2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = 300300;
const int INF = 1E9;
const int base = 1E9 + 7;
int n, cnt[1048576], meb[1048576], ppow[1048576];
int solve() {
  scanf("%d", &n);
  for (int i = 0; i < n; i++) {
    int x;
    scanf("%d", &x);
    cnt[x]++;
  }
  for (int i = 0; i < 20; i++)
    for (int j = 0; j < (1048576); j++) {
      if ((j >> i) & 1) cnt[j ^ (1 << i)] += cnt[j];
    }
  ppow[0] = 1, meb[0] = 0;
  for (int i = 1; i < (1048576); i++) {
    ppow[i] = (2 * ppow[i - 1] + 1) % base;
    meb[i] = (i & 1) ? -meb[i >> 1] : meb[i >> 1];
  }
  int ans = 0;
  for (int i = 0; i < (1048576); i++) {
    if (meb[i] == 1) {
      ans += ppow[cnt[i]];
      if (ans > base) ans -= base;
    } else {
      ans -= ppow[cnt[i]];
      if (ans < 0) ans += base;
    }
  }
  printf("%d\n", ans);
}
int main() {
  ios_base::sync_with_stdio(0);
  solve();
  return 0;
}
