6264
SEM investigations demonstrated that the primary γ/γ′ precipitates in the deposit region were 90 % finer in size compared to the substrate .
 process characterization: SEM; material: precipitates; material: substrate
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: SEM, precipitates, substrate 
Answer:
 process characterization: SEM; material: precipitates; material: substrate