2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1 << 20;
const int M = N + 100;
const int P = 1000000007;
int inc(int x, int y) {
  int ans = x + y;
  if (ans >= P) ans -= P;
  return ans;
}
int Dec(int x, int y) {
  int ans = x - y;
  if (ans < 0) ans += P;
  return ans;
}
long long val[M];
void init_(int l, int r) {
  if (l == r - 1) return;
  int m = (r + l) >> 1;
  int d = (r - l) >> 1;
  init_(l, m);
  init_(m, r);
  for (int i = 0; i <= d - 1; i++) {
    (val[l + i] *= val[m + i]) %= P;
  }
}
void solve(int l, int r) {
  if (l == r - 1) return;
  int m = (r + l) >> 1;
  int d = (r - l) >> 1;
  solve(l, m);
  solve(m, r);
  for (int i = 0; i <= d - 1; i++) {
    val[l + i] = Dec(val[l + i], val[m + i]);
  }
}
int main() {
  int n;
  cin >> n;
  for (int i = 0; i <= N - 1; i++) val[i] = 1;
  for (int i = 1; i <= n; i++) {
    int v;
    scanf("%d", &v);
    val[v] = inc(val[v], val[v]);
  }
  init_(0, N);
  solve(0, N);
  cout << val[0] << endl;
  return 0;
}
