2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
long long n, a[1000005], sos[(1 << 20) + 100], mod = 1e9 + 7;
long long bigmod(long long a, long long b) {
  if (b == 0) return 1;
  long long x = bigmod(a, b / 2);
  x = (x * x) % mod;
  if (b % 2 == 1) x *= a;
  return x % mod;
}
int main() {
  ios::sync_with_stdio(0);
  cin >> n;
  int nn = (1 << 20);
  for (int i = 0; i < n; i++) {
    cin >> a[i];
    sos[a[i]]++;
  }
  for (int i = 0; i < 20; ++i)
    for (int mask = 0; mask < (1 << 20); ++mask) {
      if (!(mask & (1 << i))) sos[mask] += sos[mask ^ (1 << i)];
    }
  for (int i = 0; i < 8; i++) {
  }
  long long ans = 0;
  for (int mask = 1; mask < (1 << 20); mask++) {
    int p = __builtin_popcount(mask);
    if (p % 2 == 1) {
      ans += bigmod(2, sos[mask]) - 1;
      ans += mod;
      ans %= mod;
    } else {
      ans -= (bigmod(2, sos[mask]) - 1);
      ans += mod;
      ans %= mod;
    }
  }
  long long ans2 = 0;
  ans2 = bigmod(2, n) - 1;
  ans2 += mod;
  ans2 %= mod;
  ans2 -= ans;
  ans2 += mod;
  ans2 %= mod;
  cout << ans2 << endl;
  return 0;
}
