2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mxlg = 21, MAXX = (1 << mxlg), MOD = 1e9 + 7;
int n, pw2[MAXX], dp[MAXX][mxlg], ans;
int main() {
  ios::sync_with_stdio(0), cin.tie(0), cout.tie(0);
  cin >> n, pw2[0] = 1;
  for (int i = 1; i < MAXX; i++) pw2[i] = (pw2[i - 1] * 2) % MOD;
  for (int i = 0, x; i < n; i++) cin >> x, dp[x][0]++;
  for (int j = 1; j < mxlg; j++) {
    for (int i = 0; i < MAXX; i++) {
      dp[i][j] = dp[i][j - 1];
      if (!(i & (1 << (j - 1))))
        dp[i][j] = (dp[i][j] + dp[i + (1 << (j - 1))][j - 1]);
    }
  }
  for (int i = 0; i < MAXX; i++) {
    int x = __builtin_popcount(i), y = pow(-1, x);
    ans = (ans + (y * pw2[dp[i][mxlg - 1]])) % MOD;
  }
  return cout << ans << endl, 0;
}
