2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1005000;
const int BASE = 1000000007;
int n, pw[N], f[N];
int main() {
  scanf("%d", &n);
  for (int i = 0; i < n; i++) {
    int x;
    scanf("%d", &x);
    f[x]++;
  }
  pw[0] = 1;
  for (int i = 1; i < N; i++) {
    pw[i] = pw[i - 1] + pw[i - 1];
    if (pw[i] >= BASE) {
      pw[i] -= BASE;
    }
  }
  for (int j = 0; j < 20; j++) {
    for (int i = N - 1; i >= 0; i--) {
      if (((i & (1 << j)) == 0) && (i + (1 << j) < N)) {
        f[i] += f[i + (1 << j)];
      }
    }
  }
  for (int i = 0; i < N; i++) {
    f[i] = pw[f[i]];
  }
  int ans = 0;
  for (int i = 0; i < N; i++) {
    int o = 0;
    int x = i;
    while (x > 0) {
      o ^= 1;
      x &= (x - 1);
    }
    if (o) {
      ans -= f[i];
      if (ans < 0) {
        ans += BASE;
      }
    } else {
      ans += f[i];
      if (ans >= BASE) {
        ans -= BASE;
      }
    }
  }
  printf("%d\n", ans);
}
