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alkali-soluble groups not protected by a group capable of leaving by an action of an acid. The content ratio is preferably from 0.01 to 0.7, more preferably from 0.05 to 0.50, still more preferably from 0.05 to 0.40. 

In the case of irradiating the composition of the present invention with ArF excimer laser light, the resin preferably has a monocyclic or polycyclic alicyclic hydrocarbon struc› ture. Hereinafter, this resin is referred to as "alicyclic hydro› carbon-based acid-decomposable resin". 

The alicyclic hydrocarbon-based acid-decomposable resin is preferably a resin containing at least one repeating unit selected from the group consisting of a repeating unit having an alicyclic hydrocarbon-containing partial structure repre› sented by the following formulae (pl) to (p V), and a repeating unit represented by the following formula (II-AB): 

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In formulae (pl) to (p V), Ru represents a methyl group, an ethyl group, ann-propyl group, anisopropyl group, ann-butyl group, an isobutyl group or a sec-butyl group. Z represents an atomic group necessary for forming a cycloalkyl group together with the carbon atom. 

Each of R$_{12 }$ to R 16 independently represents a linear or branched alkyl group having a carbon number of 1 to 4 or a cycloalkyl group, provided that at least one of R$_{12 }$ to R$_{14 }$ represents a cycloalkyl group and that either R 15 or R 16 rep› resents a cycloalkyl group. 

Each of R$_{1 }$ 7 to R$_{21 }$ independently represents a hydrogen atom, a linear or branched alkyl group having a carbon num› ber of 1 to 4, or a cycloalkyl group, provided that at least one ofR 17 to R$_{21 }$ represents a cycloalkyl group and that either R 19 or R$_{21 }$ represents a linear or branched alkyl group having a carbon number of 1 to 4 or a cycloalkyl group. 

Each of R$_{22 }$ to R 25 independently represents a hydrogen atom, a linear or branched alkyl group having a carbon num› ber of 1 to 4, or a cycloalkyl group, provided that at least one ofR$_{22 }$to R$_{25 }$ represents a cycloalkyl group. R$_{23 }$and R 24 may combine with each other to form a ring structure. 

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In formula (II-AB), each of Ru’ and R$_{12}$’ independently represents a hydrogen atom, a cyano group, a halogen atom or an alkyl group. 

Z’ represents an atomic group necessary for forming an alicyclic structure together with two carbon atoms (C-C) to which Z’ is bonded. 

Formula (II-AB) is preferably the following formula (II› ABl) or (II-AB2): 

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In formulae (II-AB!) and (II-AB2), each of R$_{13}$’ to R 16 ’ independently represents a hydrogen atom, a halogen atom, a cyano group, a hydroxyl group, -COOH, ----COOR 5 , a group capable of decomposing by an action of an acid, ----C(=O)-X-A’-R$_{17}$ ’, an alkyl group or a cycloalkyl group. Here, R 5 represents an alkyl group, a cycloalkyl group or a group having a lactone structure. X represents an oxygen atom, a sulfur atom, -NH-, -NHSO 2 - or -NHSO 2 NH-. A’ represents a single bond or a divalent linking group. R 1 / represents -COOH, -COOR 5 , ----CN, a hydroxyl group, an alkoxy group, ----CO-NH-R 6 , -CO› NH-SO2-R6 or a group having a lactone structure, wherein R 6 represents an alkyl group or a cycloalkyl group. At least two members ofR$_{13}$’ to R 16 ’ may combine with each other to form a ring structure. 

n represents O or 1. 

In formulae (pl) to (p V), the alkyl group of R$_{12 }$to R 25 is preferably a linear or branched alkyl group having a carbon number of 1 to 4, and examples thereof include a methyl group, an ethyl group, a propyl group, an n-butyl group, a sec-butyl group, and a tert-butyl group. 

The cycloalkyl group ofR$_{12 }$to R 25 or the cycloalkyl group formed by Z together with the carbon atom may be a mono- cyclic cycloalkyl group or a polycyclic cycloalkyl group. Specific examples thereof include a group having a monocy› clo, bicyclo, tricyclo or tetracyclo structure and having a 

