2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
const double eps = 0.000000001;
using namespace std;
const int mx_n = 1024 * 1024;
int a[mx_n];
int F[mx_n];
int two[mx_n];
void solve() {
  int N = 20;
  int n;
  cin >> n;
  fill(F, F + mx_n, 0);
  fill(a, a + mx_n, 0);
  vector<int> b;
  int x;
  for (int i = 0; i < n; i++) {
    cin >> x;
    a[((1 << N) - 1) ^ x]++;
  }
  two[0] = 1;
  for (int i = 1; i < mx_n; i++) {
    two[i] = two[i - 1] * 2;
    if (two[i] > 1000000007) two[i] -= 1000000007;
  }
  for (int i = 0; i < (1 << N); ++i) F[i] = a[i];
  for (int i = 0; i < N; ++i)
    for (int mask = 0; mask < (1 << N); ++mask) {
      if (mask & (1 << i)) F[mask] += F[mask ^ (1 << i)];
    }
  long long ans = 0;
  for (int i = 0; i < (1 << N); i++) {
    int tmp = two[F[((1 << N) - 1) ^ i]];
    int u = __builtin_popcount(i);
    if (u % 2 == 1) tmp *= -1;
    ans = (tmp + ans) % 1000000007;
  }
  ans = (ans + 1000000007) % 1000000007;
  printf("%lld", ans);
}
int main(int argc, char const *argv[]) {
  int t = 1;
  while (t--) {
    solve();
  }
}
