content_image/914879.jpg content_image/914884.jpg
<img src='content_image/914879.jpg'>

In formulae, Rx represents H, CH$_{3}$_ CF $_{3 }$and CH$_{2}$OH. 

50 Examples of the group (y) of which the degree of solubility increases in an alkali developer include a lactone group, a carboxylic ester group (--COO-), an anhydride group (---C (O)OC(O)-), an acid imide group (-NHCONH-), a car› boxylic thioester group (-COS-), a carbonic ester group 55 (---OC(O)O-), a sulfuric ester group (-OSO$_{2}$O-), a sul› fonic ester group (-SO$_{2}$O-), or the like, and a lactone group is preferable. 

Specific examples of the repeating unit (by) having a group capable of increasing the solubility in an alkali developer are illustrated below, but the present invention is not limited thereto. In addition, specific examples of the repeating unit (A3) of the resin (Ab) can be also included as specific examples of the repeating unit (by). 

Ra represents a hydrogen atom, a fluorine atom, a methyl group, or a trifluoromethyl group. 

-continued 

<img src='content_image/914884.jpg'>

