Three Dimensional RF MEMS Switch for Power Applications
This paper introduces a new concept in 3 D RF microelectromechanical systems switches intended for power applications. The novel switch architecture employs electrothermal hydraulic microactuators to provide mechanical actuation and 3 D out of plane silicon cantilevers that have both spring action and latching mechanisms. This facilitates an off state gap separation distance of 200 mum between ohmic contacts, without the need for any hold power. Having a simple assembly, many of the inherent problems associated with the more traditional suspension bridge and cantilever type beam architectures can be overcome. A single pole single throw switch has been investigated, and its measured on state insertion and return losses are less than 0.3 dB up to 10 GHz and greater than 15 dB up to 12 GHz, respectively, while the off state isolation is better than 30 dB up to 12 GHz. The switch works well in both hot and cold switching modes, with 4.6 W of RF power at 10 GHz and without any signs of degradation to the ohmic contacts.
IEEE Transactions on Industrial Electronics