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# c12) United States Patent 

# Hatakeyama 

# (54) RESIST COMPOSITION AND PATTERNING PROCESS 

(71) Applicant: SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP) 

(72) Inventor: Jun Hatakeyama, Joetsu (JP) 

(73) Assignee: SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP) 

( *) Notice: Subject to any disclaimer, the term ofthis patent is extended or adjusted under 35 U.S.C. 154(b) by O days. 

(21) Appl. No.: 14/013,163 

(22) Filed: Aug. 29, 2013 

## (65) Prior Publication Data 

US 2014/0065546 Al Mar. 6, 2014 

## (30) Foreign Application Priority Data 

Sep. 5, 2012 (JP) ................................. 2012-194753 

(51) Int. Cl. 

<img src='content_image/903678.jpg'>

(52) U.S. Cl. CPC ............ G03F 710397 (2013.01); G03F 710045 (2013.01); G03F 710046 (2013.01); G03F 710048 (2013.01); G03F 7111 (2013.01); G03F 7120 (2013.01) 

( 58) Field of Classification Search CPC ..... G03F 7/0045; G03F 7/0046; G03F 7/039; G03F 7/0392; G03F 7/0397; G03F 7/20; G03F 7/2002 USPC ............... 430/270.1, 326, 907, 910, 921, 925 See application file for complete search history. 

<img src='content_image/903684.jpg'>

# (IO) Patent No.: US 9,152,050 B2 

# (45) Date of Patent: Oct. 6, 2015 

## (56) References Cited 

<img src='content_image/903682.jpg'>

## FOREIGN PATENT DOCUMENTS 

<img src='content_image/903675.jpg'>

* cited by examiner 

Primary Examiner - Anca Eoff (74) Attorney, Agent, or Firm - Westerman, Daniels & Adrian, LLP Hattori, 

## (57) ABSTRACT 

A polymer capable of increasing alkali solubility under the action of acid, as a base resin is blended with a polymer comprising recurring units derived from a styrene having 1,1,1,3,3,3-hexafluoro-2-propanol as a polymeric additive to formulate a resist composition. The photoresist film formed using the resist composition is effective for minimizing out› gassing therefrom during the EUV lithography, reducing LWR after development, and suppressing formation of blob defects after development because of its hydrophilic surface. 

US009152050B2 

## U.S. PATENT DOCUMENTS 

## 7 Claims, No Drawings 

