2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
template <class T>
void read(T& x) {
  T res = 0, f = 1;
  char c = getchar();
  while (!isdigit(c)) {
    if (c == '-') f = -1;
    c = getchar();
  }
  while (isdigit(c)) {
    res = (res << 3) + (res << 1) + c - '0';
    c = getchar();
  }
  x = res * f;
}
const long long N = (1 << 20) + 10;
const int mod = 1e9 + 7;
int n, a[N], num[N];
int add(int x, int y) {
  if (x + y < 0) return x + y + mod;
  return (x + y) > mod ? x + y - mod : x + y;
}
int fpow(int x, int y) {
  int ans = 1;
  while (y) {
    if (y & 1) ans = 1ll * ans * x % mod;
    x = 1ll * x * x % mod;
    y >>= 1;
  }
  return ans;
}
int main() {
  read(n);
  for (int i = 1; i <= n; i++) read(a[i]), num[a[i]]++;
  int tot = (1 << 20);
  for (int i = 0; i <= 20; i++)
    for (int j = 1; j < tot; j++)
      if (j & (1 << i)) num[j ^ (1 << i)] = add(num[j ^ (1 << i)], num[j]);
  long long ans = 0;
  for (int i = 0; i < tot; i++) {
    int x = fpow(2, num[i]) - 1;
    if (__builtin_popcount(i) & 1) {
      ans = add(ans, -x);
    } else
      ans = add(ans, x);
  }
  printf("%lld\n", ans);
  return 0;
}
