2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
const int num = 1000000, mo = 1e9 + 7;
int a[num + 5], f[num + 5], i, j, n, x, ans = 0;
int main() {
  scanf("%d\n", &n);
  for (i = 1; i <= n; ++i) scanf("%d", &x), f[x]++;
  for (a[0] = i = 1; i <= n; ++i) a[i] = (a[i - 1] << 1) % mo;
  for (j = 0; j < 20; ++j)
    for (i = num; i >= 0; --i)
      if (i & (1 << j)) (f[1 << j ^ i] += f[i]) %= mo;
  for (i = num; i >= 0; --i) {
    x = 1;
    for (j = 0; j < 20; ++j)
      if (i & (1 << j)) x = -x;
    (ans += 1ll * x * (a[f[i]] - 1)) %= mo;
  }
  printf("%d\n", (ans + mo) % mo);
}
