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## <Component (E)> 

Furthermore, in the resist composition of the present inven› tion, for preventing any deterioration in sensitivity, and improving the resist pattern shape and the post exposure stability of the latent image formed by the pattern-wise expo- sure of the resist layer, at least one compound (E) (hereafter referred to as the component (E)) selected from the group consisting of an organic carboxylic acid, or a phosphorus oxo acid or derivative thereof can be added. 

Examples of suitable organic carboxylic acids include ace› tic acid, malonic acid, citric acid, malic acid, succinic acid, benzoic acid, and salicylic acid. 

Examples of phosphorus oxo acids or derivatives thereof include phosphoric acid, phosphonic acid and phosphinic acid. Among these, phosphonic acid is particularly desirable. 

Examples of phosphorous oxo acid derivatives include esters in which a hydrogen atom within the above-mentioned phosphorous oxo acids is substituted with a hydrocarbon group. Examples of the hydrocarbon group include an alkyl group of 1 to 5 carbon atoms and an aryl group of 6 to 15 carbon atoms. 

Examples of phosphoric acid derivatives include phospho- ric acid esters such as di-n-butyl phosphate and diphenyl phosphate. 

Examples of phosphonic acid derivatives include phospho› nic acid esters such as dimethyl phosphonate, di-n-butyl phosphonate, phenyl phosphonate, diphenyl phosphonate and dibenzyl phosphonate. 

Examples of phosphinic acid derivatives include phe› nylphosphinic acid and phosphinic acid esters. 

As the component (E), salicylic acid is particularly desir- able. 

As the component (E), one type may be used alone, or two or more types may be used in combination. 

The component (E) is typically used in an amount within a range from 0.01 to 5.0parts by weight, relative to l00parts by weight of the component (A). 

## <Component (F)> 

The resist composition may further include a fluorine addi› tive (hereafter, referred to as "component (F)") for imparting water repellency to the resist film. As the component (F), for example, a fluorine-containing polymeric compound described in Japanese Unexamined Patent Application, First Publication No. 2010-002870. 

Specific examples of the component (F) include polymers having a structural unit (fl) represented by general formula (fl-1) shown below. As such polymer, a polymer (homopoly- mer) consisting of a structural unit (fl); a copolymer of a structural unit represented by formula (fl-1) shown below and the aforementioned structural unit (al); and a copolymer of a structural unit represented by the formula (fl-1) shown below, a structural unit derived from acrylic acid or meth› acrylic acid and the aforementioned structural unit (al) are preferable. As the structural unit (al) to be copolymerized with a structural unit represented by formula (fl-1) shown below, a structural unit represented by the aforementioned formula (al-1) is preferable, and a structural unit represented by the aforementioned formula (al-1-32) is particularly desirable. 

[Chemical Formula 101] 

<img src='content_image/937873.jpg'>

In the formula, R is the same as defined above; R$^{51 }$and R 52 each independently represents a hydrogen atom, a halogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, provided that the plurality ofR$^{51 }$and R$^{52 }$may be the same or different; al represents an integer of 1 to 5; and R 2 " represents an organic group con- taining a fluorine atom. 

In formula (fl-1), R is the same as defined above. As R, a hydrogen atom or a methyl group is preferable. 51 

In formula (fl-1), examples of the halogen atom for R and R$^{52 }$include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom, and a fluorine atom is particularly desirable. Examples of the alkyl group of 1 to 5 carbon atoms for R$^{51 }$and R$^{52 }$include the same alkyl group of 1 to 5 carbon atoms for R defined above, and a methyl group or an ethyl group is preferable. Specific examples of the halogenated alkyl group ofl to 5 carbon atoms represented by R$^{51 }$andR 52 include groups in which part or all of the hydrogen atoms of the aforementioned alkyl groups of 1 to 5 carbon atoms have been substituted with halogen atoms. Examples of the halo› gen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom, and a fluorine atom is particularly desirable. Among these, as R $^{51 }$and R 52 , a hydrogen atom, a fluorine atom or an alkyl group of 1 to 5 carbon atoms is preferable, and a hydrogen atom, a fluorine atom, a methyl group or an ethyl group is more preferable. 

In formula (fl-1), al represents an integer of 1 to 5, pref- erably an integer of 1 to 3, and more preferably 1 or 2. In formula (fl-1), R 2 " represents an organic group contain› 

ing a fluorine atom, and is preferably a hydrocarbon group containing a fluorine atom. 

The hydrocarbon group containing a fluorine atom may be linear, branched or cyclic, and preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and most pref› erably 1 to 10 carbon atoms. 

It is preferable that the hydrocarbon group having a fluo› rine atom has 25% or more of the hydrogen atoms within the hydrocarbon group fluorinated, more preferably 50% or more, and most preferably 60% or more, as the hydrophobic- ity of the resist film during immersion exposure is enhanced. 2 

Among these, as R ", a fluorinated hydrocarbon group of 1 to 5 carbon atoms is particularly preferable, and a methyl group, -CH$_{2}$-CF$_{3}$ , ----CH$_{2}$----CF$_{2}$----CF$_{3}$ , ----CH(CF$_{3}$ ) 2 , ----CH$_{2}$----CH$_{2}$----CF $_{3}$ , and -CH$_{2}$-CH$_{2}$-CF $_{2}$----CF $_{2}$ - CF $_{2}$-CF 3 are most preferable. 

When the component (F) is a fluorine-containing poly› meric compound (polymeric compound), the weight average molecular weight (Mw) (the polystyrene equivalent value determined by gel permeation chromatography) of the com› ponent (F) is not particularly limited, but is preferably 1,000 

(fl-1) 

