Temple married Jane Yarner (died 1708), daughter of Sir Abraham Yarner (died 1677), the Muster-master for Ireland, in 1663 and had numerous children with her, of whom at least seven reached adulthood. The eldest surviving son, Henry (c.1673–1757) became the first Viscount Palmerston. The younger son John, of Dublin, married his cousin Elizabeth Temple, but had no children.