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(2) Compound Having a Nitrogen-Containing Heterocyclic Structure 

As the heterocyclic structure, the compound may not have an aromatic property. Further, a plurality of nitrogen atoms may be contained, and hetero atoms other than a nitrogen atom may be contained. Specifically, a compound having an imidazole structure, (2-phenylbenzimidazole, 2,4,5-triph› enylimidazole ), a compound having a piperidine structure (N-hydroxyethylpiperidine, bis(l ,2,2,6,6-pentamethyl-4-pi› peridyl)sebacate ), a compound having a pyridine structure ( 4-dimethy !amino-pyridine), and a compound having an anti› pyrine structure (antipyrine, hydroxyl-antipyrine) are exem› plified. 

A compound having two or more cyclic structures is also preferably used. Specifically, 1,5-diazabicyclo[4.3.0]non-5- ene, 1,8-diazabicyclo[5.4.0]undeca-7-ene are exemplified. 

(3) Amine Compound Having a Phenoxy Group 

More preferably, the compound is a compound having at least one oxyalkylene chain between the phenoxy group and the nitrogen atom. The number of oxyalkylene chains in one molecule is preferably 3 to 9, and more preferably 4 to 6. Of oxyalkylene chains, -CH$_{2}$CH$_{2}$0-is preferred. 

As the specific examples, 2-[2-{ 2-(2,2-dimethoxyphe› noxyethoxy)ethyl }-bis-(2-methoxyethyl)]amine, and Com- 

pounds (Cl-1) to (C3-3) disclosed in U.S. Patent Application 2007/0224539Al, paragraph [0066] are exemplified. ( 4) Ammonium Salt 

Ammonium salts are also arbitrarily used. Preferred com› pound is hydroxide or carboxylate. More specifically, tet› raalkylammonium hydroxide represented by tetrabutylam› monium hydroxide is preferred. Besides the above, ammonium salts deriving from the amines in the above (1) to (3) can be used. 

(5) Guanidine Compound 

The composition according to the invention may further contain a guanidine compound having a structure represented by the following formula. 

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Since the positive charge of conjugated acid is stably dis› tributed by three nitrogen atoms, the guanidine compound shows strong basicity. 

As the basicity of guanidine compound (A) of the inven- tion, pKa of conjugated acid is preferably 6.0 or more, when pKa is 7 .0 to 20.0, neutral reactivity with an acid is high and excellent roughness characteristics are obtained and so pre› ferred, and more preferably 8.0 to 16.0. 

Due to such strong basicity, distribution of acid is restrained and an excellent pattern form can be obtained. 

Incidentally, "pKa" here means pKa in an aqueous solu› tion, which is, for example, described in Kagaku Binran (II) 

