2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int lg = 20;
const int maxn = 2e6 + 100;
const int mod = 1e9 + 7;
const int inf = 1e9;
int n, a, c[maxn][2], dp[maxn][2], p[maxn];
int main() {
  ios::sync_with_stdio(false);
  cin.tie(0);
  cout.tie(0);
  ;
  p[0] = 1;
  for (int i = 1; i < maxn; i++) {
    p[i] = (p[i - 1] * 2) % mod;
  }
  cin >> n;
  for (int i = 0; i < n; i++) {
    cin >> a;
    c[a][0]++;
  }
  for (int j = 1; j <= lg; j++) {
    for (int i = 0; i < (1ll << lg); i++) {
      c[i][j % 2] = c[i][1 - j % 2];
      if (!((i >> (j - 1)) & 1))
        c[i][j % 2] += c[i + (1ll << (j - 1))][1 - j % 2];
      c[i][j % 2] %= mod;
    }
  }
  for (int i = 0; i < (1ll << lg); i++) {
    dp[i][0] = p[c[i][lg % 2]] - 1;
    if (__builtin_popcount(i) % 2) dp[i][0] *= -1;
  }
  for (int j = 1; j <= lg; j++) {
    for (int i = 0; i < (1ll << lg); i++) {
      dp[i][j % 2] = dp[i][1 - j % 2];
      if (!((i >> (j - 1)) & 1))
        dp[i][j % 2] += dp[i + (1ll << (j - 1))][1 - j % 2];
      dp[i][j % 2] %= mod;
    }
  }
  cout << (dp[0][lg % 2] + mod) % mod;
  return 0;
}
