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However , after annealing the original NM structure with a = b = 5.47 Å and c = 6.66 Å with a c/a -ratio of 1.22 was recovered and crystallographic twins could be observed in an SEM .
 manufacturing process: annealing; concept or principle: structure; material: b; material: c; material: be; process characterization: SEM
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: annealing, structure, b, c, be, SEM 
Answer:
 manufacturing process: annealing; concept or principle: structure; material: b; material: c; material: be; process characterization: SEM