2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int cnt[1000005];
int num[1000005];
int rt[1000005];
int main() {
  int n;
  scanf("%d", &n);
  for (int i = 0; i < n; i++) {
    int a;
    scanf("%d", &a);
    cnt[a]++;
  }
  rt[0] = 1;
  for (int i = 1; i < 1000005; i++) rt[i] = rt[i - 1] * 2 % 1000000007;
  for (int i = 0; i < 1000005; i++) rt[i]--;
  int ret = rt[n];
  for (int i = 1000005 - 1; i >= 1; i--) {
    long long int zan = 0;
    for (int S = i; S > 0; S = S & (S - 1)) {
      cnt[(S & (S - 1)) + zan] += cnt[i];
      zan += S - (S & (S - 1));
    }
  }
  num[0] = 0;
  for (int i = 1; i < 1000005; i++) {
    num[i] = num[i & (i - 1)] + 1;
    if (num[i] % 2 == 0)
      ret += rt[cnt[i]];
    else
      ret += 1000000007 - rt[cnt[i]];
    if (ret >= 1000000007) ret -= 1000000007;
  }
  printf("%d\n", ret);
  return 0;
}
