Plasma ion source for in situ ion bombardment in a soft x ray magnetic scattering diffractometer.
A new plasma ion source for in situ keV He ion bombardment of solid state samples or thin films was designed and built for ion fluences between 1 x 10(12) and 1 x 10(17) ions/cm(2) The system was designed to be mounted to different diffraction chambers for soft x ray resonant magnetic scattering. Without breaking the vacuum due to He ion bombardment, structural and magnetic modifications of the samples can be studied in situ and element specifically.
The Review of scientific instruments