text:
package org.apache.sysml.runtime.compress.cocode;

import java.util.ArrayList;
import java.util.Arrays;
import java.util.HashMap;
import java.util.List;
import java.util.concurrent.Callable;
import java.util.concurrent.ExecutorService;
import java.util.concurrent.Future;

import org.apache.commons.logging.Log;
import org.apache.commons.logging.LogFactory;
import org.apache.sysml.runtime.DMLRuntimeException;
import org.apache.sysml.runtime.compress.estim.CompressedSizeEstimator;
import org.apache.sysml.runtime.compress.estim.CompressedSizeInfo;
import org.apache.sysml.runtime.util.CommonThreadPool;

public class PlanningCoCoder
{
	//internal configurations
	private final static PartitionerType COLUMN_PARTITIONER = PartitionerType.BIN_PACKING;

	private static final Log LOG = LogFactory.getLog(PlanningCoCoder.class.getName());

	public enum PartitionerType {
		BIN_PACKING,
		STATIC,
	}

	public static List<int[]> findCocodesByPartitioning(CompressedSizeEstimator sizeEstimator, List<Integer> cols,
			CompressedSizeInfo[] colInfos, int numRows, int k)
	{
		// filtering out non-groupable columns as singleton groups
		// weight is the ratio of its cardinality to the number of rows
		int numCols = cols.size();
		List<Integer> groupCols = new ArrayList<>();
		HashMap<Integer, GroupableColInfo> groupColsInfo = new HashMap<>();
		for (int i = 0; i < numCols; i++) {
			int colIx = cols.get(i);
			double cardinality = colInfos[colIx].getEstCard();
			double weight = cardinality / numRows;
			groupCols.add(colIx);
			groupColsInfo.put(colIx, new GroupableColInfo(weight,colInfos[colIx].getMinSize()));
		}

		// use column group partitioner to create partitions of columns
		List<List<Integer>> bins = createColumnGroupPartitioner(COLUMN_PARTITIONER)
				.partitionColumns(groupCols, groupColsInfo);

		// brute force grouping within each partition
		return (k > 1) ?
				getCocodingGroupsBruteForce(bins, groupColsInfo, sizeEstimator, numRows, k) :
				getCocodingGroupsBruteForce(bins, groupColsInfo, sizeEstimator, numRows);
	}

	private static List<int[]> getCocodingGroupsBruteForce(List<List<Integer>> bins, HashMap<Integer, GroupableColInfo> groupColsInfo, CompressedSizeEstimator estim, int rlen)
	{
		List<int[]> retGroups = new ArrayList<>();
		for (List<Integer> bin : bins) {
			// building an array of singleton CoCodingGroup
			ArrayList<PlanningCoCodingGroup> sgroups = new ArrayList<>();
			for (Integer col : bin)
				sgroups.add(new PlanningCoCodingGroup(col, groupColsInfo.get(col)));
			// brute force co-coding
			PlanningCoCodingGroup[] outputGroups = findCocodesBruteForce(
					estim, rlen, sgroups.toArray(new PlanningCoCodingGroup[0]));
			for (PlanningCoCodingGroup grp : outputGroups)
				retGroups.add(grp.getColIndices());
		}

		return retGroups;
	}

	private static List<int[]> getCocodingGroupsBruteForce(List<List<Integer>> bins, HashMap<Integer, GroupableColInfo> groupColsInfo, CompressedSizeEstimator estim, int rlen, int k)
	{
		List<int[]> retGroups = new ArrayList<>();
		try {
			ExecutorService pool = CommonThreadPool.get(k);
			ArrayList<CocodeTask> tasks = new ArrayList<>();
			for (List<Integer> bin : bins) {
				// building an array of singleton CoCodingGroup
				ArrayList<PlanningCoCodingGroup> sgroups = new ArrayList<>();
				for (Integer col : bin)
					sgroups.add(new PlanningCoCodingGroup(col, groupColsInfo.get(col)));
				tasks.add(new CocodeTask(estim, sgroups, rlen));
			}
			List<Future<PlanningCoCodingGroup[]>> rtask = pool.invokeAll(tasks);
			for( Future<PlanningCoCodingGroup[]> lrtask : rtask )
				for (PlanningCoCodingGroup grp : lrtask.get())
					retGroups.add(grp.getColIndices());
			pool.shutdown();
		}
		catch(Exception ex) {
			throw new DMLRuntimeException(ex);
		}

		return retGroups;
	}

	/**
	 * Identify columns to code together. Uses a greedy approach that merges
	 * pairs of column groups into larger groups. Each phase of the greedy
	 * algorithm considers all combinations of pairs to merge.
	 *
	 * @param sizeEstimator compressed size estimator
	 * @param numRowsWeight number of rows weight
	 * @param singltonGroups planning co-coding groups
	 * @return
	 */
	private static PlanningCoCodingGroup[] findCocodesBruteForce(
			CompressedSizeEstimator estim, int numRows,
			PlanningCoCodingGroup[] singletonGroups)
	{
		if( LOG.isTraceEnabled() )
			LOG.trace("Cocoding: process "+singletonGroups.length);

		List<PlanningCoCodingGroup> workset = new ArrayList<>(Arrays.asList(singletonGroups));

		//establish memo table for extracted column groups
		PlanningMemoTable memo = new PlanningMemoTable();

		//process merging iterations until no more change
		boolean changed = true;
		while( changed && workset.size()>1 ) {
			//find best merge, incl memoization
			PlanningCoCodingGroup tmp = null;
			for( int i=0; i<workset.size(); i++ ) {
				for( int j=i+1; j<workset.size(); j++ ) {
					PlanningCoCodingGroup c1 = workset.get(i);
					PlanningCoCodingGroup c2 = workset.get(j);
					memo.incrStats(1, 0, 0);

					//pruning filter: skip dominated candidates
					if( -Math.min(c1.getEstSize(), c2.getEstSize()) > memo.getOptChangeInSize() )
						continue;

					//memoization or newly created group (incl bitmap extraction)
					PlanningCoCodingGroup c1c2 = memo.getOrCreate(c1, c2, estim, numRows);

					//keep best merged group only
					if( tmp == null || c1c2.getChangeInSize() < tmp.getChangeInSize()
						|| (c1c2.getChangeInSize() == tmp.getChangeInSize()
							&& c1c2.getColIndices().length < tmp.getColIndices().length))
						tmp = c1c2;
				}
			}

			//modify working set
			if( tmp != null && tmp.getChangeInSize() < 0 ) {
				workset.remove(tmp.getLeftGroup());
				workset.remove(tmp.getRightGroup());
				workset.add(tmp);
				memo.remove(tmp);

				if( LOG.isTraceEnabled() ) {
					LOG.trace("--merge groups: "+Arrays.toString(tmp.getLeftGroup().getColIndices())+" and "
							+Arrays.toString(tmp.getRightGroup().getColIndices()));
				}
			}
			else {
				changed = false;
			}
		}

		if( LOG.isTraceEnabled() )
			LOG.trace("--stats: "+Arrays.toString(memo.getStats()));

		return workset.toArray(new PlanningCoCodingGroup[0]);
	}

	private static ColumnGroupPartitioner createColumnGroupPartitioner(PartitionerType type) {
		switch( type ) {
			case BIN_PACKING:
				return new ColumnGroupPartitionerBinPacking();

			case STATIC:
				return new ColumnGroupPartitionerStatic();

			default:
				throw new RuntimeException(
					"Unsupported column group partitioner: "+type.toString());
		}
	}

	public static class GroupableColInfo {
		public final double cardRatio;
		public final long size;

		public GroupableColInfo(double lcardRatio, long lsize) {
			cardRatio = lcardRatio;
			size = lsize;
		}
	}

	private static class CocodeTask implements Callable<PlanningCoCodingGroup[]>
	{
		private CompressedSizeEstimator _estim = null;
		private ArrayList<PlanningCoCodingGroup> _sgroups = null;
		private int _rlen = -1;

		protected CocodeTask( CompressedSizeEstimator estim, ArrayList<PlanningCoCodingGroup> sgroups, int rlen )  {
			_estim = estim;
			_sgroups = sgroups;
			_rlen = rlen;
		}

		@Override
		public PlanningCoCodingGroup[] call() {
			// brute force co-coding
			return findCocodesBruteForce(_estim, _rlen,
					_sgroups.toArray(new PlanningCoCodingGroup[0]));
		}
	}
}

redpajama_set_name: RedPajamaGithub


Rensselaer City residents began meeting last spring after enduring five years of up to 100 huge trucks per day five days a week traverse downtown streets en-route to a construction and demolition debris (C&D) dump at the east end of Partition Street.
About 30 residents met September 28 at the Rensselaer public library to share information and intensify their campaign to have the trucks removed from downtown.
Whether residents will demand a closure of the dump located adjacent to the new Rensselaer public school building remains to be seen, but those at the late September meeting were unanimous they want the trucks removed from Broadway and Partition Street.
Partition Street contains a steep up hill heading east from the Hudson River; the hill peaks at the Third Street intersection and then has a steep downhill. Up to 100 trucks per day cross the hill in both directions five days a week.
Many Partition Street houses are located close to the street. Residents are outraged at the huge volume of trucks, that they begin coming over the hill at 6:30 a.m., the noise, exhaust, dust, dirt, vibrations, and falling debris, and are concerned about their physical and mental health. To experience this huge volume of truck traffic 250 days a year is extremely stressful. They are furious that both state and city officials seem to not care about them.
The Partition Street hill is easily visible from the river-facing windows of the top floors of DEC state headquarters at 625 Broadway in Albany.
Rensselaer residents and colleagues took a truck census on Partition Street June 9 from 6:20 a.m. to 4:10 p.m. and counted all the trucks that drove east up Partition Street and through the intersection at Third Street.
Ninety-nine (99) tractor-trailer trucks went east up the Partition Street hill and own the other side. Ninety-six (96) returned in the opposite direction. One 22-wheeled truck carried an earth mover in its trailer on the way in and had an empty trailer on the return trip. Four (4) tractor-trailer tanker trucks made the round trip. Ninety-four (94) other tractor-trailer trucks went over the Partition Street hill toward the dump. With the exception of one or two ten-wheeled vehicles, all the others had 18, 22, 24, or 26 wheels.
The first truck went east up the hill at 6:31 a.m., nineteen (19) trucks went by within ten minutes, and twenty-seven (27) during the first hour. The final east-bound truck went by at 3:53 p.m.; the first returning truck went by at 7:15 a.m. and the final one at 4:10 p.m.
One member of the group examined the 2012 dump permit and determined that the EIS contained no diesel exhaust assessment. The permit also requires trucks to be fully covered both ways. The June 9 truck census determined about ten percent of the trucks going into the dump were not fully covered and at least forty (40) coming from the dump were uncovered.
The residents are still loosely organized and have yet to adopt a group name. Additional meetings are sure to be held in October. For more information or to help out, contact me at tomellis107@gmail.com or 518-453-8874.


North America release for Longing Nights by Tiago Leão and Peyote by Omar Flores Sarabia.
Both titles will be available in DVD and VOD for the northern american market, thanks to the US distribution company Breaking Glass Pictures.
DVD releasing for Longing Nights is scheduled on November 5th.
DVD releasing for Peyote is scheduled on November 19th.


text:
Q: Add a contentEditable=true to every 2nd TD on Button Click wit jQuery I have a table like this:

                    Fon:
                    <?php echo $row[1]; ?>

                    Fax:
                    <?php echo $row[2]; ?>

                    E-Mail:
                    <?php echo $row[3]; ?>

How can I add a contenEditable=true to every 2nd td on button click with jQuery?

