Calcia stabilized zirconia (Ca0.15Zr0.85O1.85) (CSZ) an oxygen ion conducting electrolyte was synthesized from mixed oxalate precursor, namely calcium zirconyl oxalate (CZO). CZO heated in microwave heating system for 1h yielded the stabilized zirconia in the cubic form at 400°C. Same precursor (CZO) heated in resistance heated furnace for 1h yielded pure CSZ at 800°C. Thermogravimetry, differential thermal analysis and X-ray diffraction techniques were used to characterize the precursor and optimize the conditions for microwave processing. BET surface areas of CSZ powders prepared by conventional and microwave heating method at 800 and 400°C are 3.28 and 4.46m2 g−1, respectively.