  Recently, S Patil et al. have reported the existence of an enhanced operating
regime when a low-pressure (5 mTorr) capacitively coupled discharge (CCP) is
driven by a very high radio-frequency (60 MHz) source in the presence of a weak
external magnetic field applied parallel to its electrodes. Their
Particle-in-Cell (PIC) simulations show, that a significantly higher bulk
plasma density and ion flux can be achieved at the electrode when the electron
cyclotron frequency equals half of the applied RF frequency for a given fixed
voltage. In the present work we take a detailed look at this phenomenon and
further delineate the effect of this "electron bounce cyclotron resonance
(EBCR)" on the electron and ion dynamics of the system. We find that the
ionization collision rate and stochastic heating is maximum under resonance
condition. The electron energy distribution function also indicates that the
population of tail end electrons is highest for the case where EBCR is maximum.
Formation of electric field transients in the bulk plasma region are also seen
at lower values of applied magnetic field. Finally, we demonstrate that the
EBCR induced effect is a low pressure phenomenon and weakens as the neutral gas
pressure increases. The potential utility of this effect to advance the
operational performance of CCP devices for industrial purposes is discussed.

Plasma Physics