2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int N;
int A[2000000];
int F[2000000][25];
int cnt[2000000];
long long Ans = 0;
long long MOD = 1000000007;
long long two(int x) {
  if (x == 0) return 1;
  long long p = two(x / 2);
  if (x % 2)
    return p * p * 2 % MOD;
  else
    return p * p % MOD;
}
int main() {
  cin >> N;
  for (int Ni = 0; Ni < N; Ni++) {
    cin >> A[Ni];
    F[A[Ni]][0]++;
  }
  int n = (1 << 20);
  for (int bi = 1, di = 1; bi <= 20; bi++, di *= 2)
    for (int i = 0; i <= n; i++) {
      if (i & di)
        F[i][bi] = F[i][bi - 1], cnt[i]++;
      else
        F[i][bi] = F[i][bi - 1] + F[i + di][bi - 1];
    }
  for (int i = 0; i <= n; i++) {
    int f = cnt[i] % 2 ? -1 : 1;
    long long p = two(F[i][20]);
    Ans += f * (p - 1);
    Ans %= MOD;
    Ans += MOD;
    Ans %= MOD;
  }
  cout << Ans << endl;
}
