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[0086] Also included in the recurring units having an acid labile group of formula (AL-3) are recurring units of (meth) acrylate having a furandiyl, tetrahydrofurandiyl or oxanor› bomauediyl group as represented by the following formula (AL-3)-22. 

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[0087] In formula (AL-3)-22, RA is as defined above. RLc1 2 and RLc1 3 are each independently a C$_{1 }$-C$_{10 }$monova› lent hydrocarbon group, or RLc1 2 and RLc1 3 , taken together, may form an aliphatic ring with the carbon atom to which they are attached. RLc1 4 is furandiyl, tetrahydrofurandiyl or oxanorbornanediyl. RLc1s is hydrogen or a C$_{1 }$-C$_{10 }$monova› lent hydrocarbon group which may contain a heteroatom. The monovalent hydrocarbon group may be straight, branched or cyclic, and examples thereof include C$_{1 }$-C$_{10 }$ alkyl groups. 

[0088] Examples of the monomer from which the recur› ring units having formula (AL-3)-22 are derived are shown below, but not limited thereto. Herein RA is as defined above. 

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