Self-powered flexible inorganic electronic systems have been demonstrated to be the core of next-generation electronics due to their lightweight, thin, self-sustainable and biocompatible properties, which are applicable to cramped or corrugated surfaces. Many researchers have studied myriad approaches for high performance flexible electronics, e.g. energy harvesters, batteries, high-density memories, large-scale integration (LSI), light-emitting diodes (LEDs), and sensors. Moreover, innovative devices for in vivo biomedical applications have been demonstrated on curvilinear and isolated regions of human bodies for detecting or even treating diseases. This paper reviews recent advances in self-powered flexible inorganic electronics, covering material selection, mechanical design, fabrication method and their all-in-one integration on a single plastic substrate.