2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MAXLA = 20, MOD = 1e9 + 7;
int n, x, f[(1 << MAXLA)], ans;
int powmod(int b, int e) {
  if (!e) return 1;
  if (e & 1) return (1LL * b * powmod(b, e - 1)) % MOD;
  int aux = powmod(b, e >> 1);
  return (1LL * aux * aux) % MOD;
}
int main() {
  for (scanf("%d", &n); n--;) scanf("%d", &x), f[x]++;
  for (int i = 0, mask; i < MAXLA; ++i)
    for (mask = 0; mask < (1 << MAXLA); ++mask)
      if (mask & (1 << i)) f[mask ^ (1 << i)] += f[mask];
  for (int mask = 0; mask < (1 << MAXLA); ++mask)
    ans =
        (0LL + ans +
         1LL * powmod(MOD - 1, __builtin_popcount(mask)) * powmod(2, f[mask])) %
        MOD;
  printf("%d\n", ans);
}
