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## Comparative Synthesis Example 1 

## Synthesis of Comparative Polymer 1 

Comparative Polymer 1 was synthesized as white solid by the same procedure as in Synthesis Example 1 aside from using 7.6 g of Comparative PAG Monomer 1 instead of PAG Monomer 1. The polymer was analyzed for composition by $^{13}$C- and $^{1}$H-NMR and for Mw and Mw/Mn by GPC. 

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## Examples and Comparative Examples 

## Preparation of Resist Composition 

Resist compositions were prepared by dissolving the components in a solvent in accordance with the recipe shown in Table 1, and filtering through a filter having a pore size of 0.2 µm. The solvent contained 100 ppm of surfactant FC-4430 (3M). The components in Table 1 are as identified below. 

## Organic Solvents: 

PGMEA (propylene glycol monomethyl ether acetate) CyH (cyclohexanone) PGME (propylene glycol monomethyl ether) DAA ( diacetone alcohol) 

50 Acid generators: PAG 1 to PAG 3 of the following structural formulae 

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