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an ethyl group are more preferable, and a methyl group is most preferable. Examples of the cycloalkyl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. Examples of the alkoxycarbonyl group include a methoxycarbonyl group, an ethoxycarbonyl group, an n-butoxycarbonyl group, and a t-butoxycarbonyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, and a butoxy group. These groups may have a sub› stituent, and examples of the substituent include an alkoxy group such as a hydroxy group, a methoxy group, and an ethoxy group, a cyano group, and a halogen atom such as a fluorine atom. R$_{9 }$ and R$_{9}$ ’ are each more preferably a methyl group, a cyano group, or an alkoxycarbonyl group, and still more preferably a cyano group. 

[0137] Examples of the alkylene group ofX andX’ include a methylene group and an ethylene group. X and X’ are preferably an oxygen atom or a methylene group, and more preferably a methylene group. 

[0138] Inthecasewheremandm’ are 1 or more, at least one ofR$_{9 }$ or R$_{9}$ ’ is preferably substituted at the a- or ~-position of the carbonyl group of the lactone, and particularly preferably at the a-position. 

[0139] Specific examples of the group having a lactone structure or the repeating unit having a sultone structure, represented by General Formula (III-1) or (III-1 ’), include the structures described in paragraphs "0150" to "0151" of JP2013-l 78370A. 

[0140] The content of the repeating unit represented by General Formula (III), or the total content of the repeating units in the case where two or more kinds of repeating units are contained is preferably 15% by mole to 60% by mole, more preferably 20% by mole to 60% by mole, and still more preferably 30% by mole to 50% by mole, with respect to all the repeating units in the resin (A). 

[0141] The resin (A) may further contain, in addition to the unit represented by General Formula (III), the afore-men› tioned repeating unit having a lactone structure or a sultone structure. 

[0142] The repeating unit having a lactone group or a sul› tone group usually has an optical isomer, and any optical isomer may be used. Further, one kind of optical isomer may be used alone or a plurality of optical isomers may be mixed and used. In the case of mainly using one kind of optical isomer, the optical purity ( ee) thereof is preferably 90% or more, and more preferably 95% or more. 

[0143] The content of the repeating unit having a lactone structure or a sultone structure, other than the repeating unit represented by General Formula (III), or the total content of the repeating units in the case where plural kinds of repeating units are contained is preferably 15% by mole to 60% by mole, more preferably 20% a by mole to 50% by mole, and still more preferably 30% by mole to 50% by mole, with respect to all the repeating units in the resin. 

[0144] In order to enhance the effect of the present inven› tion, it is also possible to use two or more kinds oflactone or sultone repeating units selected from General Formula (III) in combination. In the case of using the repeating units in com› bination, it is preferable to use two or more kinds selected from the lactone or sultone repeating units, in which inn is 0 in General Formula (III), in combination. 

[0145] The resin (A) preferably has a repeating unit having a hydroxyl group or a cyano group, other than General For› mulae (AI) and (III). With the repeating unit, the adhesion to 

a substrate and the developer affinity are enhanced. The repeating unit having a hydroxyl group or a cyano group is preferably a repeating unit having an alicyclic hydrocarbon structure substituted with a hydroxyl group or a cyano group, and preferably has no acid-decomposable group. The alicy› clic hydrocarbon structure in the alicyclic hydrocarbon struc› ture substituted with a hydroxyl group or a cyano group is preferably an adamantyl group, a diamantyl group, or a nor› bornane group. The alicyclic hydrocarbon structures substi› tuted with a hydroxyl group or a cyano group are preferably partial structures represented by the following General For› mulae (VIIa) to (VIId). 

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[0146] In General Formulae (VIIa) to (Vlk), 

[0147] R$_{2}$c to R$_{4}$c each independently represent a hydrogen atom, a hydroxyl group, or a cyano group, provided that at least one ofR$_{2}$c, ... , or R$_{4}$ c represents a hydroxyl group or a cyano group. A structure where one or two members out of R$_{2}$c to R$_{4}$c are a hydroxyl group with the remainder being a hydrogen atom is preferable. In General Formula (VIIa), it is more preferable that two members out of R$_{2}$c to R$_{4}$c are a hydroxyl group and the remainder is a hydrogen atom. 

[0148] Examples of the repeating unit having a partial structure represented by General Formulae (VIIa) to (VIId) include repeating units represented by the following General Formulae (Alla) to (AIId). 

(Vila) 

(Vllb) 

(Vile) 

(Vlld) 

