3997
Unprecedented feature sizes of smaller than 10 μm are achieved with surface roughness of 0.3 to 0.7 μm .
 process parameter: feature sizes; machanical property: surface roughness
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: feature sizes, surface roughness 
Answer:
 process parameter: feature sizes; machanical property: surface roughness