5067
Dimensional analysis and surface roughness of the tools were evaluated after thermal cycling .
 process characterization: Dimensional analysis; machanical property: surface roughness; machine or equipment: tools; process parameter: thermal cycling
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
 Entities: Dimensional analysis, surface roughness, tools, thermal cycling 
Answer:
 process characterization: Dimensional analysis; machanical property: surface roughness; machine or equipment: tools; process parameter: thermal cycling