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Meanwhile , the evolution of nanoprecipitation behavior under various scan speeds is revealed and TEM analysis of precipitates shows that a small amount of spherical nanoprecipitates Al3 ( Sc , Zr ) were embedded at the bottom of the molten pool using a low scan speed .
 concept or principle: evolution; process parameter: scan speeds; process characterization: TEM; material: precipitates; concept or principle: spherical; material: Zr; concept or principle: molten pool; process parameter: scan speed
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: evolution, scan speeds, TEM, precipitates, spherical, Zr, molten pool, scan speed 
Answer:
 concept or principle: evolution; process parameter: scan speeds; process characterization: TEM; material: precipitates; concept or principle: spherical; material: Zr; concept or principle: molten pool; process parameter: scan speed