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[0286] Here, the low-molecular compound (B) means a compound other than a compound in which a part that generates an acid by irradiation with actinic rays or radiation is introduced into a main chain or a side chain of a resin, and is typically a compound in which the part is introduced into a monomolecular compound. The molecular weight of the low-molecular compound (B) is generally 4,000 or less, preferably 2,000 or less, and more preferably 1,000 or less. In addition, the molecular weight of the low-molecular compound (B) is generally 100 or greater, and preferably 200 or greater. 

[0287] As a preferred embodiment of the acid generator (B), an onium compound can be exemplified. Examples of such an acid generator (B) include a sulfonium salt, an iodonium salt, and a phosphonium salt. 

[0288] As another preferred embodiment of the acid gen› erator (B), a compound that generates a sulfonic acid, an imido acid, or a methide acid by irradiation with actinic rays or radiation can be exemplified. Examples of the acid 

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generator (B) of the embodiment include a sulfonium salt, an iodonium salt, a phosphonium salt, oxime sulfonate, and imido sulfonate. 

[0289] The acid generator (B) is preferably a compound that generates an acid by irradiation with electron beams or extreme ultraviolet rays, and more preferably a compound that generates an acid by electron beams. 

[0290] The radiation-sensitive or actinic ray-sensitive resin composition of the invention may not contain the acid generator (B). However, in a case where the radiation› sensitive or actinic ray-sensitive resin composition contains the acid generator (B), the content of the acid generator (B) is preferably 0.1 to 30 mass %, more preferably 0.5 to 20 mass%, and even more preferably 1.0 to 10 mass% based on the total solid content of the radiation-sensitive or actinic ray-sensitive resin composition. 

[0291] The acid generators (B) can be used alone or in combination of two or more kinds thereof. 

[0292] Specific examples of the acid generator (B) of the invention are as follows. 

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