The valve assembly of the substrate storage container
Substrate storage container comprises a container portion having an open side or bottom, open the side or bottom door closing and sealing the one of the door and the container portion defines an access structure. Substrate storage container comprises the upper check valve assembly, the check valve assembly is locked to the access structure provides fluid communication between the interior of the substrate container. The check valve assembly includes a grommet, the grommet is formed of elastomeric material. Valve seat is disposed inside the grommet, the valve seat, according to one embodiment, grommets and is integrally formed, and according to another embodiment are formed from separate pieces. Elastomeric valve member, according to one aspect in particular, elastomeric umbrella valve member is disposed within the grommet, and is held to engage the valve seat, whereby the check with respect to the interior of the substrate container restricting the flow of fluid through the valve assembly. .FIELD 7