2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = 2e6 + 7;
const int inf = 2e9;
const long long inff = 1e18;
const long long mod = 1e9 + 7;
int pow2[maxn];
int dp[maxn];
int32_t main() {
  ios::sync_with_stdio(0);
  cin.tie(0);
  pow2[0] = 1;
  for (int i = 1; i <= 1000000; i++) pow2[i] = pow2[i - 1] * 2 % mod;
  int n;
  cin >> n;
  for (int i = 1; i <= n; i++) {
    int x;
    cin >> x;
    dp[x]++;
  }
  for (int j = 0; j < 20; j++)
    for (int i = 0; i < (1 << 20); i++) {
      if ((i >> j) & 1 ^ 1) dp[i] += dp[i ^ (1 << j)];
    }
  int ans = 0;
  for (int i = 0; i < (1 << 20); i++) {
    if (__builtin_popcount(i) & 1)
      ans = (ans + mod - pow2[dp[i]]) % mod;
    else
      ans = (ans + pow2[dp[i]]) % mod;
  }
  cout << ans << '\n';
}
