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The microstructure , chemical composition , phase constitution and microhardness of all the test components were respectively examined by using light microscopy , SEM-EDS , X-ray diffraction and a Duromain 70 Hardness Tester .
 concept or principle: microstructure; concept or principle: chemical composition; concept or principle: phase; concept or principle: microhardness; machine or equipment: components; process characterization: microscopy; process characterization: X-ray diffraction; machanical property: Hardness
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: microstructure, chemical composition, phase, microhardness, components, microscopy, X-ray diffraction, Hardness 
Answer:
 concept or principle: microstructure; concept or principle: chemical composition; concept or principle: phase; concept or principle: microhardness; machine or equipment: components; process characterization: microscopy; process characterization: X-ray diffraction; machanical property: Hardness