2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
#pragma comment(linker, "/STACK:100000000")
using namespace std;
int h[1200100], d[1200100], p[1200100];
int main() {
  int i, j, k, n;
  for (scanf("%d", &n); n--; scanf("%d", &i), h[i]++)
    ;
  for (p[0] = 1, i = 1; i < 1200100; p[i] = p[i - 1] * 2 % 1000000007, i++)
    ;
  for (i = 0; i < (1 << 20); i++) {
    if (__builtin_popcount(i) <= 10) {
      if (h[i]) {
        for (j = i; j; d[j] += h[i], j--, j &= i)
          ;
        d[j] += h[i];
      }
    } else {
      for (j = i; j < (1 << 20); d[i] += h[j], j++, j |= i)
        ;
    }
  }
  k = 0;
  for (i = 0; i < (1 << 20); i++) {
    if (__builtin_popcount(i) % 2)
      k = (k - p[d[i]] + 1 + 1000000007) % 1000000007;
    else
      k = (k + p[d[i]] - 1) % 1000000007;
  }
  printf("%d\n", k);
  return 0;
}
