Monolayer chemically converted graphene (CCG) nanosheets can be homogeneously self-assembled onto silicon wafer modified by 3-aminopropyl triethoxysilane (APTES) to form very thin graphene film. The CCG film was characterized by FT-IR, XRD, SEM, TEM and AFM. Results show that CCG sheets formed monolayer film after assembled onto silicon wafer and there is a very tight chemical bond between sheets and wafer. Furthermore, the electrical measurements revealed that the monolayer graphene film has an excellent electrical conductivity.