2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1 << 20;
const long long MOD = 1e9 + 7;
int n, m;
long long dp[21][N];
long long g[N];
bool s[N];
void init() {
  scanf("%d", &n);
  g[0] = 1;
  for (int i = 1; i <= n; i++) g[i] = (g[i - 1] << 1LL) % MOD;
  int f0;
  for (int i = 1; i <= n; i++) {
    scanf("%d", &f0);
    dp[0][f0]++;
  }
}
void work() {
  for (int i = 1; i <= 20; i++) {
    for (int j = 0; j < N; j++)
      if ((j & (1 << (i - 1))) == 0)
        dp[i][j] = dp[i - 1][j] + dp[i - 1][j | (1 << (i - 1))];
      else
        dp[i][j] = dp[i - 1][j], s[j] ^= 1;
  }
  long long ans = 0;
  for (int i = 0; i < N; i++)
    ans = (ans + (s[i] ? (-1LL) : 1LL) * g[dp[20][i]] + MOD) % MOD;
  printf("%I64d\n", ans);
}
int main() {
  init();
  work();
  return 0;
}
