Amorphous LiCo1/3Mn1/3Ni1/3O2 thin films were deposited on the NASICON-type Li-ion conducting glass ceramics, Li1+x+y Al x Ti2−x Si y P3−y O12 (LATSP), by radio frequency (RF) magnetron sputtering below 130°C. The amorphous films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The Li/PEO18–Li(CF3SO2)2N/LATSP/LiCo1/3Mn1/3Ni1/3O2/Au all-solid-state cells were fabricated to investigate the electrochemical performance of the amorphous films. It was found that the low-temperature deposited amorphous cathode film shows a high discharge voltage and a high discharge capacity of around 130mAhg−1.