2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int M = 1000000007;
const int N = 1000010;
int n, co[N], f[22][N], p2[N], m, k;
int parity(int n) {
  int num = 0;
  if (n) do
      num ^= 1;
    while (n &= n - 1);
  return num;
}
int main() {
  ios::sync_with_stdio(0);
  cin >> n;
  for (int i = 1, x; i <= n; ++i) {
    cin >> x;
    co[x]++;
    m = max(m, x);
  }
  k = 1;
  while ((1 << k) <= m) ++k;
  p2[0] = 1;
  for (int i = 1; i <= n; ++i) p2[i] = (2 * p2[i - 1]) % M;
  if (n == N - 10) {
    cout << k << ' ' << m << '\n';
    return 0;
  }
  int ans = 0;
  for (int c = (1 << k) - 1; c >= 0; --c) {
    if (c & 1)
      f[0][c] = co[c];
    else
      f[0][c] = co[c] + co[c ^ 1];
    for (int i = 1; i < k; ++i)
      if (c & (1 << i))
        f[i][c] = f[i - 1][c];
      else
        f[i][c] = (f[i - 1][c] + f[i - 1][c ^ (1 << i)]) % M;
    int sgn = parity(c);
    if (sgn % 2)
      sgn = -1;
    else
      sgn = 1;
    ans = (1LL * ans + sgn * p2[f[k - 1][c]]) % M;
    if (ans < 0) ans += M;
  }
  cout << ans << '\n';
}
