2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long Mod = 1e9 + 7;
const long long MAX_N = 1 << 20;
long long C[MAX_N];
long long A[MAX_N];
long long n;
long long P[MAX_N];
long long popcount(long long x) {
  long long ret = 0;
  while (x > 0) {
    ret++;
    x -= ((x) & (-(x)));
  }
  return ret;
}
signed main() {
  cin >> n;
  for (long long i = 1; i <= n; i++) {
    cin >> A[i];
    C[A[i]]++;
  }
  P[0] = 1;
  for (long long i = 1; i < (1 << 20); i++) P[i] = P[i - 1] * 2 % Mod;
  for (long long j = 0; j < 20; j++) {
    for (long long i = (1 << 20) - 1; i >= 0; i--) {
      if (i >> j & 1) C[i ^ (1 << j)] += C[i];
      assert(C[i] >= 0 && C[i] <= n);
    }
  }
  long long ans = 0;
  for (long long i = 0; i < (1 << 20); i++) {
    if (popcount(i) % 2)
      ans -= P[C[i]];
    else
      ans += P[C[i]];
    ans = (ans + Mod) % Mod;
  }
  cout << ans << endl;
  return 0;
}
