content_image/904637.jpg content_image/904638.jpg content_image/904639.jpg
[0101] R 403 , R 404 , R 405 , R $^{406 }$and R$^{407 }$are each indepen› dently a C$_{1 }$-C$_{20 }$monovalent hydrocarbon group which may contain a heteroatom. Any two ofR 403 , R $^{404 }$and R$^{405 }$may bond together to form a ring with the sulfur atom to which they are attached. The monovalent hydrocarbon group may be straight, branched or cyclic, and examples thereof include C$_{1 }$-C$_{12 }$alkyl, C$_{2}$ -C$_{12 }$alkenyl, C$_{2}$ -C$_{12 }$alkynyl, CcC$_{20 }$ aryl, and C$_{7}$-C$_{12 }$ aralkyl groups. In these groups, some or all of the hydrogen atoms may be substituted by hydroxyl, car› boxyl, halogen, cyano, amide, nitro, mercapto, sultone, sulfone, or sulfonium salt-containing moieties, and some carbon may be replaced by an ether bond, ester bond, carbonyl moiety, carbonate moiety or sulfonic acid ester bond. 

[0102] In formulae (3-1) and (3-2), pis an integer of 1 to 3, q is an integer of 1 to 5, and r is an integer of Oto 3, and lsq+rs5. Preferably, q is an integer of 1 to 3, more prefer› ably 2 or 3, and r is an integer of O to 2. 

[0103] Examples of the cation in the sulfonium salt having formula (5-1) include those exemplified above as the cation in the sulfonium salt having formula (3). Examples of the cation in the iodonium salt having formula (5-2) are shown below, but not limited thereto. 

<img src='content_image/904637.jpg'>

<img src='content_image/904638.jpg'>

<img src='content_image/904639.jpg'>

