content_image/906514.jpg content_image/906523.jpg content_image/906525.jpg content_image/906524.jpg
<img src='content_image/906514.jpg'>

wherein R$^{1 }$represents a hydrogen atom, an alkyl group, a monovalent aliphatic hydrocarbon cyclic group, a halo› gen atom, a cyano group, or an alkoxycarbonyl group, 1 2 

each of Ar and Ar independently represents a divalent aromatic cyclic group, or a group formed by combining a divalent aromatic cyclic group and an alkylene group, 1 2 

each of X and X independently represents -0- or -S-, 1 

L represents an alkylene group, an alkenylene group, a divalent aliphatic hydrocarbon cyclic group, a divalent aromatic cyclic group, or a group formed by combining two or more of these groups, two or more groups com› bined in the group formed by combining two or more of these groups may be the same with or different from each other, and two or more groups combined may be linked via ---0- or -S- as a linking group; and 

Z represents a site capable of becoming a sulfonic acid group, an imidic acid group or a methide acid group upon irradiation with an actinic ray or radiation. 

2. The actinic ray-sensitive or radiation-sensitive resm composition as claimed in claim 1, 

wherein each ofX$^{1 }$and X$^{2 }$is -0-. 

3. The actinic ray-sensitive or radiation-sensitive resm composition as claimed in claim 1, 

wherein in formula (I), the number of atoms for constitut› ing the main structure of the alkylene group, the anke› nylene group, the divalent aliphatic hydrocarbon cyclic group, the divalent aromatic cyclic group, or the group formed by combining two or more of these groups rep› resented by L$_{1 }$ in formula (I) is 2 to 7. 

4. The actinic ray-sensitive or radiation-sensitive resin composition as claimed in claim 1, 

wherein the resin (P) is a resin further having (B) a repeat› ing unit having a group capable of decomposing by an action of an acid to generate a polar group. 

5. The actinic ray-sensitive or radiation-sensitive resin composition as claimed in claim 4, 

wherein the repeating unit (B) is a repeating unit repre› sented by the following formula (b ): 

<img src='content_image/906523.jpg'>

(I) 

6. The actinic ray-sensitive or radiation-sensitive resin composition as claimed in claim 5, 

7. The actinic ray-sensitive or radiation-sensitive resin composition as claimed in claim 4, 

(b) 

wherein Ar$_{2 }$ represents a (p+l)-valent aromatic cyclic group, 

Y represents a hydrogen atom or a group capable ofleaving by an action of an acid, and when a plurality ofY are present, the plurality of Y may be the same with or different from every other Y, provided that at least one of Y’s represents a group capable ofleaving by the action of an acid, and 

p represents an integer of 1 or more. 

wherein Y in formula (b) is a group represented by the following formula ( c ): 

<img src='content_image/906525.jpg'>

wherein R$^{41 }$represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or an aralkyl group, 

M$^{41 }$represents a single bond or a divalent linking group, 

Q represents an alkyl group, an alicyclic group, or an aromatic cyclic group which may contain a heteroatom, and at least two ofR 41 , M $^{41 }$and Q may be bonded to each other to form a ring. 

wherein the repeating unit (B) is a repeating unit repre› sented by the following formula (II): 

<img src='content_image/906524.jpg'>

wherein each ofRs$_{1}$ , Rs$_{2 }$ and Rs$_{3 }$ independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group, 

Rs$_{2 }$and Ls may be bonded to each other to form a ring, and Rs$_{2 }$ represents an alkylene group in that case, 

Ls represents a single bond or a divalent linking group, and Ls represents a trivalent linking group when Ls is bonded to Rs$_{2 }$ to form a ring, 

R$_{111 }$represents a hydrogen atom or an alkyl group, 

R$_{112 }$ represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group, an alkoxy group, an acyl group, or a heterocyclic group, 

M$^{1 }$represents a single bond or a divalent linking group, 

Q$^{1 }$represents an alkyl group, a cycloalkyl group, an aryl group, or a heterocyclic group, Q1, M$^{1 }$and R$_{112 }$may be bonded to each other to form a ring, 

when M$^{1 }$represents a divalent linking group, Q$^{1 }$may be bonded to M 1 via a single bond or a different linking group to form a ring. 

(c) 

(II) 

