  Electron heating and ionization dynamics in capacitively coupled radio
frequency (RF) atmospheric pressure microplasmas operated in helium are
investigated by Particle in Cell simulations and semi-analytical modeling. A
strong heating of electrons and ionization in the plasma bulk due to high bulk
electric fields are observed at distinct times within the RF period. Based on
the model the electric field is identified to be a drift field caused by a low
electrical conductivity due to the high electron-neutral collision frequency at
atmospheric pressure. Thus, the ionization is mainly caused by ohmic heating in
this "Omega-mode". The phase of strongest bulk electric field and ionization is
affected by the driving voltage amplitude. At high amplitudes, the plasma
density is high, so that the sheath impedance is comparable to the bulk
resistance. Thus, voltage and current are about 45{\deg} out of phase and
maximum ionization is observed during sheath expansion with local maxima at the
sheath edges. At low driving voltages, the plasma density is low and the
discharge becomes more resistive resulting in a smaller phase shift of about
4{\deg}. Thus, maximum ionization occurs later within the RF period with a
maximum in the discharge center. Significant analogies to electronegative low
pressure macroscopic discharges operated in the Drift-Ambipolar mode are found,
where similar mechanisms induced by a high electronegativity instead of a high
collision frequency have been identified.

Plasma Physics