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[0855] The specific examples of the groups represented by formula (F4) include, e.g., -C(CF$_{3}$ ) $_{2}$OH, -C(C$_{2}$F$_{5}$ ) $_{2}$OH, -C(CF $_{3}$)(CH$_{3}$)OH, and----CH(CF $_{3}$)OH are exemplified, and -C(CF$_{3}$ ) $_{2}$OH is preferred. 

[0856] As preferred repeating unit having a fluorine atom, the following are given. 

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[0857] In the formulae, each ofR$_{10 }$and R$_{11 }$independently represents a hydrogen atom, a fluorine atom or an alky 1 group (preferably a straight chain or branched alkyl group having 1 to 4 carbon atoms, and as an alkyl group having a substituent, a fluorinated alkyl group can be exemplified). 

[0858] Each of W$_{3 }$ to W$_{6 }$ independently represents an organic group having at least one or more fluorine atoms. Specifically the groups represented by any of formulae (F2) to (F4) are exemplified. 

[0859] Other than the above, as repeating units having a fluorine atom, repeating units shown below are exemplified. 

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[0860] In formulae (C-II) and (C-III), each of R$_{4 }$ to R$_{7 }$ independently represents a hydrogen atom, a fluorine atom or an alkyl group (preferably a straight chain or branched alkyl 

group having 1 to 4 carbon atoms, and as an alkyl group having a substituent, a fluorinated alkyl group can be exem› plified). 

[0861] However, at least one ofR$_{4 }$ to R$_{7 }$ represents a fluo› rine atom. R$_{4 }$ and R$_{5 }$ or R$_{6 }$ and R$_{7 }$ may form a ring. 

[0862] W $_{2 }$represents an organic group containing at least one fluorine atom. Specifically, atomic groups described above in formulae (F2) to (F4) are given. 

[0863] Q represents an alicyclic structure. The alicyclic structure may have a substituent, and may be a monocyclic type or a polycyclic type. In the case of a polycyclic type, the structure may be bridged. As the monocyclic type, a cycloalkyl group having 3 to 8 carbon atoms is preferred and, for example, a cyclopentyl group, a cyclohexyl group, a cyclobutyl group and a cyclooctyl group can be exemplified. As the polycyclic type, a group having a bicyclo-, tricyclo- or tetracyclo-structure of 5 or more carbon atoms can be exem› plified, preferably a cycloalkyl group having 6 to 20 carbon atoms, for example, an adamantyl group, a norbomyl group, a dicyclopentyl group, a tricyclodecanyl group and a tetracy› clododecyl group are enumerated. Incidentally, a part of the carbon atoms in the cycloalkyl group may be replaced by a hetero atom such as an oxygen atom. 

[0864] L$_{2 }$ represents a single bond or a divalent linking group. As the divalent linking group, a substituted or unsub› stituted arylene group, a substituted or unsubstituted alkylene group, a substituted or unsubstituted cycloalkylene group, ---0-, -SO$_{2}$ -, -CO-, -N(R)-(wherein R represents a hydrdogen atom or an alkyl group), -NHSO$_{2}$ -, and a divalent linking group obtained by combining these groups are exemplified. 

[0865] Hydrophobic resin (HR) may contain a silicon atom. As the partial structure containing a silicon atom, a resin having an alkylsilyl structure (preferably a trialkylsilyl group) or a cyclic siloxane structure is preferred. 

[0866] As the alkylsilyl structure or cyclic siloxane struc› ture, specifically the group represented by any of the follow› ing formulae (CS-1) to (CS-3) is exemplified. 

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