2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
bool check(long long n, long long pos) { return n & (1LL << pos); }
long long Set(long long n, long long pos) { return n = n | (1LL << pos); }
long long dp[2000006];
void solve() {
  for (long long i = 20 - 1; i >= 0; i--) {
    for (long long j = 0; j < (1 << 20); j++) {
      if (check(j, i) == 0) dp[j] += dp[j + (1 << i)];
    }
  }
}
long long power(long long x, long long y, long long p) {
  long long res = 1;
  x = x % p;
  while (y > 0) {
    if (y & 1) res = (res * x) % p;
    y = y >> 1;
    x = (x * x) % p;
  }
  return res;
}
int main() {
  long long i, j, k, l, m, n, o, r, q;
  long long testcase;
  long long input, flag, tag, ans;
  while (cin >> n) {
    memset(dp, 0, sizeof dp);
    for (i = 1; i <= n; i++) {
      scanf("%lld", &input);
      dp[input] = 1;
    }
    solve();
    ans = 0;
    for (i = 0; i < (1 << 20); i++) {
      long long one = __builtin_popcount(i);
      if (one & 1)
        ans -= power(2, dp[i], 1000000007);
      else
        ans += power(2, dp[i], 1000000007);
      if (ans < 0) ans = (ans + 1000000007) % 1000000007;
    }
    cout << ans << "\n";
  }
}
