2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int dp[1 << 21][22];
int P[22];
int main() {
  ios_base::sync_with_stdio(0);
  cin.tie(NULL);
  cout.tie(NULL);
  int n;
  cin >> n;
  int x;
  for (int i = 0; i < n; i++) {
    cin >> x;
    dp[x][19]++;
  }
  P[0] = 1;
  for (int i = 1; i < 22; i++) {
    P[i] = (P[i - 1] * 2) % 1000000007;
  }
  for (int pos = 19; pos >= 0; pos--) {
    int nxt = pos > 0 ? (pos - 1) : 20;
    for (int mask = 0; mask < (1 << 20); mask++) {
      if (mask & (1 << pos)) {
        dp[mask ^ (1 << pos)][nxt] += dp[mask][pos];
      }
      dp[mask][nxt] += dp[mask][pos];
    }
  }
  int ans = 0;
  for (int mask = 0; mask < (1 << 20); mask++) {
    if (__builtin_popcount(mask) % 2) {
      ans = (ans - P[dp[mask][20]] + 1000000007) % 1000000007;
    } else {
      ans = (ans + P[dp[mask][20]]) % 1000000007;
    }
  }
  cout << ans;
}
