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wherein R $^{35 }$and R $^{37 }$represent a hydrogen atom or a methyl group; R $^{36 }$and R $^{38 }$represent an acid-labile group other than the groups shown by the general formulae (1-1) to (1-5); Z 4 represents a single bond, a phenylene group, a naphthylene group, or ----C(=0)---0-R 39 -, where R 39 represents a linear, branched, or cyclic alkylene group having 1 to 10 carbon atoms and optionally containing an ester group, an ether group, or a lactone ring; Z 5 represents a single bond, an ester group, or an amido group; "r" represents 1 or 2; and "e" and "f’ satisfy 0ses0.5 and 0sfs0.5. 

Examples of repeating unit g that can be copolymerized other than the repeating units a, b, c, d, e, and f include repeating units derived from styrene, vinylnaphthalene, vinylanthracene, vinylpyrene, and methyleneindane (The content ratio of the repeating unit g is 0sgs0.5) 

The acid-labile groups other than the groups shown by the general formulae (1-1) to (1-5) (the acid-labile groups shown by R 36 and R 38 in the general formula (7)) are variously selected and may be the same or different from each other. In particular, there may be mentioned the fol› lowing groups shown by the general formulae (A-1) to (A-3). 

In the formula (A-1), RL 30 represents a tertiary alkyl group having 4 to 20, preferably 4 to 15 carbon atoms, a trialkylsilyl group containing alkyl groups having 1 to 6 carbon atoms, an oxoalkyl group having 4 to 20 carbon atoms, or a group shown by the formula (A-3). Illustrative examples of the tertiary alkyl group include a tert-butyl group, a tert-amyl group, a 1,1-diethylpropyl group, a 1-eth- ylcyclopentyl group, a 1-butylcyclopentyl group, a 1-ethyl› cyclohexyl group, a 1-butylcyclohexyl group, a l-ethyl-2- cyclopentenyl group, a l-ethyl-2-cyclohexenyl group, and a 2-methyl-2-adamantyl group; illustrative examples of the trialkylsilyl group include a trimethylsilyl group, a triethyl- silyl group, and a dimethyl-tert-butylsilyl group; and illus› trative examples of the oxoalkyl group include a 3-oxocy- 

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(A-1) 

(A-2) 

(A-3) 

clohexyl group, a 4-methyl-2-oxooxan-4-yl group, and a 5-methyl-2-oxooxolan-5-yl group. Al is an integer of0 to 6. 

Illustrative examples of the acid-labile group of the for› mula (A-1) include a tert-butoxycarbonyl group, a tert- butoxycarbonylmethyl group, a tert-amyloxycarbonyl group, a tert-amyloxycarbonylmethyl group, a 1,1-diethyl› propyloxycarbonyl group, a 1, 1-diethylpropyloxycarbonyl› methyl group, a 1-ethylcyclopentyloxycarbonyl group, a 1-ethylcyclopentyloxycarbonylmethyl group, a l-ethyl-2- cyclopentenyloxycarbonyl group, a l-ethyl-2-cyclopenteny› loxycarbonylmethyl group, a 1-ethoxyethoxycarbonylm› ethyl group, a 2-tetrahydropyranyloxycarbonylmethyl group, and a 2-tetrahydrofuranyloxycarbonylmethyl group. 

Other examples thereof include substituents shown by the formulae (A-1 )-1 to (A-1)-10. 

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