Crystalline LiCoO2 nano-particles for thin film battery were synthesized and deposited by aerosol flame deposition (AFD). The aqueous precursor solution of the lithium nitrate and cobalt acetate was atomized with an ultrasonic vibrator and subsequently carried into the central tube of the torch by flowing dry Ar gas. LiCoO2 were formed by oxy-hydrogen flame and deposited on a substrate placed in a heating stage. The deposited soot film composed of nano-sized particles was subsequently consolidated into a dense film by high temperature heat treatment at 500–800°C for 5h and characterized by SEM, XRD, and Raman spectroscopy. The crystalline carbonates and oxide were first formed by the deposition and the subsequent heat treatment converted those to LiCoO2. The FWHMs of the XRD peaks were reduced and their intensity increased as the heat treatment temperature increased, which is due to improved crystallinity. When judged from the low enough cation mixing and well-developed layered structure, it is believed that the LiCoO2 film satisfied the quality standard for the real application. SEM measurements showed that LiCoO2 were nano-crystalline structure with the average particle size <70nm and the particle size increased with the increase of heat treatment temperature. The thickness of thin film LiCoO2 before the consolidation process was about 15μm and reduced to about 4μm after sintering.