2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1e6 + 10, M = 21, MX = 1 << (M - 1), NX = 1e9 + 7;
int n, r, t, c, A[N], P[N], dp[M][1 << M];
int main() {
  scanf("%d", &n);
  for (int i = 0; i < n; i++) scanf("%d", &A[i]), dp[0][A[i]]++;
  P[0] = 1;
  for (int i = 1; i <= n; i++) P[i] = P[i - 1] * 2 % NX;
  for (int i = 1; i < M; i++)
    for (int j = 0; j < MX; j++) {
      dp[i][j] = dp[i - 1][j];
      if (!(j & (1 << (i - 1)))) dp[i][j] += dp[i - 1][j + (1 << (i - 1))];
    }
  for (int j = 0; j < MX; j++) {
    if (__builtin_popcount(j) & 1)
      c = (c - P[dp[M - 1][j]]) % NX;
    else
      c = (c + P[dp[M - 1][j]] + NX) % NX;
  }
  return !printf("%d", c);
}
