2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

import java.io.*;
import java.util.*;
public class Main
{
	final long mod=(long)(1e9+7);
	final int bigmask=(1<<20)-1;
	private void solve()throws Exception
	{
		int n=nextInt();
		int freq[]=new int[bigmask+1];
		for(int i=1;i<=n;i++)
			freq[nextInt()]++;
		//dp[bit][mask] is the number of elements such that
		//the last bit bits are supermask of mask and rest bits are identical to mask
		int dp[][]=new int[21][bigmask+1];
		for(int bit=0;bit<=20;bit++)
			for(int mask=0;mask<=bigmask;mask++)
			{
				if(bit==0)
				{
					dp[bit][mask]=freq[mask];
					continue;
				}
				dp[bit][mask]=dp[bit-1][mask];
				if(((mask>>(bit-1))&1)==0)
					dp[bit][mask]+=dp[bit-1][mask+(1<<(bit-1))];
			}
		long ans=0;
		for(int mask=0;mask<=bigmask;mask++)
			if(Integer.bitCount(mask)%2==0)
				ans=(ans+((modpow(2,dp[20][mask])-1+mod)%mod))%mod;
			else
				ans=(ans-((modpow(2,dp[20][mask])-1+mod)%mod)+mod)%mod;
		out.println(ans);
	}
	long modpow(long a,long b){
	    long ret=1;
	    while(b!=0)
	    {
	        if(b%2==1)
	            ret=(ret*a)%mod;
	        a=(a*a)%mod;
	        b=b/2;
	    }
	    return ret;
	} 
	 
	///////////////////////////////////////////////////////////

	public void run()throws Exception
	{
		br=new BufferedReader(new InputStreamReader(System.in));
		st=null;
		out=new PrintWriter(System.out);

		solve();
		
		br.close();
		out.close();
	}
	public static void main(String args[])throws Exception{
		new Main().run();
	}
	BufferedReader br;
	StringTokenizer st;
	PrintWriter out;
	String nextToken()throws Exception{
		while(st==null || !st.hasMoreTokens())
		st=new StringTokenizer(br.readLine());
		return st.nextToken();
	}
	String nextLine()throws Exception{
		return br.readLine();
	}
	int nextInt()throws Exception{
		return Integer.parseInt(nextToken());
	}
	long nextLong()throws Exception{
		return Long.parseLong(nextToken());
	}
	double nextDouble()throws Exception{
		return Double.parseDouble(nextToken());
	}
}