2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1e6 + 5, MOD = 1e9 + 7, LOG = 21;
int n, a[N], dp[2 * N][LOG];
long long jv;
int power(int a, int b) {
  long long res = 1;
  for (; b; b /= 2) {
    if (b % 2) {
      res *= a;
      res %= MOD;
    }
    a *= a;
    a %= MOD;
  }
  return res;
}
void read_input() {
  cin >> n;
  for (int i = 0; i < n; i++) {
    cin >> a[i];
    dp[a[i]][0]++;
  }
}
int32_t main() {
  ios::sync_with_stdio(false);
  cin.tie(0);
  cout.tie(0);
  read_input();
  for (int j = 1; j < LOG; j++) {
    for (int i = 0; i < N; i++) {
      dp[i][j] = dp[i][j - 1];
      if ((i & (1 << (j - 1))) == 0) {
        dp[i][j] += dp[i + (1 << (j - 1))][j - 1];
      }
      dp[i][j] %= MOD;
    }
  }
  for (int i = 0; i < N; i++) {
    if (__builtin_popcount(i) % 2) {
      jv -= power(2, dp[i][LOG - 1]) - 1;
    } else {
      jv += power(2, dp[i][LOG - 1]) - 1;
    }
    jv %= MOD;
  }
  cout << jv;
  return 0;
}
