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Said chemically amplified resist compos1t10n was spin coated on silicone wafers at 2000 rpm and was heated to 100° C. for 90 seconds to form thin layers with thicknesses’ as described in Table 1. Micro-pattern masks were mounted on said thin layers, mono wavelengths of 248 nm were radiated, and said layers were heated to 110° C. for 90 seconds to cause the chemical amplification. Then, said layers were developed with a tetramethylammoniumhydrox› ide aqueous solution for 60 seconds, and then were rinsed with pure water and dried to embody micro-patterns on wafers. 

The relative sensitivities and resolutions of micro-patterns are described in Table 1. 

Chemically amplified resist compositions were prepared by using polyhydroxystyrene blocked with t-BOC(tertiary› butoxy carbonyl) group represented by the formula 7 and EVE (ethyl vinyl ether) represented by the formula 8 as polymers, the compounds represented by the formulae 2-6 as acid producing agents, and propyleneglycolmonomethyletheracetate(PGMEA) and ethyllactate(EL) as solvents, in the ratios of Table 1. Said compositions were spin coated on silicone wafers and were heated to form thin layers, and were chemically amplified to embody micro-patterns, in the same manner as described in the 

The relative sensitivities and resolutions of the micro› patterns are described in Table 1 

## COMPARATIVE EXAMPLES 1-4 

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-continued 

## Examples 1 to 7 

[Formula 5] 

[Formula 6] 

[Formula 7] 

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*The relative sensitivity in Table 1 means optimum energy (Eop ). 

As shown in Table 1, the resist compositions prepared in Examples 1 to 7 of the present invention have resolutions of 0.16 to 0.20 µm which is much excellent compared to the resolutions of 0.24 to 0.30 µm of the compositions prepared in Comparative Examples 1 to 4. In addition, the relative sensitivities of the compositions of Examples are 28 to 30 mj/cm 2 , which are excellent compared to the relative sen› sitivities of 35 to 45 mj/cm 2 of the compositions of Com› parative Examples. 

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-continued 

[Formula 8] 

