2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mo = 1e9 + 7;
long long dp[1 << 20];
inline void read(int &x) {
  char b = getchar();
  x = 0;
  for (; !isdigit(b); b = getchar())
    ;
  for (; isdigit(b); b = getchar()) x = x * 10 + b - '0';
}
inline void add(long long &x, long long y) {
  x += y;
  if (x >= mo) x -= mo;
  if (x < 0) x = (x % mo + mo) % mo;
}
inline int popcount(int x) {
  int res = 0;
  for (; x; x >>= 1)
    if (x & 1) ++res;
  return res;
}
inline long long pow(long long a, long long b) {
  long long res = 1;
  for (a %= mo; b; b >>= 1, a = (a * a) % mo)
    if (b & 1) res = (res * a) % mo;
  return res;
}
int main() {
  int n;
  read(n);
  for (int i = 0, t; i < n; ++i) read(t), ++dp[t];
  long long ans = 0;
  for (int i = 0; i < 20; ++i)
    for (int s = 0; s < (1 << 20); ++s)
      if (!(s & (1 << i))) add(dp[s], dp[s ^ (1 << i)]);
  for (int s = 0; s < (1 << 20); ++s) {
    if (popcount(s) & 1)
      add(ans, mo - pow(2, dp[s]));
    else
      add(ans, pow(2, dp[s]));
    ans = (ans % mo + mo) % mo;
  }
  printf("%lld\n", ans);
  return 0;
}