A: You can do it like,
$("button").click(function(){
   $("table > tbody > tr > td:last-child").attr("contentEditable","true");
});

Since the td element that you are targeting is a last child you could use :last-child selector at this context. Also tbody should be the immediate child of table not tr.
DEMO

redpajama_set_name: RedPajamaStackExchange


Shelter for Indians, possible site of lost train robber gold, and a name that perhaps raises size expectations too high. Tour highlights include formations named Old Baldy and Fang.
I-10 exit 279, then follow the signs north for about seven miles. Don't turn on Colossal Cave Rd.
I felt the cave and the tour were fascinating and very affordable. The inside temperature is a comfortable 70 degrees year 'round and the walk and climbs are easy. The caves are off the beaten path but worth the trip and the tour. Also on site is a cute cafe that serves beer and wine.
When visiting Colossal Cave, be prepared to explore a dark, cramped, smelly beast of a cave. Long neglected and often abused, Colossal Cave is to ghetto as Carlsbad Caverns in New Mexico is to royal palace. Many of the formations in Colossal Cave have been damaged over the years -- tourists and vandals alike have left their scarring marks. As dead as this cave is it is a wonder it is still such a popular tourist attraction. That's my two bits.
This was an interesting warm cavern. Apparently it is a "dead" cave with no water, so it's the same temperature as outside, which was about 80 degrees when we were there. The tour guide we had was excellent, explaining that Colossal Cave had stalagmites, stalactites and stalaglights (which were the lighting fixtures). The usual train robbers etc. hid here and Indians were around before that.
But the most interesting part was the nearby ranch (part of the paid admission) which had a mini museum with some outside displays with hillbilly references. Probably not politically correct, but they were the best part.
Roadside Glowing Cocoon, Tucson, AZ - 10 mi.
Invisible Horses, Tucson, AZ - 13 mi.
Aircraft Boneyard Tour, Tucson, AZ - 15 mi.
25-Ton Tiki Head, Tucson, AZ - 23 mi.


text:
Phil Jackson photographer
New collective project - In Common
Call out for volunteers from the Bradford metropolitan district to have portrait taken at popular location.
I'm part of a group of photographers called @Aspect Collective who have come together to create a project looking at the effects of Brexit on people and place in the UK. Each group member will produce their own work and we'll bring it all together in an exhibition or a publication after the work has been completed.
I feel more and more that people are divided, angry and stressed out. I want to help people forget their problems and differences by connecting everyone back to nature.
Using photography, I want to show that we're all surrounded by and live in nature. That, even though we're all different and separate, nature sees us as the same. We're part of nature and all connected to each other through it. That nature is the very thing we all have in common.
We can all take comfort from the fact that everything starts and ends in nature and it's the only thing that really matters. Nature is cooperative and by reconnecting with nature we can start to cooperate too.
The images here show how the photographs will be taken, all at the same location at Shipley Glen – historically a very familiar and popular place for many people in the Bradford district to go to and connect back to nature. Whilst photographing, I'll also record the sounds of nature and each person saying their first name.
If you're over 18 and you'd like to be part of this project and have your portrait made at this great location, please contact me by email for more information and to arrange a FREE photo-shoot.
More in this collection...
photography contract success
redeye lightbox online
Copyright © Phil Jackson 2021

redpajama_set_name: RedPajamaCommonCrawl


In order to know the truth, we should look to the past to see a pattern that will confirm any teachings. In the teachings of the Far East, especially Hinduism, a period is described when many Great Souls were living on earth. They were called by many names such as Rishies, Masters, Mahatmas, Munies, etc. Their teachings, however, became a wealth of knowledge for future generations.
In their teachings a state of oneness with God (Atman) is explained. According to these teachings, that is the goal of spiritual endeavors. Whoever reaches this Oneness has reached the Goal.
However, for many thousands of years (12,000), few have realized this Oneness. The reason for this has been the 12,000 year period of human history when man fell further away from God (Truth). We are now at the point of return to the Godhead. That is the reason for such a great confusion in this conjunction between the end of the Old and Dawn of the New. However, the old (history) should not be completely disregarded. There are great lessons to be learned from it. The New indeed should be based on these lessons of the old. We are on the brink of discovering much great knowledge which can either be used for Good (God) or evil.
It is after the establishment of the Kingdom, for one thousand years, that humanity will learn the great lessons which have been revealed throughout this book (THOTH) and the Eternal Divine Path, "But the rest of the dead live not again until the thousand years..." (Rev. 20:5). Eventually through the formation of the Communities of Light and creation of the proper environment, one more time many Great Souls will reach the Great Oneness with their Essence which is God (Good). This is when many will attain salvation. This is the Goal of our teachings. They will reach Pure Consciousness. They will be with the Father as His Sons.
These Great Souls one more time will teach humanity the Goal of their lives, "To Be(come) Divine (One)." Then is the time that the Golden Era will dawn and one more time, "The Sons of God" will be with man (At-Man).


text:
using System;
using System.Collections.Generic;
using System.Linq;
using System.Web;

namespace Inventory_Management_System.Models.Product
{
    public class SparePart : Product
    {
        public SparePart(int amount, Label label, Price price, Location location)
            :base(amount, label, price, location) { }

    }
}


text:
Salisbury 1°c
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STANTON HARCOURT PARISH (30MPH SPEED LIMIT) ORDER 20**
22nd June 2017 to 22nd July 2017
OXFORDSHIRE COUNTY COUNCIL (STANTON HARCOURT PARISH) (30MPH SPEED LIMIT) ORDER 20**
NOTICE IS HEREBY GIVEN that Oxfordshire County Council proposes to make the above order under the Road Traffic Regulation Act 1984 and all other enabling powers. The effect of the order, as a result of the development of land adjacent to Blackditch, Stanton Harcourt is to extend the 30mph speed limit on Blackditch westwards by 30 metres, in place of the current unrestricted (60mph) limit. The existing Oxfordshire County Council (Stanton Harcourt Parish) (Restricted Roads) Order 2013 will be revoked/replaced. Documents giving more details of all of the proposals are available for public inspection online by visiting: https:Hconsultations.oxfordshire.gov.uk, or in person at County Hall, New Road, Oxford OX1 1ND, between 8.30am & 4.30pm Monday to Friday; and at West Oxfordshire District Council Town Centre Shop, 3 Welch Way, Witney, OX28 6JH, from 9am to 5.30pm Monday to Thursday, and from 9am to 5pm Fridays. Objections to the proposals and other representations specifying the grounds on which they are made may be sent in writing to the address below (or via the web address above) by no later than 21 July 2017. The Council will consider objections and representations received in response to this Notice. They may be disseminated widely for these purposes and made available to the public.
Traffic Regulation Team (ref.CM/12.6.362), for the Director for Infrastructure Delivery, Oxfordshire County Council, County Hall, New Road, Oxford, OX 1 IND.
County Hall , New Road , Oxford , Oxfordshire , OX1 1ND
online@oxfordshire.gov.uk http://www.oxfordshire.gov.uk/ 01865 792 422
Department for Transport TOWN AND COUNTRY PLANNING ACT 1990 The Secretary of State gives notice of the proposal to make an Order under section
Goods Vehicle Operator's Licence Harry & Sons Haulage Ltd Of: 86 Thresher Drive Swindon SN25 4AG is applying for a licence to use: Chelworth
Goods Vehicle Operator's Licence Quick Road Transport trading as QRT of 17 Mackmurdo Avenue SN25 2TE Swindon is applying for a licence to use
Goods Vehicle Operator's Licence Filipe Armando Santos Mendes trading as FMT Logistics Ltd of 7 Chudleigh, Freshbrook, Swindon SN5 8NQ is
Housing Act 1985 as amended by the Housing Act 2004 ("the Act") NOTICE PURSUANT TO SCHEDULE 5, PARAGRAPH 13
Housing Act 1985 as amended by the Housing Act 2004 ("the Act") NOTICE PURSUANT TO SCHEDULE 5, PARAGRAPH 13 (the "Notice") In respect of a
Housing Act 1985 as amended by Housing Act 2004 ("the Act") NOTICE PURSUANT TO SCHEDULE 5, PARAGRAPH 13 AND SCHEDULE 5A PARAGRAPH 2(2) (the "Notice")
Housing Act 1985 as amended by Housing Act 2004 ("the Act") NOTICE PURSUANT TO SCHEDULE 5, PARAGRAPH 13 AND SCHEDULE 5A PARAGRAPH 2(2) (the
HISTORIC CHURCHES COMMITTEE FOR THE DIOCESES OF SOUTHWARK, ARUNDEL & BRIGHTON, PORTSMOUTH, PLYMOUTH AND CLIFTON PRESS NOTICE
HISTORIC CHURCHES COMMITTEE FOR THE DIOCESES OF SOUTHWARK, ARUNDEL & BRIGHTON, PORTSMOUTH, PLYMOUTH AND CLIFTON PRESS NOTICE Application
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Notice Estate of Elizabeth Christina Abbott Notice Pursuant to section 27 of the trustee act 1925 Any person having a claim against
LICENSING ACT 2003 MAJOR VARIATION An application has been made to Wiltshire Council to vary a premises licence under section 34 of the
Notice effective from Fri 2 Mar 18 to Sun 1 Apr 18
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Cynthia Wynn-Jones (deceased)
Cynthia Wynn-Jones (deceased) Notice is hereby given pursuant to Section 27 of the Trustee Act 1925 that any persons having a claim against
ANTHONY CHARLES TYRRELL (Deceased)
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Notice effective from Tue 22 Jan 19 to Thu 21 Feb 19
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Inkubatori i sušnice | Analysis d.o.o.
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Microbiological incubators are designed for maximized sample protection – Safe. Easy. Efficient. Successful incubation is dependent upon the environmental conditions. As such, you need to trust that your valuable samples are maintained in a safe and efficient manner.


Meeting in New York with the author of some of the most acclaimed books in recent years. In addition to his last work (The Assault on the Beauty of Italy with Sergio Rizzo), he presents the multimedia show The Horde (L'Orda): Stories, Songs, and Images of Italian Immigrants with La Compagnia della Acque, directed by Gualtiero Bertelli.
Funding to publishers is cut in half – but it only applies to Italian newspapers abroad. History repeats itself. Neglect and upheaval, Italian-style? Those newspapers affected include America Oggi in the U.S., La Voce d'Italia in Venezuela, Gente d'Italia in Uruguay, Il Corriere Canadese in Canada, Il Globo in Melbourne, and La Fiamma in Sidney, Australia. All are in danger of folding.
A new work entitled, Corriere 1901, has been published by the Corriere della Sera foundation, edited by Renata Broggini, about a little explored chapter in Italian history, Italian emigration to Canada.
NYU's Casa Italiana "Zerilli-Merimò". A review of the multi-media performance of Compagnie delle Acque, a socially committed musical quartet of piano, guitar, accordion, and vocals, interspersed with a sensitively accurate, historical narrative written by Gian Antonio Stella.


