Emission measurement programmes were carried out at industrial plants in several regions of Germany to determine the fine dust in the waste gases; the PM10, PM2.5 and PM1.0 fractions were sampled using a cascade impactor technique. The installations tested included plants used for: combustion (brown coal, heavy fuel oil, wood), cement production, glass production, asphalt mixing, and processing plants for natural stones and sand, ceramics, metallurgy, chemical production, spray painting, wood processing/chip drying, poultry farming and waste treatment. In addition waste gas samples were taken from small-scale combustion units, like domestic stoves, firing lignite briquettes or wood. In total 303 individual measurement results were obtained during 106 different measurement campaigns. In the study it was found that in more than 70% of the individual emission measurement results from industrial plants and domestic stoves the PM10 portion amounted to more than 90% and the PM2.5 portion between 50% and 90% of the total PM (particulate matter) emission. For thermal industrial processes the PM1.0 portion constituted between 20% and 60% of the total PM emission. Typical particle size distributions for different processes were presented as cumulative frequency distributions and as frequency distributions. The particle size distributions determined for the different plant types show interesting similarities and differences depending on whether the processes are thermal, mechanical, chemical or mixed. Consequently, for the groups of plant investigated, a major finding of this study has been that the particle size distribution is a characteristic of the industrial process. Attempts to correlate particle size distributions of different plants to different gas cleaning technologies did not lead to usable results.