2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = 2e6 + 5;
const int mod = 1e9 + 7;
const int N = 20;
long long a[maxn], dp[maxn], p[maxn];
int main() {
  p[0] = 1;
  for (int i = 1; i < maxn; i++) {
    p[i] = p[i - 1] * 2 % mod;
  }
  ios::sync_with_stdio(false);
  int n;
  cin >> n;
  for (int i = 1; i <= n; i++) {
    cin >> a[i];
    dp[a[i]]++;
  }
  int s = 1 << N;
  for (int j = 0; j < N; j++)
    for (int i = 0; i < s; i++)
      if (!(i >> j & 1)) dp[i] += dp[i ^ (1 << j)];
  for (int i = 0; i < s; i++) {
    dp[i] = (p[dp[i]] - 1 + mod) % mod;
  }
  long long ans = 0;
  for (int i = 0; i < s; i++) {
    int cnt = 0;
    for (int j = 0; j < N; j++) {
      cnt += (i >> j & 1);
    }
    long long f = (cnt % 2 ? -1 : 1);
    ans = (ans + f * dp[i] % mod + mod) % mod;
  }
  cout << ans << endl;
  return 0;
}
