2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
long long n, m, x, ans, i, j, md, f[1000002], d[1000002];
int main() {
  cin >> n;
  md = 1000000007;
  m = 1000000;
  f[0] = 1;
  for (i = 1; i <= m; i++) f[i] = (f[i - 1] * 2) % md;
  for (i = 1; i <= n; i++) {
    cin >> x;
    d[x]++;
  }
  for (i = 20; i >= 0; i--)
    for (j = m; j >= 0; j--)
      if (j & (1 << (i))) d[j ^ (1 << i)] += d[j];
  for (int j = 0; j <= m; j++)
    if (d[j]) {
      if (__builtin_popcount(j) % 2)
        ans = (ans - f[d[j]] + 1 + md) % md;
      else
        ans = (ans + f[d[j]] - 1 + md) % md;
    }
  cout << (ans + md) % md << "\n";
}
