2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long MOD = 1000000007LL;
static int N;
static long long ans = 0, bin[1000007] = {1}, dp[1000007];
int main() {
  for (int i = 1; i < 1000007; i++) bin[i] = bin[i - 1] * 2 % MOD;
  scanf("%d", &N);
  for (int i = 0, x; i < N; i++) scanf("%d", &x), dp[x]++;
  for (int j = 0; j < 25; j++)
    for (int i = 0; i < 1000007; i++)
      if ((1 << j) & i) (dp[i ^ (1 << j)] += dp[i]) %= MOD;
  for (int i = 0; i < 1000007; i++) {
    int sign = 1;
    for (int j = 0; j < 25; j++)
      if ((1 << j) & i) sign = -sign;
    (ans += sign * (bin[dp[i]] - 1) % MOD + MOD) %= MOD;
  }
  printf("%lld\n", ans);
  return 0;
}
