2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int INF = 0x3f3f3f3f;
const long long LINF = 0x3f3f3f3f3f3f3f3fll;
const int MAXN = 2e6 + 10;
const int MOD = 1e9 + 7;
int cnt[MAXN], q[MAXN];
long long pow2[MAXN];
void build(int l, int r) {
  if (r - l == 1) {
    q[l] = cnt[l];
    return;
  }
  int mid = (l + r) / 2;
  build(l, mid);
  build(mid, r);
  for (int a = l; a < mid; ++a) q[a] = q[a] + q[a + mid - l];
}
int main() {
  int n;
  scanf("%d", &n);
  for (int a = 0; a < n; ++a) {
    int x;
    scanf("%d", &x);
    cnt[x]++;
  }
  pow2[0] = 1;
  for (int a = 1; a < MAXN; ++a) pow2[a] = (2 * pow2[a - 1]) % MOD;
  build(0, 1 << 20);
  long long ans = 0;
  for (int m = 0; m < (1 << 20); ++m) {
    if (__builtin_popcount(m) & 1)
      ans -= pow2[q[m]];
    else
      ans += pow2[q[m]];
    ans %= MOD;
  }
  cout << (ans + MOD) % MOD << endl;
  return 0;
}
