2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int n;
vector<int> cnt[20];
long long pow2[(1 << 20)];
long long solve(int i) {
  if (i + 1 == 20)
    return (pow2[cnt[i][0] + cnt[i][1]] - pow2[cnt[i][1]] + 1000000007) %
           1000000007;
  long long total = 0;
  for (int j = 0; j < (int)cnt[i + 1].size(); j++)
    cnt[i + 1][j] = cnt[i][2 * j] + cnt[i][2 * j + 1];
  total += solve(i + 1);
  for (int j = 0; j < (int)cnt[i + 1].size(); j++)
    cnt[i + 1][j] = cnt[i][2 * j + 1];
  total -= solve(i + 1);
  return total;
}
int main() {
  for (int i = 0; i < 20; i++) cnt[i].resize(1 << (20 - i));
  pow2[0] = 1;
  for (int i = 1; i < (1 << 20); i++) pow2[i] = (2 * pow2[i - 1]) % 1000000007;
  scanf("%d", &n);
  for (int i = 0; i < n; i++) {
    int a;
    scanf("%d", &a);
    cnt[0][a]++;
  }
  printf("%d\n", (int)solve(0));
}
