2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 2e6 + 5, hgs = 1e9 + 7, K = 19;
int n, x, f[N], un[N];
void Solution(int Base) {
  for (int k = 0; k <= K; ++k)
    for (int i = 0; i <= n; ++i)
      if (!(i & (1 << k))) f[i] = (f[i] + f[i | (1 << k)] * Base + hgs) % hgs;
}
signed main() {
  scanf("%d", &n);
  for (int i = 1; i <= n; ++i) scanf("%d", &x), ++f[x];
  for (int i = 1; i <= n; ++i) un[i] = (un[i - 1] << 1 | 1) % hgs;
  Solution(1);
  for (int i = 0; i <= n; ++i) f[i] = un[f[i]];
  Solution(-1);
  printf("%d\n", f[0]);
  return 0;
}
