2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int const N = 1048576 + 10, LG = 20, P = 1e9 + 7;
int n, a[N], p[N], cnt[N], dp[N], ans;
void read_input() {
  cin >> n;
  for (int i = 0; i < n; i++) cin >> a[i];
}
void solve() {
  p[0] = 1;
  for (int i = 1; i < N; i++) p[i] = (p[i - 1] * 2) % P;
  for (int i = 0; i < n; i++) dp[(1 << LG) - 1 - a[i]]++;
  for (int i = 0; i < LG; i++)
    for (int j = 0; j < (1 << LG); j++)
      if (j & (1 << i)) dp[j] += dp[j - (1 << i)];
  for (int i = 0; i < N; i++) cnt[i] = dp[(1 << LG) - 1 - i];
  for (int i = 1; i < (1 << LG); i++) {
    int k = 0;
    for (int j = 0; j < LG; j++)
      if (i & (1 << j)) k++;
    ans = (ans + (k % 2 ? 1 : -1) * p[cnt[i]]) % P;
  }
  cout << (p[n] - ans + P) % P;
}
int main() {
  ios::sync_with_stdio(0), cin.tie(0), cout.tie(0);
  read_input(), solve();
  return 0;
}
