2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int LN = 20;
const int MOD = 1000000007;
int n;
int arr[1 << LN];
int dp[1 << LN][LN + 1];
int f[1 << LN], p[1 << LN];
int main() {
  scanf("%d", &n);
  for (int i = 1; i <= n; i++) {
    scanf("%d", arr + i);
    ++dp[arr[i]][0];
  }
  for (int mask = (1 << LN) - 1; mask >= 0; mask--) {
    for (int i = 0; i < LN; i++) {
      if (mask & (1 << i))
        dp[mask][i + 1] = dp[mask][i];
      else
        dp[mask][i + 1] = dp[mask][i] + dp[mask | (1 << i)][i];
    }
    f[mask] = dp[mask][LN];
  }
  p[0] = 1;
  for (int i = 1; i < (1 << LN); i++) {
    p[i] = (2LL * p[i - 1]) % MOD;
  }
  for (int i = 0; i < (1 << LN); i++) {
    p[i] = (p[i] - 1 + MOD) % MOD;
  }
  int ans = 0;
  for (int i = 0; i < (1 << LN); i++) {
    if (__builtin_popcount(i) & 1)
      ans = (ans - p[f[i]] + MOD) % MOD;
    else
      ans = (ans + p[f[i]]) % MOD;
  }
  printf("%d\n", ans);
}
