(Li0.5La0.5)TiO3 (LLTO) film electrolytes for lithium rechargeable microbattery were prepared onto Pt/TiO2/SiO2/Si substrates using pulsed laser deposition (PLD) at deposition temperature of 500°C. A 400nm thick-LLTO films as-deposited at 500°C and annealed up to 600°C showed an amorphous-like phase and surface roughness of the films was independent of an annealing temperature. The ionic conductivity of as-deposited films was approximately 1.1 × 10−5 Scm−1 at room temperature and it slightly decreased with increasing annealing temperature. The LLTO films deposited by PLD are suitable for application as an electrolyte of thin-film microbattery.