2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
int FASTBUFFER;
using namespace std;
const int N = 1048576;
const int mo = 1000000007;
int dp[N * 2 + 5];
int mi[N + 5], fac[N + 5];
int n, ans;
int main() {
  scanf("%d", &n);
  mi[0] = 1;
  for (int i = 1; i <= n; i++) {
    int x;
    scanf("%d", &x);
    dp[x]++;
    mi[i] = (mi[i - 1] + mi[i - 1]) % mo;
  }
  for (int i = 1; i < N; i <<= 1) {
    for (int j = 0; j < N; j++) {
      if (i & j) {
        dp[i ^ j] += dp[j];
      }
    }
  }
  ans = mi[n];
  fac[0] = 1;
  for (int i = 1; i < N; i++) {
    fac[i] = -fac[i - (i & (0 - i))];
    (ans += fac[i] * mi[dp[i]]) %= mo;
  }
  while (ans < 0) {
    ans += mo;
  }
  printf("%d\n", ans);
  return 0;
}
