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# c12) United States Patent Fujiwara et al. 

# (54) ONIUM SALT, RESIST COMPOSITION, AND PATTERNING PROCESS 

(71) Applicant: Shin-Etsu Chemical Co., Ltd., Tokyo (JP) 

(72) Inventors: Takayuki Fujiwara, Joetsu (JP); Masaki Ohashi, Joetsu (JP); Ryosuke Taniguchi, Joetsu (JP) 

(73) Assignee: SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP) 

( * ) Notice: Subject to any disclaimer, the term ofthis patent is extended or adjusted under 35 U.S.C. 154(b) by O days. 

(21) Appl. No.: 15/139,780 

(22) Filed: Apr. 27, 2016 

## (65) Prior Publication Data 

US 2016/0320698 Al Nov. 3, 2016 

## (30) Foreign Application Priority Data 

Apr. 28, 2015 (JP) ................................. 2015-091358 

(51) Int. Cl. 

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(52) U.S. Cl. CPC .......... G03F 710045 (2013.01); C07C 307102 (2013.01); C07C 321128 (2013.01); C07D 303/16 (2013.01); C07D 305/06 (2013.01); C07D 305/08 (2013.01); C07D 307120 (2013.01); C07D 307133 (2013.01); C07D 307193 (2013.01); C07D 309/10 (2013.01); C07D 333/46 (2013.01); C07D 493/08 (2013.01); C07D 493/18 (2013.01); C07J 4110055 (2013.01); G03F 710397 (2013.01); 

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# (IO) Patent No.: US 9,703,193 B2 

# Jul. 11, 2017 (45) Date of Patent: 

(58) Field of Classification Search None See application file for complete search history. 

## (56) References Cited 

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Journal of Photopolymer Science and Technology, 2004, vol. 17, No. 4, p. 587, (18 pages). 

Primary Examiner - Sin Lee 

(74) Attorney, Agent, or Firm - Westerman, Hattori, Daniels & Adrian, LLP 

## (57) ABSTRACT 

An onium salt having an anion moiety of a specific structure is an effective photoacid generator. A resist composition comprising the onium salt has the advantages of compat› ibility and reduced acid diffusion and forms a pattern with a good balance of sensitivity and MEF, rectangularity, and minimal defects. 

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US009703193B2 

G03F 7111 (2013.01); G03F 712041 (2013.01); G03F 7130 (2013.01); G03F 71322 (2013.01); G03F 71325 (2013.01); G03F 7138 (2013.01); C07C 2101/02 (2013.01); 

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## U.S. PATENT DOCUMENTS 

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## FOREIGN PATENT DOCUMENTS 

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## OTHER PUBLICATIONS 

## 19 Claims, 1 Drawing Sheet 

