  The nanobeam resonator is the key mechanical component in the
nano-electromechanical system. In addition to its high frequency originating
from its low dimension, the performance is significantly influenced by the
circumstances, especially at nanoscale where a large surface area of the
material is exposed. Molecular dynamics simulations and theoretical analysis
are used for a quantitative prediction on the damping behavior, such as the
critical damping condition and lifetime, of nanobeam resonators that directly
maps the fluid-structure properties and interaction information into dynamical
behaviors. We show here how the humidity defines the critical damping condition
through viscous forces, marking the transition from under-damping to
over-damping regime at elevated humidity. Novel phenomena such as the thermal
fluctuation and paddling effects are also discussed.

Materials Science;Mesoscale and Nanoscale Physics