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preferred examples are also the same, provided that R’$_{201 }$to R’$_{207 }$ in formulae (ZI’), (ZII’) and (ZIII’) do not have the acid-decomposable group. 

[0753] Further in formulae (ZI’) and (ZII’), Z represents a non-nucleophilic anion (an anion which is extremely low in capability of causing nucleophilic reaction), and has the same meaning with z- described in formulae (ZI) and (ZII), pro› vided that z- in formulae (ZI’) and (ZII’) does not have the acid-decomposable group. 

[0754] As more preferred (ZI’) component, the following compounds (ZI’-1), (ZI’-2), (ZI’-3) and (ZI’-4) can be exem› plified. 

[0755] Compound (ZI’-1) is an arylsulfonium compound in the case where at least one ofR’$_{201}$ , R’ $_{202 }$and R’$_{203 }$in formula (ZI’) represents an aryl group, that is, a compound having arylsulfonium as the cation. 

[0756] All ofR’$_{201 }$to R’$_{203 }$may be aryl groups in the aryl› sulfonium compound, or a part ofR$_{201 }$to R$_{203 }$is an aryl group and the remainder may be an alkyl group or a cycloalkyl group. 

[0757] The specific and preferred examples of the arylsul› fonium compounds are the same with those described in compound (ZI-1), except for not having the acid-decompos› able group. 

[0758] Compound (ZI’-2) is a compound in the case where each of R’$_{201 }$ to R’$_{203 }$ in formula (ZI’) independently repre› sents an organic group not having an aromatic ring. 

[0759] As the organic group not having an aromatic ring as R’$_{201 }$to R’$_{203}$, the same groups with the groups as described in compound (ZI-2) can be exemplified, except for not having the acid-decomposable group. 

[ 07 60] Compound (ZI’-3) is a compound represented by the following formula (ZI’-3) and having a phenacylsulfonium salt structure. 

<img src='content_image/905354.jpg'>

[0761] In formula (ZI’-3), each ofR$_{1}$c’ to R$_{7}$c’, Rx’ and Ry’ independently has the same meaning as described in R$_{1}$ c to R$_{7}$c, Rx and RY in formula (ZI-3), provided that any ofR$_{1 }$c’ to R$_{7}$c’, Rx’ and Ry’ does not have the acid-decomposable group. 

[0762] Zc’- represents a non-nucleophilic anion, and the same non-nucleophilic anions as described in z- in formula (ZI) can be exemplified, provided that Zc’- does not have the acid-decomposable group. 

[0763] The specific examples of the cations of the com› pounds represented by formula (ZI’-2) or (ZI’-3) are shown below. 

<img src='content_image/905355.jpg'>

<img src='content_image/905353.jpg'>

-continued 

