question: Along with critical dimension and depth , what can the infrared light reflectance be used to determine in regard to high aspect ratio trench structures ?
answer: sidewall angle
turker_answer: Along with critical dimension and depth , the infrared light reflectance can be used as a sidewall angle to determine in regard to high aspect ratio trench structures .
rule-based: Along with critical dimension and depth , the infrared light reflectance can be used sidewall angle to determine in regard to high aspect ratio trench structures .