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-continued 

(C-23) 

(C-24) 

(C-25) 

(C-26) 

(C-27) 

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[0466] <Acid Diffusion Control Agent (D)> 

[0467] The composition of the present invention preferably contains an acid diffusion control agent (D). The acid diffu› sion control agent (D) acts as a quencher that traps acids generated from the acid generator or the like upon exposure and inhibits a reaction of the acid-decomposable resin in the unexposed area by extra generated acids. As the acid diffusion control agent (D), a basic compound, a low-molecular com› pound which has a nitrogen atom and a group capable of leaving by the action of an acid, a basic compound whose basicity is reduced or lost upon irradiation with active light or radiation, or an onium salt which becomes a relatively weak acid with respect to the acid generator can be used. 

[0468] Preferred examples of the basic compound include compounds having structures represented by the following Formulae (A) to (E). 

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-continued 

(C-28) 

(A) 

