content_image/914873.jpg content_image/914872.jpg content_image/914874.jpg content_image/914870.jpg content_image/914871.jpg
<img src='content_image/914873.jpg'>

[0728] (A2)-4: Polymeric compound represented by chemical formula (A2-4) shown below. The weight average molecular weight (Mw) and the dispersity (Mw/Mn) in terms of the polystyrene equivalent value measured by gel permeation chromatography (GPC) were 6,500 and 1.52, respectively. The composition of the copolymer (ratio (mo› lar ratio) of the respective structural units within the struc› tural formula) as determined by $^{13}$C-NMR was l/rn/n/o=3/ 1/5/1. 

<img src='content_image/914872.jpg'>

<img src='content_image/914874.jpg'>

[0729] (B)-1: A compound (acid generator) represented by chemical formula (B-1) shown below. 

[0730] (D)-1: A compound (diffusion control agent) rep› resented by chemical formula (D-1) shown below. 

<img src='content_image/914870.jpg'>

<img src='content_image/914871.jpg'>

[0731] (F)-1: fluorine-containing polymeric compound represented by chemical formula (F-1) below. The weight average molecular weight (Mw) and the dispersity (Mw/Mn) in terms of the polystyrene equivalent value measured by gel permeation chromatography (GPC) were 15,500 and 1.67, respectively. The composition of the copolymer (ratio (mo› lar ratio) of the respective structural units within the struc› tural formula) as determined by $^{13}$C-NMR was l/m=5/5. 

[0732] (S)-1: a mixed solvent of propylene glycol monom› ethyl ether acetate/propylene glycol monomethyl ether/cy› clohexanone=45/30/25 (weight ratio) 

