Sn–Zr and Ag-doped Sn–Zr thin films were prepared by an electron-beam evaporation method using pure separate metal sources. Electrochemical cycling performance was obtained as a function of film composition. The cycling stability of Sn–Zr film electrodes increased with Zr content. An Ag-doped Sn–Zr thin film such as Sn57Zr33Ag10 showed excellent cycling stability and capacity retention. The composition dependence on electrochemical behavior is related to the microstructural changes in the films.