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The compound (Bl) preferably have a structure in which a hydrogen atom of a phenolic hydroxyl group is substituted with a group having an acid-non-decomposable polycyclic aliphatic hydrocarbon structure due to obtaining the high glassy-transition temperature (Tg) and becoming excellent dry etching resistance. 

By the compound (Bl) having the specific structure described before, the glassy-transition temperature (Tg) of the compound (Bl) becomes higher, and it is possible to form a very hard resist film and to control the diffusion of an acid and dry etching resistance. Therefore, since the diffu› sion of an acid is highly controlled at the exposed portion of actinic rays or radiation such as an electron beam or extreme ultraviolet rays, resolving power, a pattern shape and LER in a fine pattern are further improved. In addition, since the compound (Bl) has an acid-non-decomposable polycyclic aliphatic hydrocarbon structure, it is considered that this contributes to further improve dry etching resistance. Also, although the details are not clearly understood, it is specu› lated that since the polycyclic aliphatic hydrocarbon struc- ture has a high hydrogen radical donating property and serves as a hydrogen source at the time of the decomposition of the compound (A) which is a photo-acid generator or (D) a compound which generates an acid by irradiation with actinic rays or radiation described later, the decomposition efficiency of the photo-acid generator is further improved and the acid generation efficiency is further increased, and it is considered that this contributes to further excellent sen› sitivity. 

In the specific structure described before in which the compound (Bl) according to the present invention may have, an aromatic ring such as a benzene ring and a group having an acid-non-decomposable polycyclic aliphatic hydrocarbon structure are linked through an oxygen atom derived from a phenolic hydroxyl group. As described before, the structure not only contributes high dry etching resistance but also can increase the glassy-transition tem› perature (Tg) of the compound (Bl), and it is speculated that higher resolving power is provided due to the effect of this combination. 

In the present invention, acid-non-decomposable means the property in which the decomposition reaction dose not occur by an acid generated by the compound (A) and (D) a compound which generates an acid by irradiation with actinic rays or radiation described later. 

More specifically, a group having an acid-non-decompos› able polycyclic aliphatic hydrocarbon structure is preferably a group which is stable with respect to an acid and an alkali. A group which is stable with respect to an acid and an alkali means a group which does not show acid-decomposable and alkali-decomposable. Here, acid-decomposable means the property in which the decomposition reaction occurs by the action of an acid generated by the compound (A) and (D) a 

