2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
long long int n;
long long int first[(1LL << 20) + 2];
long long int expo(long long int base, long long int exponent,
                   long long int mod) {
  long long int ans = 1;
  while (exponent != 0) {
    if ((exponent & 1) == 1) {
      ans = ans * base;
      ans = ans % mod;
    }
    base = base * base;
    base %= mod;
    exponent >>= 1;
  }
  return ans % mod;
}
int main() {
  ios_base::sync_with_stdio(false);
  cin.tie(0);
  cout.tie(0);
  long long int i, j;
  cin >> n;
  memset(first, 0, sizeof first);
  for (i = 0; i < n; i++) {
    long long int x;
    cin >> x;
    first[x]++;
  }
  for (long long int i = 0; i < 20; ++i) {
    for (long long int mask = 0; mask < (1LL << 20); ++mask) {
      if (!(mask & (1LL << i))) {
        first[mask] += first[mask | (1LL << i)];
      }
    }
  }
  long long int ans = 0;
  for (i = 0; i < (1LL << 20); i++) {
    long long int setbits = (long long int)(__builtin_popcount(i));
    if (setbits % 2)
      ans = (ans - expo(2LL, first[i], 1000000007) + 1000000007) % 1000000007;
    else
      ans = (ans + expo(2LL, first[i], 1000000007)) % 1000000007;
  }
  cout << ans;
  return 0;
}
