2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 22;
const int mod = 1e9 + 7;
int dp[1 << N];
int pw[1 << N];
int main() {
  ios_base::sync_with_stdio(0);
  int n;
  cin >> n;
  for (int i = 0; i < n; i++) {
    int cur;
    cin >> cur;
    dp[cur]++;
  }
  pw[0] = 1;
  for (int i = 1; i < (1 << N); i++) pw[i] = (long long)pw[i - 1] * 2 % mod;
  for (int j = 0; j < N; j++)
    for (int i = 0; i < (1 << N); i++)
      if (i & (1 << j)) dp[i ^ (1 << j)] += dp[i];
  int ans = 0;
  for (int i = 0; i < (1 << N); i++) {
    if (__builtin_popcount(i) & 1)
      ans = (ans + mod - pw[dp[i]]) % mod;
    else
      ans = (ans + pw[dp[i]]) % mod;
  }
  cout << ans << endl;
  return 0;
}
