  The design and engineering of photonic architectures, suitable to enhance,
collect and guide light on chip is needed for applications in quantum photonics
and quantum optomechanics. In this work we apply a Faraday cage based oblique
angle etch method to fabricate various functional photonic devices from 4H
Silicon Carbide - a material that has attracted attention in recent years, due
to its potential in optomechanics, nonlinear optics and quantum information. We
detail the processing conditions and thoroughly address the geometrical and
optical characteristics of the fabricated devices. Employing photoluminescence
measurements we demonstrate high quality factors for suspended microring
resonators of up to 3500 in the visible range. Such devices will be applicable
in the future to augment the properties of SiC in integrated on chip quantum
photonics.

Optics;Applied Physics