1371
Next , the scanning electron microscopy ( SEM ) , electron back scattering diffraction ( EBSD ) are employed to investigate the microstructures .
 process characterization: scanning electron microscopy; process characterization: SEM; process characterization: diffraction; process characterization: EBSD; material: microstructures
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: scanning electron microscopy, SEM, diffraction, EBSD, microstructures 
Answer:
 process characterization: scanning electron microscopy; process characterization: SEM; process characterization: diffraction; process characterization: EBSD; material: microstructures