2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MAXN = 2000 * 1000 + 5, LOGN = 20, MOD = 1000 * 1000 * 1000 + 7;
int c[MAXN], pow2[MAXN];
int main() {
  ios_base::sync_with_stdio(false);
  int n;
  cin >> n;
  for (int i = 0; i < n; i++) {
    int a;
    cin >> a;
    c[((1 << LOGN) - 1) & ~a]++;
  }
  for (int i = 0; i < LOGN; i++)
    for (int j = 0; j < (1 << LOGN); j++)
      if (!(j & (1 << i))) c[j | (1 << i)] += c[j];
  pow2[0] = 1;
  for (int i = 1; i <= n; i++) pow2[i] = (2 * pow2[i - 1]) % MOD;
  for (int i = 0; i < (1 << LOGN); i++) c[i] = pow2[c[i]];
  int ans = 0;
  for (int i = 0; i < (1 << LOGN); i++)
    ans = (ans + (__builtin_popcount(i) & 1 ? -c[i] : c[i])) % MOD;
  cout << ans << '\n';
  return 0;
}
