As more and more applications require high energy density electrochemical storage systems that deliver more than 200 Wh/kg, Lithium-ion batteries with silicon-based anodes provide promising electrochemical properties especially high specific capacity. In this paper, we present micro-grain structured silicon deposited by DC sputtering on special copper foil that serves as current collector. It is demonstrated that high-density silicon anodes are obtained with more than 2000 mAh g−1 and 2.0 mAh cm−2 that can be considered as a commercial value. In addition, irreversible capacity during the first galvanostatic cycle can be lower than 20% for such anodes. Finally, it is found that there exists a clear correlation between the grain-size and the texture of the amorphous silicon to the electrochemical performance of half-cells.