Room temperature anodization of titanium foil specimens was carried out in 0.5M phosphoric acid solution with addition of various halide ions. Addition of 0.138M HF or NaF resulted in self-ordered nano-tubular oxide structure. Addition of bromide and chloride ions initiated only pitting and nano-pores were not observed during anodization. Acidified fluoride solution is found to be necessary to obtain ordered nano-structure as neutral fluoride solution did not form nano-pores. Instability of the oxide layer during anodization and formation of the self-ordered structure can be explained by the perturbation theory. Separation of individual nano-tubes of titanium oxide layer from the inter-connected nano-pores could be attributed to the possible repulsion forces of the cation vacancies.