text:
New York, NY, The Bottom Line
John Entwistle, Sunday, 08. November 1987
Shakin' All Over
See Me Feel Me
Dave Chmela: Vocals
Mark Hitt: Guitar
Jack Hotop: Keyboards
Steve Luongo: Vocals, Drums
Got a set list including these songs: "Song from Rat Race Choir, Song from Lezy West, Song from Lezy West, Summertime Blues, Pinball Wizard, My Wife, 5.15, Boris The Spider, Bargain, Shakin' All Over, My Generation, See Me, Feel Me, Sparks, Won't Get Fooled Again, Twist and Shout, Too Late The Hero." It's not confirmed, because it was recorded from the radio and the band didn't play Entwistle solo stuff during this tour. Any help is welcome!
Fanreports
Brian Cantaldi
I was listening to the radio in NYC that day when they mentioned that John Entwistle would be performing one song "Summertime Blues" at the New York Blood center for all the people who came out to give blood that day. And if I remember correctly, the only way one could get a ticket for the show at "The Bottom Line" that evening was to come out and give blood.
Greg S.
I was lucky enough to attend this show ... and yes as Brian said, you had to donate a pint of blood to get a ticket. My roomate Charlie P. and I went down to the blood bank this day after a late night out. At the time Howard Stern was in his earlier years at the radio station 92.3 K-Rock which sponsored the event. Some of his crew were there. We met "Babba Booy" Boy Gary up front at the door and then listened to Fred Norris' band play while we were waiting to get our veins tapped. After we gave our pint, we were given tickets to the show, plus a t-shirt. It was a fun show. Imagine a couple of hundred people who just gave blood, then started drinking heavily...
New York, Bottom Line (0:54:27, CD-R)
1987-11-08 New York, NY (0:56:12, Torrent)
List John Entwistle 1987
John Entwistle in New York, NY
08.03.1975: Academy of Music
08.11.1987: The Bottom Line
02.12.1987: The Ritz
13.07.1995: Radio City Music Hall
21.01.1996: Tramps


text:
Das Schloss Ansemburg in der gleichnamigen luxemburgischen Ortschaft Ansemburg der Gemeinde Helperknapp ist ein Schloss im Stil der Renaissance und wurde zwischen 1639 und 1647 von dem Hüttenbesitzer Thomas Bidart im Tal der Eisch errichtet. Sein Nachfahr Lambert-Joseph de Marchant vergrößerte es im 18. Jahrhundert. Um das "neue Schloss" nicht mit der auf einem Berg gelegenen älteren Burganlage von Ansemburg zu verwechseln, wird das Schloss oft als  bezeichnet. Burg und Schloss zählen zum "Tal der sieben Schlösser", dem Motto, unter welchem für das Eischtal touristisch geworben wird.

Der im französischen Stil angelegte Barockgarten des Schlosses wurde mit EU-Finanzhilfe renoviert und ist öffentlich zugänglich. Das Schloss selbst ist seit 1986 Eigentum der japanischen Religionsgemeinschaft Sukyo Mahikari und nicht zu besichtigen.

Weblinks

 Fotos vom Schloss und Park in Ansemburg

Einzelnachweise

Ansemburg
Monument national (Luxemburg)
Bauwerk in Helperknapp
Renaissancebauwerk
Ansemburg

redpajama_set_name: RedPajamaWikipedia


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After back to back losses at Lord's, you'd think team India would get a break but unfortunately no! Social media wasn't kind after the two losses and the frenzy got crazier when the BCCI posted an image of the lunch menu Team India was having.
When the fans saw the third dish on the menu titled as "Braised Beef Pasta". This did not sit well with the Indian fans. The menu was the same for both teams and the decision of what each player wants to eat was left up to the player. But still, the fans were upset and expressed their feelings on social media.
The fans were not happy with the inclusion of beef on the menu offered to an Indian team. Believing both teams should've been offered different menus as to respect their cultures. Some people tried to stay calm while expressing their anger while others didn't.
Some fans even tried reasoning with the crazy frenzy as this was an English menu being served in England. The inclusion of beef was for their players, so the outrage was uncalled for.
Post lunch saw England blow up the scoreboard with a huge 189 runs by the duo of Chris Woakes and Jonny Bairstow. The match ended with Woakes unbeaten, having scored a century and even singlehandedly outscored India with 120 runs. His partner Jonny Bairstow was able to get his century as he got out after 93 runs.


There is complete opacification of the mastoid air cells without evidence of septal erosion. On the left side, the external auditory canal is patent. The tympanic membrane is minimally thickened. The middle ear cavity is clear. The ossicles are intact.


text:
'An Old Maid's Triumph' by George Gissing: Short Story Analysis
April 28, 2020 By fizapathan 2 Comments
https://www.insaneowl.com/wp-content/uploads/2020/04/An-Old-Maids-Triumph-by-George-Gissing-Short-Story-Analysis_en-US-Wavenet-A.wav
We remember George Gissing because of his most famous work New Grub Street. I especially think of him as a writer who blends hard work with misery in his written works. He was a man who had faced hardships, and this is shown clearly in this short story which to me is more of a character sketch, as my second favorite writer Ruskin Bond (the writer from the hills of Mussoorie), would say in his essays. 'An Old Maid's Triumph' is a work that is penned in a form of a subtle message to the readers of Gissing's time about one of his favorite topics, which is women suffrage and feminism. Miss Hurst, in this story, has served as a governess to young people for a whole thirty-year-period. She is the epitome of austerity, self-refinement, a disciplinarian, and a person who enjoys a sort of 'somber cheerfulness'. She is basically what everyone in today's world would consider as being an anomaly, exactly how the Victorian era saw its single and unmarried women. Since Miss Hurst has not married, she is deemed as a bother to the society in which she lives. Indeed, in her time, there were institutions present to cater to single independent women. Even her soon to be ex-employers the Fletchers mention this in the first part of the sketch. Gissing in this sketch paints such a stark picture of early Victorian feminism that a reader wonders whether being a scrupulous miser, given to extreme forms of self-denial throughout a thirty- year career, and being stingy, is a 'triumph' or not.
Miss Hurst was in the current situation fifty-eight years of age. She had never married. She had always been one of those women who consider themselves to be the epitome of 'upright' behavior. She now is too old to teach the young and so was to retire. This is so ironic and so different from women's situation today, or is it? Even today sexism and gender bias are present in its urban as well as rural forms. A woman is only regarded as worthy to be taken note of in certain societies if she is 'attached' to a man, the 'patriarchy' in any way. A woman is either identified as someone's sister, daughter, wife, or mother. But what about people like Miss Hurst who seem to have had no one to call her own, what then? Do we stop respecting their status in society? Was this situation only predominant in Victorian England or is it raising its ugly hood even in our day and time? Single women are not looked on with respect if they are promiscuous. Single men on the other hand when they are promiscuous are seen as sexy men or very attractive; the more fun they have, the more does society applaud them. Not so with women. Not so with Miss Hurst. Note to what level she has deprived herself of comforts for the past thirty years, such as traveling to places she liked, books, and comfortable lodgings to live in. She bore it all patiently because she wanted to retire as an independent woman with an annual income of fifty-two pounds, which is 20 shillings a week back then. Was this freedom or was it the cage that Victorian society has placed around single-independent women? Notice in the sketch how she longs to be independent of others, indicative that she didn't have the best of times as a governess. Would 20 shillings a week do for a week? Would it? Notice her miserly tendencies where she even never donated a lot to the church coffers or where she stayed in horrible lodgings. She is simple, homely, but not a spend-thrift. She saves for her retirement devotedly, fifteen pounds a year. She is wise enough to know her capabilities and shortcomings; she has no pride in her or any misconception about herself. She is aware that she won't be able to meet the demands of a new generation of young students and so is ready to retire. She feels doubly rewarded by the cheque gifted to her by the Fletchers for her service. They look upon her with pity. They see her as a lowly creature, but she has self-esteem and confidence in her faculties. There is so much to admire about Miss Hurst, the governess, and yet we wonder: was her life a life? Saving up every pound for a life to live again, saving every shilling. Maybe it is freedom. At least she is independent and can look after herself which in my mind makes Miss Hurst, the woman who has repressed all her desires throughout her life, as a winner. This is certainly a 'triumph' for a single woman but, it need not be this way. We have retained a lot of our fickle-minded and very sexist proprieties concerning women, especially single independent women. I have always been proud of being a single independent woman devoted to teaching, writing, and reading. I have a lot of views where this story is concerned but the most important of them happens to be that: 'everyone, it's high time you stop telling women what they are supposed to do and not do.' We are capable of looking after ourselves and we don't need you, period!
Here are some takeaways from today's very thought-provoking and highly feminist sketch:
The level of repressed feelings and desires which brings out the empathy of the wiser of us and the sympathy of the fools among us.
The sad fact in the Victorian period that a hundred pounds saved by a single man would have yielded more to him than for a single woman. This troubled Miss Hurst a lot in this story, and you should also be troubled by it. So, then on whose side was George Gissing on when he made the statement about the hundred pounds?
She considers herself not to be a 'beauty' but a 'homely' person. It's more than obvious that this is far from the truth because even in today's society, a woman who is not married is always considered not to be a beauty or is deemed very 'homely'. It's like you are trying to describe a piece of furniture than a human being!
Miss Hurst considers the reason for her having saved so much money in the past thirty years is because of 'old fashioned piety', indicative of a very austere lifestyle choice.
You can see throughout the story of a life spent only to save for a rainy day, quite the life George Gissing had lived in his days.
The title is suggestive that she is a winner, but by calling Miss Hurst an 'old maid' when she was only fifty-eight years old is highly evocative of many things. It indicates a sort of slap-stick 'sick' humor to us as well as down-right meanness. Very indicative that even when women 'win' they are still mocked by society.
Her major fear in life was basically about destitution – being left alone at the mercy of others.
I love the works of George Gissing. He, according to me, is one of the most underrated writers of the Victorian era. I've read a lot of his works and will review them for you in due time. This short story or rather character sketch was a thought-provoking read indeed. If you are interested in more book reviews, short story analysis, and author interviews, then you can visit my blog insaneowl.com. If you are interested in buying my books, then visit my website fizapathanpublishing.us or fizapathan.com. Happy reading to you always!
Filed Under: Analysis, Short Story Analysis Tagged With: analysis, Fiza Pathan, George Gissing, short story analysis
robertawrites235681907 says
This is an excellent analysis, Fiz, of not only this short story, but the situation of unmarried Victorian women. The description of Miss Hurst is one that often features in books of that time. The books by the Bronte sisters feature governesses and their miserable lot in life. Even children's books like What Katy Did? feature unmarried women in a austere, strict and negative light.
fizapathan says
Thanks Ma'am for the feedback. 🙂


We love seeing our centres in the news! Recently Guardian Early Learning – Mulgrave was featured in a wonderful article in the Monash Leader.
Children will be able to let their imagination run wild at a Mulgrave learning centre.
Guardian Learning Centre opened its doors in Mulgrave last month and it's already racked up more than 40 enrolments.
Centre Manager Alyce Mardell said children were creating new friendships.
"There are positive relationships between the children and it's so great to see them become more resilient," Ms Mardell said.
She said children enjoyed the centre's open plan learning curriculum.
"The children are having a sensory experience with creative activities and playing with loose parts including wheels from bikes," she said.
Ms Mardell said parents were impressed by the centre. "Parents are really happy with how their children are responding to learning at the centre," she said.
She said the variety of age groups at the centre was giving children a positive experience.
"It's an amazing centre with multi-aged learning. We have one space dedicated to birth to two years and a second space for two to five year olds," Ms Mardell said.
To learn more about this early learning centre in Melbourne, head here.


