2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long N = 2e6 + 10;
const long long p = 1e9 + 7;
long long n, a[N], f[N], ans;
long long get(long long x) {
  long long sum = 0;
  while (x) x -= (x & -x), sum++;
  return sum;
}
long long POW(long long a, long long b) {
  if (!b) return 1;
  if (b == 1) return a;
  long long sum = POW(a, b / 2);
  if (b % 2) return sum * sum % p * a % p;
  return sum * sum % p;
}
signed main() {
  scanf("%lld", &n);
  for (long long i = 1; i <= n; i++) scanf("%lld", &a[i]), f[a[i]]++;
  for (long long j = 0; j < 20; j++)
    for (long long i = (1 << 20) - 1; i >= 0; i--)
      if ((i & (1 << j)) == 0) f[i] += f[i + (1 << j)];
  for (long long i = 0; i < (1 << 20); i++)
    ans += (get(i) % 2 ? -1 : 1) * (POW(2, f[i]) - 1 + p) % p, ans += p,
        ans %= p;
  printf("%lld", ans);
  return 0;
}
