2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = 1000000007;
const int N = (1 << 20) + 100;
bool one(int mask, int i) { return mask & (1 << i); }
int n, a[N], d[N];
int p[N];
int main() {
  scanf("%d", &n);
  p[0] = 1;
  for (int i = 1; i <= n; ++i) {
    scanf("%d", &a[i]);
    p[i] = p[i - 1] << 1;
    if (p[i] >= mod) p[i] -= mod;
    d[a[i]]++;
  }
  for (int i = 0; i <= n; ++i) p[i] = (p[i] - 1 + mod) % mod;
  for (int i = 20; i >= 0; --i)
    for (int j = (1 << i); j < (1 << 20); ++j)
      if (one(j, i)) d[j - (1 << i)] += d[j];
  long long ans = 0;
  for (int i = 1; i <= 1000000; ++i) {
    if (!d[i]) continue;
    int kol = __builtin_popcount(i);
    if (kol & 1)
      ans = (ans + p[d[i]]) % mod;
    else
      ans = (ans - p[d[i]] + mod) % mod;
  }
  ans = (p[n] - ans) % mod;
  ans = (ans + mod) % mod;
  cout << ans;
  return 0;
}
