2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1e5 + 5;
const int M = 1 << 20;
const int mod = 1e9 + 7;
int cnt[M];
int dp[M];
int pow2[N];
int n, m;
int getbit(int x, int i) { return (x >> i) & 1; }
int main() {
  ios_base::sync_with_stdio(0);
  cin.tie(0);
  cin >> n;
  m = 20;
  for (int i = 1; i <= n; i++) {
    int mask = 0;
    cin >> mask;
    mask = (M - 1) ^ mask;
    cnt[mask]++;
  }
  for (int i = 0; i < m; i++)
    for (int mask = 0; mask < (1 << m); mask++)
      if (getbit(mask, i)) cnt[mask] += cnt[mask ^ (1 << i)];
  pow2[0] = 1;
  for (int i = 1; i <= n; i++) pow2[i] = pow2[i - 1] * 2 % mod;
  for (int mask = 0; mask < (1 << m); mask++)
    dp[mask] = (pow2[cnt[mask]] + mod - 1) % mod;
  for (int i = 0; i < m; i++)
    for (int mask = 0; mask < (1 << m); mask++)
      if (getbit(mask, i)) {
        dp[mask] += mod - dp[mask ^ (1 << i)];
        if (dp[mask] >= mod) dp[mask] -= mod;
      }
  cout << dp[M - 1];
  return 0;
}
