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# c12) United States Patent 

# Son 

# (54) PHOTORESIST POLYMER AND PHOTORESIST COMPOSITION CONTAINING THE SAME 

(75) Inventor: Min Seok Son, Seoul (KR) 

(73) Assignee: Hynix Semiconductor Inc., Icheon (KR) 

( *) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by O days. 

(21) Appl. No.: 11/124,937 

(22) Filed: May 9, 2005 

## (65) Prior Publication Data 

US 2005/0244748 Al Nov. 3, 2005 

## (30) Foreign Application Priority Data 

Jul. 30, 2004 (KR) ...................... 10-2004-0060267 

(51) Int. Cl. G03F 71038 (2006.01) C0SG 77100 (2006.01) C0SF 20110 (2006.01) 

(52) U.S. Cl. ............................... 430/281.1; 430/285.1; 525/29; 526/318; 528/10; 528/41 

( 58) Field of Classification Search ... ... ... ... . 430/281.1, 430/285.1; 525/29; 526/318; 528/10, 41 See application file for complete search history. 

## (56) References Cited 

<img src='content_image/904660.jpg'>

## U.S. PATENT DOCUMENTS 

<img src='content_image/904669.jpg'>

<img src='content_image/904671.jpg'>

# (IO) Patent No.: US 7,129,023 B2 

# (45) Date of Patent: Oct. 31, 2006 

<img src='content_image/904661.jpg'>

* cited by examiner 

Primary Examiner-Hoa Van Le 

(74) Attorney, Agent, or Firm-Marshall, Gerstein & Borun LLP 

## (57) ABSTRACT 

Photoresist polymers and photoresist compositions are dis› closed. A photoresist polymer comprising a polymerization repeating unit represented by Formula 1 is less sensitive to change in the amount of energy due to its higher active energy than that of a conventional photoresist polymer. As a result, a phenomenon that a pattern of an outer field region that receives a relatively large amount of light becomes too thin is alleviated without additional dummy patterns when pattern is formed, and pattern collapse caused by a high aspect ratio due to high etching resistance is prevented. Formula 1 

<img src='content_image/904668.jpg'>

wherein R$_{1 }$-Rw a, b, c and d are as defined in the description. 

US007129023B2 

## 20 Claims, 2 Drawing Sheets 

