of the spatial resolution of the microscope is an important and
active project in our group. Here, we use the following
definition of resolution: = half-period of a equal line and
space pattern that exhibits Rayleigh-like 26.5% modulation in
resolution, in general, can be expressed as . is the radiation
wavelength, and NA is the numerical aperture of the imaging
optic. is a constant which primarily depends on the degree of
partial coherence of the illumination, . In our case, NA is
equal to , is the outermost zone width of the micro zone degree
of partial coherence of the microscope, is equal to. is the
outermost zone width of the condenser zone plate (CZP).
Typically, is from 0.4 to 0.7, and from 0.6 to 0.8. The
resolution of the full-field microscope is slightly finer than
the smallest zone width of the micro zone plate. We design and
fabricate various test objects for measurement of the
microscopes resolution. Test objects and measurement result are
discussed