  We reported the usage of grating-based X-ray phase-contrast imaging in
nondestructive testing of grating imperfections. It was found that
electroplating flaws could be easily detected by conventional absorption
signal, and in particular, we observed that the grating defects resulting from
uneven ultraviolet exposure could be clearly discriminated with phase-contrast
signal. The experimental results demonstrate that grating-based X-ray
phase-contrast imaging, with a conventional low-brilliance X-ray source, a
large field of view and a reasonable compact setup, which simultaneously yields
phase- and attenuation-contrast signal of the sample, can be ready-to-use in
fast nondestructive testing of various imperfections in gratings and other
similar photoetching products.

Instrumentation and Detectors