2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
long long int cnt[1 << 20];
inline long long int pow(long long int x, long long int y, long long int p) {
  long long int ans = 1;
  x = x % p;
  while (y > 0) {
    if (y & 1) ans = (ans * x) % p;
    y = y >> 1;
    x = (x * x) % p;
  }
  return ans;
}
inline long long int invmod(long long int x, long long int p) {
  return pow(x, p - 2, p);
}
int main() {
  ios_base::sync_with_stdio(false);
  cin.tie(NULL);
  cout.tie(NULL);
  ;
  long long int n, m;
  cin >> n;
  m = 20;
  long long int rev = (1 << m) - 1;
  for (long long int i = 0; i < n; i++) {
    long long int x;
    cin >> x;
    cnt[x]++;
  }
  for (long long int i = 0; i < m; i++)
    for (long long int j = rev; j >= 0; j--)
      if ((j & (1 << i)) == 0) cnt[j] += cnt[j ^ (1 << i)];
  long long int ans = 0;
  for (long long int i = 0; i <= rev; i++) {
    long long int x = pow(2, cnt[i], 1000000007) - 1;
    long long int y = (__builtin_popcount(i)) % 2;
    if (y)
      ans = (ans - x) % 1000000007;
    else
      ans = (ans + x) % 1000000007;
  }
  cout << (ans + 1000000007) % 1000000007;
}
