2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MOD = 1000000007;
const int MAXN = 1000010;
long long bipo[MAXN];
int N, dp[1 << 21];
int main() {
  scanf("%d", &N);
  bipo[0] = 1;
  int i, j;
  for (i = 1; i <= N; i++) bipo[i] = (bipo[i - 1] * 2) % MOD;
  for (i = 0; i <= 0x1FFFF; i++) dp[i] = 0;
  for (i = 1; i <= N; i++) {
    int u;
    scanf("%d", &u);
    dp[u]++;
  }
  for (i = 0; i <= 20; i++)
    for (j = 0; j <= 0x1FFFF; j++)
      if ((j & (1 << i)) == 0) dp[j] += dp[j + (1 << i)];
  long long ans = 0;
  for (i = 0; i <= 0x1FFFF; i++)
    if (__builtin_popcount(i) & 1)
      ans -= bipo[dp[i]];
    else
      ans += bipo[dp[i]];
  ans %= MOD;
  ans += MOD;
  ans %= MOD;
  printf("%I64d\n", ans);
}