text:
Microlinkinc
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© 2017 Microlinkinc. All rights reserved


text:
Invest-With-Purpose advises institutional and high-net-worth investors who seek double-bottom line initiatives through investments in companies, organizations and financial instruments with the intention of generating environmental impact while achieving a financial return.
Shelley Goldberg
Shelley Goldberg, Principal & Founder, has served as a macroeconomic strategist, trader, and investment advisor for multi-asset, top-down portfolio managers.
She managed her own energy fund, G3 Capital Partners, LLC, and ran the largest fund-of funds devoted to natural resources with Swiss private bank, Union Bancaire Priveé. She has also served as a trading and investments strategist for Brevan Howard Asset Management LLP, a multi-billion- dollar hedge fund manager, and for Roubini Global Economics.
Since 2013 she has been channeling sector-specific knowledge toward leadership roles in impact investing with the goal of monetizing developments in environmental sustainability. She also has had significant international experience.
Currently a writer for Bloomberg Prophets,, and Investopedia, she publishes frequently on resource sustainability topics and is often invited to speak and serve on panels at industry conferences. She is featured on television and online forums as an expert in commodities and impact investing.
Shelley graduated from Tufts University, earning a Bachelor of Arts degree in political science and Spanish and received a Master of Business Administration from New York University Stern School of Business in finance and international business.


text:
The stigmatisation and denial of mental illness in athletes
Thomas L Schwenk
Department of Family Medicine, University of Michigan Health System
http://dx.doi.org/10.1136/bjsm.34.1.4
A patient asks for your help with fatigue, which she has been experiencing for the past several weeks. She says she is having increasing difficulty carrying out her daily responsibilities, lacks motivation and energy, and is irritable and discouraged. She reports trouble sleeping, is often late to her scheduled responsibilities, is not performing as well as previously in her job and other roles, and has had several minor injuries and mild headache and back pain.
If you are a family doctor or general practitioner, you would suspect that this woman has a major depressive disorder (MDD), although the likelihood that a depressed patient would actually present her symptoms in such a clear and obvious fashion is extraordinarily low. However, if you are a sports doctor and the patient is a competitive athlete, you may label her as being burned out, overtrained or stale, depending on your personal nomenclature for this problem. You may carry out a routine battery of laboratory tests, often including measuring a variety of immunological, hormonal, and haematological variables, consult with the athlete's coach about a modified training schedule, and suggest the athlete consider a trial of rest which may even include cessation of all training and competition. On the other hand, the primary care doctor would recommend some combination of counselling and/or medication for the non-athlete patient, with an active treatment programme designed to maintain the patient's roles and responsibilities.
Why the dramatic difference in approach to labelling, diagnosing, and treating what appears to be the same disease? Three issues stand out when attempting to answer this question.
Despite the known beneficial and protective effect of exercise on mental illness,1 athletes are still susceptible to depression and other mental illness, although perhaps at a lower prevalence than the general population.2
Athletes may be even more susceptible to underdiagnosis and inadequate treatment of depression and other mental illness than are non-athletes,3 particularly for problems that are related to athletic training and performance and are viewed from a narrow physiological rather than a broader biopsychosocial perspective.
The current conceptualisation of and approach to mental illness in athletes is fraught with stigmatisation, denial, and dichotomous paradigms of "psychological" versus "physical" disease, which are inaccurate, unhelpful, and deprive the athlete of effective care.
The similarities between "depression", as a psychiatric disease, and "overtraining", as a consequence of overly intense athletic training, are remarkable both for their number and strength, as well as for their denial by many sports doctors and psychologists. Current nomenclature defines overreaching as a short term decrement in performance in which recovery may take a few days to weeks, usually through a temporary and modest decrease in training load.4 Overreaching is the athletic equivalent of an adjustment reaction, grieving, or a more minor depression in which psychosocial loss or stressors lead to a temporary decrement in social or work function. Overtraining (OT) is defined as a long term decrement in performance,4 usually with various physiological, immunological, hormonal, and metabolic changes that are remarkably similar to those in MDD, the only difference being the nature of the role dysfunction: athletic performance in the case of the overtrained athlete, social, cognitive, and work in the case of the depressed patients.
The similarities between OT and MDD extend to immunological effects, in which natural killer cell and humoral immunological parameters are suppressed in both, leading to an increased risk of upper respiratory infection. In fact, the J shaped curve relating exercise to immunological function5 is equally appropriate to describe the relation between exercise and mood, in which both too little and too much exercise correlate with increased levels of irritability and depression, and moderate exercise is associated with the lowest level of mood disturbance.
Both OT and MDD are related to central fatigue, with similar alterations in neurotransmitter levels and function.6 Elevated and unsuppressed cortisol secretion are found in both OT and MDD.7 Both depressed patients and overtrained athletes have decreased sensitivity to noradrenaline (norepinephrine) and dopamine, decreased levels of growth hormone, lutrophin, β-endorphins, and thyrotrophin, and increased levels of corticotrophin-releasing hormone leading to hypercortisolism. Similar changes may also occur in both MDD and OT in brain monoamines, including tryptophan and serotonin.6 These intriguing similarities are enhanced by the highly anecdotal, but common and often successful, use of serotonergic antidepressants in overtrained athletes. These athletes report both early and delayed benefits in their energy, motivation, and training similar to those reported by depressed patients in mood, energy, and role function.
Perhaps the most telling comparison of OT and MDD is in the denial and avoidance of each diagnosis by the respective patient groups. There is a common response that the disease represents a personal failure, a loss of willpower, and a defect in character, and is a problem of which one is ashamed and hides.8 Patients reject the implications of loss of control, diminished vitality, and inadequate coping skills that both diagnoses carry, and often vow to work harder so as to overcome their inadequacies, which usually leads to even more severe symptoms and dysfunction. Athletes with OT are particularly susceptible to harm from these myths because of their heightened levels of goal orientation and task mastery.
In summary, competitive athletes are special in many ways, including a high level of goal orientation, a commitment to intense physical training and competition, and a decreased risk of depression and possibly other mental illnesses. But the risk of depression is not eliminated, and may be reflected, at its most severe level, in what sports doctors and scientists currently call OT. MDD as a neuropsychiatric disorder causes profound chemical and role dysfunction that is remarkably similar to the effects of OT in athletes, the major difference being that the role dysfunction in athletes relates to the major role in their life—athletic training and performance. Most importantly, the stigmatisation of and denial by athletes with OT, similar to the behaviour of patients with MDD, are preventing sports doctors and scientists from a proper study and treatment of overtrained athletes. OT deserves a broader, more enlightened, biopsychosocial approach if we are to help athletes with this devastating problem.
Paluska S, Schwenk TL. Physical activity and mental health: current concepts. Sports Med 1999;in press.
Sime WE. Exercise in the prevention and treatment of depression. In: Morgan WP, Goldston SE, eds. Exercise and mental health. New York: Hemisphere Publishing, 1987:145–53.
Hirschfield RMA, Keller MB, Panico S, et al. The National Depressive and Manic-Depressive Association consensus statement on the undertreatment of depression. JAMA1997;277:333–40.
Kreider RB, Fry AC, O'Toole ML. Overtraining in sport: terms, definitions, and prevalence. In: Kreider RB, Fry AC, O'Toole ML, eds. Overtraining in sport. Champaign, IL: Human Kinetics, 1998:viii.
Nieman DC. Exercise, upper respiratory tract infection, and the immune system. Med Sci Sport Exerc1994;26:128–39.
Keizer HA. Neuroendocrine aspects of overtraining. In: Kreider RB, Fry AC, O'Toole ML, eds. Overtraining in sport. Champaign, IL: Human Kinetics, 1998:145–67.
Keizer HA, Kuipers H, deHaan J, et al. Effect of a 3-month endurance training program on metabolic and multiple hormonal responses to exercise. Int J Sports Med1987;3:154–60.
Simon GE, VonKorff M, Piccinelli M, et al. An international study of the relation betwen somatic symptoms and depression. N Engl J Med1999;341:1329–35.
Copyright 2000 by the British Journal of Sports Medicine


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As Investigations Swirl, Bill de Blasio Sticks to His Talking Points
When it comes to the several criminal inquiries swirling around his City Hall, Mayor Bill de Blasio has clearly found his talking point—and he's sticking to it.
By Jillian Jorgensen • 05/03/16 3:44pm
Police Commissioner Bill Bratton and Mayor Bill de Blasio today.
When it comes to the several criminal inquiries swirling around his City Hall, Mayor Bill de Blasio has clearly found his talking point—and he's sticking to it.
"I'm confident of the fact that we handled everything legally and ethically, that we did the things I wish more people would do in public service—we sought guidance from an ethics board, we followed that guidance and disclosed everything we did," Mr. de Blasio said today, fielding questions from reporters in a police precinct in a far-flung neighborhood of Queens.
Some of those words seemed to come up over and over: "confident," "legally," "ethically," "disclosure." Mr. de Blasio endeavored to look non-nonplussed by the fact that investigations into his administration and campaigns are stacking up so quickly it will soon be impossible to count them on a single hand.
There's the investigation into his State Senate fundraising—subject of a leaked state Board of Elections memo and several subpoenas. There's the investigation into corruption at the NYPD, where officers accepted gifts from two business who also donated handsomely to Mr. de Blasio. Then there's the look into Rivington House, a former AIDS hospice where the city lifted a deed restriction that will ultimately allow for the development of lucrative condos at the site, where developers were at times represented by a lobbyist tight with Mr. de Blasio. And there's also inquiries into Mr. de Blasio's non-profit, the Campaign For One New York, and whether donors got favors from City Hall.
In response to every one of these inquiries, Mr. de Blasio has argued he's followed the law and the advice of his attorneys—and, in soliciting donations to State Senate candidates or using a non-profit to collect hefty donations for his priorities, that he's doing things other politicians do but is, for some reason, being singled out.
"I don't conjecture. I can say, I think there should be a fair standard. I think there should be a consistent and fair standard," Mr. de Blasio said. "We're convinced that things were done legally and appropriately, and I think it's a very important fact when someone discloses voluntarily. It suggests comfort that they have that they're doing things the right way."
Mr. de Blasio's campaign has indeed voluntarily disclosed the donors to his non-profit, something that is not required by law and that others have not chosen to do. But whether it was appropriate to accept the donations—which came from unions who have contracts with the city, real estate firms with interests in re-zonings and others matters, activists calling for a horse carriage ban and others—has been questioned.
Last night, NY1 reported on a letter from the Conflicts of Interest Board advising Mr. de Blasio not to solicit any donations from entities that have matters "pending or about to be pending" before the city. But in a story last year, Politico New York reported that 62 percent of donors had business or labor contracts before the city, or were trying to get a project approved—including the union DC37, which was negotiating a contract, and a manufacturer of scented garbage bags who eventually got a contract to provide them to the city.
Mr. de Blasio would not offer an explanation of how accepting donations from those people squared with COIB's advice, other than to say everything was reviewed by his attorneys.
"This is a very important thing to get the definitions right on, which is why we went to the Conflicts of Interest Board, got a definition on it, and then had lawyers determine how to follow that definition," Mr. de Blasio said.
The mayor repeatedly referred to how frequently he spoke with lawyers about donors and the fundraising issues now under the microscope—which of course, to some, might raise the question of whether he or his team suspected they were running up against the law. (When a reporter posited that the legal advice the mayor had gotten may have been up against the line, which would seem to be a given since it's led to formal criminal inquiries, Mr. de Blasio accused him "editorializing.")
The mayor has argued that there are problems in the laws governing campaign finance—but said that even if he doesn't like the current rules and thinks the laws should be change, he will play by them as long as his enemies are. So, while he's decried the role of money in politics and called for publicly funded campaigns and the overturning of Citizens United, he's solicited large donations to county committees that are then passed on Senate candidates, who would not legally be able to accept those donations directly. And he set up his non-profit to take larger donations than he could accept to his re-election account, though he repeatedly singled himself out for praise for taking the extra step of disclosing those donors.
That argument—that the conduct might be ugly but it isn't against the law, and everybody else does it—might sound familiar: it was what former Assembly Speaker Sheldon Silver's lawyers said when U.S. Attorney Preet Bharara indicted him on accepting kickbacks disguised as outside income. (It is not illegal to earn outside income while serving in the State Legislature; many pols do.) Mr. Silver was convicted and was sentenced to 12 years in prison today.
Did Mr. de Blasio think Mr. Silver was unfairly targeted?
"I don't know the details of the case," Mr. de Blasio said of the trial, which consumed the city's press corps for weeks and was closely watched by politicians and lawyers. "I think it's a tragedy what happened, I think it's exceedingly sad, but again I'm not a lawyer. I don't know the detail of the case. I think it's clear something was done wrong."
But does the mayor worry that his argument might remind some New Yorkers of Silver's defense?
"No. I think these are entirely different matters," he told the Observer. "And first of all, to the credit of everyone involved in this discourse, no one's talking about anyone lining their pockets—which unfortunately has happened in way too many instances. The thing we're talking about is what we were trying to achieve working with outside colleagues, things like pre-k for all, affordable housing programs, a Democratic State Senate that we thought would better serve the people of New York State and New York City. So I think that's apples and oranges to begin with."
Filed Under: Politics, Cyrus Vance Jr, Campaign Finance, Preet Bharara, Fundraisers, Bill Bratton, Bill Bratton, state senate, Bill de Blasio, Bill de Blasio, New York, News & Politics
SEE ALSO: New York State May Soon Have the Highest-Paid Lawmakers in the US


