2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
const int maxn = 2500005;
const int mod = 1e9 + 7;
inline int read() {
  char c = getchar();
  int x = 0;
  while (c < '0' || x > '9') c = getchar();
  while (c >= '0' && c <= '9') x = (x << 3) + (x << 1) + c - 48, c = getchar();
  return x;
}
int len, n, M;
long long S[maxn], A[maxn], a[maxn], pw[maxn];
inline void Fwt(long long *f, int o) {
  for (register int i = 2; i <= len; i <<= 1)
    for (register int ln = i >> 1, l = 0; l < len; l += i)
      for (register int x = l; x < l + ln; ++x)
        f[x] += o * f[ln + x], f[x] = (f[x] + mod) % mod;
}
int main() {
  n = read();
  for (register int i = 1; i <= n; i++)
    a[i] = read(), M = ((M) > (a[i]) ? (M) : (a[i]));
  len = 1;
  while (len <= M) len <<= 1;
  pw[0] = 1;
  for (register int i = 1; i <= n; i++) pw[i] = (pw[i - 1] + pw[i - 1]) % mod;
  for (register int i = 1; i <= n; i++) A[a[i]]++;
  S[len - 1] = 1;
  Fwt(S, 1);
  Fwt(A, 1);
  for (register int i = 0; i < len; i++) S[i] = (S[i] * pw[A[i]]) % mod;
  Fwt(S, -1);
  std::cout << S[0];
  return 0;
}
