2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxm = 2e6 + 5;
const int mod = 1e9 + 7;
int cnt[maxm];
int p[maxm];
int d[maxm];
int a[maxm];
int n;
int cal(int x) {
  int ans = 0;
  while (x) {
    x &= (x - 1);
    ans++;
  }
  return ans;
}
signed main() {
  p[0] = 1;
  for (int i = 1; i < maxm; i++) {
    p[i] = p[i - 1] * 2 % mod;
  }
  scanf("%d", &n);
  for (int i = 1; i <= n; i++) {
    scanf("%d", &a[i]);
    cnt[a[i]]++;
  }
  for (int i = 0; i < 20; i++) {
    for (int j = (1 << 20) - 1; j >= 0; j--) {
      if (!(j >> i & 1)) {
        d[j] += d[j | (1 << i)];
        d[j] %= mod;
      }
    }
  }
  for (int i = 0; i < (1 << 20); i++) {
    d[i] = (p[d[i]] - 1 + mod) % mod;
  }
  int ans = 0;
  for (int i = 0; i < (1 << 20); i++) {
    int t = cal(i) % 2 ? -1 : 1;
    ans = (ans + t * d[i]) % mod;
  }
  ans = (ans % mod + mod) % mod;
  printf("%d\n", ans);
  return 0;
}
