2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 2020;
const int INF = 1000000000;
const long long Mod = 1000000007LL;
const int tot = (1 << 20);
int cnt[tot + 10];
void add(long long &x, long long y) {
  x += y;
  if (x >= Mod) x -= Mod;
}
long long pow_mod(long long a, long long k) {
  long long ret = 1;
  while (k) {
    if (k & 1) ret = ret * a % Mod;
    a = a * a % Mod;
    k >>= 1;
  }
  return ret;
}
int main() {
  int n;
  scanf("%d", &n);
  int cur = tot - 1;
  for (int i = 1; i <= n; i++) {
    int x;
    scanf("%d", &x);
    cnt[x]++;
    cur = cur & x;
  }
  if (cur) {
    printf("0\n");
    return 0;
  }
  for (int i = 0; i < 20; i++) {
    for (int j = 0; j < tot; j++) {
      if (j & (1 << i)) {
        cnt[j ^ (1 << i)] += cnt[j];
      }
    }
  }
  long long ans = 0;
  for (int i = 0; i < tot; i++) {
    long long tmp = pow_mod(2LL, cnt[i]);
    if (__builtin_popcount(i) & 1) {
      ans = (ans - tmp + Mod) % Mod;
    } else {
      ans = (ans + tmp) % Mod;
    }
  }
  ans = (ans % Mod + Mod) % Mod;
  cout << ans << endl;
  return 0;
}
