When the water that has been used to wash chips becomes so heavily fluorinated that it is no longer recyclable, the company sends it to its own in-house water treatment pool. There calcium carbonate or calcium chloride is used to precipitate out a calcium fluoride sludge. A waste treatment firm then handles the removal and transportation of this sludge, while the water is routed to the science park's water treatment facility.
至於清洗晶片的含氟廢水用到無法再回收的地步之後，廠商也在自己的汙水處理池以石灰或是氯化鈣，沈澱出氟化鈣汙泥，這些汙泥會交由專業的處理業者清運，水則排到園區汙水處理廠。