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## [Synthesis Example 1-8] Synthesis of PAG-8 

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A mixed solution of a photo acid generator (PAG-4) (6.7 30 g), a 3,248 g/mol fluoro sulfonate sodium salt (1-6) (39.0 g), methylisobutylketone (50 g), and pure water (30 g) was stirred for 10 minutes to dispense an organic layer. The obtained organic layer was cleaned with pure water (20 g) 3 times and concentrated under reduced pressure to remove a 35 solvent by evaporation, and subjected to decantation using diisopropylether (30 g). Afterwards, the residue was con› centrated under reduced pressure to synthesize a target photo acid generator (PAG-8) (7.0 g) as an oily substance (yield: 40 75%). 

## <PAG-8> 

$^{1}$H-NMR (500 MHz, in DMSO-d$_{6}$ ): o=l.59-1.70 (6H, m), 1.83 (6H, d), 1.95 (3H, s), 3.36 (3H, s), 4.91 (2H, s), 5.11 (2H, s), 5.94 (lH, m), 7.47 (2H, m), 7.74-7.88 (12H, m) ppm 

$^{19}$F-NMR (500 MHz, in DMSO-d$_{6}$ ): o=-119.5 (IF, m), -113.5 (IF, m), -74.2 (6F, s), -72.5 (35, m) ppm 

## [Synthesis Example 1-9] Synthesis of PAG-9 for Comparison 

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A mixed solution of a photo acid generator (PAG-3) (6.3 g), an aqueous solution (9.8 g) of a 611 g/mol ammonium salt (5-1), methylisobutylketone (60 g) and pure water (30 g) was stirred for 10 minutes to dispense an organic layer. The obtained organic layer was cleaned with pure water (30 g) 5 times, and concentrated under reduced pressure to remove a solvent by evaporation, and methylisobutylketone was added thereto to prepare a 50 wt % methylisobutylketone solution. After subjecting to decantation by adding hexane (80 g) thereto, the product was dissolved into methylisobu› tylketone (40 g), and an activated carbon (0.5 g) was added thereto and stirred for 18 hours. After the activated carbon was filtered for removal, a filtrate was concentrated under reduced pressure to synthesize a target photo acid generator (PAG-9) (6.8 g) as an oily substance (yield: 94%). The PAG-9 is a sulfonium salt having a cation represented by the general formula (1 ’), not the sulfonium salt of the present invention. 

## <PAG-9> 

IR (D-ATR): v=3066, 2962, 1688, 1592, 1467, 1477, 1448, 1415, 1311, 1257, 1212, 1162, 1149, 1103, 1060, 980, 834, 791, 748, 683, 646 cm- 1 

$^{1}$H-NMR (500 MHz, in DMSO-d$_{6}$ ): o=4.56 (2H, s), 6.38 (lH, s), 7.41 (2H, m), 7.74-7.79 (SH, m), 7.82-7.86 (4H, m), 8.60 (lH, br) ppm 

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