2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int inline read() {
  int num = 0, neg = 1;
  char c = getchar();
  while (!isdigit(c)) {
    if (c == '-') neg = -1;
    c = getchar();
  }
  while (isdigit(c)) {
    num = (num << 3) + (num << 1) + c - '0';
    c = getchar();
  }
  return num * neg;
}
const int maxn = 1e6 + 10, mod = 1e9 + 7;
int n, a[maxn], f[1 << 20], g[1 << 20], sum[1 << 20];
int Pow(int x, int y) {
  int ans = 1;
  while (y) {
    if (y & 1) ans = ans * x % mod;
    x = x * x % mod;
    y >>= 1;
  }
  return ans;
}
int Get(int x) {
  int num = 0;
  while (x) {
    if (x & 1) num++;
    x >>= 1;
  }
  return num;
}
int main() {
  n = read();
  for (int i = 1; i <= n; i++) a[i] = read(), f[a[i]]++;
  for (int i = 0; i < 20; i++)
    for (int j = (1 << 20) - 1; j >= 0; j--)
      if (!(j & (1 << i))) f[j] = (f[j] + f[j | (1 << i)]) % mod;
  for (int i = 0; i < (1 << 20); i++)
    g[i] = ((Pow(2, f[i]) - 1) % mod + mod) % mod;
  for (int i = 0; i < (1 << 20); i++) sum[i] = (Get(i) & 1) ? -1 : 1;
  int ans = 0;
  for (int i = 0; i < (1 << 20); i++)
    ans = (ans + (sum[i] * g[i] % mod + mod) % mod) % mod;
  cout << ans << endl;
  return 0;
}
