2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int t, n, a[2000005], f[2000005], g[2000005], cnt[2000005];
int pow_mod(int a, int i) {
  int s = 1;
  while (i) {
    if (i & 1) s = 1LL * s * a % 1000000007;
    a = 1LL * a * a % 1000000007;
    i = i >> 1;
  }
  return s;
}
int bit(int x) {
  if (x == 0) return 0;
  return bit(x >> 1) + (x & 1);
}
int main() {
  scanf("%d", &n);
  memset(a, 0, sizeof(a));
  for (int i = 0; i < n; i++) {
    scanf("%d", &a[i]);
    cnt[(1 << 20) - 1 - a[i]]++;
  }
  for (int i = 0; i < (1 << 20); i++) f[i] = cnt[i];
  for (int i = 0; i < 20; i++) {
    for (int mask = 0; mask < (1 << 20); mask++)
      if (mask & (1 << i)) f[mask] += f[mask ^ (1 << i)];
  }
  int ans = 0;
  for (int mask = 0; mask < (1 << 20); mask++) {
    int flag = (bit(mask) & 1) ? -1 : 1;
    ans = (ans + flag * (pow_mod(2, f[mask]) - 1) + 1000000007) % 1000000007;
  }
  printf("%d\n", ans);
  return 0;
}
