2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = (int)1e6 + 9, K = 20, M = 1 << K, mod = (int)1e9 + 7;
int n, a[N], f[M], pw[N] = {1};
short builtin_popcount(int x) {
  short ans = 0;
  while (x) {
    ans += (x & 1);
    x >>= 1;
  }
  return ans;
}
int main() {
  ios_base::sync_with_stdio(false);
  cin.tie(nullptr);
  cin >> n;
  for (int i = 1, a; i <= n; ++i) {
    cin >> a;
    ++f[a];
    pw[i] = pw[i - 1] << 1;
    if (pw[i] > mod) pw[i] -= mod;
  }
  for (int i = 0; i < K; ++i)
    for (int mask = 0; mask < M; ++mask)
      if (!(mask & (1 << i))) f[mask] += f[mask ^ (1 << i)];
  long long ans = 0;
  for (int mask = 0; mask < M; ++mask) {
    if (builtin_popcount(mask) & 1)
      ans -= pw[f[mask]];
    else
      ans += pw[f[mask]];
  }
  ans %= mod;
  if (ans < 0) ans += mod;
  cout << ans;
}
