2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long maxn = 2e6 + 5;
const long long mod = 1e9 + 7;
long long F[maxn];
long long A[maxn], B[maxn];
long long ppow(long long a, long long b, long long mod) {
  long long ans = 1 % mod;
  a %= mod;
  while (b) {
    if (b & 1) ans = ans * a % mod;
    a = a * a % mod;
    b >>= 1;
  }
  return ans;
}
signed main(void) {
  long long n;
  cin >> n;
  for (long long i = 1; i <= n; ++i) {
    cin >> A[i];
    F[A[i]]++;
  }
  for (long long i = 0; i < 20; ++i) {
    for (long long mask = (1 << 20) - 1; mask >= 0; --mask)
      if (!(mask >> i & 1)) F[mask] += F[mask | (1 << i)];
  }
  long long ans = 0;
  for (long long i = 0; i < (1 << 20); i++) {
    long long t = 1;
    if (__builtin_popcount(i) & 1) {
      t = -1;
    }
    ans += (t * ppow(2, F[i], mod) - 1 + mod) % mod;
    ans = (ans % mod + mod) % mod;
  }
  cout << ans << endl;
  return 0;
}
