2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = 4e6 + 9, p = 1e9 + 7;
int lim = 1, n, mx, a[maxn], f[maxn];
int poww(int a, int b) {
  int ans = 1;
  while (b) {
    if (b & 1) ans = 1ll * ans * a % p;
    b >>= 1;
    a = 1ll * a * a % p;
  }
  return ans;
}
void FWT_or(int *A, int type) {
  for (int mid = 1; mid < lim; mid <<= 1)
    for (int j = 0, R = mid << 1; j < lim; j += R)
      for (int k = 0; k < mid; ++k)
        A[j + k] = ((A[j + k] + type * A[j + k + mid]) % p + p) % p;
}
int main() {
  cin >> n;
  for (int i = 1; i <= n; ++i) cin >> a[i], ++f[a[i]], mx = max(mx, a[i]);
  while (lim < mx) lim <<= 1;
  FWT_or(f, 1);
  int ans = 0;
  for (int s = 0; s < lim; ++s) {
    if (__builtin_popcount(s) & 1)
      ans = (ans + p - poww(2, f[s]) + 1) % p;
    else
      ans = (ans + poww(2, f[s]) - 1) % p;
  }
  cout << ans;
}
