Spherical particle morphology of Li1.1Ni1/3Co1/3Mn1/3O2 cathode material was carefully controlled by spray drying the slurry containing mixed oxides pre-calcined at 900°C. The as-dried powders were then treated in a microwave-processing cavity with different power and time. The microwave-processing cavity is a designed elliptically resonant cavity with double foci. One focusing zone concentrated microwave energy to treat the as-dried cathode material. After microwave-treated power of 200W for 15min at least, high purity of Rocksalt structure showed high ratio of integrated intensities of (003)/(104), larger than 1.1, and double peaks (006)/(102) and (108)/(110) split up clearly based on X-ray diffraction patterns. After 200W microwave treating for 15min, the discharge capacity of the obtained Li1.1Ni1/3Co1/3Mn1/3O2 powders was 120mAhg−1 by charging from 4.3 to 2.5V at room temperature. Furthermore, discharge capacity larger than 140mAhg−1 can be obtained for treating with 200W microwave energy for 30min. Nevertheless, the discharge capacity was less than 100mAhg−1 treated with 1100°C/24h by conventional furnace. The microwave-treated Li1.1Ni1/3Co1/3Mn1/3O2 cathode material sustains capacity less than 5% degradation after 50 cycles test. The results of microwave process show promise properties requirement for commercial applications.