2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int fastMax(int x, int y) { return (((y - x) >> (32 - 1)) & (x ^ y)) ^ y; }
int fastMin(int x, int y) { return (((y - x) >> (32 - 1)) & (x ^ y)) ^ x; }
const long long int N = 20;
const long long int MAXN = 1 << N;
const long long int MOD = 1e9 + 7;
long long int power(long long int x, long long int y) {
  long long int res = 1;
  while (y > 0) {
    if (y & 1) res = (res * x) % MOD;
    x = (x * x) % MOD;
    y >>= 1;
  }
  return res;
}
long long int A[MAXN], F[MAXN];
void solve() {
  long long int n;
  cin >> n;
  for (int i = (1); i <= (n); ++i) {
    cin >> A[i];
    F[A[i]]++;
  }
  for (int i = (0); i <= (N - 1); ++i) {
    for (int mask = (0); mask <= (MAXN - 1); ++mask) {
      if (mask & (1 << i)) F[mask ^ (1 << i)] += F[mask];
    }
  }
  long long int ans = 0;
  for (int i = (0); i <= (MAXN - 1); ++i) {
    long long int b = __builtin_popcount(i);
    long long int cnt = power(2, F[i]);
    if (b & 1) cnt = MOD - cnt;
    ans += cnt;
    ans %= MOD;
  }
  cout << ans << endl;
}
signed main() {
  ios::sync_with_stdio(0);
  cin.tie(0);
  cout.tie(0);
  ;
  long long int t;
  t = 1;
  while (t--) solve();
}
