2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
const int N = 3e6 + 5;
int bit[N], pw[N], f[N];
char IN[300000], *SS = IN, *TT = IN;
inline int read() {
  int now = 0;
  register char c = getchar();
  for (; !isdigit(c); c = getchar())
    ;
  for (; isdigit(c); now = now * 10 + c - '0', c = getchar())
    ;
  return now;
}
int main() {
  int n = read(), lim = 0;
  for (int t, i = 1; i <= n; ++i) ++f[t = read()], lim = std::max(lim, t);
  pw[0] = 1;
  for (int i = 1; i <= n; ++i)
    pw[i] = pw[i - 1] << 1, pw[i] >= 1000000007 && (pw[i] -= 1000000007);
  for (int i = 0; 1 << i <= lim; ++i)
    for (int s = 0; s <= lim; ++s)
      if (!(s >> i & 1))
        (f[s] += f[s | (1 << i)]) >= 1000000007 && (f[s] -= 1000000007);
  long long ans = 0;
  for (int i = 1; i <= lim; ++i) bit[i] = bit[i ^ (i & -i)] ^ 1;
  for (int i = 0; i <= lim; ++i)
    ans += bit[i] ? 1000000007 - pw[f[i]] + 1 : pw[f[i]] - 1;
  printf("%I64d\n", ans % 1000000007);
  return 0;
}
