butylidenebis-(3-methyl-6-tert-butylphenol), 1, 1-bis-( 4- hydroxyphenyl)-cyclohexane, 2,2’-dihydroxy-3,3"-di-( a› methylcyclohexyl)-5,5’-dimethyl diphenyl methane, alkylated bisphenol, hindered bisphenol, 1,3,5-trimethyl-2,4, 6-tris(3,5-di-tert-butyl-4-hydroxybenzyl)benzene, tris-(2- methyl-4-hydroxy-5-tert-butylphenyl)butane, and tetrakis› [methylene-3-(3’,5’-di-tert-butyl-4’-hydroxyphenyl) propionate ]methane. 

Preferred examples of the antioxidants include 2,6-di-t› butyl-4-methylphenol, 4-hydroxymethyl-2,6-di-t-butylphe- no!, 2,2’-methylene bis( 4-methyl-6-t-butylphenol), butylhy› droxyanisole, t-butylhydroquinone, 2,4,5- trihydroxybutyrophenone, nordihydroguaiaretic acid, propyl gallate, octyl gallate, lauryl gallate, and isopropyl citrate. Among these, 2,6-di-t-butyl-4-methylphenol, 4-hydroxym- ethyl-2,6-di-t-butylphenol, butylhydroxyanisole and t-butyl› hydroquinone are preferred, and 2,6-di-t-butyl-4-methylphe› nol and 4-hydroxymethyl-2,6-di-t-butylphenol are more preferred. 

These antioxidants may be used alone or in combination of two or more kinds thereof. 

In the case where the composition according to the present invention contains an antioxidant, the addition amount of antioxidant is preferably 1 ppm or more, more preferably 5 ppm or more, still more preferably 10 ppm or more, even still more preferably 50 ppm or more, particularly preferably 100 ppm or more, and most preferably 100 to 1,000 ppm. 

[10] Solvent 

The composition according to the present invention may further contain a solvent. As the solvent, an organic solvent is typically used. Examples of the organic solvent include alky› lene glycol monoalkyl ether carboxylate, alkylene glycol monoalkyl ether, alkyl lactate, alkyl alkoxypropionate, cyclic lactone (preferably having 4 to 10 carbon atoms), a monoke› tone compound (preferably having 4 to 10 carbon atoms) which may contain a ring, alkylene carbonate, alkyl alkoxy› acetate, and alkyl pyruvate. 

Preferred examples of the alkylene glycol monoalkyl ether carboxylate include propylene glycol monomethyl ether acetate (PGMEA; also called l-methoxy-2-acetoxypropane ), propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, propylene glycol monobutyl ether acetate, propylene glycol monomethyl ether propionate, pro› pylene glycol monoethyl ether propionate, ethylene glycol monomethyl ether acetate, and ethylene glycol monoethyl ether acetate. 

Examples of the alkylene glycol monoalkyl ether include propylene glycol monomethyl ether (PGME; also called l-methoxy-2-propanol), propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, ethylene glycol monomethyl ether, and eth› ylene glycol monoethyl ether. 

Examples of the alkyl lactate include methyl lactate, ethyl lactate, propyl lactate, and butyl lactate. 

Examples of the alkyl alkoxypropionate include ethyl 3-ethoxypropionate, methyl 3-methoxypropionate, methyl 3-ethoxypropionate, and ethyl 3-methoxypropionate. 

Examples of the cyclic lactone include ~-propiolactone, ~-butyrolactone, y-butyrolactone, a-methyl-y-butyrolactone, ~-methyl-y-butyrolactone, y-valerolactone, y-caprolactone, y-octanoic lactone, and a-hydroxy-y-butyrolactone. 

