2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
const int mod = 1000 * 1000 * 1000 + 7;
using namespace std;
long long arr[1 << 20], a[1 << 20];
long long pw(long long a, long long b) {
  long long ans = 1;
  while (b) {
    if (b & 1) ans = (ans * a) % mod;
    a = (a * a) % mod;
    b = b >> 1;
  }
  return ans;
}
long long u[10000000];
int main() {
  long long n, i, j;
  cin >> n;
  for (i = 0; i < n; i++) {
    long long a1;
    cin >> a1;
    a[a1]++;
    arr[a1]++;
  }
  for (i = 0; i < 20; i++) {
    for (j = 0; j < (1 << 20); j++) {
      if (j % (1 << i) == 1) arr[j ^ (1 << i)] += arr[j];
    }
  }
  for (long long i = 0; i < mod % 10000000; i++) u[i] = i;
  long long ans = (pw(2, n) - 1 + mod) % mod;
  for (i = 1; i < (1 << 20); i++) {
    long long temp = (pw(2, a[i]) - 1 + mod) % mod;
    ans = (ans - (pw(2, arr[i] - a[i]) * temp) % mod + mod) % mod;
  }
  cout << ans;
}
