2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
long long n, i, x, dp[25][(1 << 20) + 10], j, bi, ma, k;
long long ans, MOD = 1000000007;
int main() {
  cin >> n;
  for (i = 1; i <= n; ++i) {
    cin >> x;
    dp[0][x]++;
    ma = max(ma, x);
  }
  k = 0;
  while ((1 << k) <= ma) ++k;
  for (j = (1 << k) - 1; j >= 0; --j) {
    bi = 0;
    if (j & 1)
      bi++;
    else
      dp[0][j] += dp[0][j | 1];
    for (i = 1; i < k; ++i)
      if (j & (1 << i))
        dp[i][j] = dp[i - 1][j], bi++;
      else
        dp[i][j] = (dp[i - 1][j] + dp[i - 1][j | (1 << i)]) % MOD;
    if (bi & 1)
      ans = (ans - (1 << dp[20][j]) + MOD) % MOD;
    else
      ans = (ans + (1 << dp[20][j])) % MOD;
  }
  cout << ans << '\n';
  return 0;
}
