  The physical principles of the MRI model (abbreviation for mixing-roughness-
information depth) for the theoretical calculation of measured concentration-
depth profiles obtained in sputter depth profiling with AES, XPS, SIMS, etc.
are outlined. The main features of the calculation and the respective visual
Basic program are explained. Examples demonstrate the usefulness of the current
approach for the reconstruction of the original in-depth distribution of
composition.

Materials Science