2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int dp[21][(1 << 20)], pw[1000005];
int main() {
  int n, i, x, mask, cnt;
  cin >> n;
  for (i = 1; i <= n; i++) {
    cin >> x;
    dp[0][x]++;
  }
  for (i = 1; i <= 20; i++) {
    for (mask = 0; mask < (1 << 20); ++mask) {
      if (mask & (1 << (i - 1)))
        dp[i][mask] = dp[i - 1][mask];
      else {
        dp[i][mask] = dp[i - 1][mask] + dp[i - 1][mask + (1 << (i - 1))];
      }
    }
  }
  pw[0] = 1;
  for (i = 1; i < 1000005; i++) pw[i] = (pw[i - 1] * 2LL) % 1000000007;
  long long ans = 0;
  for (mask = 0; mask < (1 << 20); mask++) {
    cnt = 0;
    for (i = 0; i < 20; i++) {
      if (mask & (1 << i)) cnt ^= 1;
    }
    if (cnt) {
      ans -= pw[dp[20][mask]];
      if (ans < 0) ans += 1000000007;
    } else {
      ans += pw[dp[20][mask]];
      if (ans >= 1000000007) ans -= 1000000007;
    }
  }
  cout << ans << endl;
  return 0;
}
