content_image/931910.jpg content_image/931909.jpg content_image/931911.jpg content_image/931908.jpg
wherein R:t4 and Rf’ are the same or different and each is a fluorine-containing alkyl group having 1 to 10 carbon atoms or a fluorine-containing alkyl group which has 1 to 10 carbon atoms and ether bond; 

Y is the same or different and each is H, F, Cl, an alkyl group 5 having 1 to 10 carbon atoms or a fluorine-containing alky 1 group which has 1 to 10 carbon atoms and may have ether bond; R is the same or different and each is H or an alkyl group having 1 to 10 carbon atoms; n is O or an integer of 10 from 1 to 5. 

The functional group Y in those norbomene derivatives having a fluorine-containing tertiary alcohol structure is H, F, Cl, an alky 1 group or fluorine-containing alky 1 group having 1 to 10 carbon atoms or a fluorine-containing alkyl group hav› ing 1 to 10 carbon atoms and ether bond, and it is particularly preferable that the functional group Y is F, a fluorine-contain› ing alkyl group or a fluorine-containing alkyl group having ether bond because transparency is enhanced when the nor- bomene derivative is used for a resist. It is particularly pref› erable that at least one ofY is For CFy 

For example, there are preferably norbomene derivatives having fluorine-containing alcohol structure represented by the formula (12): 

<img src='content_image/931910.jpg'>

wherein R:t4 and Rf’ are the same or different and each is a 40 fluorine-containing alkyl group having 1 to 10 carbon atoms or a fluorine-containing alkyl group which has 1 to 10 carbon atoms and ether bond; 

Y 1 , Y $^{2 }$and Y$^{3 }$are the same or different and each is H, F, Cl, an alkyl group having 1 to 10 carbon atoms or a fluorine- containing alkyl group which has 1 to 10 carbon atoms and may have ether bond; R is the same or different and each is H or an alky 1 group having 1 to 10 carbon atoms; 

n is O or an integer of from 1 to 5; at least one ofY1, Y$^{2 }$andY 3 is For a fluorine-containing alkyl group which has 1 to 10 carbon atoms and may have ether bond. 

In the formula (12), itis preferablethatY$^{1 }$andY$^{2 }$are Hand Y$^{3 }$is For CF 3, andY$^{1 }$andY$^{2 }$areF andY$^{3 }$is For CF 3, because transparency can be improved more. 

Examples of the preferred norbomene derivative having fluorine-containing tertiary alcohol structure are: 

<img src='content_image/931909.jpg'>

<img src='content_image/931911.jpg'>

and the like. 

In the above examples of the norbornene derivative, R:t4 and Rf’ may be the same or different, and are selected from fluorine-containing alkyl groups having 1 to 10 carbon atoms or fluorine-containing alkyl groups having 1 to 10 carbon atoms and ether bond. 

R:t4 and Rf’ are those obtained by replacing a part or the whole of hydrogen atoms of an alkyl group or an alkyl group having ether bond with fluorine atoms and may have partly halogen atoms other than F such as Cl and Br. 

It is particularly preferable that R:t4 and Rf’ are perfluoro› alkyl groups or perfluoroalkyl groups having ether bond from the point that acidity of OH group can be enhanced and transparency can be imparted. Preferred examples thereof are: 

<img src='content_image/931908.jpg'>

-continued 

