2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long mod = 1e9 + 7;
const long long inf = 1e9;
const long long N = (1 << 20);
long long mod_expo(long long a, long long b, long long c) {
  long long ans = 1;
  while (b) {
    if (b & (long long)1) ans = (ans * a) % c;
    a = (a * a) % c;
    b = b >> 1;
  }
  return ans;
}
long long inverse(long long n) { return mod_expo(n, mod - 2, mod); }
int n;
int total;
int a[N];
long long f[N];
int main() {
  ios_base::sync_with_stdio(0);
  cin.tie(0);
  cout.tie(0);
  cin >> n;
  total = 1 << 20;
  for (int i = 0; i < n; i++) {
    int x;
    cin >> x;
    a[x]++;
  }
  n = 20;
  for (int i = 0; i < total; i++) f[i] = a[i];
  for (int i = 0; i < n; i++) {
    for (int mask = total - 1; mask >= 0; mask--) {
      if ((mask & (1 << i)) == 0) f[mask] += f[mask ^ (1 << i)];
    }
  }
  long long ans = 0;
  for (int i = 0; i < total; i++) {
    int bits = __builtin_popcount(i);
    if (bits % 2)
      ans -= mod_expo(2, f[i], mod);
    else
      ans += mod_expo(2, f[i], mod);
    ans %= mod;
    ans += mod;
    ans %= mod;
  }
  cout << ans;
  return 0;
}
