2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long maxn = 1e6 + 3, mod = 1e9 + 7;
long long n, ans = 0;
long long v[maxn];
long long dp[(1 << 20)];
int main() {
  scanf("%lld", &n);
  for (long long i = 1; i <= n; i++) {
    scanf("%lld", &v[i]);
    dp[(1 << 20) - v[i] - 1]++;
  }
  for (long long i = 0; i <= 20; i++)
    for (long long j = 0; j < (1 << 20); j++)
      if (j & (1 << i)) {
        dp[j] += dp[j ^ (1 << i)];
        if (dp[j] >= mod) dp[j] -= mod;
      }
  for (long long i = 0; i < (1 << 20); i++) {
    long long bits = 20 - __builtin_popcount(i);
    if (bits & 1) {
      ans -= (1ll << dp[i]) % mod;
      if (ans < 0) ans += mod;
    } else {
      ans += (1ll << dp[i]) % mod;
      if (ans >= mod) ans -= mod;
    }
  }
  printf("%lld", ans);
  return 0;
}
