Solid electrolyte interface (SEI) films formed on Li1−x CoO2 electrodes were observed with hard X-ray photoelectron spectroscopy (HX-PES). This paper particularly focuses on film thickness estimation using HX-PES with theoretical calculation. The validity of the calculation was proven by experiments using model SEI films. The native film formed on a LiCoO2 composite electrode was estimated to be LiF with its thickness of 5nm. Formation of Co (II) species on top of LiCoO2 was also indicated. Storage of the electrode at 60°C brought about considerable film growth (30–40nm) with carbonate compounds formation. SEI film changes during charging of the LiCoO2 electrode were also examined. The main component in the film was deduced to be LiF or a kind of fluorite, with its thickness decreased during charging. The SEI formation mechanisms are also elucidated.