content_image/900261.jpg content_image/900254.jpg content_image/900260.jpg content_image/900259.jpg content_image/900258.jpg content_image/900257.jpg content_image/900255.jpg content_image/900256.jpg
The resin (A) preferably contains a repeating unit repre› sented by formula (III) in addition to the repeating units represented by formulae (I) and (II): 

<img src='content_image/900261.jpg'>

wherein 

R$_{3 }$to Rs each independently represents a hydrogen atom, a fluorine atom, a chlorine atom, a cyano group or an alkyl group, and 

X 1 represents a hydrogen atom or an organic group. 

The alkyl group of R$_{3 }$ to Rs is preferably an alkyl group having from 1 to 5 carbon atoms and examples thereof include a methyl group, an ethyl group and a propyl group. 

The organic group of X 1 is preferably an organic group having from 1 to 40 carbon atoms and may be an acid› decomposable group or a non-acid-decomposable group. 

In the case of a non-acid-decomposable group, examples of the organic group include the same organic groups for the non-acid-decomposable group ofR$_{2 }$ (since this is an organic group, a halogen atom is not included). 

Also, examples thereofinclude an alkyl group, a cycloalkyl group, an alkenyl group, an aryl group, an alkyloxy group ( excluding -O-tertiary alkyl group), an acyl group, a cycloalkyloxy group, an alkenyloxy group, an aryloxy group, an alkylcarbonyloxy group, an alkylamidomethyloxy group, an alkylamide group, an arylamidomethyl group and an ary› lamide group. 

Of these non-acid-decomposable groups, preferred are an acyl group, an alkylcarbonyloxy group, an alkyloxy group, a cycloalkyloxy group, an aryloxy group, an alkylamideoxy group and an alkylamide group, and more preferred are an acyl group, an alkylcarbonyloxy group, an alkyloxy group, a cycloalkyloxy group and an aryloxy group. 

In the non-acid-decomposable group, the alkyl group is preferably an alkyl group having from 1 to 4 carbon atoms, such as methyl group, ethyl group, propyl group, n-butyl group, sec-butyl group and tert-butyl group; the cycloalkyl group is preferably a cycloalkyl group having from 3 to 10 carbon atoms, such as cyclopropyl group, cyclobutyl group, cyclohexyl group and adamantyl group; the alkenyl group is preferably an alkenyl group having from 2 to 4 carbon atoms, such as vinyl group, propenyl group, ally! group and butenyl group; the aryl group is preferably an aryl group having from 6 to 14 carbon atoms, such as phenyl group, xylyl group, toluyl group, cumenyl group, naphthyl group and anthracenyl group; and the alkyloxy group is preferably an alkyloxy group having from 1 to 4 carbon atoms, such as methoxy group, ethoxy group, hydroxyethoxy group, propoxy group, hydrox› ypropoxy group, n-butoxy group, isobutoxy group and sec› butoxy group. 

In the case of an acid-decomposable group, examples of the organic group of X include ----C(R 11 a)(R 12 J(R$_{13}$a), -CCR14J(R1sa)(OR16J and -CO---OC(R11a)CR12J (Rl3a). 

R 1 la to R$_{13}$ a each independently represents an alkyl group, a cycloalkyl group, an alkenyl group, an aralkyl group or an aryl group. R 14 a and Risa each independently represents a hydrogen atom or an alkyl group. R 16 a represents an alkyl group, a cycloalkyl group, an alkenyl group, an aralkyl group 

or an aryl group. Two ofR 11 a, R$_{12}$a and R$_{13}$a, or two ofR 14 a, Risa and R 16 a may combine to form a ring. 

Also, a group having an acid-decomposable group may be introduced into X 1 by modification. X 1 having introduced thereinto an acid-decomposable group is, for example, rep› resented by the following formula: 

<img src='content_image/900254.jpg'>

wherein R 1 ?a and R 18 a each independently represents a hydrogen atom or an alkyl group, and p represents an integer ofl to 4. 

The organic group ofX 1 is preferably an acid-decompos› able group having at least one cyclic structure selected from an alicyclic structure, an aromatic cyclic structure and a crosslinked alicyclic structure, and the structure is preferably a structure containing an aromatic group (particularly a phe› nyl group) or a structure containing an alicyclic or crosslinked alicyclic structure represented by any one of the following formulae (pl) to (pVI): 

<img src='content_image/900260.jpg'>

<img src='content_image/900259.jpg'>

<img src='content_image/900258.jpg'>

<img src='content_image/900257.jpg'>

<img src='content_image/900255.jpg'>

<img src='content_image/900256.jpg'>

wherein 

R 11 represents a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group or a sec-butyl group, 

Z represents an atomic group necessary for forming an alicyclic hydrocarbon group together with the carbon atom, 

R 12 to R 16 each independently represents a linear or branched alkyl group having from 1 to 4 carbon atoms or an alicyclic hydrocarbon group, provided that at least one ofR 12 to R 14 or either one of R 1 s and R 16 represents an alicyclic hydrocarbon group, 

R 1 $_{7 }$to R$_{21 }$each independently represents a hydrogen atom, a linear or branched alkyl group having from 1 to 4 carbon 

