574
Selective deposition was performed by patterning precursor layers using a masked high-volume , low-pressure slurry spray deposition technique .
 concept or principle: deposition; material: precursor; material: slurry; concept or principle: deposition
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: deposition, precursor, slurry, deposition 
Answer:
 concept or principle: deposition; material: precursor; material: slurry; concept or principle: deposition