Semi-automatic parametric test station, based on a Süss Microtech PA200 semi-automatic prober and an Agilent 41000 Parametric Test System. It has 4 SMU units, a CV meter and a switching matrix. Connection to the wafer is done through probecard.
Two semi-automatic wafer probers (Wentworth AWP 1050 and Süss Microtech PA200) are available. Wafer can be contacted both using micromanipulators or probecard. They can be used together with the available electric measurement equipment: two Semiconductor Parameter Analyzers (an Agilent 4155B and a Keithley 4200, both including 4 SMU), CV measurement equipment (HP4280A, HP4192A and HP4140B), and other auxiliary small equipment. There are also available two manual wafer probers with thermal chuck.