2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
inline long long read() {
  long long sum = 0, ff = 1;
  char ch = getchar();
  while (!isdigit(ch)) {
    if (ch == '-') ff = -1;
    ch = getchar();
  }
  while (isdigit(ch)) sum = sum * 10 + (ch ^ 48), ch = getchar();
  return sum * ff;
}
const long long N = 1e6 + 5;
const long long mo = 1e9 + 7;
long long n, m, ans, f[22], dp[N], g[N];
inline void Add(long long &x, long long y) {
  x += y;
  if (x >= mo) x -= mo;
}
signed main() {
  for (long long i = 1; g[0] = 1, i <= 1e6; i++) g[i] = (g[i - 1] << 1) % mo;
  n = read();
  for (long long i = 1; i <= n; i++) dp[read()]++;
  for (long long j = 0; j <= 21; j++)
    for (long long i = 1; i <= 1e6; i++)
      if ((1ll << j) & i) Add(dp[i ^ (1ll << j)], dp[i]);
  for (long long i = 0; i <= 1e6; i++) {
    long long gs = 0;
    for (long long j = 0; j <= 21; j++)
      if ((1ll << j) & i) gs++;
    Add(f[gs], g[dp[i]] - 1);
  }
  for (long long i = 0; i <= 21; i++)
    (i & 1) ? Add(ans, -f[i]) : Add(ans, f[i]);
  printf("%lld\n", (ans + mo) % mo);
  return 0;
}
