28504
A modified HandiHaler with a MP including a three - dimensional ( 3D ) array of rods ( HH - 3D ) produced a submicrometer particle fraction of 38 . 8 % with a conventional fine particle fraction ( % < 5 mu m ) of 97 . 3 % .
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Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
 Entities:  
Answer:
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