A face-centered cubic Mo2N film is successfully prepared on Cu foil by reactive DC magnetron sputtering. The thickness of Mo2N film is about 1.5 μm with porous and nano-column array. The Mo2N film can be directly used as anode electrode for lithium ion batteries (LIBs) without additional conductive agent and binder. Electrochemical tests including cyclic voltammetry (CV), galvanostatic charge-discharge circulation and electrochemical impedance spectroscopy (EIS) show that the Mo2N film electrode exhibits high reversible capacity of 127 μAh/cm2 at a high current density of 1000 μA/cm2 and low charge transfer resistance due to the porous nano-column array.