2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int dx[] = {0, 0, 1, -1};
int dy[] = {1, -1, 0, 0};
int dx8[] = {0, 0, 1, 1, 1, -1, -1, -1};
int dy8[] = {1, -1, -1, 0, 1, -1, 0, 1};
int kx8[] = {1, 1, 2, 2, -1, -1, -2, -2};
int ky8[] = {2, -2, 1, -1, 2, -2, 1, -1};
const int M = (1 << 20) + 5;
long long dp[M];
long long relax(long long val) {
  if (val >= 1000000007) val -= 1000000007;
  if (val >= 1000000007) val %= 1000000007;
  if (val < 0) val += 1000000007;
  return val;
}
long long pwr[M];
int main() {
  ios_base::sync_with_stdio(0);
  cin.tie(0);
  long long n, N, m;
  cin >> m;
  for (int i = 0; i < (m); i++) {
    int a;
    cin >> a;
    dp[a]++;
  }
  pwr[0] = 1;
  for (int i = 1; i <= m; i++) {
    pwr[i] = (pwr[i - 1] * 2LL) % 1000000007;
  }
  N = 20;
  n = (1 << N);
  for (int i = 0; i < N; ++i) {
    for (int mask = n - 1; mask >= 0; --mask) {
      if (!(bool)(mask & (1 << i))) {
        dp[mask] += dp[mask ^ (1 << i)];
      }
    }
  }
  long long res = 0;
  for (long long i = 0; i < n; i++) {
    if (__builtin_popcountll(i) % 2) {
      res -= pwr[dp[i]];
      res = relax(res);
    } else {
      res += pwr[dp[i]];
      res = relax(res);
    }
  }
  cout << res << endl;
  return 0;
}
