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from being leached out of the resist film for minimizing any damage to the exposure tool. The surfactant becomes solu› bilized during alkaline development following exposure and PEB, and thus forms few or no foreign particles which become defects. The preferred surfactant is a polymeric surfactant which is insoluble or substantially insoluble in water, but soluble in alkaline developer, also referred to as "hydrophobic resin" in this sense, and especially which is water repellent and enhances water sliding. 

[0201] Suitable polymeric surfactants include those con› taining recurring units of at least one type selected from the formulae (7 A) to (7E). 

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[0202] Herein, RB is hydrogen, fluorine, methyl or trifluo› romethyl. W 1 is ----CH$_{2}$-, ----CH$_{2}$CH$_{2}$ - or ---0-, or two separate -H. R5 1 is each independently hydrogen or a C$_{1 }$-C$_{10 }$monovalent hydrocarbon group. Rs 2 is a single bond or a C$_{1 }$-C$_{5 }$ straight or branched divalent hydrocarbon group. Rs 3 is each independently hydrogen, a C$_{1 }$-C$_{15 }$ monovalent hydrocarbon or fluorinated hydrocarbon group, or an acid labile group. When Rs 3 is a monovalent hydrocarbon or fluorinated hydrocarbon group, an ether bond (-0-) or carbonyl moiety (----C(=0)-) may intervene in a carbon› carbon bond. Rs 4 is a C$_{1}$-C$_{20 }$ (u+l)-valent hydrocarbon or fluorinated hydrocarbon group, and u is an integer of 1 to 3. Rs 5 is each independently hydrogen or a group having the formula: 

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wherein Rs 7 is a C$_{1 }$-C$_{20 }$fluorinated hydrocarbon group. Rs 6 is a C$_{1 }$-C$_{15 }$ monovalent hydrocarbon or fluorinated hydro› carbon group in which an ether bond (-0-) or carbonyl moiety (-C(=0)-) may intervene in a carbon-carbon bond. 

[0203] The monovalent hydrocarbon group represented by Rs $^{1 }$may be straight, branched or cyclic and examples thereof include methyl, ethyl, n-propyl, isopropyl, cyclopropyl, n-butyl, isobutyl, sec-butyl, tert-butyl, cyclobutyl, n-pentyl, cyclopentyl, n-hexyl, cyclohexyl, n-heptyl, n-octyl, n-nonyl, n-decyl, adamantyl, and norbornyl. Inter alia, C$_{1 }$-C$_{6 }$ hydro› carbon groups are preferred. 

[0204] The divalent hydrocarbon group represented by R5 2 may be straight, branched or cyclic and examples thereof include methylene, ethylene, propylene, butylene, and pen› tylene. 

[0205] The monovalent hydrocarbon group represented by Rs 3 or Rs$^{6 }$may be straight, branched or cyclic and examples thereof include alkyl, alkenyl, and alkynyl groups, with the alkyl groups being preferred. Suitable alkyl groups include those exemplified for the monovalent hydrocarbon group represented by Rs $^{1 }$as well as n-undecyl, n-dodecyl, tridecyl, tetradecyl, and pentadecyl. Examples of the monovalent fluorinated hydrocarbon group represented by Rs 3 or Rs 6 include the foregoing monovalent hydrocarbon groups in which some or all carbon-bonded hydrogen atoms are sub› stituted by fluorine atoms. In these groups, an ether bond (-0-) or carbonyl moiety (----C(=0)-) may intervene in a carbon-carbon bond as mentioned above. 

[0206] Examples of the acid labile group represented by R5 3 include groups of the above formulae (Ll) to (L4), C$_{4}$-C$_{20}$ , preferably C $_{4}$-C$_{15 }$ tertiary alkyl groups, trialkylsilyl groups in which each alkyl moiety has 1 to 6 carbon atoms, and C$_{4}$ -C$_{20 }$oxoalkyl groups. 

[0207] The (u+ 1 )-valent hydrocarbon or fluorinated hydrocarbon group represented by Rs 4 may be straight, branched or cyclic and examples thereof include the fore- 

