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[0340] In General Formula (ZI-4), R$_{13 }$represents a group having a hydrogen atom, a fluorine atom, a hydroxyl group, an alkyl group, a cycloalkyl group, an alkoxy group, an alkoxycarbonyl group, or a cycloalkyl group. These groups may have a substituent. 

[0341] Ina case where a plurality ofR 14 ’s are present, each ofR 14 ’s independently represents a group having a hydroxyl group, an alkyl group, a cycloalkyl group, analkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylsul› fonyl group, a cycloalkylsulfonyl group, or a cycloalkyl group. These groups may have a substituent. 

[0342] Each of R 15 ’s independently represents an alkyl group, a cycloalkyl group, or a naphthyl group. These groups may have a substituent. Two R 15 ’s may be bonded to each otherto form a ring. When two R 15 ’s are bonded to each other to form a ring, a heteroatom such as an oxygen atom or a nitrogen atom may be included in the ring skeleton. In one aspect, it is preferable that two R 15 ’s are alkylene groups, and these alkylene groups are bonded to each other to form a ring structure. 

[0343] 1 is an integer ofO to 2. 

[0344] r is an integer ofO to 8. 

[0345] z- represents a non-nucleophilic anion, and as z-, the same as the non-nucleophilic anion represented by z- in General Formula (ZI) can be exemplified. 

[0346] In General Formula (ZI-4), the alkyl group repre› sented by R$_{13}$, R 14 , or R 15 is linear or branched, and prefer› ably has 1 to 10 carbon atoms, and is preferably a methyl group, an ethyl group, an n-butyl group, or at-butyl group. 

[0347] Examples of the cation of the compound repre› sented by General Formula (ZI-4) in the present invention include the cations described in paragraph "O 121 ", "O 123 ", or "0124" of JP201O-256842A, and paragraph "0127", "0129", or "0130" of JP2011-76O56A. 

[0348] Next, General Formulas (ZII) and (ZIII) will be described. 

[0349] In General Formulas (ZII) and (ZIII), each ofR 204 to R 207 independently represents an aryl group, an alkyl group, or a cycloalkyl group. 

[0350] The aryl group represented by each ofR 204 to R 207 is preferably a phenyl group or a naphthyl group, and more preferably a phenyl group. The aryl group represented by each ofR 204 and R 207 may be an aryl group having a hetero› cyclic structure which contains an oxygen atom, a nitrogen atom, a sulfur atom, or the like. Examples of the skeleton of the ary 1 group having a heterocyclic structure include pyrrole, furan, thiophene, indole, benzofuran, and benzothiophene. 

[0351] Preferable examples of the alkyl group and the cycloalkyl group represented by each ofR 204 to R 207 include a linear or branched alkyl group having 1 to 10 carbon atoms (for example, a methyl group, an ethyl group, a propyl group, a butyl group, or a pentyl group) and a cycloalkyl group having 3 to 10 carbon atoms (a cyclopentyl group, a cyclo› hexyl group, or a norbomyl group). 

[0352] The aryl group, the alkyl group, and the cycloalkyl group represented by each of R 204 to R 207 may have a sub› stituent. Examples of the substituent which each of the aryl group, the alkyl group, and the cycloalkyl group represented by each of R 204 to R 207 may have include an alkyl group (having 1 to 15 carbon atoms, for example), a cycloalkyl group (having 3 to 15 carbon atoms, for example), an aryl group (having 6 to 15 carbon atoms, for example), an alkoxy group (having 1 to 15 carbon atoms, for example), a halogen atom, a hydroxyl group, or a phenylthio group. 

[0353] z- represents a non-nucleophilic anion, and as z-, the same as the non-nucleophilic anion in General Formula (ZI) can be exemplified. 

[0354] In addition, in one aspect of the present invention, as a preferable acid generator, a compound represented by the following General Formula (IIIB-2) can be exemplified. 

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[0355] In the formula, x+ represents an organic cation. 

[0356] Q 61 represents a group having an alicyclic group, a group having a lactone structure, a group having a sultone structure, or a group having a cyclic carbonate structure. 

[0357] Examples of the alicyclic group in Q 61 include the same as the alicyclic groups exemplified as Cy in General Formulas (IIIB) and (IVB) above. The alicyclic group is particularly preferably an adamantyl group. 

[0358] Examples of the lactone structure or the sultone structure in Q 61 include the same as the lactone structure or the sultone structure in the repeating unit having a lactone structure or a sultone structure described in the section of the resin (A) above. Specifically, a lactone structure represented by any one of General Formulas (LCl-1) to (LCl-17) or a sultone structure represented by any one of General Formulas (SLl-1) to (SLl-3) is exemplified. 

[0359] The cyclic carbonate structure in Q 61 is preferably a 5- to 7-membered carbonate structure, and examples thereof include 1,3-dioxolan-2-one and 1,3-dioxan-2-one. 

[0360] Each of the alicyclic group, the lactone structure, the sultone structure, and the cyclic carbonate structure may be directly bonded to the oxygen atom of the ester group in General Formula (IBB-2). In addition, each of the alicyclic group, the lactone structure, the sultone structure, and the cyclic carbonate structure may be bonded to the oxygen atom of the ester group through an alkyene group (for example, a methylene group or an ethylene group). In this case, the group having an alicyclic group, a lactone structure, a sultone struc› ture, or a cyclic carbonate structure can be an alkyl group which has an alicyclic group, a lactone structure, a sultone structure, or a cyclic carbonate structure as a substituent. 

[0361] Examples of the organic cation represented by x+ include a sulfonium cation or an iodonium cation. 

[0362] The sulfonium cation is, for example, preferably -S(R201)(R202)(R $_{203}$t in General Formula (ZI), and the iodonium cation is, for example, preferably-I(R 204 )(R $_{205}$t in General Formula (ZII). 

[0363] Specific examples of the anion structure in the com› pound represented by General Formula (IIIB-2) will be described below, but the present invention is not limited thereto. 

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(IIIB-2) 

