  The effects of the tilt of the crystallographic orientation with respect to
an incident electron probe on high-angle annular dark field (HAADF) imaging in
aberration-corrected scanning transmission electron microscopy (STEM) have been
investigated with experiments and simulations. A small specimen tilt can lead
to unequal deviations of different atom species in the HAADF image and result
in further relative displacement between anions and cations. Simulated HAADF
images also confirm that the crystal tilt causes an artifact in atom
polarization as well. The effect is derived from the scattering ability of
different atoms.

Materials Science;Mesoscale and Nanoscale Physics