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# c12) United States Patent De Silva et al. 

# (54) APPROACH TO LOWERING EXTREME ULTRAVIOLET EXPOSURE DOSE FOR INORGANIC HARDMASKS FOR EXTREME ULTRAVIOLET PATTERNING 

(71) Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US) 

(72) Inventors: Ekmini A. De Silva, Slingerlands, NY (US); Karen E. Petrillo, Voorheesville, NY (US); Indira P. Seshadri, Troy, NY (US) 

(73) Assignee: International Business Machines Corporation, Armonk, NY (US) 

( *) Notice: Subject to any disclaimer, the term ofthis patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days. 

(21) Appl. No.: 15/406,327 

(22) Filed: Jan. 13, 2017 

## (65) Prior Publication Data 

US 2018/0203355 Al Jul. 19, 2018 

(51) Int. Cl. 

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(52) U.S. Cl. CPC .............. G03F 71165 (2013.01); B82Y 40100 (2013.01); G03F 71094 (2013.01); G03F 7111 (2013.01); G03F 71168 (2013.01); G03F 712004 (2013.01); G03F 712037 (2013.01); 

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# (IO) Patent No.: US 10,082,736 B2 

# Sep.25,2018 (45) Date of Patent: 

(58) Field of Classification Search CPC .......... G03F 7/004; G03F 7/2037; G03F 7/11; G03F 7/165; G03F 7/094; H01L 21/0274; H0lL 21/0276; H0lL 21/32139; B82Y 40/00 USPC ....... 430/270.1, 271.1, 273.1, 311, 322, 325, 430/329, 300, 331 

## (56) References Cited 

Grenville, et al., "Integrated Fab Process for Metal Oxide EUV Photoresist", SPIE Advanced Lithography Conference 2015. Feb. 22, 2015. Proceedings vol. 9425. pp. 1-8. 

Primary Examiner - Amanda C Walke 

(74) Attorney, Agent, or Firm - Tutunjian & Bitetto, 

P.C.; Vazken Alexanian 

## (57) ABSTRACT 

An extreme ultraviolet lithography pattern stack, including, an inorganic hardmask layer, an under layer on the inorganic hardmask layer, and a resist layer on the under layer, where the inorganic hardmask layer, under layer, and resist layer have a combined thickness in the range of about 8.5 nm to about 70 nm. 

See application file for complete search history. 

<img src='content_image/912580.jpg'>

USO 10082736B2 

H0JL 2110274 (2013.01); H0JL 2110276 (2013.01); H0JL 21/32139 (2013.01) 

## U.S. PATENT DOCUMENTS 

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## OTHER PUBLICATIONS 

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## 20 Claims, 2 Drawing Sheets 

