  Negative bias on substrate during DC sputter deposition of nano-crystalline
molybdenum thin films has been utilized to tune their properties for solar
cells and the cryogenic radiation detector applications. Films have been
deposited on Si substrates under different out of plane negative biases aiming
to improve their physical properties such as the sheet resistance,
superconducting transition temperature, width of transition and surface
roughness. Significant modifications in the electrical and surface
morphological properties of nano-crystalline Mo thin films have been reported.
The superconducting transition temperature and crystallite size of the films
does not show much improvement but the surface roughness and electrical
resistivity of the film have been improved by the application of substrate
bias.

Applied Physics