content_image/899518.jpg content_image/899519.jpg content_image/899502.jpg content_image/899523.jpg content_image/899524.jpg
# c19) United States c12) Patent Application Publication 

# NAGAMINE et al. 

# (54) RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, POLYMERIC COMPOUND, AND COPOLYMER 

(71) Applicant: TOKYO OHKA KOGYO CO., LTD., Kawasaki-shi (JP) 

(72) Inventors: Takashi NAGAMINE, Kawasaki-shi (JP); Hideto NITO, Kawasaki-shi (JP); Masafumi FUJISAKI, Kawasaki-shi (JP); Tatsuya FUJII, Kawasaki-shi (JP); Yuki FUKUMURA, Kawasaki-shi (JP); Takahiro KOJIMA, Kawasaki-shi (JP); Issei SUZUKI, Kawasaki-shi (JP); Takuya IKEDA, Kawasaki-shi (JP); KhanhTin NGUYEN, Kawasaki-shi (JP) 

(21) Appl. No.: 16/334,302 

(22) PCT Filed: Oct. 4, 2017 

(86) PCT No.: PCT I JP2017 /036151 § 371 (c)(l), (2) Date: Mar. 18, 2019 

## (30) Foreign Application Priority Data 

<img src='content_image/899518.jpg'>

(51) Int. Cl. 

<img src='content_image/899519.jpg'>

(52) U.S. Cl. CPC ............ G03F 71039 (2013.01); G03F 7/2059 (2013.01); C0SF 20126 (2013.01); G03F 710045 (2013.01) 

## Publication Classification 

<img src='content_image/899502.jpg'>

## (57) ABSTRACT 

A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, and which includes a polymeric com› pound having a structural unit represented by general for› mula (a0-1) (wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; Va 0 represents a divalent hydrocar› bon group; nao represents an integer of Oto 2; Ra$^{00 }$repre› sents an acid dissociable group represented by general formula (a0-rl-1); Ra$^{01 }$and Ra$^{02 }$represents a hydrocarbon group; Ra 01 and Ra$^{02 }$may be mutually bonded to form a ring; Ya 0 represents a quaternary carbon atom; Ra 031 Ra 032 033 ’ and Ra each independently represents a hydrocarbon group, provided that at least one ofRa 031 , Ra $^{032 }$and Ra033 is a hydrocarbon group having a polar group). 

US 20190219920Al 

# c10) Pub. No.: US 2019/0219920 Al 

# (43) Pub. Date: Jul. 18, 2019 

[Chemical Formula 1] 

<img src='content_image/899523.jpg'>

<img src='content_image/899524.jpg'>

