To increase reflectance of the HSQ film and to avoid light transmission and reflection from the metal substrate, we sputter coated cured HSQ samples with a thin film of gold/palladium (80/20) alloy. We used the Balzers SCD 004 sputter coater, operated with 0.06–0.07 mBar pressure of Argon. Samples have been processed for 240 s at 30 mA current. A silicon wafer is always included to examine the effect of sputtering on roughness.
alloy
gold/palladium
(80/20
Argon
pressure
0.06–0.07 mBar
mBar
Samples
processed
240 s
s
processed
current
30 mA
mA