The AL120-12 wafer handler is compatible with both FOUP (Load Port) and FOSB, ideal for lower cost back-end inspection. The safe and ergonomic design maintains operator safety while effectively transferring wafers including thin and warped wafers.
With post-process inspection in mind, particular emphasis has been placed on the ease of use and ergonomics. The AL120-12 system includes top macro, back macro and microscope inspection.
The robotic vacuum pick-up arm provides non-contact centering of wafer for accurate placement on the microscope stage. Wafers can be rotated 360 degrees during microscope inspection.
The AL120-12 interfaces with Olympus ' MX61L microscope providing excellent resolution and precision quality optical imaging.
Centrally located controls and on-board macro illuminator allow operators to maintain an ergonomic and relaxed position, even for long periods of inspection.
Olympus continues with their proven expertise in wafer handling with the AL120-12 model. Its robust and reliable design maintains wafer integrity and ensures safe handling for 300mm wafers.
Transfer of thin and warped wafers can be safely transferred using the AL120-12 handler.
Wafer Size 300 mm in dia. (SEMI M1.15, t=775 µm) Option: 200 mm in dia.
Mass (Excluding the Microscope) 360 kg approx. 270 kg approx.