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group, in which at least one hydrogen ( one or more or even all hydrogen atoms) may be substituted by a hydroxyl, carboxyl, halogen, cyano, oxo, amide, nitro, sultone, sulfone or sulfonium salt-containing moiety, or in which at least one carbon atom may be substituted by an ether, ester, carbonyl, carbonate or sulfonic acid ester moiety, or R 402 and R 403 may bond together to form a ring with the sulfur atom to which they are attached, r is an integer of 1 to 3, s is an integer of 1 to 5, and t is an integer of Oto 3. 

[0110] Further useful PAGs are sulfonium and iodonium salts of iodized benzene-containing fluorinated sulfonic acid having the formulae (3-3) and (3-4), respectively. 

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[0111] In formulae (3-3) and (3-4), R $^{411 }$is each indepen› dently a hydroxyl, C$_{1 }$-C$_{20 }$straight, branched or cyclic alkyl or alkoxy group, C$_{2}$-C$_{20 }$straight, branched or cyclic acyl or acyloxy group, fluorine, chlorine, bromine, amino, or alkoxycarbonyl-substituted amino group. R$^{412 }$is each inde› pendently a single bond or alkylene group. R$^{413 }$is a single bond or C$_{1}$-C$_{20 }$ divalent linking group when u=l, or a C$_{1 }$-C$_{20 }$tri- or tetravalent linking group when u=2 or 3, the linking group optionally containing an oxygen, sulfur or nitrogen atom. Rf 21 to Rf$^{24 }$are each independently hydro› gen, fluorine or trifluoromethyl, at least one of Rf$^{21 }$to Rf2 4 being fluorine or trifluoromethyl, or Rf2 1 and Rf2 2 , taken together, may form a carbonyl group. R 414 , R 415 , R 416 , R 417 and R$^{418 }$are each independently a C$_{1}$-C$_{12 }$straight, branched or cyclic alkyl group, C$_{2}$-C$_{12 }$ straight, branched or cyclic alkenyl group, CcC$_{20 }$ aryl group, C$_{7}$ -C$_{12 }$ aralkyl group or C$_{7}$ -C$_{12 }$aryloxyalkyl group, in which at least one hydrogen ( one or more or even all hydrogen atoms) may be substituted by a hydroxyl, carboxyl, halogen, cyano, oxo, amide, nitro, sultone, sulfone, or sulfonium salt-containing moiety, or in which at least one carbon atom may be substituted by an ether, ester, carbonyl, carbonate or sulfonic acid ester moi› ety, or R$^{414 }$and R$^{415 }$may bond together to form a ring with the sulfur atom to which they are attached, u is an integer of 1 to 3, v is an integer of 1 to 5, and w is an integer of O to 3. 

[0112] Suitable examples of the cation moiety in the sulfonium salt having formulae (3-1) and (3-3) are as exemplified above as the cation moiety in the sulfonium salt having formula (1-1 ). Suitable examples of the cation moi› ety in the iodonium salt having formulae (3-2) and (3-4) are as exemplified above as the cation moiety in the iodonium salt having formula (1-2). 

[0113] Examples of the anion moiety in the onium salts having formulae (3-1) to (3-4) are given below, but not limited thereto. 

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