2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MAXN = 20, MOD = 1e9 + 7;
int p[1 << MAXN], dp[1 << MAXN];
int main() {
  ios::sync_with_stdio(false);
  int n;
  cin >> n;
  for (int i = 0; i < n; i++) {
    int x;
    cin >> x;
    dp[x]++;
  }
  for (int i = 0; i < MAXN; i++)
    for (int mask = 0; mask < (1 << MAXN); mask++)
      dp[mask] += (mask >> i & 1 ? 0 : dp[mask ^ (1 << i)]);
  p[0] = 1;
  for (int i = 1; i < (1 << MAXN); i++) p[i] = (p[i - 1] * 2) % MOD;
  int ans = 0;
  for (int mask = 0; mask < (1 << MAXN); mask++) {
    int cur = p[dp[mask]];
    if (__builtin_popcount(mask) & 1)
      ans -= cur;
    else
      ans += cur;
    ans %= MOD;
  }
  ans = (ans + MOD) % MOD;
  cout << ans << endl;
  return 0;
}
