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of70% to 85% by mass, and still more preferably in a range of 7 5% to 85% by mass with respect to the total content of the component (A), the component (I), and the component (M) in the photosensitive composition of the present embodiment. 

[0234] In a case where the content of the component (A) is in the above-described preferable range, the sensitivity is further increased, and a pattern having an excellent shape and high resolution is easily obtained. 

[0235] <Other Components> 

[0236] The photosensitive composition of the present embodiment may contain components other than the com› ponent (A), the component (I), and the component (M) as necessary. 

[0237] As desired, other miscible additives such as addi› tive resins, dissolution inhibitors, basic compounds, plasti› cizers, stabilizers, colorants, and halation preventing agents used to improve the performance of the film can be added to the photosensitive composition of the embodiment as appro› priate. 

[0238] <<Silane Coupling Agent>> 

[0239] The photosensitive composition of the embodiment may further contain an adhesion assistant in order to improve the adhesiveness to the support. As this adhesion assistant, a silane coupling agent is preferable. 

[0240] Examples of the silane coupling agent include silane coupling agents having reactive substituents such as a carboxy group, a methacryloyl group, an isocyanate group, and an epoxy group. Specific examples thereof include trimethoxysilylbenzoic acid, y-methacryloxypropylt› rimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysi› lane, y-glycidoxypropyltrimethoxysilane, and ~-(3,4-epoxy› cyclohexyl)ethyltrimethoxysilane. 

[0241] The silane coupling agent may be used alone or in a combination of two or more kinds thereof. 

[0242] The content of the silane coupling agent is prefer› ably in a range of 2.5 to 20 parts by mass, more preferably in a range of3 to 15 parts by mass, and still more preferably in a range of3 to 10 parts by mass with respect to 100 parts by mass of the component (A). 

[0243] In a case where the content of the silane coupling agent is in the above-described preferable range, the hard› ness of the cured film is further increased. In addition, the adhesiveness between the cured film and the support 1s further improved. 

[0244] <<Cationic Polymerization Initiator (IO)>> 

[0245] The photosensitive composition of the embodiment may contain a cationic polymerization initiator (hereinafter, referred to as a component (IO)) that does not correspond to the component (I). 

[0246] By using a combination with the component (IO), the sensitivity during pattern formation does not become extremely high and a pattern having high resolution can be formed. 

[0247] As the component (IO), a cationic polymerization initiator that generates an acid with a pKa of preferably -3 or greater, more preferably O or greater, and still more preferably 1 or greater is exemplified. Among the examples, an onium salt compound that does not have a halogen atom in the anion moiety thereof is preferable. By using the compound (IO) that does not have a halogen atom in the anion moiety thereof, the amount of gas to be generated 

( degassing) is more likely to be reduced. The upper limit of the pKa of the acid generated from the compound (IO) is preferably 5 or less. 

[0248] As the component (IO), one or more compounds selected from the group consisting of a compound repre› sented by Formula (bl-1) (hereinafter, referred to as a "component (bl-1)") and a compound represented by For› mula (bl-2) (hereinafter, referred to as a "component (bl- 2)") are preferable. 

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[0249] [In the formulae, R$^{611 }$and R$^{612 }$represent a cyclic group which may have a substituent other than a halogen atom, a cyclic alkyl group which may have a substituent other than a halogen atom, or a cyclic alkenyl group which may have a substituent other than a halogen atom. m represents an integer of 1 or greater, and Mm+,s each independently represent an m-valent organic cation.] 

[0250] { Component (b 1-1)} 

[0251] Anion Moiety 

[0252] In Formula (bl-1), R$^{611 }$represents a cyclic group which may have a substituent other than a halogen atom, a cyclic alkyl group which may have a substituent other than a halogen atom, or a cyclic alkenyl group which may have a substituent other than a halogen atom, and examples thereof include those that do not have substituents and those having substituents other than halogen atoms, among the cyclic group, the cyclic alkyl group, and the cyclic alkenyl group in the description of R 1201 above. 

[0253] The expression "may have a substituent other than a halogen atom" here excludes not only a case of having a substituent formed of only a halogen atom but also a case of having a substituent having even one halogen atom (for example, a case where the substituent is a fluorinated alkyl group). 

[0254] Among these, it is preferable that R$^{611 }$represent an aromatic hydrocarbon group which may have a substituent other than a halogen atom, an aliphatic cyclic group which may have a substituent other than a halogen atom, and a chain alkyl group which may have a substituent other than a halogen atom. Examples of the substituents which may be included in these groups include a hydroxyl group, an oxo group, an alkyl group, an aryl group, a lactone-containing cyclic group, an ether bond, an ester bond, and a combina› tion of these. 

[0255] In a case where an ether bond or an ester bond is included as a substituent, the substituent may be bonded via an alkylene group, and a linking group represented by any of Formulae (y-al-1) to (y-al-7) is preferable as the sub› stituent in this case. 

(bl-1) 

(bl-2) 

