2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
const int N = (int)1e6 + 7;
const int inf = (int)1e9 + 7;
const int mod = (int)1e9 + 7;
const long long linf = (long long)1e18 + 7;
const int dx[] = {-1, 0, 1, 0, 1, -1, -1, 1};
const int dy[] = {0, 1, 0, -1, 1, -1, 1, -1};
using namespace std;
void add(int &x, int y) {
  x += y;
  if (x >= mod)
    x -= mod;
  else if (x < 0)
    x += mod;
}
int sum(int x, int y) {
  add(x, y);
  return x;
}
int bp(int x, int y) {
  int res = 1;
  while (y) {
    if (y & 1) res = res * 1ll * x % mod;
    x = x * 1ll * x % mod, y >>= 1;
  }
  return res;
}
int n;
int dp[1 << 20];
int main() {
  ios_base ::sync_with_stdio(0), cin.tie(0), cout.tie(0);
  cin >> n;
  for (int i = (1); i <= (n); i++) {
    int x;
    cin >> x;
    dp[x]++;
  }
  for (int i = (0); i <= (19); i++) {
    for (int mask = ((1 << 20) - 1); mask >= (0); mask--) {
      if (mask & (1 << i)) dp[mask ^ (1 << i)] += dp[mask];
    }
  }
  int ans = 0;
  for (int mask = (0); mask <= ((1 << 20) - 1); mask++) {
    if (__builtin_popcount(mask) & 1)
      add(ans, -bp(2, dp[mask]));
    else
      add(ans, bp(2, dp[mask]));
  }
  cout << ans;
  exit(0);
}
