content_image/911497.jpg content_image/911498.jpg content_image/911499.jpg content_image/911500.jpg
(2) A Functional Group Containing a Structure where a Nitro› gen Atom and an Atom with the Electronegativity Differ› ence from Nitrogen Atom being 0.6 or More are Bonded 1brough a Single Bond 

Examples of this polar group include a group containing a structure represented by N-H, such as amino group. 

(3) A Functional Group Containing a Structure where Two Atoms Differing in the Electronegativity by 0.5 or More are Bonded Through a Double Bond or a Triple Bond 

Examples of this polar group include a group containing a structure represented by C N, C=O, N=O, S=O or C N. 

( 4) A Functional Group Having an Ionic Moiety 

Examples of this polar group include a group having a moiety represented by N+or s+. 

The "polar group" which can be contained in the repeating unit (3A) is, for example, at least one selected from the group consisting of (I) a hydroxy group, (II) a cyano group, (III) a lactone group, (IV) a carboxylic acid group or a sulfonic acid group, (V) an amide group, a sulfonamide group or a group corresponding to a derivative thereof, (VI) an ammonium group or a sulfonium group, and a group formed by combin- ing two or more thereof 

In particular, the polar group is preferably an alcoholic hydroxy group, a cyano group, a lactone group, or a group containing a cyanolactone structure. 

When a repeating unit having an alcoholic hydroxy group is further incorporated into the resin (A), the exposure latitude (EL) of a composition containing the resin (A) can be more enhanced. 

When a repeating unit having a cyano group is further 35 incorporated into the resin (A), the sensitivity of a composi› tion containing the resin (A) can be more enhanced. 

When a repeating unit having a lactone group is further incorporated into the resin (A), the dissolution contrast for an organic solvent-containing developer can be more enhanced. Also, when the repeating unit is incorporated, a composition containing the resin (A) can be more improved in the dry etching resistance, coatability and adherence to substrate. 

When a repeating unit having a group containing a cyano group-containing lactone structure is further incorporated into the resin (A), the dissolution contrast for an organic solvent-containing developer can be more enhanced. Also, when the repeating unit is incorporated, a composition con› taining the resin (A) can be more improved in the sensitivity, dry etching resistance, coatability and adherence to substrate. In addition, when the repeating unit is incorporated, a single repeating unit can play functions attributable to a cyano group and a lactone group, respectively, and the latitude in design› ing the resin (A) can be more broadened. 

Specific examples of the structure which can be contained in the "polar group" are illustrated below. In the following specific examples, x- indicates a counter anion. 

<img src='content_image/911497.jpg'>

<img src='content_image/911498.jpg'>

The preferred repeating unit (3A) includes, for example, a repeating unit where in the repeating unit (R2), "a group capable of decomposing by the action of an acid to produce an alcoholic hydroxy group" is replaced by "an alcoholic hydroxy group". 

This repeating unit (3A) preferably has a structure where in each of formulae (I-1) to (I-10), "OP" is replaced by "OH". That is, the repeating unit is preferably represented by at least one formula selected from the group consisting of the follow› ing formulae (I-lH) to (I-l0H). In particular, the repeating unit (3A) is more preferably represented by at least one for- mula selected from the group consisting of the following formulae (I-lH) to (I-3H), still more preferably represented by the following formula (I-lH). 

-continued 

<img src='content_image/911499.jpg'>

<img src='content_image/911500.jpg'>

