2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MOD = 1e9 + 7;
const int MAX = 1e6 + 10;
int dp[1 << 22], cnt[1 << 21], Pow[30];
int a[MAX];
void bitcount() {
  memset(cnt, 0, sizeof(cnt));
  for (int i = 0; i < (1 << 21); i++) {
    for (int j = 0; j <= 21; j++) {
      if (i & (1 << j)) cnt[i]++;
    }
  }
}
void powcount() {
  Pow[0] = 1;
  Pow[1] = 2;
  for (int i = 2; i <= 20; i++) {
    Pow[i] = Pow[i - 1] * 2;
  }
}
int main() {
  int n;
  bitcount();
  powcount();
  while (scanf("%d", &n) == 1) {
    memset(dp, 0, sizeof(dp));
    for (int i = 1; i <= n; i++) {
      scanf("%d", &a[i]);
      dp[a[i]]++;
    }
    for (int i = 0; i <= 20; i++) {
      for (int j = 0; j < (1 << n); j++) {
        if ((j & (1 << i)) == 0) {
          dp[j] = dp[j] + dp[j + (1 << i)];
        }
      }
    }
    long long res = 0;
    for (int i = 0; i < (1 << n); i++) {
      if (cnt[i] & 1) {
        res = (res - (long long)Pow[dp[i]] + (long long)MOD) % MOD;
      } else
        res = (res + (long long)Pow[dp[i]]) % MOD;
    }
    printf("%I64d\n", res % MOD);
  }
  return 0;
}
