2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

import java.io.*;
import java.math.*;
import java.util.*;

public class Main{
    FastScanner in;
    PrintWriter out;

    int mod = (int)1e9+7;

    public void solve()
    {
        int n = in.nextInt();
        int[] f = new int[(1<<21)];
        for (int i = 0; i < n; i++) {
            f[in.nextInt()]++;
        }

        for (int i = 0; i <= 19; i++)
            for (int j = 1000000; j >= 0; j--)
                if ((j & (1 << i)) != 0)
                    f[j - (1 << i)] += f[j];

        int[] pow = new int[1000001];
        pow[0] = 1;
        for (int i = 1; i < 1000001; i++) {
            pow[i] = pow[i-1] + pow[i-1];
            if (pow[i] >= mod)
                pow[i] -= mod;
        }


        int ans = 0;
        int cnt;

        for (int i = 0; i < (1 << 20); i++) {
            cnt = 0;
            for (int j = 0; j < 21; j++) {
                if ((i >> j) % 2 == 1)
                    cnt++;
            }

            if (cnt % 2 == 0)
                ans += pow[f[i]];
            else
                ans += mod - pow[f[i]];

            if (ans >= mod)
                ans -= mod;
        }

        out.println(ans);
    }

    public void run()
    {
        in = new FastScanner();
        out = new PrintWriter(System.out);

        solve();

        out.close();
    }


    public static void main(String[] args) {
        new Main().run();
    }

    class FastScanner {
        BufferedReader br;
        StringTokenizer st;

        FastScanner() {
            br = new BufferedReader(new InputStreamReader(System.in));
        }

        String next() {
            while (st == null || !st.hasMoreTokens()) {
                try {
                    st = new StringTokenizer(br.readLine());
                } catch (IOException e) {
                    e.printStackTrace();
                }
            }
            return st.nextToken();
        }

        int nextInt() {
            return Integer.parseInt(next());
        }

        long nextLong() {
            return Long.parseLong(next());
        }

        double nextDouble() {
            return Double.parseDouble(next());
        }
    }
}