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# c12) United States Patent Trefonas, III et al. 

# (54) ELECTRONIC DEVICE MANUFACTURE 

(75) Inventors: Peter Trefonas, III, Medway, MA (US); Dong Won Chung, Sturbridge, MA (US) 

(73) Assignee: Rohm and Haas Electronic Materials LLC, Marlborough, MA (US) 

( *) Notice: Subject to any disclaimer, the term ofthis patent is extended or adjusted under 35 U.S.C. 154(b) by 487 days. 

(21) Appl. No.: 12/069,857 

(22) Filed: Feb. 13, 2008 

## (65) Prior Publication Data 

US 2008/0292990 Al Nov. 27, 2008 

(60) Provisional application No. 60/901,600, filed on Feb. 13, 2007. 

(51) Int. Cl. 

<img src='content_image/941505.jpg'>

(52) U.S. Cl. CPC ............. H0JL 2110274 (2013.01); G03F 7140 (2013.01); H0JL 2110338 (2013.01); G03F 7/0035 (2013.01) 

## Related U.S. Application Data 

<img src='content_image/941479.jpg'>

# (IO) Patent No.: US 9,437,431 B2 

# Sep.6,2016 (45) Date of Patent: 

(58) Field of Classification Search CPC .......... G03F 7/20; G03F 7/40; G03F 7/0035; H01L 21/0338; H0lL 21/0274 USPC .......................................... 430/311, 322, 330 See application file for complete search history. 

## (56) References Cited 

<img src='content_image/941506.jpg'>

* cited by examiner 

Primary Examiner - Brittany Raymond 

(74) Attorney, Agent, or Firm -Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.; Peter F. Corless 

## (57) ABSTRACT 

New methods are provided for manufacturing a semicon› ductor device. Preferred methods of the invention include depositing a photoresist on a semiconductor substrate sur› face followed by imaging and development of resist coating layer; applying a curable organic or inorganic composition over the resist relief image; etching to provide a relief image of the resist encased by the curable composition; and remov› ing the resist material whereby the curable organic or inorganic composition remains in a relief image of increased pitch relative to the previously developed resist image. 

US009437431B2 

## U.S. PATENT DOCUMENTS 

## 8 Claims, 2 Drawing Sheets 

<img src='content_image/941507.jpg'>

