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other additives, such as a dye, a plasticizer, a photo-decom› posable basic compound, and a photo-base generator, if nec› essary. As for these compounds, respective compounds described in JP-A-2002-6500 can be exemplified. 

## [6] Solvent 

[0473] The examples of the solvents which are used in the actinic ray-sensitive or radiation-sensitive resin composition of the invention preferably include, for example, ethylene glycol monoethyl ether acetate, cyclohexanone, 2-heptanone, propylene glycol monomethyl ether (PGME, l-methoxy-2- propanol by another name), propylene glycol monomethyl ether acetate (PGMEA, l-methoxy-2-acetoxypropane by another name), propylene glycol monomethyl ether propi› onate, propylene glycol monoethyl ether acetate, methyl 3-methoxypropionate, ethyl 3-ethoxypropionate, methyl ~-methoxyisobutyrate, ethyl butyrate, propyl butyrate, methyl isobutyl ketone, ethyl acetate, isoamyl acetate, ethyl lactate, toluene, xylene, cyclohexyl acetate, diacetone alco› hol, N-methylpyrrolidone, N,N-dimethylformamide, y-buty› rolactone, N,N-dimethylacetamide, propylene carbonate, and ethylene carbonate. These solvents are used alone or in combination. 

[0474] The solid content of the actinic ray-sensitive or radiation-sensitive resin composition according to the inven› tion is preferably dissolved in the above solvents in the solid content concentration of 1 % by mass to 40% by mass, more preferably 1 % by mass to 30% by mass, and still more pref› erably 3% by mass to 20% by mass. 

## [7] Compound Capable of Decomposing by the Action of an Acid to Generate an Acid 

[0475] The actinic ray-sensitive or radiation-sensitive resin composition in the invention may contain one or two or more kinds of compounds capable of decomposing by the action of an acid to generate an acid. The acid generated by the com› pound capable of decomposing by the action of an acid to generate an acid is preferably a sulfonic acid, a methide acid, or an imidic acid. 

[0476] The specific examples of the compounds capable of decomposing by the action of an acid to generate an acid are shown below, but the invention is not restricted thereto. 

<img src='content_image/896471.jpg'>

<img src='content_image/896476.jpg'>

<img src='content_image/896475.jpg'>

<img src='content_image/896474.jpg'>

<img src='content_image/896473.jpg'>

<img src='content_image/896472.jpg'>

-continued 

