6461
In order to better understand the formation of the lattice defects during the melting process , and the tensile deformation mechanism of the SLM-produced Co29Cr9W3Cu samples , the microstructures of the samples before and after tensile deformation were observed using a scanning electron microscope ( SEM ) , a transmission electron microscope ( TEM ) , and an electron back-scattered diffraction ( EBSD ) , respectively .
 concept or principle: lattice defects; manufacturing process: melting; machanical property: tensile; concept or principle: deformation; concept or principle: samples; material: microstructures; concept or principle: samples; machanical property: tensile; concept or principle: deformation; machine or equipment: scanning electron microscope; process characterization: SEM; process characterization: transmission electron microscope; process characterization: TEM; process characterization: diffraction; process characterization: EBSD
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: lattice defects, melting, tensile, deformation, samples, microstructures, samples, tensile, deformation, scanning electron microscope, SEM, transmission electron microscope, TEM, diffraction, EBSD 
Answer:
 concept or principle: lattice defects; manufacturing process: melting; machanical property: tensile; concept or principle: deformation; concept or principle: samples; material: microstructures; concept or principle: samples; machanical property: tensile; concept or principle: deformation; machine or equipment: scanning electron microscope; process characterization: SEM; process characterization: transmission electron microscope; process characterization: TEM; process characterization: diffraction; process characterization: EBSD