Novel flexible array pressure sensor
The invention provides a novel flexible array pressure sensor, including an upper flexible thin layer, an upper electrode layer, a pressure sensitive unit array, a lower electrode layer and a lower flexible thin layer in order from top to bottom. The pressure sensitive unit array comprises n identical pressure sensitive units, each pressure sensitive unit comprises a pn junction and a pressure sensitive film, and the pn junction is composed of a p type semiconductor film and a n type semiconductor film. Each pressure sensitive unit of the flexible array pressure sensor is of a serially connected structure composed of one pressure sensitive film and one pn junction rectification diode. During measurement of resistance change of a single sensitive point, and the unilateral conduction feature of the pn junction rectification diode enables sensitive points on a sensor array not to form a current loop, so that the cross coupling between array resistors is effectively prevented. The sensor is small in size and light in weight, and the low cost large scale batch production is easy to achieve.