2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int Mo = 1000000007;
int All, n, i, j, k;
int a[2000005], b[2000005], f[2000005];
long long two[2000005], ans, tmp;
int main() {
  All = (1 << 20) - 1;
  scanf("%d", &n);
  for (i = 1; i <= n; i++) scanf("%d", &a[i]), b[a[i]]++;
  two[0] = 1;
  for (i = 1; i <= n; i++) two[i] = two[i - 1] * 2 % Mo;
  for (i = 0; i < 20; i++)
    for (j = 0; j <= All; j++)
      if (j & (1 << i)) b[j - (1 << i)] += b[j], f[j]++;
  for (i = 0; i <= All; i++) {
    tmp = (two[b[i]] + Mo - 1) % Mo;
    if (f[i] & 1)
      ans = (ans + Mo - tmp) % Mo;
    else
      ans = (ans + tmp) % Mo;
  }
  printf("%I64d\n", ans);
}
