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The SiC-316 L mixture with 40 vol % of 320 grit SiC powder had the highest powder flow rate ( 37.53 μL/s ) .
 material: SiC powder; process parameter: powder flow rate
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: SiC powder, powder flow rate 
Answer:
 material: SiC powder; process parameter: powder flow rate