content_image/905919.jpg content_image/905920.jpg content_image/905921.jpg content_image/905922.jpg content_image/905923.jpg content_image/905931.jpg content_image/905932.jpg content_image/905924.jpg content_image/905925.jpg content_image/905926.jpg content_image/905927.jpg content_image/905928.jpg content_image/905929.jpg content_image/905930.jpg
12 carbon atoms (for example, a cyclohexylene group, a norbornylene group, and an adamantylene group), examples of the alkenylene group of A include alkenylene groups having 2 to 12 carbon atoms (for example, an ethenylene group, a propenylene group, and a butenylene group), and examples of the arylene group of A include arylene groups having 6 to 10 carbon atoms (for example, a phenylene group, a tolylene group, and a naphthylene group), respec› tively. 

Moreover, a compound having a plurality of structures represented by the general formula (ZVI) is also preferred in the invention. For example, either of R$_{209 }$ or R$_{210 }$ of the compound represented by the general formula (ZVI) may be a compound having a structure bonded with either ofR$_{209 }$or R$_{210 }$ of another compound represented by the general for- mula (ZVI). 

[Chem. 26] 

<img src='content_image/905919.jpg'>

<img src='content_image/905920.jpg'>

<img src='content_image/905921.jpg'>

<img src='content_image/905922.jpg'>

<img src='content_image/905923.jpg'>

<img src='content_image/905931.jpg'>

<img src='content_image/905932.jpg'>

In the compounds generating acid upon decomposing caused by irradiation with actinic rays or radiation, the acid generator (B) is more preferably a compound represented by the general formula (ZIII) to (ZVI) from the viewpoint of a good solubility with respect to a developer containing the organic solvent of the unexposed portions and the tendency not to generate development defects, that is, preferably a nonionic compound. Among these, the compound is more preferably a compound represented by the general formula (ZV) or (ZVI). 

In addition, from the viewpoint of improving the acid generating efficiency and the acid strength, the acid genera› tor (B) preferably has a structure generating an acid con› taining a fluorine atom. 

Specific examples of the acid generator (B) are shown below; however, the invention is not limited thereto. 

<img src='content_image/905924.jpg'>

<img src='content_image/905925.jpg'>

<img src='content_image/905926.jpg'>

<img src='content_image/905927.jpg'>

<img src='content_image/905928.jpg'>

<img src='content_image/905929.jpg'>

<img src='content_image/905930.jpg'>

