2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxK = 20;
const int maxN = (1 << maxK);
const int INF = (int)1e9;
const long long MOD = 7 + (long long)1e9;
const double eps = 1e-9;
int A[maxN];
int F[maxN];
int bits(int m) {
  int res = 0;
  for (int i = 0; i < maxK; i++) {
    res += (m >> i) & 1;
  }
  return res;
}
long long pow2[maxN + 5];
int main(void) {
  int n;
  cin >> n;
  pow2[0] = 1;
  for (int i = 0; i < n; i++) {
    int x;
    scanf("%d", &x);
    F[x]++;
    pow2[i + 1] = (pow2[i] * 2LL) % MOD;
  }
  for (int i = maxK - 1; i >= 0; i--) {
    for (int mask = (1 << i); mask < maxN; mask++) {
      if ((1 << i) & mask) {
        F[mask ^ (1 << i)] += F[mask];
      }
    }
  }
  long long res = 0;
  for (int mask = 0; mask < maxN; mask++) {
    if (bits(mask) & 1) {
      res = (res - (pow2[F[mask]] - 1) + MOD) % MOD;
    } else {
      res = (res + (pow2[F[mask]] - 1) + MOD) % MOD;
    }
  }
  cout << res << endl;
  return 0;
}
