In cutting-edge film formation, fast transient response along with precise flow accuracy is important. CRITERIONTM modules combine an advanced variable PID algorithm (patent pending) with high accuracy, high speed pressure transducers, a fast and stable piezoelectric valve and a blazing 32 bit CPU. This combination of high quality and high speed components enables CRITERIONTM to provide accurate and responsive flow control in transient and steady state conditions over the entire flow range, from the smallest to the largest set points. As a result, CRITERIONTM series achieves a 20% improvement in speed of response over our previous digital MFCs.