2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
#pragma GCC optimize("O2")
using namespace std;
const int MAXN = 1e6 + 10;
const long long MOD = 1e9 + 7;
const long long MOD2 = 998244353;
const long long INF = 8e18;
const int LOG = 22;
long long pw(long long a, long long b, long long mod) {
  return (!b ? 1
             : (b & 1 ? (a * pw(a * a % mod, b / 2, mod)) % mod
                      : pw(a * a % mod, b / 2, mod)));
}
int v[MAXN], dp[MAXN];
int main() {
  ios::sync_with_stdio(false);
  cin.tie(0);
  cout.tie(0);
  ;
  int n;
  cin >> n;
  for (int i = 1; i <= n; i++) {
    cin >> v[i];
    dp[v[i]]++;
  }
  for (int mask = MAXN - 1; mask >= 1; mask--) {
    vector<int> P;
    for (int j = 0; j < LOG; j++) {
      if (mask & (1 << j)) {
        P.push_back(j);
      }
    }
    for (auto y = 0; y < (int)P.size(); y++) {
      int i = P[y];
      dp[mask ^ (1 << i)] += dp[mask];
      for (int x = y + 1; x < (int)P.size(); x++) {
        int j = P[x];
        dp[mask - (1 << i) - (1 << j)] -= dp[mask];
      }
    }
  }
  long long ans = 0;
  for (int mask = 0; mask < MAXN; mask++) {
    int f = __builtin_popcount(mask);
    int z = ((f % 2) ? -1 : 1);
    ans = (ans + z * pw(2, dp[mask], MOD) + MOD) % MOD;
  }
  cout << ans;
  return 0;
}
