2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
template <typename T>
void read(T &first) {
  int f = 1;
  first = 0;
  char c = getchar();
  while (!isdigit(c)) {
    if (c == '-') f = -1;
    c = getchar();
  }
  while (isdigit(c)) {
    first = (first << 3) + (first << 1) + c - '0';
    c = getchar();
  }
  first *= f;
  return;
}
void write(register long long first) {
  if (first < 0) {
    first = ~first + 1;
    putchar('-');
  }
  if (first > 9) write(first / 10);
  putchar(first % 10 + '0');
  return;
}
int n;
long long f[(1 << 20)], ans;
long long power(long long first, long long second) {
  long long ret = 1;
  for (; second; second >>= 1, first = first * first % (long long)(1e9 + 7))
    ret = ret * (second & 1 ? first : 1);
  return ret;
}
int count(int first) {
  int ret = 0;
  for (; first; first >>= 1) ret += first & 1;
  return ret;
}
int main() {
  read(n);
  for (register int(i) = (1); (i) <= (n); i++) {
    int first;
    read(first);
    f[first]++;
  }
  for (register int(i) = (0); (i) <= (19); i++)
    for (register int(j) = ((1 << 20) - 1); (j) >= (0); j--)
      if (!(j & (1 << i))) (f[j] += f[j | (1 << i)]) %= (long long)(1e9 + 7);
  for (register int(i) = (0); (i) <= ((1 << 20) - 1); i++)
    (ans += (power(2, f[i]) - 1) * (count(i) & 1 ? -1 : 1)) %=
        (long long)(1e9 + 7);
  write((ans + (long long)(1e9 + 7)) % (long long)(1e9 + 7));
  return 0;
}
