TSMC manufactures IC wafers in tightly sealed clean rooms that require enormous ventilation systems to keep the air clean. "In order to get rid of the dust and particulates in the air, our circulation systems used to have to move large volumes of air in and out," says Hsu Fang-ming, deputy director of TSMC's Risk Management and Corporate ESH division.
以台積電的晶圓製程為例，全密閉的「潔淨室」需要耗用大量空調來維持潔淨度，「以前為了把空氣中的浮塵和微粒帶走，循環系統要大量進氣，也大量排氣。」