2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1e6 + 6, MOD = 1e9 + 7, B = 21;
int n, arr[N], dp[(1 << B)][B], ans = 0, pow2[N];
int M(int x) {
  while (x < 0) x += MOD;
  return x % MOD;
}
int main() {
  ios_base::sync_with_stdio(false);
  cin.tie(0);
  pow2[0] = 1;
  for (int i = 1; i < N; i++) {
    pow2[i] = (pow2[i - 1] * 2) % MOD;
  }
  cin >> n;
  for (int i = 0; i < n; i++) {
    cin >> arr[i];
    dp[arr[i]][B - 1] += 1;
  }
  for (int i = B - 2; i >= 0; i--) {
    for (int j = (1 << B) - 1; j >= 0; j--) {
      if (j & (1 << i)) {
        dp[j][i] = dp[j][i + 1];
      } else {
        dp[j][i] = dp[j][i + 1] + dp[j ^ (1 << i)][i + 1];
      }
    }
  }
  for (int i = 0; i < (1 << B); i++) {
    int cnt = 0, multip = 1;
    for (int j = 0; j < B; j++) {
      if (i & (1 << j)) cnt++;
    }
    if (cnt % 2) multip *= (-1);
    ans += pow2[dp[i][0]] * multip;
    ans = M(ans);
  }
  cout << ans;
}
