Low loss, Low crosstalk Silicon Nitirde Array Waveguide Grating using Multimode Waveguide at 850nm
We investigated silicon nitride(SixNy) arrayed waveguide grating (AWG) with multimode arrayed waveguide at 850nm wavelength to reduce phase error due to the sidewall roughness of the waveguide. The fabricated 8 channel SixNy AWG shows low crosstalk of 30dB and low loss of 0.5dB.
2020 IEEE Photonics Conference (IPC)