  A strong trend for quantum based technologies and applications follows the
avenue of combining different platforms to exploit their complementary
technological and functional advantages. Micro and nano-mechanical devices are
particularly suitable for hybrid integration due to the easiness of fabrication
at multi-scales and their pervasive coupling with electrons and photons. Here,
we report on a nanomechanical technological platform where a silicon chip is
combined with an aluminum nitride layer. Exploiting the AlN piezoelectricity,
Surface Acoustic Waves are injected in the Si layer where the material has been
localy patterned and etched to form a suspended nanostring. Characterizing the
nanostring vertical displacement induced by the SAW, we found an external
excitation peak efficiency in excess of 500 pm/V at 1 GHz mechanical frequency.
Exploiting the long term expertise in silicon photonic and electronic devices
as well as the SAW robustness and versatility, our technological platform
represents a strong candidate for hybrid quantum systems.

Applied Physics;Mesoscale and Nanoscale Physics