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# c12) United States Patent 

# Yasunami et al. 

# (54) POSITIVE RESIST COMPOSITION 

(75) Inventors: Shoichiro Yasunami, Shizuoka (JP); Kazuyoshi Mizutani, Shizuoka (JP) 

(73) Assignee: Fujifilm Corporation, Tokyo (JP) 

( *) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 50 days. 

(21) Appl. No.: 10/840,624 

(22) Filed: May 7, 2004 

## (65) Prior Publication Data 

US 2004/0229161 Al Nov. 18, 2004 

## (30) Foreign Application Priority Data 

May 12, 2003 (JP) .......................... P.2003-133194 

(51) Int. Cl. G03F 71039 (2006.01) G03F 71075 (2006.01) 

(52) U.S. Cl. .................... 430/270.1; 430/905; 430/914 

(58) Field of Classification Search ............. 430/270.1, 430/905, 914 See application file for complete search history. 

## (56) References Cited 

<img src='content_image/900211.jpg'>

## U.S. PATENT DOCUMENTS 

<img src='content_image/900224.jpg'>

# (IO) Patent No.: US 7,217,493 B2 

# (45) Date of Patent: May 15, 2007 

<img src='content_image/900212.jpg'>

## FOREIGN PATENT DOCUMENTS 

<img src='content_image/900214.jpg'>

Keiji Watanabe et al., "Study of Bi-level Resist System with Conductive Bottom Layer for EB lithography", Journal of Photopolymer Science and Technology, vol. 19, No. 4 (1996), pp. 697-706. 

* cited by examiner 

Primary Examiner-Richard L. Schilling 

(74) Attorney, Agent, or Firm-Sughrue Mion, PLLC 

## (57) ABSTRACT 

A positive resist composition comprising (A) polysiloxane or polysilsesquioxane that has a property of increasing solubility in an alkali developing solution by the action of an acid and contains a group capable of being decomposed with an acid, (B) a compound that generates a sulfonic acid upon irradiation of an actinic ray or radiation and (C) an organic basic compound, wherein an amount of the compound that generates a sulfonic acid upon irradiation of an actinic ray or radiation is from 6 to 20% by weight based on the total solid content of the positive resist composition. 

US007217493B2 

## OTHER PUBLICATIONS 

## 8 Claims, No Drawings 

