content_image/945322.jpg content_image/945323.jpg content_image/945324.jpg content_image/945329.jpg content_image/945328.jpg content_image/945327.jpg content_image/945326.jpg content_image/945325.jpg
<img src='content_image/945322.jpg'>

<img src='content_image/945323.jpg'>

[0743] In Table 5, the structures of the acid generator (B) are as follows. 

<img src='content_image/945324.jpg'>

-continued 

K-3 

K-4 

[0744] In Table 5, the structures of the compound (C) are as described in Examples of "ArF" as described above. 

PAG-1 

[0745] In Table 5, the structures of the acid diffusion con› trol agent (D) which is a basic compound are as follows. 

<img src='content_image/945329.jpg'>

<img src='content_image/945328.jpg'>

<img src='content_image/945327.jpg'>

<img src='content_image/945326.jpg'>

<img src='content_image/945325.jpg'>

-continued 

PAG-2 

PAG-3 

PAG-4 

PAG-5 

N-1 

