2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long mod = 1000000007, inv2 = 500000004;
int n, m, mx;
long long f[4000005], _2[4000005];
inline long long fpow(long long x, long long t) {
  long long ret = 1;
  for (; t; t >>= 1, x = x * x % mod)
    if (t & 1) ret = ret * x % mod;
  return ret;
}
void FWT(long long *F, int tp) {
  for (int i = 1; i < (1 << n); i <<= 1) {
    for (int p = (i << 1), j = 0; j < (1 << n); j += p) {
      for (int k = 0; k < i; k++) {
        long long x = F[j + k], y = F[j + k + i];
        F[j + k] = (x + tp * y + mod) % mod;
        F[j + k + i] = y;
      }
    }
  }
}
int main() {
  scanf("%d", &m);
  for (int i = 1, x; i <= m; i++) {
    scanf("%d", &x);
    f[x]++;
    mx = max(mx, x);
  }
  _2[0] = 1;
  for (int i = 1; i <= m; i++) _2[i] = _2[i - 1] * 2 % mod;
  n = (int)(ceil(log2(mx) + 0.5));
  FWT(f, 1);
  for (int i = 0; i < (1 << n); i++) f[i] = _2[f[i]];
  FWT(f, -1);
  printf("%lld\n", f[0]);
  return 0;
}