Examples of the monoketone compound which may con› tain a ring include 2-butanon, 3-methylbutanon, pinacolone, 2-pentanone, 3-pentanone, 3-methly-2-pentanone, 4-methly- 2-pentanone, 2-methly-3-pentanone, 4,4-dimethly-2-pen- tanone, 2,4-dimethly-3-pentanone, 2,2,4,4-tetramethly-3- pentanone, 2-hexanone, 3-hexanone, 5-methly-3-hexanone, 

2-heptanone, 3-heptanone, 4-heptanone, 2-methly-3-hep› tanone, 5-methly-3-heptanone, 2,6-dimethly-4-heptanone, 2-octanone, 3-octanone, 2-nonanone, 3-nonanone, 5-nonanone,2-decanone,3-decanone,4-decanone, 5-hexen- 2-one, 3-penten-2-one, cyclopentanone, 2-methlycyclopen› tanone, 3-methlycyclopentanone, 2,2-dimethlycyclopen- tanone, 2,4,4-trimethlycyclopentanone, cyclohexanone, 3-methlycyclohexanone, 4-methlycyclohexanone, 4-ethly› cyclohexanone, 2,2-dimethlycyclohexanone, 2,6-dimethly› cyclohexanone, 2,2,6-trimethlycyclohexanone, cyclohep› tanone, 2-methlycycloheptanone, and 3-methlycycloheptanone. 

Examples of the alkylene carbonate include propylene car› bonate, vinylene carbonate, ethylene carbonate, and butylene carbonate. 

Examples of the alkyl alkoxyacetate include 2-methoxy› ethyl acetate, 2-ethoxyethyl acetate, 2-(2-ethoxyethoxy)ethyl acetate, 3-methoxy-3-methylbutyl acetate, and l-methoxy-2- propyl acetate. 

Examples of the alkyl pyruvate include methyl pyruvate, ethyl pyruvate, and propyl pyruvate. 

As the solvent, a solvent having a boiling point of 130° C. or higher at ordinary temperature under atmospheric pressure is preferably used. Specific examples thereof include cyclo- pentanone, y-butyrolactone, cyclohexanone, ethyl lactate, ethylene glycol monoethyl ether acetate, PGMEA, ethyl 3-ethoxypropionate, ethyl pyruvate, 2-ethoxyethyl acetate, 2-(2-ethoxyethoxy)ethyl acetate, and propylene carbonate. 

These solvents may be used alone or in a mixture of two or more kinds thereof. In the latter case, a mixed solvent of a solvent containing a hydroxyl group and a solvent not con› taining a hydroxyl group are preferably used. 

Examples of the solvent containing a hydroxyl group include ethylene glycol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, propylene glycol, PGME, propylene glycol monoethyl ether, and ethyl lactate. Among these, PGME and ethyl lactate are particularly preferred. 

Examples of the solvent not containing a hydroxyl group include PGMEA, ethyl ethoxypropionate, 2-heptanone, y-bu- tyrolactone, cyclohexanone, butyl acetate, N-methylpyrroli› done, N,N-dimethylacetamide and dimethylsulfoxide. Among these, propylene glycol monomethyl ether acetate, ethyl ethoxypropionate, 2-heptanone, y-butyrolactone, cyclo› hexanone and butyl acetate are preferred. Among these, PGMEA, ethyl ethoxypropionate and 2-heptanone are par› ticularly preferred. 

In the case of using a mixed solvent of a solvent containing a hydroxyl group and a solvent not containing a hydroxyl group, the mass ratio therebetween is preferably from 1/99 to 99/1, more preferably from 10/90 to 90/10, and still more preferably from 20/80 to 60/40. 

Incidentally, when a mixed solvent containing 50% by mass or more of a hydroxyl group-free solvent is used, par› ticularly excellent coating uniformity can be achieved. Inci- dentally, the solvent is particularly preferably a mixed solvent of PGMEA and one or more kinds of other solvents. 

The content of the solvent in the composition of the present invention may be appropriately adjusted according to the desired film thickness or the like, but the composition is usually prepared such that the entire solid content concentra› tion of the composition becomes from 0.5 to 30% by mass, preferably from 1.0 to 20% by mass, and more preferably from 1.5 to 10% by mass. 

## <Pattern Forming Method> 

The present invention relates to an actinic ray-sensitive or radiation-sensitive film formed using the above-described composition of the present invention. In addition, a pattern 

