2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int sum[1 << 20];
const int P = 1e9 + 7;
int power(int a, int b) {
  int ans = 1, z = a;
  for (; b; b >>= 1, z = (long long)z * z % P)
    if (b & 1) ans = (long long)ans * z % P;
  return ans;
}
int main() {
  int n;
  scanf("%d", &n);
  for (int i = 1; i <= n; ++i) {
    int x;
    scanf("%d", &x);
    ++sum[x];
  }
  for (int i = 0; i < 20; ++i)
    for (int j = 0; j < 1 << 20; ++j)
      if (j >> i & 1) sum[j ^ (1 << i)] += sum[j];
  int ans = 0;
  for (int opt = 0; opt < 1 << 20; ++opt) {
    int ans1 = power(2, sum[opt]) - 1;
    if (ans1 < 0) ans1 += P;
    int cur = 0;
    for (int i = opt; i; i -= i & -i) cur ^= 1;
    if (!cur)
      ans += ans1;
    else
      ans -= ans1;
    if (ans < 0) ans += P;
    ans %= P;
  }
  printf("%d\n", ans);
  return 0;
}
