2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long mod = 1e9 + 7;
const int N = 1e6;
int cnt[N + 10];
long long two[N + 10];
int main() {
  int n;
  scanf("%d", &n);
  for (int i = 1; i <= n; i++) {
    int a;
    scanf("%d", &a);
    cnt[a]++;
  }
  for (int j = 19; j >= 0; j--) {
    for (int i = 1; i <= N; i++) {
      if ((i >> j) & 1) {
        cnt[i - (1 << j)] += cnt[i];
      }
    }
  }
  two[0] = 1;
  for (int i = 1; i <= N; i++) {
    two[i] = (two[i - 1] * 2) % mod;
  }
  for (int i = 0; i <= N; i++) {
    two[i] = (two[i] - 1 + mod) % mod;
  }
  long long ans = two[n];
  for (int i = 1; i <= N; i++) {
    int one = __builtin_popcount(i);
    if (one & 1) {
      ans = (ans - two[cnt[i]] + mod) % mod;
    } else {
      ans = (ans + two[cnt[i]]) % mod;
    }
  }
  printf("%lld\n", ans);
}
