2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
inline int read() {
  register int X = 0;
  register char ch = 0;
  while (ch < 48 || ch > 57) ch = getchar();
  while (ch >= 48 && ch <= 57) X = X * 10 + (ch ^ 48), ch = getchar();
  return X;
}
long long powM(long long a, long long t = 1000000007 - 2) {
  long long ans = 1;
  while (t) {
    if (t & 1) ans = ans * a % 1000000007;
    a = a * a % 1000000007;
    t >>= 1;
  }
  return ans;
}
int n, maxx, lim = 1 << 20;
long long S[1050000];
void DWT(long long *a) {
  for (int len = 1; len < lim; len <<= 1)
    for (int p = 0; p < lim; p += len + len)
      for (int i = p; i < p + len; i++) a[i] = (a[i] + a[i + len]) % 1000000007;
}
void IDWT(long long *a) {
  for (int len = 1; len < lim; len <<= 1)
    for (int p = 0; p < lim; p += len + len)
      for (int i = p; i < p + len; i++) a[i] = (a[i] - a[i + len]) % 1000000007;
}
int main() {
  n = read();
  for (int i = 1, sav; i <= n; i++) {
    S[sav = read()]++;
    maxx = max(maxx, sav);
  }
  lim = 1;
  while (lim <= maxx) lim <<= 1;
  DWT(S);
  for (int i = 0; i < lim; i++) S[i] = powM(2, S[i]);
  IDWT(S);
  printf("%lld", S[0]);
  return 0;
}
