2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
const int inf = 0xfffffff;
const long long INF = 1ll << 61;
using namespace std;
const int MOD = 1000000007;
int num[1000000 + 5];
int dp[1000000 + 5];
int n;
void init() {
  memset(num, 0, sizeof(num));
  memset(dp, 0, sizeof(dp));
}
void cal(int &x, int y) {
  x += y;
  if (x >= MOD) x -= MOD;
  if (x < 0) x += MOD;
}
int quick(long long a, long long b) {
  long long ans = 1;
  while (b) {
    if (b & 1) {
      ans = ans * a % MOD;
      b--;
    }
    b >>= 1;
    a = a * a % MOD;
  }
  ans--;
  if (ans < 0) ans += MOD;
  return ans;
}
int main() {
  int n;
  while (scanf("%d", &n) == 1) {
    init();
    for (int i = 1; i <= n; i++) scanf("%d", &num[i]);
    int tmp = (1 << 20) - 1;
    for (int i = 1; i <= n; i++) num[i] ^= tmp;
    for (int i = 1; i <= n; i++) dp[num[i]]++;
    for (int i = 0; i < 20; i++)
      for (int j = 0; j <= tmp; j++)
        if ((j >> i) & 1) cal(dp[j], dp[j ^ (1 << i)]);
    int ans = 0;
    for (int i = 0; i <= tmp; i++) {
      int cnt = 0;
      for (int j = 0; j < 20; j++)
        if ((i >> j) & 1) cnt++;
      if (cnt & 1)
        cal(ans, -quick(2, dp[i]));
      else
        cal(ans, quick(2, dp[i]));
    }
    printf("%d\n", ans);
  }
  return 0;
}
