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-continued 

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[0205] PAG-6 to PAG-11 were synthesized by well-known synthesis methods using corresponding reactants. 

## Examples 1-1 to 1-19, Comparative Examples 1-1 to 1-7 and Reference Examples 1-1 to 1-2 

[0206] Resist compositions in solution form were pre› pared by dissolving a betaine type onium compound (PAG-1 to PAG-11) or comparative betaine type onium compound or onium salt (PAG-A to PAG-F), base resin (P-1 or P-2), quencher (Q-1 or Q-2), and alkali-soluble surfactant (SF-1) in a solvent containing 0.01 wt % of surfactant A in accordance with the formulation shown in Tables 1 to 3, and filtering through a Teflonfi filter with a pore size of 0.2 µm. 

## [2] Preparation of Resist Composition 

-continued 

