6051
Different precipitation behavior between various scan speeds are characterized by SEM and TEM .
 concept or principle: precipitation; process parameter: scan speeds; process characterization: SEM; process characterization: TEM
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: precipitation, scan speeds, SEM, TEM 
Answer:
 concept or principle: precipitation; process parameter: scan speeds; process characterization: SEM; process characterization: TEM