2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = 1e9 + 7;
int dp[1 << 20];
int n, a[1 << 20];
int b[21];
int ans = 1;
int cal(int x) {
  int cnt = 0;
  while (x) {
    x -= x & (-x);
    cnt++;
  }
  return cnt;
}
int mi(int x, int p) {
  int tmp = 1;
  for (; p; p >>= 1) {
    if (p & 1) tmp = (long long)(tmp * x) % mod;
    x = (long long)(x * x) % mod;
  }
  return tmp;
}
void work() {
  int i, j, tmp;
  ans--;
  for (i = 1; i < (1 << 20); i++) {
    if (!dp[i]) continue;
    tmp = cal(i);
    if (tmp % 2)
      ans -= mi(2, dp[i]) - 1;
    else
      ans += mi(2, dp[i]) - 1;
    ans %= mod;
  }
  printf("%d", (ans % mod + mod) % mod);
}
int main() {
  scanf("%d", &n);
  b[0] = 1;
  int i, j, tmp;
  for (i = 1; i <= n; i++)
    scanf("%d", &a[i]), dp[a[i]]++, ans = (long long)(ans * 2) % mod;
  for (i = (1 << 20); i; i--) {
    if (!dp[i]) continue;
    tmp = i;
    while (tmp) {
      dp[i - (tmp & (-tmp))] += dp[i];
      tmp -= tmp & (-tmp);
    }
  }
  work();
}
