2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = 1000000007;
int pow(int a, int n) {
  int res = 1;
  while (n) {
    if (n & 1) res = res * a % mod;
    a = a * a % mod;
    n >>= 1;
  }
  return res;
}
void solve(int f[], int n, int ty) {
  for (int i = 0; i < n; i++) {
    for (int j = 0; j < (1 << n); j++) {
      if (j & (1 << i)) continue;
      if ((f[j | (1 << i)] += ty * f[j]) >= mod) f[j | (1 << i)] -= mod;
      if ((f[j | (1 << i)]) < 0) f[j | (1 << i)] += mod;
    }
  }
}
int f[1 << 20];
int main() {
  int n;
  scanf("%d", &n);
  int mask = (1 << 20) - 1;
  for (int i = 0; i < n; i++) {
    int x;
    scanf("%d", &x);
    f[x ^ mask]++;
  }
  solve(f, 20, 1);
  for (int i = 0; i < (1 << 20); i++) {
    f[i] = pow(2, f[i]);
  }
  solve(f, 20, -1);
  printf("%d\n", f[mask]);
  return 0;
}
