2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int dp[21][1 << 20];
long long mod_pow(long long a, int b) {
  long long ret = 1;
  while (b) {
    if (b & 1) ret = ret * a % 1000000007;
    a = a * a % 1000000007;
    b >>= 1;
  }
  return ret;
}
int main() {
  int n, x;
  scanf("%d", &n);
  for (int i = 0; i < n; ++i) {
    scanf("%d", &x);
    ++dp[0][x];
  }
  for (int i = 0; i <= 19; ++i) {
    for (int mask = 0; mask < (1 << 20); ++mask) {
      dp[i + 1][mask] += dp[i][mask];
      if (dp[i + 1][mask] >= 1000000007) dp[i + 1][mask] -= 1000000007;
      if (mask & (1 << i)) {
        dp[i + 1][mask ^ (1 << i)] += dp[i][mask];
        if (dp[i + 1][mask ^ (1 << i)] >= 1000000007)
          dp[i + 1][mask ^ (1 << i)] -= 1000000007;
      }
    }
  }
  int ans = 0;
  for (int mask = 0; mask < (1 << 20); ++mask) {
    if (__builtin_popcount(mask) % 2 == 0) {
      ans += mod_pow(2, dp[20][mask]);
      if (ans >= 1000000007) ans -= 1000000007;
    } else {
      ans -= mod_pow(2, dp[20][mask]);
      if (ans < 0) ans += 1000000007;
    }
  }
  printf("%d\n", ans);
  return 0;
}
