Three different Ti–Si nanocomposite thin films are prepared by the co-sputtering method with Si target and Ti target. The film thickness ranges between 250 and 480nm. X-ray diffraction (XRD), high resolution transmission electron miscopy (HRTEM) and X-ray photoelectron spectroscopy (XPS) reveal significant charge transfer between Ti and Si and uniform dispersion of Ti–Si alloy nanograins in the amorphous Si thin films. It is found that decreasing the grain size of the Ti x Si y alloy below 2nm, can improve the cyclic performance over pure Si thin film electrodes and those containing larger Ti–Si grains. This is mainly related to the improved mechanical properties that result from dispersing small grains of Ti–Si. The throughout thin film cracks formed after 10 electrochemical cycles are finer and more curved compared to the other thin films with the same film thickness. Furthermore, the width of the cracks, as well as, the area and junction angles of the remained fractured particle size of all electrode films considered, is compared and analyzed, after 10 cycles.