2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int BITS = 20;
const int MAXN = 1 << BITS;
const long long mod = 1e9 + 7;
void subsets(int* A, int nb) {
  if (nb == 0) return;
  int half = 1 << (nb - 1);
  subsets(A, nb - 1);
  subsets(A + half, nb - 1);
  for (int i = (0); i < int(half); ++i)
    tie(A[i], A[i + half]) = make_tuple(A[i] + A[i + half], A[i + half]);
}
int main(void) {
  static int frek[MAXN];
  memset(frek, 0, sizeof frek);
  int n;
  scanf("%d", &n);
  for (int i = (0); i < int(n); ++i) {
    int x;
    scanf("%d", &x);
    ++frek[x];
  }
  static long long pow2[MAXN];
  for (int i = (0); i < int(MAXN); ++i)
    pow2[i] = (i == 0) ? 1 : pow2[i - 1] * 2 % mod;
  subsets(frek, BITS);
  long long ans = 0;
  for (int st = (0); st < int(MAXN); ++st) {
    int sign = 1;
    for (int i = (0); i < int(BITS); ++i)
      if (st & (1 << i)) sign = -sign;
    ans = (ans + sign * pow2[frek[st]]) % mod;
  }
  printf("%lld\n", (ans % mod + mod) % mod);
  return 0;
}
