  In response to aggressive scaling demands in semiconductor manufacturing and
the growing need to apply sustainable practices, this paper presents a holistic
sustainability assessment framework for evaluating alternative metals for
advanced applications. The framework, consisting of seven sustainability
aspects, aims to guide researchers and industry stakeholders towards decisions
fostering a more sustainable and secure future for microelectronics. This study
applies the framework to assess the sustainability of alternative local
interconnect metals. The framework identifies five metals (Ti, Al, Ni, Co, and
Mo) with relatively favourable performance in at least six out of nine specific
indicators, while others (Pt, Ru, Ir, Rh, and Pd) exhibit poorer sustainability
metrics. The study recommends further analyses, suggesting the incorporation of
case-specific functional units and the use of normalization and weighting
factors for a comprehensive evaluation. Coupled with traditional technological
assessments, this framework equips decision-makers with essential tools to
broaden criteria for selecting alternative metals, aligning semiconductor
manufacturing with broader sustainability objectives.

Materials Science