8410
Resulting microstructures are being evaluated with different measurement techniques , i.e. , a stylus instrument , SEM and AFM .
 material: microstructures; process characterization: measurement; machine or equipment: stylus; process characterization: SEM
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: microstructures, measurement, stylus, SEM 
Answer:
 material: microstructures; process characterization: measurement; machine or equipment: stylus; process characterization: SEM