Pattern Recognition in Analog Wafermaps with Multiple Ensemble Approaches
A wafer is a thin slice or substrate of semiconductors used for the fabrication of microelectronics devices. Thus, a large scale of precision is needed to make the microdevices work properly and to meet the requirements. Wafer test is an important step in wafer manufacturing to validate the activity of the microdevices and produces pictures of each wafer based on the electrical measurement of each of the devices on the wafer. Wafer shows different patterns while testing based on the requirement gap present on some of the devices on the wafer. To detect this error pattern manually is almost an impossible and time consuming act. Therefore, we are presenting a wafer map pattern recognition system based on some ensemble approaches. Three (3) different ensemble including bagging, boosting, and voting approaches are implemented. Bagging performs relatively better than the others.
2021 2nd International Conference on Robotics, Electrical and Signal Processing Techniques (ICREST)