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[0112] From the viewpoint of miniaturization of the pat› tern, L$_{2 }$ is preferably a secondary or tertiary alkyl group, and more preferably the tertiary alkyl group. Examples of the secondary alkyl group include an isopropyl group, a cyclo› hexyl group, and a norbornyl group, and examples of the tertiary alkyl group include a tert-butyl group and an ada› mantane group. In these aspects, since the glass transition temperature (Tg) and the activation energy increase, fogging can be suppressed, in addition to ensuring film hardness. 

[0113] In Formula (Y4), Ar represents an aromatic ring group. Rn represents an alkyl group, a cycloalkyl group, or an aryl group. Rn and Ar may be bonded to each other to form a non-aromatic ring. Ar is more preferably an aryl group. 

[0114] Among those, the leaving group is preferably bonded to another group to form a group having a group represented by any of General Formulae (B-a) to (B-c). In other words, the repeating unit B preferably has a group represented by any of General Formulae (B-a) to (B-c). In addition, the resin X preferably has the repeating unit B having a group represented by any of General Formulae (B-a) to (B-c). 

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[0115] In General Formula (B-a), OX represents an oxygen atom. 

[0116] Rel represents a substituent in which the atom directly bonded to OX is a tertiary carbon atom. 

[0117] Rel is preferably, for example, a group represented by Formula (Yl). 

[0118] * represents a bonding position. 

[0119] In General Formula (B-b ), ex represents a carbon atom. 2 

[0120] Rc represents a substituent in which the atom directly bonded to ex is a tertiary carbon atom. 2 

[0121] Rc is, for example, a monovalent organic group represented by R$_{36 }$ in Formula (Y3), examples thereof include the group in which the atom directly bonded to ex is a tertiary carbon atom, and specific examples of the group include a group represented by Formula (Yl ), a 1-adamantyl group, and an aryl group (preferably having a fluoroalkyl group (preferably a perfluoroalkyl group having 1 or 2 carbon atoms) as a substituent). 

[0122] * represents a bonding position. 

[0123] In General Formula (B-c ), OX represents an oxygen atom. 

[0124] Rc3 represents a substituent in which the atom directly bonded to OX is a tertiary carbon atom. 

[0125] Rc3 is preferably, for example, a group represented by Formula (Yl). 

[0126] Lf represents an aromatic ring group (preferably an arylene group having 6 to 15 carbon atoms, and more preferably a phenylene group) or a perfluoroalkylene group (preferably a perfluoroalkylene group having 2 to 5 carbon atoms, and more preferably a group represented by ----C(CF $_{3}$ ) 2 -). 

[0127] * represents a bonding position. 

[0128] As the repeating unit A, a repeating unit repre› sented by Formula (XA) is preferable. 

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[0129] In General Formula (XA), RXA represents a hydro› gen atom, a methyl group, or a trifluoromethyl group. 

[0130] LxA represents a single bond or a divalent linking group. Examples of the divalent linking group include an ester group (-COO-), an ether group (-0-), a carbonyl group (-CO-), a thioether group (-S-), -SO$_{2}$ -, -NRN - (RN represents a hydrogen atom or an alkyl group), a divalent hydrocarbon group (preferably having 1 to 10 carbon atoms, with examples thereof including an alkylene group, an alkenylene group (for example, ----CH=CH-), and an alkynylene group (for example, ----C=C-)), an arylene group (preferably having 6 to 16 carbon atoms), and a group formed by combining these groups. 

[0131] Among those, LxA is preferably the single bond, a carbonyl group, an arylene group (preferably a phenylene group), or an ester group. 

[0132] XxA represents an acid-decomposable group. As the acid-decomposable group, for example, a group in which a carboxyl group whose hydrogen atom is substituted with any of the above-mentioned groups represented by Formulae (Y) to (Y 4), a group in which a phenolic hydroxyl group (for example, a hydroxyl group directly linked to LxA which is an arylene group) whose hydrogen atom is substituted with any of the above-mentioned groups represented by Formulae (Yl) to (Y 4 ), or a group in which a fluorinated alcohol group (preferably a hexafluoro-2-propanol group) whose hydrogen atom in the hydroxyl group is substituted with any of the above-mentioned groups represented by Formulae (Yl) to (Y4) is preferable. 

[0133] Among those, XXA is preferably a group having the group represented by General Formula (B-a) or the group represented by General Formula (B-b) as mentioned above. 

[0134] Specific aspects in a case where XxA is a group having the group represented by General Formula (B-b) include a carboxyl group, a phenolic hydroxyl group, and a fluorinated alcohol group (preferably a hexafluoro-2-propa› nol group), in which a hydrogen atom of a group selected from the group consisting of the hydroxyl groups included is substituted with the above-mentioned group represented by Formula (Y3). It should be noted that in this case, it is preferable that in Formula (Y3), R$_{36 }$has a group represented by Formula (Yl), a 1-adamantyl group, or an aryl group (a fluoroalkyl group (preferably a perfluoroalkyl group having 1 or 2 carbon atoms) as a substituent, and R$_{37 }$is a hydrogen atom. 

