1954
The values of selected parameters per ISO 25178-2 are reported , including Sa , the arithmetic mean height , for which the values from the Nikon MCT 225 metrology CT measurements were all within 0.5 % of the mean reference focus variation measurement .
 concept or principle: parameters; manufacturing standard: ISO 25178-2; concept or principle: arithmetic mean; concept or principle: metrology; enabling technology: CT; concept or principle: variation; process characterization: measurement
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: parameters, ISO 25178-2, arithmetic mean, metrology, CT, variation, measurement 
Answer:
 concept or principle: parameters; manufacturing standard: ISO 25178-2; concept or principle: arithmetic mean; concept or principle: metrology; enabling technology: CT; concept or principle: variation; process characterization: measurement