Ultra-low intensity electron pulsed beams for irradiation have been developed by the use of the electron linear accelerator at Radiation Research Center of Osaka Prefecture University. The energy and the pulse width of the beams are about 4–12MeV and 0.5–4μs, respectively. The minimum beam charge has been estimated to be about several aC/pulse. These electrons are basically mono energetic, controllable, collimated and synchronized with the master oscillator of the accelerator, which are favorable features for various uses compared with β-ray sources. Especially, the system is suitable for evaluation of response of radiation detectors. In this study, the response of the TLD for high energetic electron irradiation was also evaluated by the use of these electrons.