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component (E), a component (F), and a component (S) described below are exemplified. 

[0400] <<Acid Generator Component (B)>> 

[0401] The resist composition of the present embodiment may further contain an acid generator component (herein› after, referred to as a "component (B)") in addition to the component (A). 

[0402] The component (B) is not particularly limited, and those which have been proposed as an acid generator for a chemically amplified resist in the related art can be used. 

[0403] Examples of these acid generators are numerous and include onium salt acid generators such as iodonium salts and sulfonium salts; oxime sulfonate-based acid gen› erators; diazomethane-based acid generators such as bisalkyl or bisaryl sulfonyl diazomethanes and poly(bis› sulfonyl)diazomethanes; nitrobenzylsulfonate-based acid generators; iminosulfonate-based acid generators; and dis› ulfone-based acid generators. Among these examples, it is preferable to use an onium salt acid generator. 

[0404] As the onium salt acid generator, a compound represented by Formula (b-1) (hereinafter, also referred to as "component (b-1)"), a compound represented by Formula (b-2) (hereinafter, also referred to as "component (b-2)") or a compound represented by Formula (b-3) (hereinafter, also referred to as "component (b-3)") can be used. 

[0405] [In the formulae, R$^{101 }$and R$^{104 }$to R$^{108 }$each inde› pendently represent a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent, provided that R $^{104 }$and R $^{105 }$may be bonded to each other to form a ring. 102 

[0406] R represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms. Y 101 represents a single bond or a divalent linking group containing an oxygen atom. V 101 to V 103 each independently represent a single bond, an alkylene group, or a fluorinated alkylene group. L $^{101 }$and L $^{102 }$each independently represent a single bond or an oxygen atom. L $^{103 }$to L $^{105 }$each independently represent a single bond, --CO- or -SO$_{2}$ -. m represents an integer of 1 or greater, and M’m+ represents an m-valent onium cation.] 

[0407] {Anion Moiety} 

[0408] Anion Moiety of Component (B-1) 101 

[0409] In Formula (b-1), R represents a cyclic group which may have a substituent, a chain-like alkyl group which may have a substituent, or a chain-like alkenyl group which may have a substituent. 

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[0410] Cyclic group which may have substituent: 

[0411] The cyclic group is preferably a cyclic hydrocarbon group, and the cyclic hydrocarbon group may be an aromatic hydrocarbon group or an aliphatic hydrocarbon group. The aliphatic hydrocarbon group indicates a hydrocarbon group that has no aromaticity. The aliphatic hydrocarbon group may be saturated or unsaturated, but in general, the aliphatic hydrocarbon group is preferably saturated. 101 

[0412] The aromatic hydrocarbon group as R is a hydrocarbon group having an aromatic ring. The aromatic hydrocarbon group has preferably 3 to 30 carbon atoms, more preferably 5 to 30, still more preferably 5 to 20, particularly preferably 6 to 15, and most preferably 6 to 10. Here, the number of carbon atoms in a substituent is not included in the number of carbon atoms. 

[0413] Specific examples of the aromatic ring contained in the aromatic hydrocarbon group as R 101 include benzene, fluorene, naphthalene, anthracene, phenanthrene, biphenyl, or an aromatic hetero ring in which some carbon atoms constituting any of these aromatic rings have been substi› tuted with hetero atoms. Examples of the hetero atom in the aromatic hetero rings include an oxygen atom, a sulfur atom, and a nitrogen atom. 

[0414] Specific examples of the aromatic hydrocarbon group as R$^{101 }$include a group in which one hydrogen atom has been removed from the above-described aromatic ring (an aryl group such as a phenyl group or a naphthyl group), and a group in which one hydrogen atom in the aromatic ring has been substituted with an alkylene group (an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naph› thylmethyl group, a 2-naphthylmethyl group, 1-naphthyl› ethyl group, or a 2-naphthylethyl group). The alkylene group (an alkyl chain in the arylalkyl group) has preferably 1 to 4 carbon atom, more preferably 1 or 2 carbon atoms, and particularly preferably 1 carbon atom. 

[0415] Examples of the cyclic aliphatic hydrocarbon group as R $^{101 }$include aliphatic hydrocarbon groups contain› ing a ring in the structure thereof. 

[0416] Examples of the aliphatic hydrocarbon group con› taining a ring in the structure thereof include an alicyclic hydrocarbon group (a group in which one hydrogen atom has been removed from an aliphatic hydrocarbon ring), a group in which the alicyclic hydrocarbon group is bonded to the terminal of a linear or branched aliphatic hydrocarbon group, and a group in which the alicyclic hydrocarbon group is interposed in a linear or branched aliphatic hydrocarbon group. 

[0417] The alicyclic hydrocarbon group has preferably 3 to 20 carbon atoms and more preferably 3 to 12 carbon atoms. 

[0418] The alicyclic hydrocarbon group may be a poly› cyclic group or a monocyclic group. As the monocyclic alicyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a monocycloal› kane is preferable. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane. As the polycyclic alicyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a polycycloalkane is pref› erable, and the number of carbon atoms of the polycycloal› kane is preferably in a range of 7 to 30. Among polycy› cloalkanes, a polycycloalkane having a bridged ring polycyclic skeleton, such as adamantane, norbomane, isobomane, tricyclodecane, or tetracyclododecane, and a 

