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# c12) United States Patent Fukushima et al. 

# (54) ONIUM SALT COMPOUND, RESIST COMPOSITION, AND PATTERN FORMING PROCESS 

(71) Applicant: Shin-Etsu Chemical Co., Ltd., Tokyo (JP) 

(72) Inventors: Masahiro Fukushima, Joetsu (JP); Masaki Ohashi, Joetsu (JP); Jun Hatakeyama, Joetsu (JP) 

(73) Assignee: SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP) 

( * ) Notice: Subject to any disclaimer, the term ofthis patent is extended or adjusted under 35 U.S.C. 154(b) by O days. 

(21) Appl. No.: 14/930,869 

(22) Filed: Nov. 3, 2015 

## (65) Prior Publication Data 

US 2016/0131972 Al May 12, 2016 

## (30) Foreign Application Priority Data 

Nov. 7, 2014 (JP) ................................. 2014-226553 

(51) Int. Cl. 

<img src='content_image/894016.jpg'>

(52) U.S. Cl. CPC ............ G03F 710397 (2013.01); C07C 25100 (2013.01); C07C 25102 (2013.01); C07C 69176 (2013.01); C07C 69178 (2013.01); C07C 

<img src='content_image/893983.jpg'>

# (IO) Patent No.: US 9,665,002 B2 

# (45) Date of Patent: May 30, 2017 

(58) Field of Classification Search None See application file for complete search history. 

## (56) References Cited 

<img src='content_image/894015.jpg'>

<img src='content_image/894017.jpg'>

Machine-assisted English translation of JP 2013-250433 provided by JPO (2013).* 

Office Action dated Jul. 6, 2016, issued in counterpart Taiwanese Patent Application No. 104136092. (4 pages). 

* cited by examiner 

Primary Examiner - Sin Lee 

(74) Attorney, Agent, or Firm - Westerman, Hattori, Daniels & Adrian, LLP 

## (57) ABSTRACT 

Sulfonium and iodonium salts of a carboxylate having an aromatic ring to which a nitrogen-containing alkyl or cyclic structure is attached are novel. The onium salt functions as an acid diffusion controlling agent in a resist composition, enabling to form a pattern of good profile with high reso› lution, improved MEF, LWR and DOF. 

US009665002B2 

381112 (2013.01); C07D 203/14 (2013.01); C07D 205/04 (2013.01); C07D 207104 (2013.01); C07D 211106 (2013.01); C07D 213179 (2013.01); C07D 223104 (2013.01); C07D 225102 (2013.01); C07D 233102 (2013.01); C07D 241104 (2013.01); C07D 263/04 (2013.01); C07D 265/30 (2013.01); C07D 277104 (2013.01); C07D 279112 (2013.01); C07D 2951112 (2013.01); C07D 2951155 (2013.01); C07D 295/26 (2013.01); G03F 710045 (2013.01); G03F 710046 (2013.01); G03F 71168 (2013.01); G03F 712037 (2013.01); G03F 712041 (2013.01); G03F 7130 (2013.01); G03F 71322 (2013.01); G03F 71325 (2013.01); G03F 7138 (2013.01) 

## U.S. PATENT DOCUMENTS 

## FOREIGN PATENT DOCUMENTS 

## OTHER PUBLICATIONS 

## 11 Claims, 1 Drawing Sheet 

