2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
inline long long bip(long long x, long long n, long long mod) {
  long long res = 1;
  while (n) {
    if (n & 1) {
      res = (res * x) % mod;
    }
    x = (x * x) % mod;
    n >>= 1;
  }
  return res;
}
const int maxn = 1e9;
const long long inf = 1e18;
const int mod = 1e9 + 7;
const int N = (1 << 20);
int n, dp[N];
void solve() {
  cin >> n;
  for (int i = 1; i <= n; i++) {
    int x;
    cin >> x;
    dp[x]++;
  }
  for (int i = 0; i < 20; i++)
    for (int mask = (1 << 20) - 1; mask >= 0; mask--)
      if (!(mask >> i & 1)) dp[mask] += dp[mask | (1 << i)];
  long long ans = 0;
  for (int i = 0; i < (1 << 20); i++)
    if (__builtin_popcount(i) & 1)
      ans = (ans - ((1 << dp[i]) - 1) + mod) % mod;
    else
      ans = (ans + ((1 << dp[i]) - 1)) % mod;
  cout << ans;
}
int main() {
  ios_base::sync_with_stdio(0), cin.tie(0), cout.tie(0);
  int tt = 1;
  while (tt--) {
    solve();
    cout << '\n';
  }
}
