2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = 1e9 + 7;
int n, m, dp[2][1200005], f[1200005];
inline int exp(int x, int y) {
  int ans = 1;
  while (y) {
    if (y & 1) ans = (long long)ans * x % mod;
    x = (long long)x * x % mod;
    y >>= 1;
  }
  return ans;
}
int main() {
  scanf("%d", &n);
  int k = 0;
  for (int i = 1; i <= n; i++) {
    int x;
    scanf("%d", &x);
    dp[k][x]++;
    m = max(m, x);
    f[x]++;
  }
  n = 2;
  while (n <= m) n <<= 1;
  for (int i = 1; i < 20; i++) {
    k ^= 1;
    for (int j = 0; j < n; j++) {
      dp[k][j] = 0;
      for (int l = 0; l < 20; l++)
        if (!(j & (1 << l))) dp[k][j] += dp[k ^ 1][j ^ (1 << l)];
      dp[k][j] /= i;
      f[j] = f[j] + dp[k][j];
    }
  }
  int ans = 0;
  for (int i = 0; i < n; i++) {
    if (f[i] < 0) return 0;
    int num = 0, t = exp(2, f[i]);
    for (int j = 0; j < 20; j++)
      if (i & (1 << j)) num++;
    if (num & 1)
      ans = (ans - t + mod) % mod;
    else
      ans = (ans + t) % mod;
  }
  printf("%d\n", ans);
}
