The analysis of the self oscillation system for resonant pressure sensor
Abstract In this paper a detailed analysis on the self oscillation system that is used for the resonant pressure sensor is presented. The stability and transient response of the system are investigated through a theoretical model, which is verified by experiment. This analysis provides an approach to optimize the parameters of the control system to get a short settling time and a stable system in the full pressure scale. The sensor chip is fabricated using a commercially available silicon on insulator wafer. By optimizing the parameters, the self oscillation system for the sensor works well and the setting time is less than 300 ms in full pressure scale. The calibration result shows that the resonant pressure sensor has a nonlinearity of 0.045 %FS, a hysteresis error of 0.14 %FS, and a repeatability error of 0.18 %FS.