  We discuss an algorithm that eliminates the periodic non-linearity of a
bimorph piezo actuator by modifying the phase of the voltage waveforms used for
driving the actuator. The procedure presented allows for a separate
optimization of the motion of the actuator groups in order to obtain the
properties desired (such as a specific stepsize or maximum force). The
resulting response of a bimorph piezo drive, also under different loads, is
experimentally investigated. The optimization process can be applied to other
actuators relying on internal periodic processes, if the motion is
reproducible, and is limited by measurement noise or manufacturing tolerances
only.

Instrumentation and Detectors