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[0113] In formulae (1-1) and (1-2), R 101 , R 102 , R 103 , R 104 and R 105 are each independently a C$_{1}$-C$_{20 }$ monovalent hydrocarbon group which may contain a heteroatom. Any two ofR 101 , R $^{102 }$and R$^{103 }$may bond together to form a ring with the sulfur atom to which they are attached. The monovalent hydrocarbon group may be straight, branched or cyclic, and examples thereof include those exemplified above for R$^{21 }$to R$^{28 }$in formulae (fl) to (f3). 

[0114] Examples of the cation in the sulfonium salt having formula (1-1) are shown below, but not limited thereto. 

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