Silicon carbide (SiC) has emerged as an enabling material for biomedical microelectromechanical systems (BioMEMS) due to its unique combination of electrical, mechanical, and chemical properties combined with its compatibility with Si micromachining techniques. This chapter reviews the development of SiC as a key structural material in bioMEMS-based devices. The chapter includes a short introductory tutorial on MEMS-based micromachining techniques as background for the benefit of readers not familiar with MEMS fabrication in general and/or SiC MEMS in specific. Also included is a review of bio-relevant SiC nanoelectromechanical systems (NEMS) that, while still in its infancy, is proving to be among the best material for NEMS devices.