> >> with more energy.
> > doubt as long as there are new ideas and people willing to try them.
> > have too many cycles to spend on the project.
> > to measure the expected increase in activity?
> > better than the mentioned earlier attempts at growing the community?
> > such efforts are working?
> > activity and diversity.
> This is exactly what we did for the last months (years, actually).
> Give it yet more time.
> another few months" when it failed for the past years.
> Is this the extra-bonus IPMC time?
> The much I'd love to see Chukwa fly, this is getting ridiculous.


We are looking for an ambitious and motivated Telesales Executive for a learning technologies company in Tortworth, which is just north of Bristol.
Please note: Due to the rural location you must have a full driving licence and your own transport.
Our client supplies large corporate and Government customers with their Learning Management System (LMS) and supporting digital training design and creation services.
As a Telesales Executive you will research, identify and contact potential international LMS reseller partners, supporting them through the process to sign-up as approved resellers. You will report directly to the CEO and be based at prestigious and picturesque offices near Thornbury.


A lesson on living standards and exchange rates that will work well in the current economic climate.
It's AS-level or GCSE standard, but could easily be adapted for younger pupils. I've used it with college students on the first year of the Btec National Diploma in Business.
3. What do you want the lesson to achieve?
This lesson helps pupils to understand fluctuations in housing markets, living standards and lifestyle differences, and helps them to hone their business skills.
Brief pupils that they have inherited a huge sum of money or have won the lottery. The amount is the same for each pair or group of pupils. They must invest the money in foreign property to a given specification (that is, number of bedrooms, bathrooms, garage and so on). You select the countries and allocate them.
The pupils go to a currency converter website and find out how much they get in local currency. They then visit various overseas property websites. Pupils will have fun searching around to get the best bargain and draw up a shortlist of value-for-money homes that meet the specification. They also need to research transaction costs - for example, local property taxes (the equivalent of our stamp duty). They present their best value property and compete for the title of "winner".
6. Why would you recommend this lesson to other teachers?
The success is in the enthusiasm of the pupils. Also, the follow-up activites are many and varied. For example, they could go away and research average wages in a certain country. This gives them a much better idea of what can actually be afforded. The exercise also maintains its value - unlike housing - through both boom times and slumps.
- Research the market first to find a good site. Rightmove has a foreign property search facility. Visit www.rightmove.co.uk.
- Build on the competitive side. This seems to come naturally as the pupils become mini estate agents.
- Draw out - or ensure the pupils draw out - the economic drivers that underpin the property market.
- World currency converter: www.xe.com.
- www.bbc.co.ukhomespropertybuying_ buyingapropertyabroad1.shtml - has a useful guide to the legal and administrative steps to buying abroad.
- www.pfeg.orgteaching_resourcesresourcesindex. html - offers a variety of teaching resources on personal finance.


text:
"""
 Copyright 2014 Werner Langenhuisen

   Licensed under the Apache License, Version 2.0 (the "License");
   you may not use this file except in compliance with the License.
   You may obtain a copy of the License at

       http://www.apache.org/licenses/LICENSE-2.0

   Unless required by applicable law or agreed to in writing, software
   distributed under the License is distributed on an "AS IS" BASIS,
   WITHOUT WARRANTIES OR CONDITIONS OF ANY KIND, either express or implied.
   See the License for the specific language governing permissions and
   limitations under the License.
"""

# -*- coding: utf-8 -*-

import threading
from websockets.websocket import Websocket

class WebsocketThread(threading.Thread):

    connected = True
    client = 0
    channel = 0
    details = 0
    server = 0
    websocket = Websocket()

    def __init__(self, channel, details, client, server):
        super(WebsocketThread, self).__init__()
        self.channel = channel
        self.details = details
        self.client = client
        self.server = server

    def run(self):
        self.connected = True

        msg = "Server: Device #{0} connected at {1}"
        print((msg.format(self.client.clientid, self.details[0])))

        self.websocket.do_handshake(self.channel)

        while self.connected:
            self.interact(self.channel)

    def stop(self):
        self.connected = False
        self.channel.close()

    def interact(self, channel):
        encodeddata = channel.recv(8192)
        data = self.websocket.decode_data(encodeddata)

        if data[2] == 8:
            msg = "Client #{0} closed connecting, bye!"
            print((msg.format(self.client.clientid)))
            self.channel.close()
            self.connected = False
        else:
            msg = "Received data from client #{0} saying: {1}"
            print((msg.format(self.client.clientid, data[0])))

            if data[0] == "hallo":
                response = self.websocket.encode_data(True, "hey browser")
                channel.send(response)


