2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
constexpr int MAX = 1 << 20;
constexpr int MOD = 1e9 + 7;
int count_bits(int n) {
  int result = 0;
  while (n) {
    result += (n % 2);
    n >>= 1;
  }
  return result;
}
int pow2(int deg) {
  if (deg == 0) {
    return 1;
  }
  int result = pow2(deg >> 1);
  result = (result * result) % MOD;
  return (deg % 2) ? (2 * result) % MOD : result;
}
int count_zero_groups(const std::vector<int>& vector) {
  std::vector<int> dp(MAX);
  for (auto x : vector) {
    dp[x] += 1;
  }
  for (int i = 1; i < MAX; i <<= 1) {
    for (int j = 0; j < dp.size(); ++j) {
      if ((j & i) == 0) {
        dp[j] += dp[j + i];
      }
    }
  }
  int result = (pow2(vector.size()) + MOD - 1) % MOD;
  for (int i = 1; i < MAX; ++i) {
    const auto p = (pow2(dp[i]) + MOD - 1) % MOD;
    result += (count_bits(i) % 2) ? (MOD - p) : p;
    result = result % MOD;
  }
  return result;
}
int main() {
  std::cin.tie(nullptr);
  std::ios::sync_with_stdio(false);
  int size;
  std::cin >> size;
  std::vector<int> vector(size);
  for (auto& x : vector) {
    std::cin >> x;
  }
  std::cout << count_zero_groups(vector) << '\n';
  return 0;
}
