2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int two[(1 << 20)];
int A[(1 << 20)];
int S[(1 << 20)];
int main() {
  two[0] = 1;
  for (int i = (1); i <= ((1 << 20) - 1); ++i)
    two[i] = two[i - 1] * 2 % 1000000007;
  int N;
  scanf("%d", &N);
  for (int i = (0); i < (N); ++i) scanf("%d", A + i), S[A[i]]++;
  for (int b = (0); b < (20); ++b)
    for (int s = (0); s < ((1 << 20)); ++s)
      if (s & (1 << b)) S[s - (1 << b)] += S[s];
  int ans = 0;
  for (int s = (0); s < ((1 << 20)); ++s)
    if (__builtin_popcount(s) & 1)
      ans = (ans - two[S[s]] + 1000000007) % 1000000007;
    else
      ans = (ans + two[S[s]]) % 1000000007;
  cout << ans << endl;
}
