2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mo = 1000000007;
const int N = (1 << 20) + 5;
int f[N], g[N];
int main() {
  ios_base::sync_with_stdio(false);
  int n;
  cin >> n;
  g[0] = 1;
  for (int i = 1; i <= (1 << 20); ++i) g[i] = g[i - 1] * 2 % mo;
  for (int i = 0; i < n; ++i) {
    int x;
    cin >> x;
    ++f[x];
  }
  for (int j = 1; j < (1 << 20); j <<= 1)
    for (int i = 0; i < (1 << 20); ++i)
      if (i & j) f[i ^ j] += f[i];
  for (int i = 1; i < (1 << 20); ++i) f[i] = g[f[i]];
  int ans = 0;
  for (int j = 1; j < (1 << 20); j <<= 1)
    for (int i = 0; i < (1 << 20); ++i)
      if (i & j) (f[i ^ j] -= f[i]) %= mo;
  for (int i = 1; i < (1 << 20); ++i) (ans += f[i]) %= mo;
  (ans = g[n] - ans) %= mo;
  if (ans < 0) ans += mo;
  cout << ans << endl;
}
