Micro-solid oxide fuel cells (μ-SOFC) are promising power sources for portable electronic devices. This review presents the current status of development of microfabricated micro-solid oxide fuel cell membranes for power delivery. The μ-SOFC membranes are developed using micro-electro-mechanical system (MEMS) fabrication and machining techniques. The different designs of free-standing μ-SOFC membranes and μ-SOFCs deposited on porous substrates are presented. The materials used in the μ-SOFC anode, electrolyte and cathode are discussed and compared along with their microstructures. The electrical performance data of the different μ-SOFC designs are compared and discussed. High μ-SOFC performances of 677mWcm−2 were demonstrated at temperatures as low as 400°C.