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本発明は露光装置及び露光方法に関し、例えば液晶表示装置を製造するための感光基板に大面積のパターンを露光する際に適用し得る。 The present invention is applicable when exposing relates exposure apparatus and an exposure method, for example, a pattern of large area photosensitive substrate for manufacturing a liquid crystal display device.
従来、感光基板に大面積のパターンを露光する際には、所望の面積に達するまで部分パターンを繰り返し露光していた。 Conventionally, when exposing a pattern of a large area on the photosensitive substrate, it was exposed repeatedly to the partial pattern until the desired area. 一方、液晶表示装置を製造するための感光基板は、近年大面積化が所望されている。 On the other hand, a photosensitive substrate for manufacturing a liquid crystal display device has recently large area is desired. このため露光装置に対しては、単位時間当たりの露光領域の拡大が望まれていた。 For this reason the exposure apparatus, the expansion of the exposure area per unit time has been desired. この単位時間当たりの露光領域を拡大するため、複数の投影光学系を備えた走査型露光装置が提案されている。 To enlarge the exposure area per unit time, the scanning exposure apparatus has been proposed which includes a plurality of projection optical systems.
この走査型露光装置は、複数の照明光学系が設けられており、それぞれの照明光学系から射出された光束でマスク上の異なる小領域(照明領域)をそれぞれ照明する。 The scanning exposure apparatus, a plurality of illumination optical system is provided to illuminate different small areas on the mask with light beams emitted from each of the illumination optical system (illumination area), respectively. 因みに、この走査型露光装置の照明光学系は、光源から射出されフライアイレンズ等を含む光学系を介して光量を均一化した光束を視野絞りによつて所望の形状に整形してマスクのパターン面上を照明する。 Incidentally, the illumination optical system of the scanning type exposure apparatus, to shape the light beam homogenizing the light intensity through the optical system including a emitted from the light source fly-eye lens or the like by connexion desired shape field stop mask pattern to illuminate the Menjo.
続いてこの走査型露光装置は、照明されたマスク上のパターン像を複数の投影光学系のそれぞれを介して感光基板上の異なる投影領域に投影して結像する。 Then the scanning exposure apparatus, forms an image by projecting each of the different projection regions on the photosensitive substrate through the pattern image on the illuminated mask plurality of projection optical systems. この走査型露光装置は、マスクと感光基板とを同期して、照明光学系及び投影光学系に対して走査して、マスク上のパターン領域の全面を感光基板上に転写する。 The scanning exposure apparatus, in synchronism with the mask and the photosensitive substrate, by scanning with respect to the illumination optical system and the projection optical system to transfer the entire surface of the pattern area on the mask onto the photosensitive substrate.
ところで、感光基板にマスク上のパターンを転写する際のレジストの露光量には適正値がある。 Meanwhile, there is a proper value in the resist exposure amount at the time of transferring the pattern on the mask onto a photosensitive substrate. 露光量は光源から射出された光束の照度と露光時間との積すなわち露光量=基板面上の露光照度×露光時間で表される。 Exposure is represented by the exposure intensity × exposure time on the product i.e. exposure amount = substrate surface between the illuminance and exposure time of the light beam emitted from the light source. 光源から射出された光束の照度は光源の輝度に比例して増減する。 Illuminance of the light flux emitted from the light source is increased or decreased in proportion to the luminance of the light source. また光源の輝度は、使用初期に最大であり使用時間に応じて減少する。 The luminance of the light source is reduced in accordance with the maximum and is used time used initially.
このため光源の輝度が大きい場合、上述の走査型露光装置は、露光時間を短くするため、マスク及び基板の走査速度を上げる必要がある。 If the luminance of this for the light source is large, the above scanning exposure apparatus, in order to shorten the exposure time, it is necessary to increase the mask and scanning speed of the substrate. これに対して、光源の輝度が小さくなると、上述の走査型露光装置は、感光基板上のレジストに対して一定露光量を得るように走査速度を下げる必要が有る。 In contrast, when the luminance of the light source is small, the above-described scanning exposure apparatus, should there to lower the scanning speed to obtain a constant exposure of a resist on the photosensitive substrate.
ところが、光源の輝度は製造誤差により一般的に不均一である。 However, the brightness of the light source is generally non-uniform due to a manufacturing error. また照明光学系及び投影光学系に対するマスク及び基板の走査速度は、制御系の特性により一般に上限が有る。 The scanning speed of the mask and the substrate relative to the illumination optical system and the projection optical system is generally the upper limit is present due to the characteristics of the control system. すなわち走査速度だけの制御によつて露光時間を短くするには限界が有る。 That limitation is present to reduce the by connexion exposure time control only the scanning speed.
このため、上限の走査速度によつて対応できない程に光源の輝度が大き過ぎると、上限の走査速度による露光時間と適正露光に必要な走査速度による露光時間との差分が過剰露光時間となつて、マスクのパターンを感光基板に正確に転写できなくなるという問題があつた。 Therefore, such the luminance of the light source is too large to the extent that can not be due connexion corresponding to the scanning speed of the upper limit, the difference is excessive exposure time and exposure time by the scanning speed required exposure time and proper exposure by the scanning speed of the upper connexion , a problem that the pattern of the mask can not be accurately transferred to the photosensitive substrate has been made.
本発明は以上の点を考慮してなされたもので、照明光学系に対する感光基板の走査速度の制御だけで露光量を適切値に調節できない程に光源の輝度が過大であつても、感光基板に適正な露光量を与え得る露光装置及び露光方法を提案しようとするものである。 The present invention has been made in view of the above, even if the brightness of the light source is filed excessive enough not to adjust the exposure to the appropriate value by controlling the scanning speed of the photosensitive substrate relative to the illumination optical system, a photosensitive substrate is intended to propose an exposure apparatus and an exposure method can provide a proper exposure amount.
かかる課題を解決するために、一実施例を表す図2に対応付けて説明すると、請求項1に記載の露光装置では、複数の超高圧水銀ランプ10からそれぞれ射出された複数の光束L6 〜L8 を光ガイド14によつて集光した後に光ガイド14によつて分割して得た複数の光束L1 〜L5 によつて、パターンが形成されたマスク上の互いに異なる複数の照明領域M1〜M5をそれぞれ照明する照明光学系2と、複数の照明領域M1〜M5に対応して配置された複数の投影光学系4A〜4Eとを有し、複数の照明領域M1〜M5のそれぞれの像を複数の投影光学系4A〜4Eのそれぞれを介して感光基板5上に投影する露光装置において、複数の超高圧水銀ランプ10が射出したそれぞれの光束L6 〜L8 を開口率で規制する複数のシヤツタ1 In order to solve such a problem, one will be described in association with FIG. 2 illustrates an embodiment, in an exposure apparatus according to claim 1, a plurality of light beams L6 emitted from a plurality of ultra-high pressure mercury lamp 10 through L8 Yotsute a into a plurality of light beams L1 ~L5 obtained by by connexion divided into the light guide 14 after have been conducted under condensing the light guide 14, a plurality of illumination regions M1~M5 different from each other on a mask on which a pattern is formed an illumination optical system 2 for illuminating each of a plurality of projection optical systems 4A~4E arranged corresponding to the plurality of illumination regions M1 to M5, each of images of the plurality of illumination regions M1 to M5 more in an exposure apparatus for projecting onto the photosensitive substrate 5 through the respective projection optical systems 4A - 4E, a plurality of shutter 1 which regulates multiple of each ultra-high pressure mercury lamp 10 is emitted a light beam L6 through L8 by an aperture と、光束L1 〜L5 の照度を検出する光検出素子21と、照度信号S1〜S5に基づいて、複数のシヤツタ12によるそれぞれの開口率と、複数の光束L1 〜L5 の照度とを対応付けて照度データS6として記憶するメモリ23と、メモリ23に記憶した照度データS6に基づいて、 光束L 1 〜L 5 の照度が所定値となるように、光束L 1 〜L 5 中の任意の光束成分を射出している超高圧水銀ランプ10が射出する光束L 6 〜L 8 を開口率で規制するようにシヤツタ12を制御する制御部22とを設けるようにする。 When a photodetector element 21 for detecting the illuminance of the light beam L1 ~L5, based on the illumination signal S1-S5, in association with each of the opening ratio of a plurality of shutter 12, and a luminance of the plurality of light beams L1 ~L5 a memory 23 for storing the luminance data S6, based on the illuminance data S6 which is stored in the memory 23, as the illuminance of the light beam L 1 ~L 5 becomes a predetermined value, any light beam components in the light beam L 1 ~L 5 injection to have extra-high pressure mercury lamp 10 to be provided and a control unit 22 for controlling the shutter 12 to regulate the light beam L 6 ~L 8 for emitting at the opening rate.
請求項2に記載の露光装置では、光ガイド14は、複数の光フアイバを束ねて構成されている。 In the exposure apparatus according to claim 2, the light guide 14 is constituted by bundling a plurality of optical fibers.
請求項3に記載の露光装置では、シヤツタ12は、光束L 6 〜L 8を通過させる開口部の開口率を制御して、光束L 6 〜L 8を規制する。 In the exposure apparatus according to claim 3, shutter 12 controls the opening ratio of the opening for passing the light beam L 6 ~L 8, to regulate the luminous flux L 6 ~L 8.
請求項4に記載の露光装置では、複数の投影光学系4A〜4Eの一部4A、4C及び4Eは、光軸がY方向に沿つて一列に配置されており、複数の投影光学系4A〜4Eの他の一部4B及び4Dは、光軸が複数の投影光学系の一部4A、4C及び4Eと平行に、かつ所定間隔をおいて一列に配置されており、Y方向とほぼ直交し、かつ感光基板5の面内方向にマスク3と感光基板5とを同期して走査する。 In the exposure apparatus according to claim 4, a part of the plurality of projection optical system 4A - 4E 4A, 4C and 4E, the optical axis is disposed along connexion a line in the Y direction, the plurality of projection optical system 4A~ another portion 4B and 4D of 4E, a portion the optical axis of the plurality of projection optical system 4A, parallel to 4C and 4E, and are arranged in a line at predetermined intervals, and substantially perpendicular to the Y direction and scanning in the plane direction of the photosensitive substrate 5 in synchronization with the mask 3 and the photosensitive substrate 5.
請求項5に記載の露光装置では、第1及び第2の超高圧水銀ランプ10からそれぞれ射出された光束L 6及びL 7を光ガイド14によつて集光した後に光ガイド14によつて分割して得た第1及び第2の光束L 1及びL 2によつて、パターンが形成されたマスク5上の互いに異なる第1及び第2の照明領域M1及びM2をそれぞれ照明し、第1及び第2の照明領域M1及びM2のそれぞれの像を第1及び第2の投影光学系4A及び4Bをそれぞれ介して感光基板5上に投影する露光方法において、第1の超高圧水銀ランプ10から射出された光束L 6を開口率で規制する第1のシヤツタ12による光束L 6に対する開口率毎に、第1及び第2の光束L 1及びL 2の照度を検出する第1の処理と、第2の超高圧水銀ランプ10から射出さ In the exposure apparatus according to claim 5, by connexion divided into the light guide 14 after the first and second light fluxes emitted respectively from the ultra-high pressure mercury lamp 10 L 6 and L 7 and by connexion condensing the light guide 14 Yotsute the light beam L 1 and L 2 the first and second obtained by the first and second illumination areas M1 and M2 differ from each other on the mask 5 in which a pattern is formed by illuminating each first and the exposure method for projecting a respective image of the second illumination region M1 and M2 of the first and second projection optical systems 4A and 4B onto the photosensitive substrate 5 via respectively emitted from the first ultra-high pressure mercury lamp 10 for each opening ratio for the light flux L 6 of the first shutter 12 to regulate the light beam L 6, which is by an aperture, a first processing for detecting the first and second illumination intensity of the light beam L 1 and L 2, the injection of ultra-high pressure mercury lamp 10 of 2 た光束L 7を開口率で規制する第2のシヤツタ12による光束L 7に対する開口率毎に、第1及び第2の光束L 1及びL 2の照度を検出する第2の処理と、第1及び第2の処理による照度信号S1及びS2に基づいて、第1及び第2のシヤツタ12によるそれぞれの開口率と、第1及び第2の光束L 1及びL 2の照度とを対応付けて照度データS6として記憶する第3の処理と、パターンを感光基板5上に投影する際に、第1及び第2の光束L 1及びL 2の照度を均一にするよう、第3の処理による照度データS6に基づいて、第1及び第2のシヤツタ12を制御する第4の処理とを設ける。 And for each opening with respect to light flux L 7, second process of detecting the first and second illumination intensity of the light beam L 1 and L 2 of the second shutter 12 to the light beam L 7 is regulated by the aperture rate, the first and on the basis of the illuminance signals S1 and S2 according to the second process, the illumination in association with each of the opening ratio of the first and second shutters 12, and first and second light beams L 1 and L 2 illuminance a third process of storing as data S6, when projecting the pattern onto the photosensitive substrate 5, so as to equalize the first and second illumination intensity of the light beam L 1 and L 2, the illuminance data of the third process based on S6, providing a fourth process of controlling the first and second shutter 12.
