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# c12) United States Patent 

# Araki et al. 

# (54) FLUORINE-CONTAINING POLYMER, RESIST COMPOSITION PREPARED FROM SAME AND NOVEL FLUORINE-CONTAINING MONOMER 

(75) Inventors: TakayukiAraki, Settsu (JP); Takuji Ishikawa, Settsu (JP); Meiten Koh, Settsu (JP) 

(73) Assignee: Daikin Industries, Ltd., Osaka (JP) 

( *) Notice: Subject to any disclaimer, the term ofthis patent is extended or adjusted under 35 U.S.C. 154(b) by 255 days. 

(21) Appl. No.: 11/438,669 

(22) Filed: May 17, 2006 

## (65) Prior Publication Data 

US 2006/0251991 Al Nov. 9, 2006 

(60) Division of application No. 10/815,801, filed on Apr. 2, 2004, now Pat. No. 7,115,690, which is a continua› tion-in-part of application No. PCT/JP02/10242, filed on Oct. 2, 2002. 

## (30) Foreign Application Priority Data 

<img src='content_image/931883.jpg'>

(51) Int. Cl. 

<img src='content_image/931884.jpg'>

(52) U.S. Cl. ....................... 570/123; 570/124; 570/126; 430/270.1; 430/907 

(58) Field of Classification Search ....................... None See application file for complete search history. 

## Related U.S. Application Data 

<img src='content_image/931895.jpg'>

# (IO) Patent No.: US 7,511,179 B2 

# (45) Date of Patent: Mar.31,2009 

## (56) References Cited 

3,393,993 A * 7/1968 Gilbert et al. ............... 504/353 

## FOREIGN PATENT DOCUMENTS 

<img src='content_image/931885.jpg'>

International Search Report for PCT/JP02/10242 dated Jan. 21, 2003. English translation of JP 10-231239. 

* cited by examiner 

Primary Examiner-Sin J. Lee 

(74) Attorney, Agent, or Firm-Sughrue Mion, PLLC 

## (57) ABSTRACT 

A fluorine-containing unsaturated cyclic compound repre› sented by the formula (l)(a): 

<img src='content_image/931893.jpg'>

wherein Z $^{3 }$are the same or different and each is -R:F-Z 4 , in which Z 4 is at least one functional group selected from the group consisting of OH group, COOH group, a derivative of carboxylic acid group and a functional group protected by a protective group which can convert the functional group to OH group by reaction with an acid; Rf $^{3 }$is a fluorine-contain› ing alkylene group which has 1 to 30 carbon atoms and may have ether bond; nll is an integer of from 1 to 4. 

US007511179B2 

## U.S. PATENT DOCUMENTS 

## OTHER PUBLICATIONS 

## 5 Claims, 1 Drawing Sheet 

