27. Device (1) according to a mirror (29) at least one claims 25 or 26 is characterized that the deflection arrangement (25) comprise at least one ratio of a mirror of a mirror which is combination of the energy beam (12).
27. Device (1) according to at least one of claims 25 or 26, characterized in that the deflection arrangement (25) comprises at least one of the energy beam (12) semi-transparent mirror element (29).