2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
using ll = long long;
using pii = pair<int, int>;
const int INF = 0x3f3f3f3f, N = 1e6 + 5, bit = 20, mod = 1e9 + 7;
int n, a[N];
ll dp[N << 1];
ll powmod(ll a, ll b, ll mod) {
  ll ans = 1;
  while (b) {
    if (b & 1) ans = ans * a % mod;
    a = a * a % mod;
    b >>= 1;
  }
  return ans;
}
int main() {
  ios::sync_with_stdio(false);
  cin.tie(0);
  cin >> n;
  for (int i = 1; i <= n; i++) {
    cin >> a[i];
    dp[a[i]]++;
  }
  for (int i = 0; i < bit; i++) {
    for (int mask = 0; mask < (1 << bit); mask++) {
      if (mask & (1 << i))
        dp[mask ^ (1 << i)] = (dp[mask ^ (1 << i)] + dp[mask]) % mod;
    }
  }
  ll ans = 0;
  for (int i = 0; i < (1 << bit); i++) {
    int cnt = __builtin_popcount(i);
    if (cnt & 1)
      ans = (ans - powmod(2, dp[i], mod) + 1 + mod) % mod;
    else
      ans = (ans + powmod(2, dp[i], mod) - 1 + mod) % mod;
  }
  cout << (ans + mod) % mod << '\n';
  return 0;
}
