76800
In common integrated circuits , a wafer of monocrystalline silicon serves as a mechanical support for the circuits , which are created by doping and insulated from each other by thin layers of silicon oxide , an insulator that is easily produced on Si surfaces by processes of thermal oxidation or local oxidation ( LOCOS ) , which involve exposing the element to oxygen under the proper conditions that can be predicted by the Deal–Grove model .
 person: Deal–Grove
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: location, person, organization 
Text: {0} 
 Entities: Deal–Grove 
Answer:
 person: Deal–Grove