2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MOD = 1000000007;
int dp[25][1 << 20];
int a[1 << 20], ans, n;
int scan() {
  int res = 0;
  bool flag = 0;
  char ch;
  while ((ch = getchar()) == ' ' || ch == '\n')
    ;
  if (ch == '-')
    flag = 1;
  else if (ch >= '0' && ch <= '9')
    res = ch - '0';
  while ((ch = getchar()) >= '0' && ch <= '9') res = res * 10 + ch - '0';
  return flag ? -res : res;
}
int power(int a, int b, long long MOD) {
  long long res = 1;
  a %= MOD;
  while (b) {
    if (b & 1) {
      res = res * a % MOD;
      b--;
    }
    b >>= 1;
    a = a * a % MOD;
  }
  return res;
}
int main() {
  scanf("%d", &n);
  for (int i = 1; i <= n; i++) {
    scanf("%d", &a[i]);
    dp[0][a[i]]++;
    if (a[i] & 1) dp[0][a[i] ^ 1]++;
  }
  for (int i = 0; i < 19; i++) {
    for (int j = 0; j < 1 << 20; j++) {
      dp[i + 1][j] += dp[i][j];
      if (j & (1LL << (i + 1))) {
        dp[i + 1][j ^ (1LL << (i + 1))] += dp[i][j];
      }
    }
  }
  int tmp, cnt, res;
  for (int i = 0; i < 1 << 20; i++) {
    cnt = 1;
    for (int j = 0; j < 20; j++)
      if ((1LL << j) & i) cnt *= -1;
    res = (power(2, dp[19][i], MOD) - 1 + MOD) % MOD;
    res--;
    if (res < 0) res = res + MOD;
    ans += cnt * res;
    if (ans >= MOD) ans -= MOD;
    if (ans < 0) ans += MOD;
  }
  printf("%d\n", ans);
  return 0;
}
