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acceptibility is reduced or lost, or which is changed from being proton-accepting to be acidic, by being decomposed due to irradiation with active light or radiation, as a basic compound. 

Regarding the compound (PA) which has a proton-ac- cepting functional group and generates a compound in which the proton-acceptibility is reduced or lost, or which is changed from being proton-accepting to be acidic, by being decomposed due to irradiation with active light or radiation, the description in paragraphs "0379" to "0425" of JP2012- 32762A (which corresponds to paragraphs "0386" to "0435" of US2012/0003590A) can be referred to, and the contents thereof are incorporated in the present specification. 

( 6) Guanidine Compound 

The composition of the present invention may further contain a guanidine compound having a structure repre› sented by the following formula. 

The guanidine compound exhibits strong basicity since the positive charge of the conjugate acid is dispersed and stabilized by the three nitrogen atoms. 

For the basicity of the guanidine compound (A) of the present invention, the pKa of a conjugate acid is preferably 6.0 or greater, preferably 7.0 to 20.0 since neutralization reactivity with an acid is high and the roughness properties are excellent, and more preferably 8.0 to 16.0. 

Due to such strong basicity, the diffusibility of an acid is suppressed, and the strong basicity can contribute to forma› tion of an excellent pattern shape. 

The "pKa" here represents pKa in an aqueous solution, and for example, it is described in Chemical Handbook (II) (revised 4th edition, 1993, edited by The Chemical Society of Japan, published by Maruzen Co., Ltd.), and a smaller value means higher acidity. Specifically, the pKa in aqueous solution can be obtained by measuring the acid dissociation constant at 25° C. using an infinite dilution aqueous solution, and a value based on the database of Hammett substituent constants and known literature values can also be deter› mined by calculation using the following software package 1. All of pKa values described in the present specification are values determined by calculation using this software package. 

Software package 1: Advanced Chemistry Development (ACD/Labs) Software V8.14 for Solaris (1994-2007 ACD/ Labs). 

In the present invention, log Pis a logarithmic value of an n-octanol/water distribution coefficient (P), and with respect to a wide range of compounds, it is an effective parameter that can characterize the hydrophilicity/hydrophobicity. In general, the distribution coefficient is determined not by experiment but by calculation, and in the present invention, the distribution coefficient is a value calculated by a CS ChemDraw Ultra Ver. 8.0 software package (Crippen’s fragmentation method). 

In addition, the log P of the guanidine compound (A) is preferably 10 or less. When the log Pis the above value or less, the guanidine compound can be uniformly contained in a resist film. 

The log P of the guanidine compound (A) in the present invention is preferably within a range of 2 to 10, more 

preferably within a range of 3 to 8, and particularly prefer› ably within a range of 4 to 8. 

In addition, the guanidine compound (A) in the present invention preferably does not have a nitrogen atom other than a guanidine structure. 

Specific examples of the guanidine compound are shown below, but, the present invention is not limited thereto. 

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