  We report on the development of Electron Holographic Tomography towards a
versatile potential measurement technique, overcoming several limitations, such
as a limited tilt range, previously hampering a reproducible and accurate
electrostatic potential reconstruction in three dimensions. Most notably,
tomographic reconstruction is performed on optimally sampled polar grids taking
into account symmetry and other spatial constraints of the nanostructure.
Furthermore, holographic tilt series acquisition and alignment have been
automated and adapted to three dimensions. We demonstrate 6 nm spatial and 0.2
V signal resolution by reconstructing various, previously hidden, potential
details of a GaAs/AlGaAs core-shell nanowire. The improved tomographic
reconstruction opens pathways towards the detection of minute potentials in
nanostructures and an increase in speed and accuracy in related techniques such
as X-ray tomography.

Materials Science