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composition, (2) exposing the film to active light or radiation and (3) developing the exposed film using a developer including an organic solvent, in which the active light› sensitive or radiation-sensitive resin composition contains a resin (A) having a repeating unit represented by General Formula (I), a repeating unit represented by any one of General Formulas (II) to (IV), and a repeating unit repre› sented by General Formula (V). 

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In General Formula (I), each of R$_{41}$ , R 42 , and R $_{43 }$inde› pendently represents a hydrogen atom, an alkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. Here, R$_{42 }$may be bonded to Ar$_{4 }$ to form a ring, and R$_{42 }$in 25 this case represents a single bond or an alkylene group. X$_{4 }$ represents a single bond, -COO-, or ----CONR$_{44}$-, and, in the case of forming a ring with R$_{42}$, represents a trivalent connecting group. R$_{44 }$ represents a hydrogen atom or an alkyl group. L$_{4 }$ represents a single bond or an alkylene group. Ar$_{4 }$ represents an (n+l) valent aromatic ring group, and, in the case of being bonded to R$_{42 }$ to form a ring, represents an (n+2) valent aromatic ring group. n represents an integer of 1 to 4. 30 

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In Formula (II), each of R$_{6}$ i, R$_{62}$, and R$_{63 }$independently represents a hydrogen atom, an alkyl group, a cycloalkyl 

group, a halogen atom, a cyano group, or an alkoxycarbonyl group. Here, R$_{62 }$may be bonded to Ar$_{6 }$ to form a ring, and R$_{62 }$ in this case represents a single bond or an alkylene group. X$_{6 }$ represents a single bond, --COO-, or ----CONR$_{64}$-. R$_{64 }$represents a hydrogen atom or an alkyl group. L$_{6 }$ represents a single bond or an alkylene group. Ar$_{6 }$ represents a divalent aromatic ring group, and, in the case of being bonded to R$_{62 }$ to form a ring, represents a trivalent aromatic ring group. Y $_{2 }$represents a group leaving due to the action of an acid. 

In Formula (III), each ofR$_{51}$, R 52 , and R $_{53 }$independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. R$_{52 }$may be bonded to L$_{4 }$ to form a ring, and R$_{52 }$in this case represents an alkylene group. L$_{5 }$ represents a single bond or a divalent connecting group, and in the case of being bonded to R$_{52 }$to form a ring, represents a trivalent connect› ing group. R$_{54 }$represents an alkyl group, and each ofR$_{55 }$and R$_{56 }$ independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or an aralkyl group. R 55 to R$^{56 }$may be bonded to each other to form a ring. However, R$_{55 }$ and R$_{56 }$do not represent a hydrogen atom at the same time in any case. 

In Formula (IV), each of Rm R$_{72}$, and R$_{73 }$independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. R$_{72 }$may be bonded to L$_{4 }$ to form a ring, and R$_{72 }$in this case represents an alkylene group. L$_{7 }$ represents a single bond or a divalent connecting group, and in the case of forming a ring with R$_{72}$, represents a trivalent connecting group. R$_{74 }$ represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkoxy group, an acyl group, or a heterocyclic group. M$_{4 }$ represents a single bond or a divalent connecting group. Q$_{4 }$ represents an alkyl group, a cycloalkyl group, an aryl group, or a heterocyclic group. At least two of Q$_{4}$ , M$_{4}$ , and R$_{74 }$may be bonded to each other to form a ring. 

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In Formula (V), each of Rgi, Rg$_{2}$ , and Rg$_{3 }$ independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group. Here, Rg$_{2 }$ may be bonded to Lg to form a ring, and Rg$_{2 }$ in this case represents a single bond or an alkylene group. Xg represents a single bond or a divalent connecting group. Lg represents a single bond or an (s+l) valent connecting group, and in the case of being bonded to Rg$_{2 }$ to form a ring, represents a trivalent connecting group. s represents an integer of 1 to 5. Here, in a case where Lg is a single bond, s is 1. Bg represents a group containing a cross-linking group. 

[2] 

The pattern formation method according to [1], in which the cross-linking group included in Bg in General Formula (V) is a hydroxymethyl group, an alkoxymethyl group, an oxirane ring, or an oxetane ring. 

