2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 2e6 + 7, mod = 1e9 + 7, Lg = 20;
inline int add(int a, int b) {
  int c = a + b;
  if (c >= mod) c -= mod;
  return c;
}
int t[N], a[N];
int tav[N];
int main() {
  tav[0] = 1;
  for (int i = 1; i < N; i++) tav[i] = add(tav[i - 1], tav[i - 1]);
  ios::sync_with_stdio(0);
  int n;
  cin >> n;
  for (int i = 0; i < n; i++) {
    cin >> a[i];
    t[a[i]]++;
  }
  for (int i = Lg - 1; i >= 0; i--)
    for (int mask = 0; mask < (1 << Lg); mask++)
      if (((mask >> i) & 1) == 0) t[mask] = add(t[mask], t[mask ^ (1 << i)]);
  int ans = 0;
  for (int i = 0; i < (1 << Lg); i++)
    if (__builtin_popcount(i) & 1)
      ans = add(ans, -tav[t[i]] + mod);
    else
      ans = add(ans, tav[t[i]]);
  cout << ans << endl;
  return 0;
}
