2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int M = 1048576;
int f[M + 10], pw[M + 10];
int siz[M + 10];
int main() {
  int n;
  scanf("%d", &n);
  pw[0] = 1;
  for (int i = 1; i <= n; i++) {
    int a;
    scanf("%d", &a);
    f[a]++;
    pw[i] = pw[i - 1] << 1;
    if (pw[i] >= 1000000007) pw[i] -= 1000000007;
  }
  for (int step = 1; step < M; step <<= 1)
    for (int i = 0; i < M; i += step << 1)
      for (int j = i; j < i + step; j++) {
        f[j] += f[j + step];
        if (f[j] >= 1000000007) f[j] -= 1000000007;
      }
  for (int i = 1; i < M; i++) siz[i] = siz[i >> 1] + (i & 1);
  int ans = 0;
  for (int i = 0; i < M; i++) {
    if (siz[i] & 1)
      ans -= pw[f[i]];
    else
      ans += pw[f[i]];
    if (ans >= 1000000007) ans -= 1000000007;
    if (ans < 0) ans += 1000000007;
  }
  printf("%d\n", ans);
  return 0;
}
