2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int cnt[(1 << 20)];
int pwr[1000005];
int mod_mul(long long a, long long b) { return (a * b) % 1000000007; }
int mod_plus(int a, int b) {
  a += b;
  if (a >= 1000000007) a -= 1000000007;
  return a;
}
int mod_min(int a, int b) {
  a -= b;
  if (a < 0) a += 1000000007;
  return a;
}
void go(int st, int total) {
  if (!total) return;
  for (int i = 0; i < total; i++) cnt[st + i] += cnt[st + i + total];
  go(st, total / 2);
  go(st + total, total / 2);
}
int main() {
  int i, n, j;
  pwr[0] = 1;
  for (i = 1; i < 1000005; i++) pwr[i] = mod_mul(pwr[i - 1], 2);
  scanf("%d", &n);
  for (i = 0; i < n; i++) {
    scanf("%d", &j);
    cnt[j]++;
  }
  go(0, (1 << 20) / 2);
  int ans = 0;
  for (i = 0; i < (1 << 20); i++) {
    if (__builtin_popcount(i) % 2)
      ans = mod_min(ans, pwr[cnt[i]]);
    else
      ans = mod_plus(ans, pwr[cnt[i]]);
  }
  cout << ans << endl;
  return 0;
}
