3790
We report here , for the first time , the realization of polymer-derived ceramic SiOC ceramic components structured in 3D across several length scales ( with micron and mesoscale 3D features ) , produced by pyrolysis at 1000 °C of preceramic parts , without shape distortion during the pyrolysis step .
 material: ceramic; material: ceramic; concept or principle: 3D; process characterization: length scales; engineering feature: micron; concept or principle: mesoscale 3D; manufacturing process: pyrolysis; concept or principle: distortion; manufacturing process: pyrolysis
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: ceramic, ceramic, 3D, length scales, micron, mesoscale 3D, pyrolysis, distortion, pyrolysis 
Answer:
 material: ceramic; material: ceramic; concept or principle: 3D; process characterization: length scales; engineering feature: micron; concept or principle: mesoscale 3D; manufacturing process: pyrolysis; concept or principle: distortion; manufacturing process: pyrolysis