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As the number of deposition layers increases , the position of maximum tensile stress moves from the substrate to the deposited layers .
 material: As; process parameter: deposition layers; machanical property: tensile stress; material: substrate; process characterization: deposited layers
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: As, deposition layers, tensile stress, substrate, deposited layers 
Answer:
 material: As; process parameter: deposition layers; machanical property: tensile stress; material: substrate; process characterization: deposited layers