2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
long long read() {
  long long x = 0, f = 1;
  char ch;
  while (ch < '0' || ch > '9') {
    if (ch == '-') f = -1;
    ch = getchar();
  }
  while (ch <= '9' && ch >= '0') {
    x = x * 10 + ch - '0';
    ch = getchar();
  }
  return f * x;
}
long long count(long long x) {
  long long ans = 0;
  for (; x; x -= (x & -x)) ans++;
  return ans;
}
long long fu(long long x) { return x & 1 ? -1 : 1; }
long long g[1050000], n, a, po[1050000];
long long ans;
int main() {
  n = read();
  po[0] = 1;
  for (long long i = 1; i <= n; i++) {
    a = read();
    g[a]++;
  }
  for (long long i = 0; i <= 20; i++) {
    for (long long j = 0; j <= 1000000; j++) {
      if (j & (1 << i)) g[j ^ (1 << i)] += g[j];
    }
  }
  for (long long i = 1; i <= 1000000; i++) po[i] = po[i - 1] * 2 % 1000000007;
  for (long long i = 0; i <= 1000000; i++) {
    ans = ((ans + fu(count(i)) * (po[g[i]] - 1)) % 1000000007 + 1000000007) %
          1000000007;
  }
  printf("%lld\n", ans);
  return 0;
}
