2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int N;
long long a[1000000];
long long dp[1 << 22];
const int MOD = 1e9 + 7;
int main() {
  cin.sync_with_stdio(false);
  while (cin >> N) {
    for (int i = 0; i < N; ++i) cin >> a[i];
    fill(dp, dp + (1 << 20), 1);
    for (int i = 0; i < N; ++i) dp[a[i]] = (dp[a[i]] * 2) % MOD;
    for (int i = 0; i < 20; ++i) {
      for (int j = 0; j < (1 << 20); ++j) {
        if ((j >> i) & 1) continue;
        dp[j] = (dp[j] * dp[j | (1 << i)]) % MOD;
      }
    }
    long long ans = 0;
    for (int i = 0; i < (1 << 20); ++i) {
      int cnt = __builtin_popcount(i);
      if (cnt % 2 == 0)
        ans = (ans + dp[i]) % MOD;
      else
        ans = (ans - dp[i] + MOD) % MOD;
    }
    cout << ans << endl;
  }
  return 0;
}
