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The morphological features of the substrates and geometrical tolerances have been inspected by field emission gun–scanning electron microscopy ( FEG–SEM ) and contact gauge profilometry .
 process parameter: tolerances; process characterization: emission; process characterization: electron microscopy; application: contact
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: tolerances, emission, electron microscopy, contact 
Answer:
 process parameter: tolerances; process characterization: emission; process characterization: electron microscopy; application: contact