content_image/912949.jpg content_image/912947.jpg content_image/912945.jpg content_image/912943.jpg content_image/912941.jpg content_image/912939.jpg content_image/912937.jpg content_image/912934.jpg content_image/912948.jpg content_image/912946.jpg content_image/912944.jpg content_image/912942.jpg content_image/912940.jpg content_image/912938.jpg content_image/912936.jpg content_image/912935.jpg
Among the compounds capable of decomposing upon irra› diation with an actinic ray or radiation to generate an acid except for a carboxylic acid, which are used as the acid generator (B), the compounds represented by formulae (ZI) to (ZIII) are preferred, the compound represented by formula 

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<img src='content_image/912941.jpg'>

<img src='content_image/912939.jpg'>

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(ZI) is more preferred, and the compounds represented by (ZI-1) to (ZI-3) are most preferred. 

Specific examples of the acid generator (B) are illustrated below, but the present invention is not limited thereto. 

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<img src='content_image/912935.jpg'>

