2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
inline int add(int a) { return a >= 1000000007 ? a - 1000000007 : a; }
inline int dec(int a) { return a < 0 ? a + 1000000007 : a; }
inline void Add(int &a, int b) {
  ((a += b) >= 1000000007) && (a -= 1000000007);
}
inline void Dec(int &a, int b) { ((a -= b) < 0) && (a += 1000000007); }
int ksm(int a, int b) {
  int ans = 1;
  while (b) {
    if (b & 1) ans = 1ll * ans * a % 1000000007;
    a = 1ll * a * a % 1000000007;
    b >>= 1;
  }
  return ans;
}
int n, num[1200005], cnt[1200005], limit;
void fwtand() {
  for (int mid = 1; mid < limit; mid <<= 1) {
    for (int i = 0; i < limit; i += mid * 2) {
      for (int j = 0; j < mid; ++j) {
        num[i + j] += num[i + j + mid];
      }
    }
  }
}
int main() {
  scanf("%d", &n);
  int mx = 0;
  for (int a, i = 1; i <= n; ++i) {
    scanf("%d", &a);
    mx = max(mx, a);
    ++num[a];
  }
  for (limit = 1; limit < mx; limit <<= 1)
    ;
  if (limit == 1) num[0] += num[1];
  fwtand();
  int ans = 0;
  for (int i = 0; i <= mx; ++i) {
    cnt[i] = cnt[i >> 1] + (i & 1);
    if (cnt[i] & 1)
      Dec(ans, ksm(2, num[i]) - 1);
    else
      Add(ans, ksm(2, num[i]) - 1);
  }
  printf("%d", ans);
  return 0;
}
