6463
The TEM observation and EBSD analysis showed that the accumulated residual stress during the SLM process predominated in the overlapping regions between the adjacent scanning tracks , which consequently induced a larger number of the lattice defects , such as dislocations and overlapping stacking faults .
 process characterization: TEM; process characterization: EBSD; machanical property: residual stress; manufacturing process: SLM; concept or principle: process; concept or principle: scanning; concept or principle: lattice defects; material: as
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: TEM, EBSD, residual stress, SLM, process, scanning, lattice defects, as 
Answer:
 process characterization: TEM; process characterization: EBSD; machanical property: residual stress; manufacturing process: SLM; concept or principle: process; concept or principle: scanning; concept or principle: lattice defects; material: as