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In the stress relaxation period , the removal of parts from the substrate is simulated , and the off-substrate part distortion and residual stress are predicted .
 concept or principle: stress relaxation; material: substrate; concept or principle: distortion; machanical property: residual stress; concept or principle: predicted
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: stress relaxation, substrate, distortion, residual stress, predicted 
Answer:
 concept or principle: stress relaxation; material: substrate; concept or principle: distortion; machanical property: residual stress; concept or principle: predicted