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In Formula (ZI-3), each of Ric to R$_{5}$c independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group or a halogen atom. 

Each ofR$_{6}$c and R$_{7}$c independently represents a hydrogen atom, an alkyl group or a cycloalkyl group. 

Each of Rx and RY independently represents an alkyl group, a cycloalkyl group, an ally! group or a vinyl group. 

Any two or more of Ric to R$_{5}$c, R$_{6}$c and R$_{7}$c, and Rx and RY may combine with each other to form a ring structure, respectively. This ring structure may include an oxygen atom, a sulfur atom, a ketone group, an ester bond and/or an amide bond. Examples of the group formed by combining them may include a butylene group, a pentylene group and the like. 

zc- represents a non-nucleophilic anion, and examples thereof may include the non-nucleophilic anion which is the same as z- in Formula (ZI). 

As for the specific structure of a cation moiety of Formula (ZI-3), reference may be made to the structure of a cation moiety of an acid-generating agent described in [0047] and [0048] of Patent Application Laid-Open No. 2004-233661 and [0040] to [0046] of Patent Application Laid-Open No. 2003-35948. 

Subsequently, a (ZI-4) group will be described. 

The (ZI-4) group is a group represented by the following Formula (ZI-4). The group is effective in the suppression of outgas. 

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In Formula (ZI-4), each of Ri to R$_{13 }$ independently represents a hydrogen atom or a substituent. 

At least one of Ri to R$_{13 }$ is preferably a substituent containing an alcoholic hydroxyl group. Further, here "an alcoholic hydroxyl group" means a hydroxyl group in which bonded to a carbon atom of an alkyl group. 

Z is a single bond or a divalent linking group. 

zc- represents a non-nucleophilic anion; examples thereof include the same as z- in Formula (ZI). 

When Ri to R$_{13 }$ are a substituent including an alcoholic hydroxyl group, Ri to R$_{13 }$are preferably a group represented 

by -(WY). Here, Y is an alkyl group substituted by a hydroxyl group and Wis a single bond or a divalent linking group. 

Examples of the alkyl group represented by Y may include an ethyl group, a propyl group and an isopropyl group. Y includes particularly preferably a structure repre› sented by ----CH$_{2}$CH$_{2}$OH. 

A divalent linking group represented by Wis not particu› larly limited, but preferably includes a single bond, an alkoxy group, an acyloxy group, an acylamino group, an alkyl and a arylsulfonylamino group, an alkylthio group, an alkylsulfonyl group, an acyl group, an alkoxycarboxyl group or a divalent group in which any hydrogen atom in a carbamoyl group is substituted by a single bond, and more preferably, a single bond, an acyloxy group, an alkylsulfonyl group, an acyl group or a divalent group in which arbitrary hydrogen atom in an alkoxycarboxyl group is substituted by a single bond. 

When Ri to R$_{13 }$are a substituent containing, an alcoholic hydroxyl group, the carbon number contained is preferably 2 to 10, more preferably 2 to 6, and particularly preferably 2 to 4. 

A substituent containing an alcoholic hydroxyl group of Ri to R$_{13 }$ may have two or more alcoholic hydroxyl groups. The number of an alcoholic hydroxyl group possessed by the substituent containing an alcoholic hydroxyl group as Ri to R$_{13 }$ is 1 to 6, preferably 1 to 3, and more preferably 1. 

The number of an alcoholic hydroxyl group that (ZI-4) group contains is preferably 1 to 10, more preferably 1 to 6, and still more preferably 1 to 3 after all of Ri to R$_{13 }$ are combined. 

When Ri to R$_{13 }$ do not contain an alcoholic hydroxyl group, examples ofRi to R$_{13 }$may include a hydrogen atom, a halogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, an alkynyl group, an aryl group, heterocyclic ring group, a cyano group, a nitro group, a carboxyl group, an alkoxy group, an aryloxy group, a silyl oxy group, a heterocyclic oxy group, an acyloxy group, a carbamoyl oxy group, an alkoxycarbonyloxy group, an aryloxycarbonyloxy group, an amino group (including an anilyno group), an ammonia group, an acylamino group, an aminocarbonylamino group, an alkoxycarbonylamino group, an aryloxycarbonylamino group, a sulfamoylamino group, an alkyl and an arylsulfonylamino group, a mercapto group, an alkylthio group, an arylthio group, a polycyclic› thio group, a sulfamoyl group, a sulfa group, an alkyl and arylsulfinyl group, an alkyl and arylsulfonyl group, an acyl group, an aryloxycarbonyl group, an alkoxycarboxyl group, a carbamoyl group, an aryl and heterocyclic azo group, an imide group, a phophino group, a phophinyl group, a pho› phinyloxy group, a phophinylamino group, a phosphono group, a silyl group, a hydrazino group, a ureido group, a boronic acid group [-B(OH)$_{2}$ ], a phosphate group [---OPO (OH)$_{2}$], a sulfate group (-OSO $_{3}$H), and other known sub› stituent. 

When Ri to R$_{13 }$ do not contain an alcoholic hydroxyl group, examples of Ri to R$_{13 }$ may include preferably a hydrogen atom, a halogen atom, an alkyl group, a cycloalkyl group, a cyano group, an alkoxy group, an acyloxy group, an acylamino group, an aminocarbonyl amino group, an alkoxycarbonylamino group, an alkyl and arylsulfo› nylamino group, an alkylthio group, a sulfamoyl group, an alkyl and arylsulfonyl group, an alkoxycarboxyl group or a carbamoyl group. 

When Ri to R$_{13 }$ do not contain an alcoholic hydroxyl group, examples of Ri to R$_{13 }$ may include particularly 

