What is the estimated revenue for Lam Research's CSBG business in 2022
ly working on the issues with our suppliers and believe we will see progressive improvement as we move through the next few quarters. Overall, for calendar year 2022, we expect to deliver strong across-the-board revenue growth. On the demand front, we are seeing continued momentum in wafer fabrication equipment spending.
We believe that spending in calendar year 2021 ended consistent with the mid-$80 billion estimate we provided on our last call. Strength was broad-based, with NAND, DRAM, and Foundry/Logic all growing double digits. As we look to calendar year 2022, there are multiple themes underpinning our view for continued WFE growth, including powerful in-market demand trends, rising device complexity, strong semiconductor industry operating profitability, and regional government support and incentives. In end markets, the technology landscape continues to build, not only on the prevalent drivers of AI, IoT, the cloud, and 5G but also now, along another vector, as advances in virtual and augmented reality lay the groundwork for the metaverse over the coming decade.
Immersive gaming experiences will be a primary driver of metaverse development and adoption, and I've spoken on prior calls about how advanced processors and memory devices for gaming are favorable for WFE demand due to both leading-edge performance requirements and semiconductor content growth. Across the semiconductor industry, we see more than 20 new fabs being built, and customers have already announced significant capex increases for the year. Consequently, we expect 2022 WFE spending to be in the $100 billion range, with strong growth across all segments. We believe that our performance in 2021 has strengthened our ability to win in the robust demand environment we see ahead.
We launched innovative new etch and deposition products, gained market share in key technology inflections, and rapidly grew our installed base. On this last point, our customer support business group continues to exceed expectations. Our chamber count grew approximately 13% in calendar year 2021 to approximately 75,000 units. Our revenue per chamber, which we highlighted in our 2020 Investor Day as a key growth objective, increased nearly 24% year on year in 2021, or nearly twice the growth in chamber count.
We expect calendar year 2022 to be another strong growth year for our CSBG business. Our large and growing installed base also adds immense value to our product innovation process. The high volume of wafers running on our installed base every day enables us to detect newly emerging challenges more quickly and accelerate our cycles of learning, both of which are critical in an era of increasing device and manufacturing complexity. On the product front, 2021 was a year of significant milestones for Lam.
To highlight just a few, our Vantex dielectric etch system became the fastest ramping new etch product in Lam history. Built on our groundbreaking new Sense.i platform, Vantex helps customers reduce costs by enabling higher etch rates and improving fab footprint efficiency, while new process capabilities extend our technology leadership in high aspect ratio etch. We expect continued growth in Vantex shipments in 2022, with overall revenues from this product roughly doubling year over year. Our Vector DT product for backside deposition achieved process tool of record status at all customers for 3D NAND devices with more than 200 layers, further demonstrating our leadership in 3D scaling enablement.
We achieved several important leading-edge wins with our selective etch, strip, and surface treatment solutions, including applications for gate-all-around in the Foundry/Logic customer and our first selective etch win in DRAM. As device complexity increases across Logic and Memory devices, the need for angstrom-level precision is driving greater adoption of Lam's selective etch solutions compared to conventional wet etch methods. This should enable selective etch revenues to double this year as customers adopt our innovative suite of products for current leading-edge applications, 
ly working on the issues with our suppliers and believe we will see progressive improvement as we move through the next few quarters. Overall, for calendar year 2022, we expect to deliver strong across-the-board revenue growth. On the demand front, we are seeing continued momentum in wafer fabrication equipment spending.
We believe that spending in calendar year 2021 ended consistent with the mid-$80 billion estimate we provided on our last call. Strength was broad-based, with NAND, DRAM, and Foundry/Logic all growing double digits. As we look to calendar year 2022, there are multiple themes underpinning our view for continued WFE growth, including powerful in-market demand trends, rising device complexity, strong semiconductor industry operating profitability, and regional government support and incentives. In end markets, the technology landscape continues to build, not only on the prevalent drivers of AI, IoT, the cloud, and 5G but also now, along another vector, as advances in virtual and augmented reality lay the groundwork for the metaverse over the coming decade.
Immersive gaming experiences will be a primary driver of metaverse development and adoption, and I've spoken on prior calls about how advanced processors and memory devices for gaming are favorable for WFE demand due to both leading-edge performance requirements and semiconductor content growth. Across the semiconductor industry, we see more than 20 new fabs being built, and customers have already announced significant capex increases for the year. Consequently, we expect 2022 WFE spending to be in the $100 billion range, with strong growth across all segments. We believe that our performance in 2021 has strengthened our ability to win in the robust demand environment we see ahead.
We launched innovative new etch and deposition products, gained market share in key technology inflections, and rapidly grew our installed base. On this last point, our customer support business group continues to exceed expectations. Our chamber count grew approximately 13% in calendar year 2021 to approximately 75,000 units. Our revenue per chamber, which we highlighted in our 2020 Investor Day as a key growth objective, increased nearly 24% year on year in 2021, or nearly twice the growth in chamber count.
 We expect calendar year 2022 to be another strong growth year for our CSBG business. Our large and growing installed base also adds immense value to our product innovation process. The high volume of wafers running on our installed base every day enables us to detect newly emerging challenges more quickly and accelerate our cycles of learning, both of which are critical in an era of increasing device and manufacturing complexity. On the product front, 2021 was a year of significant milestones for Lam.
To highlight just a few, our Vantex dielectric etch system became the fastest ramping new etch product in Lam history. Built on our groundbreaking new Sense.i platform, Vantex helps customers reduce costs by enabling higher etch rates and improving fab footprint efficiency, while new process capabilities extend our technology leadership in high aspect ratio etch. We expect continued growth in Vantex shipments in 2022, with overall revenues from this product roughly doubling year over year. Our Vector DT product for backside deposition achieved process tool of record status at all customers for 3D NAND devices with more than 200 layers, further demonstrating our leadership in 3D scaling enablement.
We achieved several important leading-edge wins with our selective etch, strip, and surface treatment solutions, including applications for gate-all-around in the Foundry/Logic customer and our first selective etch win in DRAM. As device complexity increases across Logic and Memory devices, the need for angstrom-level precision is driving greater adoption of Lam's selective etch solutions compared to conventional wet etch methods. This should enable selective etch revenues to double this year as customers adopt our innovative suite of products for current leading-edge applications, 