2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int block = 400;
const long long base = 31, base2 = 37;
const long long mod = 1e9 + 7, mod2 = 1e9 + 9;
int a[1000011], n, freq[(1 << 22) + 10];
long long f[(1 << 22) + 10];
long long quickPow(int x, int y) {
  if (y == 0) return 1;
  long long tmp = quickPow(x, y / 2) % mod;
  if (y % 2) return (((tmp * tmp) % mod) * x) % mod;
  return (tmp * tmp) % mod;
}
int main() {
  ios::sync_with_stdio(0);
  cin.tie(0);
  cin >> n;
  for (int i = 1; i <= n; i++) {
    cin >> a[i];
    f[a[i]]++;
  }
  long long ans = 0;
  for (int j = 0; j <= 20; j++) {
    for (int mask = 0; mask <= 1e6; mask++) {
      if ((mask & (1 << j)) == 0) {
        f[mask] = (f[mask] + f[mask + (1 << j)]) % mod;
        assert(mask + (1 << j) < (1 << 22));
        assert(f[mask] >= 0);
      }
    }
  }
  for (int i = 0; i < (1 << 20); i++) {
    long long mul = 1;
    if (__builtin_popcount(i) % 2 == 1) mul = -1;
    ans = (ans + ((mul * quickPow(2, f[i])) % mod)) % mod;
    ans = (ans + mod * mod) % mod;
    if (ans < 0) {
      break;
    }
  }
  cout << ans;
  return 0;
}
