2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int findsign(int n) {
  int re = 1;
  while (n) {
    if (n % 2) re *= -1;
    n /= 2;
  }
  return re;
}
int mod = 1e9 + 7;
int a[1123456], dp[1 << 20];
int main() {
  int i, j, k, n, re = 0;
  cin >> n;
  for (int(i) = 0; (i) < (n); ++(i)) {
    cin >> a[i];
    dp[a[i]]++;
  }
  for (int(i) = 0; (i) < (20); ++(i)) {
    for (int(j) = 0; (j) < (1 << 20); ++(j))
      if (!(j & (1 << i))) dp[j] += dp[j | (1 << i)];
  }
  for (i = 0; i < (1 << 20); i++) {
    int sign = findsign(i), sum = 1;
    for (int(j) = 0; (j) < (dp[i]); ++(j)) sum *= 2;
    re = (re + sign * sum + mod) % mod;
  }
  cout << (re + mod) % mod << endl;
  return 0;
}
