2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int Mod = 1000000007;
int f[1 << 20];
int p[1 << 20];
int main() {
  int n;
  scanf("%d", &n);
  for (int i = 0; i < n; ++i) {
    int x;
    scanf("%d", &x);
    f[x] += 1;
  }
  for (int i = 1; i < (1 << 20); i *= 2) {
    for (int j = (1 << 20) - 1; j >= 0; --j) {
      if ((j & i) != 0) {
        f[j ^ i] += f[j];
      }
    }
  }
  int ans = 0;
  p[0] = 1;
  for (int i = 1; i < (1 << 20); ++i) p[i] = (p[i - 1] * 2) % Mod;
  for (int i = 0; i < (1 << 20); ++i) {
    int cnt = __builtin_popcount(i);
    if (cnt & 1)
      ans -= p[f[i]];
    else
      ans += p[f[i]];
    ans %= Mod;
  }
  ans += Mod, ans %= Mod;
  printf("%d\n", ans);
  return 0;
}
