2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
int in() {
  int r = 0, c;
  for (c = getchar(); c <= 32; c = getchar())
    ;
  if (c == '-') return -in();
  for (; c > 32; r = (r << 1) + (r << 3) + c - '0', c = getchar())
    ;
  return r;
}
using namespace std;
long long pot(long long b, long long e) {
  if (e == 0ll) return 1ll;
  return (pot((b * b) % 1000000007, e / 2) * (e & 1 ? b : 1)) % 1000000007;
}
int main() {
  ios::sync_with_stdio(false);
  cin.tie(0);
  int n, a, ma = 0;
  cin >> n;
  int arr[n];
  for (int i = 0; i < n; i++) {
    cin >> arr[i];
    ma = max(ma, arr[i]);
  }
  int N = ceil(log2(ma));
  long long ar[(1 << N)];
  memset(ar, 0, sizeof(ar));
  for (int i = 0; i < n; i++) {
    ar[(1 << N) - 1 - arr[i]]++;
  }
  for (int i = 0; i < N; i++)
    for (int mask = 0; mask <= (1 << N); mask++) {
      if (mask & (1 << i)) {
        ar[mask] += ar[mask ^ (1 << i)];
      }
    }
  long long res = 0;
  for (int i = 0; i < (1 << N); i++) {
    res += ((__builtin_popcount(i) & 1 ? 1 : -1) * pot(2, ar[i]));
    res %= 1000000007;
  }
  cout << abs(res);
  return 0;
}
