2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int read();
const int N = 1 << 21, P = 1000000007;
int n, mx, h;
int a[N], g[N], bitcnt[N], pw[N];
void fwt(int *a) {
  for (int l = 2, mid = 1; l <= h; l <<= 1, mid <<= 1)
    for (int *p = a; p != a + h; p += l)
      for (int i = 0; i < mid; ++i) p[i] += p[i + mid];
}
int mo(int x) { return x >= P ? x - P : x; }
int main() {
  n = read();
  for (int i = 1, x; i <= n; ++i) ++g[x = read()], mx = max(mx, x);
  h = 1;
  while (h <= mx) h <<= 1;
  fwt(g);
  pw[0] = 1;
  for (int(i) = (1); (i) <= (n); ++(i)) pw[i] = mo(pw[i - 1] + pw[i - 1]);
  int ans = 0;
  for (int i = 0; i < h; ++i) {
    bitcnt[i] = bitcnt[i >> 1] + (i & 1);
    int res = mo(pw[g[i]] - 1 + P);
    if (bitcnt[i] & 1)
      ans = mo(ans - res + P);
    else
      ans = mo(ans + res);
  }
  printf("%d\n", ans);
  return 0;
}
int read() {
  int x = 0, f = 1;
  char c = getchar();
  while (c < '0' || c > '9') {
    if (c == '-') f = -1;
    c = getchar();
  }
  while (c >= '0' && c <= '9')
    x = (x << 3) + (x << 1) + (c ^ 48), c = getchar();
  return f * x;
}
