2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = (1 << 21) + 5;
const int mod = 1e9 + 7;
int dp[22][maxn];
int ted[maxn], n;
long long t2[maxn], ans;
int main() {
  t2[0] = 1;
  for (int i = 1; i < (1 << 21); i++) t2[i] = (t2[i - 1] * 2) % mod;
  cin >> n;
  for (int i = 1; i <= n; i++) {
    int a;
    cin >> a;
    ted[a]++;
  }
  for (int i = 0; i < (1 << 21); i++) dp[0][i] = ted[i];
  for (long long k = 1; k <= 20; k++)
    for (long long i = 0; i < (1 << 21); i++) {
      if ((i >> (k - 1)) & 1)
        dp[k][i] = dp[k - 1][i];
      else
        dp[k][i] = dp[k - 1][i] + dp[k - 1][i + (1 << (k - 1))];
    }
  for (int i = 0; i < (1 << 21); i++) {
    if ((__builtin_popcount(i)) % 2)
      ans = (ans - t2[dp[20][i]]) % mod;
    else
      ans = (ans + t2[dp[20][i]]) % mod;
  }
  ans = (ans + mod) % mod;
  cout << ans << endl;
  return 0;
}
