X ray Microanalysis and Electron Energy Loss Spectroscopy (EELS)
Abstract When a beam of electrons with different energies bombards a material, the interaction of electrons within that material undergoes either elastic or inelastic scattering. Both are important in identifying structural, compositional, and sometimes bonding information of the material. In determination of structural information both X ray spectroscopy and electron energy loss spectroscopy (EELS) have equal importance, which are related to the incident electrons. The importance of X ray spectroscopy as absorption and emission in analysis of material given in detail, depending on different aspects along with advantages and disadvantages, is also discussed. The dependence of energy distribution on EELS after the interaction and the influencing parameters are discussed. Different applications of this spectroscopy are reported with their advantages and disadvantages.