A hybrid microwave furnace and radiant heating system
A furnace system for heat treatment of articles and materials is disclosed, the system is particularly suitable for treating furnace for the tablet and the touch screen silicon wafers for solar cell structure. The system utilizes a hybrid microwave radiation heating of the workpiece and to provide a controlled heating of the workpiece. A plurality of receivers placed in a furnace chamber. A plurality of microwave sources arranged to provide uniform heating of the microwave radiation in the chamber to uniformly heat the chamber and to provide a workpiece receiver. After the receiver in the microwave heating by the microwave source acting in the chamber that provides uniform radiant heating of a workpiece.