2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long mod = 1e9 + 7;
long long n, ans, f[1 << 20], g[20];
long long power(long long a, long long b) {
  long long ans = 1;
  while (b) {
    if (b & 1) ans = ans * a % mod;
    a = a * a % mod;
    b >>= 1;
  }
  return ans;
}
int main() {
  ios::sync_with_stdio(0);
  cin >> n;
  for (long long i = 1, a; i <= n; ++i) cin >> a, f[a]++;
  for (long long i = 0; i < 20; ++i)
    for (long long j = 0; j < (1 << 20); ++j)
      if (j & (1 << i)) f[j ^ (1 << i)] += f[j];
  for (long long i = 0; i < (1 << 20); ++i) {
    long long num = 0;
    for (long long j = 0; j < 20; ++j)
      if (i & (1 << j)) ++num;
    g[num] = ((g[num] + power(2, f[i]) - 1ll) % mod + mod) % mod;
  }
  long long sign = 1;
  for (long long i = 0; i <= 20; ++i)
    ans = ((ans + sign * g[i]) % mod + mod) % mod, sign *= -1;
  cout << ans << endl;
  return 0;
}
