2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const double eps = 1e-9;
const int maxmask = 1000010;
const int mod = 1000000007;
int cnt[maxmask], pw[maxmask];
int main() {
  int n;
  cin >> n;
  for (int i = 0; i < n; ++i) {
    int ai;
    scanf("%d", &ai);
    cnt[ai]++;
  }
  pw[0] = 1;
  for (int i = 1; i <= n; ++i) {
    pw[i] = (pw[i - 1] * 2) % mod;
  }
  for (int bit = 1; bit < maxmask; bit <<= 1) {
    for (int mask = 0; mask < maxmask; ++mask) {
      if (mask & bit) cnt[mask ^ bit] += cnt[mask];
    }
  }
  int res = pw[n] - 1;
  for (int i = 1; i < maxmask; ++i) {
    int bits = 0;
    for (int bit = 1; bit <= i; bit <<= 1) {
      if (i & bit) ++bits;
    }
    int add = pw[cnt[i]] - 1;
    if (bits & 1)
      res -= add;
    else
      res += add;
    res = res % mod;
  }
  res = (res + mod) % mod;
  cout << res;
  return 0;
}
