2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MV = 1048576, ML = 20, MOD = 1e9 + 7;
int N, freq[MV], sup[MV];
long long int pow2(int n) {
  long long int base = 2, res = 1;
  while (n) {
    if (n & 1) res = res * base % MOD;
    base = base * base % MOD;
    n /= 2;
  }
  return res;
}
int main() {
  int n;
  scanf("%d", &N);
  for (int i = 0; i < N; i++) {
    scanf("%d", &n);
    ++freq[n];
  }
  for (int m = 0; m < MV; m++) sup[m] = freq[m];
  for (int i = 0; i < 20; i++)
    for (int m = 0; m < MV; m++)
      if (!(m & (1 << i))) sup[m] += sup[m ^ (1 << i)];
  long long int ans = 0;
  for (int m = 1; m < MV; m++) {
    if (__builtin_popcount(m) & 1)
      ans = (ans + pow2(sup[m]) - 1) % MOD;
    else
      ans = (ans + 1 + MOD - pow2(sup[m])) % MOD;
  }
  printf("%lld\n", (pow2(N) + MOD - ans - 1) % MOD);
}