以下図面について、本発明の一実施例を詳述する。 For it is described with reference to the accompanying drawings an embodiment of the present invention.
図1は全体として走査型露光装置1を示し、大面積のパターンを一次元の走査だけで露光する。 Figure 1 shows a scanning exposure apparatus 1 as a whole, to expose a pattern having a large area with only scan one-dimensional. 走査型露光装置1は、照明光学系2から照度を均一化した5つの光束L 1 〜L 5を射出し、この光束L 1 〜L 5によつてマスク3上のそれぞれ異なる小さな照明領域M1〜M5を照明する。 Scanning exposure apparatus 1, the five light beams L 1 ~L 5 that uniform illumination from the illumination optical system 2 is injected, different small illumination area M1~ on Yotsute mask 3 on the light beam L 1 ~L 5 M5 to illuminate the. 走査型露光装置1は、マスク3を透過した複数の光束をそれぞれ異なる投影光学系4A〜4Eを介して、液晶表示装置を製造するための感光基板5上に投影して、異なる5つの投影領域P1〜P5に照明領域M1〜M5のパターン像を結像させる。 Scanning exposure apparatus 1 via a different projection optical system 4A~4E a plurality of light beams passing through the mask 3, are projected onto the photosensitive substrate 5 for manufacturing a liquid crystal display device, five different projection region P1~P5 to image the pattern image of the illuminated region M1~M5 to.
因に、感光基板5上の投影領域P1〜P5は、隣り合う投影領域(例えばP1とP2、P2とP3)がX方向に互いに所定距離隔てられていると共に、隣り合う投影領域の端部同士がX方向と直交したY方向に重複するように配置されている。 In this connection, the projected region P1~P5 on the photosensitive substrate 5, together with the projection region adjacent (e.g. P1 and P2, P2 and P3) are separated a predetermined distance from one another in the X direction, the end portion of the projection area adjacent to each other There are arranged to overlap in the Y direction orthogonal to the X direction. このため、投影光学系4A〜4Eもそれぞれの投影領域P1〜P5の配置に対応してX方向に所定距離隔てられていると共に、Y方向に重複して配置されている。 Therefore, the are separated a predetermined distance in the X direction corresponding projection optical system 4A~4E to the arrangement of each of the projection area P1 to P5, it is arranged overlapping in the Y direction.
投影光学系4A〜4Eはいずれも等倍正立系であり、その配置はマスク3上の照明領域M1〜M5と同じ配置となる。 Projection optics 4A~4E are both equal magnification erect system, their arrangement is the same arrangement as the illumination region M1~M5 on the mask 3. 従つて、照明領域M1〜M5のパターン像が結像される投影領域P1〜P5の配置は照明領域M1〜M5と同様である。 Accordance connexion, the arrangement of the projection area P1~P5 which the pattern image of the illuminated region M1 to M5 is imaged is the same as the illumination region M1 to M5. 照明光学系2の光束L 1 〜L 5の光軸の平面配置は、マスク3上の照明領域M1〜M5と同様に配置されている。 Planar arrangement of the optical axis of the light beam L 1 ~L 5 of the illumination optical system 2 is arranged similarly to the illumination area M1~M5 on the mask 3.
マスク3と感光基板5とは互いに対面した状態でステージ保持台6に一体に保持されている。 They are held together on the stage holding table 6 in a state of facing each other with the mask 3 and the photosensitive substrate 5. これによりマスク3と感光基板5とは、相互の位置が一定となるように機械的に結合されていることになる。 Thus the mask 3 and the photosensitive substrate 5, so that the mutual positions are mechanically coupled so as to be constant. ステージ保持台6には、走査方向(X方向)に長ストロークで駆動する駆動装置が設けられている。 The stage holding table 6, the scanning direction (X direction) drive is provided for driving a long stroke.
走査のとき走査型露光装置1は、この駆動装置によつてステージ保持台6をX方向へ駆動して、マスク3及び感光基板5を照明光学系2及び投影光学系4A〜4Eに対して一次元に同期走査させる。 Scanning exposure apparatus 1 when the scanning is primary with respect to drive the Yotsute stage holding table 6 in the X direction with the driving unit, the mask 3 and the photosensitive substrate 5 the illumination optical system 2 and the projection optical system 4A~4E to scan synchronization to the original. この同期走査によつてマスク3におけるパターン領域3Aの全面の像を感光基板5の感光面5Aに転写することができる。 The entire image of the pattern area 3A in by connexion mask 3 to the synchronous scanning can be transferred to the photosensitive surface 5A of the photosensitive substrate 5.
マスク3はステージ保持台6上に配置されたマスクステージ7に支持されており、複数の微動アクチユエータ(図示せず)によつてマスク3の面内方向の任意の位置に位置決めされる。 Mask 3 is supported by the mask stage 7 disposed on the stage holding table 6, is positioned at an arbitrary position in the plane direction of Yotsute mask 3 into a plurality of fine movement actuator (not shown). これにより、走査型露光装置1は、この微動アクチユエータで位置決めして、投影光学系4A〜4Eに対するステージ保持台6の傾きに起因したパターン像の位置ずれを補正することができる。 Accordingly, the scanning type exposure apparatus 1 is positioned at this fine motion actuator, the positional deviation of the pattern image due to the inclination of the stage holding table 6 with respect to the projection optical system 4A~4E can be corrected.
図2に示すように、照明光学系2は、例えば3つの超高圧水銀ランプ10が配設されており、この超高圧水銀ランプ10からそれぞれ射出された光束L 6 〜L 8を楕円鏡11、シヤツタ12、レンズ系13を介して、複数の光フアイバを束ねて構成された光ガイド14に入射して集光する。 As shown in FIG. 2, the illumination optical system 2, for example, three ultra-high pressure mercury lamp 10 is disposed, the ultra-high pressure mercury light beam emitted from each lamp 10 L 6 ~L 8 the elliptical mirror 11, shutter 12, through a lens system 13, for focusing incident on the plurality of light guide 14 that is configured by bundling optical fibers.
照明光学系2は、集光した光束L 6 〜L 8を光ガイド14によつて5つの光束L 1 〜L 5に分割し、分割して得たそれぞれの光束L 1 〜L 5を射出部内のフライアイレンズ(図示せず)によつて照度を均一化して射出させる。 The illumination optical system 2, the light beam L 6 ~L 8 condensed divided into the light guide 14 to Yotsute five light beams L 1 ~L 5, the injection portion of each of the light beams L 1 ~L 5 obtained by dividing homogenizing the by connexion illuminance fly-eye lens (not shown) of it is emitted.
因みに、シャッタ12は通常の照明光学系の構成でも使用されており、部品点数を増加させることはない。 Incidentally, the shutter 12 is also used in the normal illumination optical system configuration does not increase the number of parts.
続いて、照明光学系2は、例えば光束L 1をハーフミラー15、コンデンサレンズ16を介して視野絞り17に照射し、この視野絞り17によつて光束L 1を所望の形状にそれぞれ整形する。 Subsequently, the illumination optical system 2, for example, a half mirror 15 the light beam L 1, irradiated to the field stop 17 through a condenser lens 16, the O connexion beam L 1 to the field stop 17 shapes each into a desired shape. 照明光学系2は、整形した光束L 1をリレーレンズ18及び19を介してマスク3のパターン面上に照射して視野絞り17の像を形成する。 The illumination optical system 2, the light beam L 1 that is shaped by irradiating on the pattern surface of the mask 3 through the relay lens 18 and 19 to form an image of the field stop 17.
照明光学系2は、光ガイド14の出射端とコンデンサレンズ16との間にハーフミラー15が設けられており、光束L 1の一部を光検出素子21に入射する。 The illumination optical system 2, a half mirror 15 is provided between the exit end and the condenser lens 16 of the light guide 14, enters the portion of the light beam L 1 to the light detecting element 21. 照明光学系2は、光束L 2 〜L 5も光束L 1と同様に処理してマスク3のパターン面上に照射すると共に、それぞれの光束L 2 〜L 5の一部を光検出素子21に入射する。 The illumination optical system 2, the light beam L 2 ~L 5 be treated in the same manner as the light beam L 1 is irradiated on the pattern surface of the mask 3, a portion of each of the light beams L 2 ~L 5 to the light detection element 21 incident.
照明光学系2は、ハーフミラー15、レンズ系20を介して光検出素子21に与えた一部の光束のそれぞれの照度に応じて照度信号S1〜S5を光検出素子21に生成させ、この照度信号S1〜S5を制御部22に与える。 The illumination optical system 2, a half mirror 15, to produce a luminance signal S1~S5 to the light detecting element 21 in response to each of the illuminance of a part of the light beam applied to the light detecting element 21 via the lens system 20, the illumination providing a signal S1~S5 to the control unit 22. 照明光学系2は、照度信号S1〜S5に基づいて、それぞれの光束L 1 〜L 5の照度を制御部22で求め、それぞれのシヤツタ12の開口率と対応付けて生成した照度データS6をメモリ23に記憶する。 The illumination optical system 2, based on the illumination signal S1-S5, the illuminance of the respective light beams L 1 ~L 5 determined by the control unit 22, the illuminance data S6 generated in association with the opening ratio of each of the shutters 12 memory and stored in 23.
照明光学系2は、メモリ23に記憶した照度データS6を制御部22に読み出し、この照度データS6に基づいて制御部22で生成した制御信号S7〜S9をそれぞれシヤツタ制御部24〜26に与える。 The illumination optical system 2 reads the illuminance data S6 which is stored in the memory 23 to the control unit 22 provides control signals S7~S9 generated by control unit 22 based on the illuminance data S6 each shutter control unit 24 to 26.
これにより、照度が適正値を越えるとき、照明光学系2は、制御部22によつて3つのシヤツタ12のそれぞれの開口率を調節して、光束L 1 〜L 5の照度を適正値まで減少させると共に、光束L 2 〜L 5の相互間の照度を均一化させる。 Thus, when the illuminance exceeds a proper value, the illumination optical system 2, by adjusting the respective aperture ratio of Yotsute three shutter 12 to the control unit 22, reducing the illuminance of the light beam L 1 ~L 5 to the proper value together is, making uniform the illuminance of mutual light beam L 2 ~L 5.
ここで、照度データS6を得る際、照明光学系2は、例えば図3に示す照度データ獲得手順に従つて動作する。 Here, when obtaining the illuminance data S6, the illumination optical system 2 is accordance connexion operate illuminance data acquisition procedure shown in FIG. 3, for example. すなわち照明光学系2は、ステツプSP0から入り、ステツプSP1においてパラメータMをクリアしてステツプSP2に移る。 That illuminating optical system 2 enters the step SP0, it proceeds to step SP2 to clear the parameter M at step SP1. ステツプSP2において、照明光学系2は、N(ここでは3)個の光源すなわち超高圧水銀ランプ10の全シヤツタ12を全開して開口率を 100%に設定し、ステツプSP3に移る。 In step SP2, the illumination optical system 2, N (here 3) pieces of the light source that is, fully open all shutter 12 of the ultra-high pressure mercury lamp 10 to set the aperture ratio of 100%, and then proceeds to step SP3.
ステツプSP3において、照明光学系2は、この設定での光束L 1 〜L 5の照度を検出すると、ステツプSP4に移り、このときの光束L 1 〜L 5のそれぞれの照度を3つのシヤツタ12の開口率と対応付けて記憶する。 In step SP3, the illumination optical system 2 detects the illuminance of the light beam L 1 ~L 5 in this setting, it proceeds to step SP4, the light beam L 1 ~L each of the three shutter 12 the illumination of 5 at this time association with aperture ratio stored. 続いて、照明光学系2は、ステツプSP5に移り、パラメータMをM+1にインクリメントしてステツプSP6に移る。 Subsequently, the illumination optical system 2 proceeds to the step SP5, proceeds to step SP6 to increment the parameter M to M + 1. ステツプSP6において、照明光学系2は、M(ここでは1)番目の超高圧水銀ランプ10のシヤツタ12を閉じて開口率を0%に設定してステツプSP7に移る。 In step SP6, the illumination optical system 2 proceeds to M (here 1) th closing the shutter 12 of the ultra-high pressure mercury lamp 10 by setting the aperture ratio to 0% step SP7.
ステツプSP7において、照明光学系2は、光束L 1 〜L 5の照度を検出すると、ステツプSP8に移りこのときの光束L 1 〜L 5のそれぞれの照度を3つのシヤツタ12の開口率と対応付けて記憶する。 In step SP7, the illumination optical system 2 detects the illuminance of the light beam L 1 ~L 5, the correspondence with the aperture ratio of the light beam L 1 ~L 3 single shutter 12 each illuminance 5 when this moves to step SP8 and stores Te. 続いて、照明光学系2は、ステツプSP9に移りパラメータMがM=Nを満たすか否かを判断する。 Subsequently, the illumination optical system 2, the parameters M proceeds to step SP9 to determine whether they meet the M = N.
ステツプSP9において否定結果を得ると、照明光学系2は、全ての超高圧水銀ランプ10のシヤツタ12の開口率に対応した照度を検出していないと判断してステツプSP10に移る。 If a negative result is obtained at step SP9, the illumination optical system 2 proceeds to step SP10 it is judged that not detected illuminance corresponding to the opening ratio of the shutter 12 of all the ultra-high pressure mercury lamp 10. ステツプSP10において、照明光学系2は、M(ここでは1)番目の超高圧水銀ランプ10のシヤツタ12の開口率を再び 100%に設定してステツプSP5に戻り、上述の手順を繰り返す。 In step SP10, the illumination optical system 2, M (here 1) th aperture ratio of shutter 12 of ultra-high pressure mercury lamp 10 is set again to 100 percent returns to step SP5, repeat the above steps.
やがて、ステツプSP9において肯定結果を得ると、照明光学系2は、全ての超高圧水銀ランプ10のシヤツタ12の開口率に対応した照度を検出したと判断して、ステツプSP11に移り、照度データ獲得手順を終了する。 Eventually, when an affirmative result is obtained at step SP9, the illumination optical system 2, it is determined that the detected illuminance corresponding to the opening ratio of the shutter 12 of all the ultra-high pressure mercury lamp 10 proceeds to the step SP11, the illuminance data acquisition to end the procedure.
