content_image/922190.jpg content_image/922193.jpg content_image/922189.jpg content_image/922194.jpg content_image/922191.jpg content_image/922192.jpg content_image/922187.jpg content_image/922186.jpg
(MEC-31 is a fluorinating agent available from DAIKIN INDUSTRIES, LTD.) 

Also a monomer represented by: 

<img src='content_image/922190.jpg'>

which can introduce a structural unit represented by: 

<img src='content_image/922193.jpg'>

is a novel compound, and example of a preparation process thereof is the following preparation scheme ( 4). 

<img src='content_image/922189.jpg'>

(MEC-11 is a fluorinating agent available from DAIKIN INDUSTRIES, LTD.) 

Also a structural unit represented by: 

<img src='content_image/922194.jpg'>

can be obtained by cyclic polymerization of a diene com› pound represented by: 

<img src='content_image/922191.jpg'>

and further can be obtained by ( co )polymerization of a novel monomer represented by: 

<img src='content_image/922192.jpg'>

and example of a preparation process thereof is the following preparation scheme (5). 

Preparation Scheme (5) 

<img src='content_image/922187.jpg'>

<img src='content_image/922186.jpg'>

It is preferable that the fluorine-containing polymer having OH group for the photoresist composition of the present 

or 

