2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int cnt[1 << 20], pow2[1000009];
void pre() {
  pow2[0] = 1;
  for (int i = int(1); i <= int(1000000); i++)
    pow2[i] = (pow2[i - 1] * 2) % 1000000007;
}
int main() {
  pre();
  int n;
  scanf("%d", &n);
  for (int i = int(0); i <= int(n - 1); i++) {
    int p;
    scanf("%d", &p);
    cnt[p]++;
  }
  for (int i = int(0); i <= int(19); i++) {
    for (int j = int((1 << 20) - 1); j >= int(0); j--) {
      if (j & (1 << i)) cnt[j - (1 << i)] += cnt[j];
    }
  }
  int ans = 0;
  for (int i = int(0); i <= int((1 << 20) - 1); i++) {
    int bits = 0, temp = i;
    while (temp > 0) {
      bits++;
      temp -= temp & -temp;
    }
    if (bits % 2 == 0)
      ans = (ans + pow2[cnt[i]]) % 1000000007;
    else
      ans = (ans - pow2[cnt[i]] + 1000000007) % 1000000007;
  }
  printf("%d\n", ans);
  return 0;
}