このようにして得た開口率 100%のときの光束L 1 〜L 5の照度と、開口率0%のときの光束L 1 〜L 5の照度との差分を総合することによつて、照明光学系2は、開口率を制御したシヤツタ12に対応した超高圧水銀ランプ10が射出した光束L 6 〜L 8のそれぞれの照度を検出することができる。 Yotsute to total such as illuminance of the light beam L 1 ~L 5 when the opening ratio of 100% thus obtained, a difference between the illuminance of the light beam L 1 ~L 5 when the opening ratio of 0%, lighting optical system 2 can be ultra-high pressure mercury lamp 10 corresponding to the shutters 12 that controls the opening ratio detecting each of intensity of the light beam L 6 ~L 8 emitted.
またこの光束L 6 〜L 8のそれぞれの照度が分かると、照明光学系2は、この光束L 6 〜L 8を分割して得た2次光束である光束L 1 〜L 5への光束L 6 〜L 8のそれぞれの分割率を上述した差分に基づいて検出することができる。 Further, when each of the illuminance of the light beam L 6 ~L 8 is seen, the illumination optical system 2, the light beam L to the optical beam L 1 ~L 5 is a secondary light beam which is obtained by dividing the light beam L 6 ~L 8 each division ratio of 6 ~L 8 can be detected based on the difference described above. この分割率は、光ガイド14の構成を変更しない限り一定であることが明らかである。 The division ratio, it is clear that a constant unless changed the configuration of the light guide 14.
以上の構成において、照明光学系2は、例えば1ロツトの感光基板5を露光する前やランプ交換直後に、それぞれの3つの超高圧水銀ランプ10に対応した照度データS6を得てメモリ23に記憶しておく。 In the above configuration, the illumination optical system 2, for example 1 a photosensitive substrate 5 Rotsuto immediately before or lamp replacement for exposing, to give each of the three illumination data S6 corresponding to ultra-high pressure mercury lamp 10 stored in the memory 23 keep.
照明光学系2は、照度データS6を得る際に、光束L 1 〜L 5のいずれかの照度が所定値を越えていることを検出すると、いずれかの超高圧水銀ランプ10の輝度が過大であると判断して、光束L 1 〜L 5の照度を校正する。 The illumination optical system 2, when obtaining the illuminance data S6, when any one of the illuminance of the light beam L 1 ~L 5 detects that exceeds a predetermined value, the luminance of any of the ultra-high pressure mercury lamp 10 is excessively large it is determined that there is, calibrating the illuminance of the light beam L 1 ~L 5.
すなわち、照明光学系2は、露光直前に獲得した照度データS6をメモリ23から読み出し、3つの超高圧水銀ランプ10が射出する光束L 6 〜L 8の照度と、3つのシヤツタ12の開口率と、光束L 1 〜L 5への光束L 6 〜L 8のそれぞれの分割率とに基づいて、3つのシヤツタ12に対する最適な開口率の組合せを設定する。 That is, the illumination optical system 2 reads the illuminance data S6 acquired immediately before exposure from the memory 23, the illuminance of the light beam L 6 ~L 8 three ultra-high pressure mercury lamp 10 is emitted, the aperture ratio of the three shutters 12 , based on the respective division of the light beam L 6 ~L 8 to the light beam L 1 ~L 5, sets the optimum combination of aperture ratio for the three shutter 12.
これにより、いずれかの超高圧水銀ランプ10の輝度が過大であつて、かつ走査速度の調整だけで露光量を適切値に調節することが困難である状態でも、感光基板5の全面に亘つて均一な照度の光束で照明して適正露光量で感光基板5に露光できることになる。 Thus, any of that mediation excessive brightness of the ultra-high pressure mercury lamp 10, and even when it is difficult to adjust the amount of exposure to the appropriate value by the adjustment of the scanning speed, Wataru connexion on the entire surface of the photosensitive substrate 5 would be exposed on the photosensitive substrate 5 at a proper exposure amount is illuminated with light beams having a uniform illuminance.
以上の構成によれば、複数の超高圧水銀ランプ10から射出されたそれぞれの光束L 6 〜L 8を規制するシヤツタ12の開口率と、光束L 6 〜L 8を光ガイド14によつて集光及び分割して得た光束L 1 〜L 5の照度とを対応付けてメモリ23に記憶した照度データS6に基づいて、露光前に3つのシヤツタ12に最適な開口率の組合せを設定することにより、照明光学系2に対する感光基板の走査速度の制御だけで露光量を適切値に調節できない程に超高圧水銀ランプ10の輝度が過大であつても、感光基板5に適正な露光量を与えることができる。 According to the above configuration, the aperture ratio of the shutter 12 to regulate the respective light beams L 6 ~L 8 emitted from a plurality of ultra-high pressure mercury lamp 10, by connexion condensing the light beam L 6 ~L 8 to the light guide 14 based in association with the illuminance of the light beam L 1 ~L 5 obtained by light and dividing the illuminance data S6 which is stored in the memory 23, it sets the optimum combination of aperture ratio three shutter 12 before exposure be Accordingly, even it shall apply excessive brightness of the ultra-high pressure mercury lamp 10 to the extent that can not adjust the amount of exposure to the appropriate value only by controlling the scanning speed of the photosensitive substrate relative to the illumination optical system 2, provide a proper exposure amount on the photosensitive substrate 5 be able to.
なお上述の実施例においては、液晶表示装置を製造するための感光基板5に露光する場合について述べたが、本発明はこれに限らず、任意の感光基板、例えば半導体素子を製造するための感光基板に露光する場合にも適用し得る。 Incidentally, in the aforementioned embodiment, it has dealt with the case of exposing a photosensitive substrate 5 for manufacturing a liquid crystal display device, the present invention is not limited to this, any photosensitive substrate, for example a photosensitive for manufacturing a semiconductor device also applicable in the case of exposure to the substrate.
また上述の実施例においては、本発明を5つの投影光学系4A〜4Eを有する走査型露光装置に適用する場合について述べたが、本発明はこれに限らず、投影光学系を5つ以外の任意の数だけ配置した露光装置にも適用し得る。 Also in the embodiment described above has dealt with the case of applying the present invention to a scanning exposure apparatus having five projection optical system 4A - 4E, the present invention is not limited to this, other than the five projection optical system also applicable to an exposure apparatus arranged any number.
さらに上述の実施例においては、本発明を1次元にだけ走査して露光する露光装置1に適用する場合について述べたが、本発明はこれに限らず、2次元に走査して露光する露光装置にも適用できる。 Further, in the aforementioned embodiments, it has dealt with the case of applying to the exposure apparatus 1 exposes by scanning the present invention only in one dimension, the present invention is not limited to this, the scanning to exposure to an exposure apparatus in a two-dimensional in can also be applied.
さらに上述の実施例においては、露光前に2次光束である光束L 1 〜L 5の照度を校正する場合について述べたが、本発明はこれに限らず、露光中に1次光束を規制して、2次光束の照度を制御する場合にも適用できる。 Further, in the aforementioned embodiments have dealt with the case of calibrating the illuminance of the light beam L 1 ~L 5 is a secondary light beam before the exposure, the present invention is not limited thereto, to regulate the primary light beam during exposure Te, it can be applied to a case of controlling the illumination of the secondary light beam.
さらに上述の実施例においては、光束L 6 〜L 8を規制するため、シヤツタ12の開口率を制御する場合について述べたが、本発明はこれに限らず、光束を規制する光束規制手段は任意の構成のもので良い。 Further, in the aforementioned embodiments, for regulating the light beam L 6 ~L 8, has dealt with the case of controlling the opening ratio of the shutter 12, the present invention is not limited to this, the light beam restriction means for restricting a light flux optionally it may be of the configuration.
さらに上述の実施例においては、光ガイド14によつて光束を集光及び分割する場合について述べたが、本発明はこれに限らず、任意の構成の光学系によつて光束を集光及び分割する場合にも適用できる。 Further, in the aforementioned embodiments have dealt with the case of condensing and dividing the I connexion beam into the light guide 14, the present invention is not limited thereto, the condenser and splits the I connexion light beam to the optical system of any configuration It can also be applied in the case of.
上述のように、本発明によれば、複数の光源から射出されたそれぞれの1次光束を規制する光束規制手段の規制状態と、1次光束を光伝送路によつて集光及び分割して得た2次光束の照度とを対応付けて記憶手段に記憶した記憶結果に基づいて、複数の光束規制手段に最適な規制状態の組合せを設定することにより、照明光学系に対する感光基板の走査速度の制御だけで露光量を適切値に調節できない程に光源の輝度が過大であつても、感光基板に適正な露光量を与え得る露光装置及び露光方法を実現することができる。 As described above, according to the present invention, the regulating state of the light beam regulating means for regulating each of the primary light beams emitted from a plurality of light sources, primary light bundle and by connexion condenser and split the optical transmission line the resulting secondary light beam in association with illuminance based on the stored stored results in the storage means, by setting the optimum combination of restricted state to a plurality of beam restricting means, the scanning speed of the photosensitive substrate relative to the illumination optical system be filed in the control only by excessive brightness of the light source to the extent that can not be adjusted to the appropriate value exposure quantity, it is possible to realize an exposure apparatus and an exposure method can provide a proper exposure amount on the photosensitive substrate.
【図1】本発明による露光装置及び露光方法の一実施例による走査型露光装置を示す斜視図である。 1 is a perspective view showing a scanning type exposure apparatus according to an embodiment of an exposure apparatus and an exposure method according to the present invention.
【図2】実施例による照明光学系の構成の説明に供する略線図である。 2 is a schematic diagram illustrating configuration of an illumination optical system according to Example.
【図3】実施例による照度データ獲得手順の説明に供するフローチヤートである。 3 is a flow chart for explaining the illuminance data acquisition procedure according to Example.
1……走査型露光装置、2……照明光学系、3……マスク、3A……パターン領域、4A〜4E……投影光学系、5……感光基板、5A……感光面、6……ステージ保持台、7……マスクステージ、10……超高圧水銀ランプ、11……楕円鏡、12……シヤツタ、13……レンズ系、14……光ガイド、15……ハーフミラー、16……コンデンサレンズ、17……視野絞り、18、19……リレーレンズ、20……レンズ系、21……光検出素子、22……制御部、23……メモリ、24〜26……シヤツタ制御部、L 1 〜L 8 ……光束、P1〜P5……投影領域、M1〜M5……照明領域。 1 ...... scanning exposure apparatus, 2 ...... illumination optical system, 3 ...... mask, 3A ...... pattern region, 4A - 4E ...... projection optical system, 5 ...... photosensitive substrate, 5A ...... photosensitive surface, 6 ...... stage holder, 7 ...... mask stage, 10 ...... ultra-high pressure mercury lamp, 11 ...... elliptical mirror, 12 ...... shutters, 13 ...... lens system, 14 ...... light guide, 15 ...... half mirror, 16 ...... condenser lens, 17 ...... field stop, 18, 19 ...... relay lens, 20 ...... lens system, 21 ...... photodetector, 22 ...... controller, 23 ...... memory, 24 to 26 ...... shutter control unit, L 1 ~L 8 ...... beam, P1~P5 ...... projection area, M1~M5 ...... illumination area.
前記記憶手段に記憶された記憶結果に基づいて、前記2次光束の照度が所定値となるように、該2次光束中の任意の光束成分を射出している前記光源が射出する前記1次光束を規制するように前記光束規制手段を制御する制御手段とを備えることを特徴とする露光装置。 Based on the stored stored results in the storage means, said primary illuminance of the secondary light beam to a predetermined value, the light source that emits any light beam components in the 2 Tsugikotaba is emitted exposure apparatus, characterized in that it comprises a control means for controlling said light beam restriction means to regulate the light flux.
前記光伝送路は、複数の光フアイバを束ねて構成されていることを特徴とする請求項1に記載の露光装置。 It said optical transmission path, an exposure apparatus according to claim 1, characterized in that it is constituted by bundling a plurality of optical fibers.
前記光束規制手段は、前記1次光束を通過させる開口部の開口率を制御して、前記1次光束を規制することを特徴とする請求項1に記載の露光装置。 It said light beam restriction means, said controlling the opening ratio of the opening for passing the primary beam exposure apparatus according to claim 1, characterized in that to regulate the primary light beam.
前記第1の方向とほぼ直交し、且つ前記感光基板の面内方向に前記マスクと前記感光基板とを同期して走査することを特徴とする請求項1に記載の露光装置。 It said first substantially perpendicular to the direction, and the exposure apparatus according to claim 1, wherein said mask in-plane direction of the photosensitive substrate a photosensitive substrate and synchronization with the characterized by scanning.
前記パターンを前記感光基板上に投影する際に、前記第1及び第2の2次光束の照度を均一にするよう、前記第3の処理による記憶結果に基づいて、前記第1及び第2の光束規制手段を制御する第4の処理とを具えることを特徴とする露光方法。 When projecting the pattern onto the photosensitive substrate, so as to uniform the illuminance of said first and second secondary light beam, based on the stored result by the third processing, the first and second exposure method characterized by comprising a fourth process of controlling the beam restricting means.