2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MOD = 1000000007;
const int N = 12000000;
int cnt[N], cnt1[N], n;
int count(int x) {
  int cnt = 0;
  for (int i = 0; i < 32; ++i)
    if (x & 1 << i) cnt++;
  return cnt;
}
int main() {
  scanf("%d", &n);
  for (int i = 0; i < n; ++i) {
    int temp;
    scanf("%d", &temp);
    cnt[temp]++;
  }
  cnt1[0] = 1;
  for (int i = 1; i <= n; ++i) cnt1[i] = cnt1[i - 1] * 2 % MOD;
  for (int i = 0; i < 20; ++i)
    for (int j = 0; j < 1 << 20; ++j)
      if (j & (1 << i)) cnt[j - (1 << i)] += cnt[j];
  int ans = cnt1[n];
  for (int s = 1; s < 1 << 20; ++s) {
    if (count(s) & 1)
      ans -= cnt1[cnt[s]];
    else
      ans += cnt1[cnt[s]];
    ans = (ans + MOD) % MOD;
  }
  printf("%d\n", ans);
}
