2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int cnt[1000 * 1000 + 10];
int A[1000 * 1000], n;
const int MOD = 1000 * 1000 * 1000 + 7;
int pow2(int n) {
  long long unit = 2;
  long long ret = 1;
  for (int i = 0; (1 << i) <= n; ++i) {
    if (n & (1 << i)) ret = (ret * unit) % MOD;
    unit = (unit * unit) % MOD;
  }
  return ret;
}
int count_bits(int n) {
  int ret = 0;
  while (n) {
    ret += (n & 1);
    n >>= 1;
  }
  return ret;
}
inline int mod(int x) {
  if (x > MOD) return x - MOD;
  return x;
}
int main() {
  scanf("%d", &n);
  memset(cnt, 0, sizeof(cnt));
  for (int i = 0; i < n; ++i) {
    scanf("%d", &A[i]);
    cnt[A[i]]++;
  }
  long long ret = 0;
  for (int num = 1; num <= 1000000; ++num)
    if (cnt[num])
      for (int ch = ((num - 1) & num); ch; ch = ((ch - 1) & num)) {
        cnt[ch] = mod(cnt[ch] + cnt[num]);
      }
  for (int num = 1000 * 1000; num >= 1; --num) {
    if (count_bits(num) % 2)
      ret = mod(ret + pow2(cnt[num]) - 1 + MOD);
    else
      ret = mod(ret - pow2(cnt[num]) + 1 + MOD);
  }
  ret = mod(pow2(n) - ret + MOD);
  ret = mod(ret - 1 + MOD);
  cout << ret << endl;
}
