3459
Dense Cu parts ( 95 % ) with smooth surface finishing ( Ra ∼18 μm ) were obtained at a scan speed of 400 mm/s , a hatch distance of 0.12 mm , and a layer thickness of 0.03 mm .
 material: Cu; concept or principle: smooth surface; manufacturing process: finishing; process parameter: scan speed; process parameter: hatch distance; manufacturing process: mm; process parameter: layer thickness; manufacturing process: mm
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: Cu, smooth surface, finishing, scan speed, hatch distance, mm, layer thickness, mm 
Answer:
 material: Cu; concept or principle: smooth surface; manufacturing process: finishing; process parameter: scan speed; process parameter: hatch distance; manufacturing process: mm; process parameter: layer thickness; manufacturing process: mm