content_image/901500.jpg content_image/901501.jpg content_image/901502.jpg content_image/901503.jpg content_image/901504.jpg content_image/901505.jpg content_image/901506.jpg content_image/901507.jpg content_image/901518.jpg content_image/901519.jpg content_image/901520.jpg content_image/901521.jpg
(2) a step of exposing the film by using an actinic ray or radiation, and 

(4) a step of developing the exposed film by using an organic solvent-containing developer to form a negative pattern. 

[2] The pattern forming method as described in [1], 

wherein the (C) compound capable of decomposing by the action of an acid to generate an acid is a compound represented by any one of the following formulae (1) to (8): 

<img src='content_image/901500.jpg'>

<img src='content_image/901501.jpg'>

<img src='content_image/901502.jpg'>

<img src='content_image/901503.jpg'>

<img src='content_image/901504.jpg'>

<img src='content_image/901505.jpg'>

<img src='content_image/901506.jpg'>

<img src='content_image/901507.jpg'>

wherein in formula (1 ), 

R$_{1 }$ represents an alkyl group, a cycloalkyl group, an alkoxy group, an aryl group or an aryloxy group, 

R$_{2 }$ represents an alkyl group or a cycloalkyl group, 

R$_{1 }$ and R$_{2 }$ may combine to form a monocyclic or poly› cyclic cyclic hydrocarbon structure, 

each of R$_{3 }$ and R$_{4 }$ independently represents a hydrogen atom or an alkyl group, 

Ry $_{1 }$ represents a hydrogen atom, an alkyl group, a 65 cycloalkyl group, an alkoxy group, an aryl group, or an alkylene group combining with Ry$_{2}$ , 

Ry$_{2 }$ represents an aryl group or an aryloxy group, and X represents -SO$_{2}$ -, -SO- or --CO-; in formula (2), Ri’ represents an alkyl group, a cycloalkyl group, an 

alkoxy group, an aryl group or an aryloxy group, 

R$_{2}$ ’ represents an alkyl group or a cycloalkyl group, 

Ri’ and R$_{2}$ ’ may combine to form a monocyclic or polycyclic cyclic hydrocarbon structure, 

each of R$_{3}$’ and R$_{4}$’ independently represents a hydrogen atom or an alkyl group, 

Rs’ represents an aryl group-free group capable ofleaving by the action of an acid, and 

X’ represents -SO$_{2}$ -, -SO- or -CO-; in formulae (3) to (6), 

Rb represents an alkyl group, a cycloalkyl group, an aryl group or an aralkyl group, 

R$_{7 }$ represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or an aralkyl group, 

Rs represents an alkyl group, a cycloalkyl group, an aryl group or an aralkyl group, 

R$_{9 }$ represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or an aralkyl group, 

R$_{9 }$ may combine with R$_{7 }$ to form a ring, 

R$_{10 }$ represents an alkyl group, a cycloalkyl group, an alkoxy group, an aryl group, an aralkyl group, an aryloxy group or an alkenyloxy group, 

Ru represents an alkyl group, a cycloalkyl group, an alkoxy group, an aryl group, an aralkyl group, an aryloxy group or an alkenyl group, 

R$_{10 }$and Ru may combine with each other to form a ring, and 

R$_{12 }$represents an alkyl group, a cycloalkyl group, an aryl group, an alkenyl group, an alkynyl group or a cyclic imide group; 

in formulae (7) and (8), 

each of R$_{13 }$to R$_{16 }$and R$_{19 }$to R$_{23 }$ represents a hydrogen atom or a monovalent substituent, 

each of R$_{17 }$and R$_{1}$s represents a monovalent substituent, and R$_{1 7 }$ and R$_{1}$s may combine with each other to form a ring; and 

in formulae (1) to (5), (7) and (8), 

each of Zi, Zi’, Z$_{3}$ , Z$_{4}$ , Zs, Z$_{7 }$ and Zs is independently a group represented by any one of the following formulae (Z-a) to (Z-d), and each Zs may be the same as or different from every other Zs: 

<img src='content_image/901518.jpg'>

<img src='content_image/901519.jpg'>

<img src='content_image/901520.jpg'>

<img src='content_image/901521.jpg'>

wherein in formulae (Z-a) to (Z-d), 

each ofRb$_{1 }$ and Rb$_{2 }$ independently represents an organic group, 

each of Rb$_{3}$ , Rb$_{4 }$ and Rbs independently represents an organic group, and 

Rb$_{3 }$ and Rb$_{4 }$ may combine to form a ring. 

