2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
template <typename T>
inline T read(T& x) {
  x = 0;
  int f = 0;
  char ch = getchar();
  while (ch < '0' || ch > '9') f |= (ch == '-'), ch = getchar();
  while (ch >= '0' && ch <= '9') x = x * 10 + ch - '0', ch = getchar();
  return x = f ? -x : x;
}
const int N = 1e6 + 10;
const int P = 1e9 + 7;
int n, i, status, ans, a[N], f[(1 << 20) + 10];
int fexp(int a, int n) {
  int res = 1;
  while (n) {
    if (n & 1) res = 1LL * res * a % P;
    a = 1LL * a * a % P;
    n >>= 1;
  }
  return res;
}
inline void up(int& a, int b) {
  a += b;
  if (a >= P) a -= P;
}
int main() {
  read(n);
  for (i = 1; i <= n; i++) {
    read(a[i]);
    f[a[i]]++;
  }
  for (i = 0; i < 20; i++) {
    for (status = 0; status < (1 << 20); status++) {
      if (!(status & (1 << i))) f[status] += f[status | (1 << i)];
    }
  }
  for (status = 0; status < (1 << 20); status++) {
    int g = __builtin_popcount(status);
    int res = fexp(2, f[status]) - 1;
    if (res < 0) res += P;
    if (g & 1)
      up(ans, P - res);
    else
      up(ans, res);
  }
  printf("%d\n", ans);
  return 0;
}
