATTERN FORMING METHOD USING THE COMPOSITION 

(75) Inventors: Takeshi Inasaki, Haibara-gun (JP); Tomotaka Tsuchimura, Haibara-gun (JP) 

(73) Assignee: FUJIFILM Corporation, Tokyo (JP) 

( *) Notice: Subject to any disclaimer, the term ofthis patent is extended or adjusted under 35 U.S.C. 154(b) by O days. 

(21) Appl. No.: 13/528,477 

(22) Filed: Jun.20,2012 

## (65) Prior Publication Data 

US 2013/0004888 Al Jan. 3, 2013 

## (30) Foreign Application Priority Data 

Jun.29,2011 (JP) ................................. 2011-144458 

(51) Int. Cl. 

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(52) U.S. Cl. USPC ............ 430/270.1; 430/5; 430/913; 430/942; 430/945; 430/966 

( 58) Field of Classification Search USPC ................... 430/270.1, 5, 945, 942, 966, 913 See application file for complete search history. 

## (56) References Cited 

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## U.S. PATENT DOCUMENTS 

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# (IO) Patent No.: US 8,574,814 B2 

# (45) Date of Patent: Nov. 5, 2013 

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## FOREIGN PATENT DOCUMENTS 

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* cited by examiner 

Primary Examiner - Amanda C. Walke 

(74) Attorney, Agent, or Firm - Sughrue Mion, PLLC 

## (57) ABSTRACT 

An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive resin composition that can form independent line patterns with high resolution and excellent shapes and shows excellent resist performances including roughness characteristics, and to provide an actinic ray-sensitive or radiation-sensitive film and a pattern forming method using the composition. 

The actinic ray-sensitive or radiation-sensitive resin compo› sition contains a compound (P) that contains at least one phenolic hydroxyl group and at least one group in which a hydrogen atom of a phenolic hydroxyl group is substituted with a group represented by the following General Formula (1) (the respective symbols in the formula represent the same definitions as in the claims and the specification). 

[Chem.!] 

US008574814B2 

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## 17 Claims, No Drawings 

