2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
inline int read() {
  int ret = 0, f = 1;
  char ch = getchar();
  while (ch < '0' || ch > '9') {
    if (ch == '-') f = -f;
    ch = getchar();
  }
  while (ch <= '9' && ch >= '0') ret = ret * 10 + ch - '0', ch = getchar();
  return ret * f;
}
int n, x, dp[3000000], g[3000000];
long long f[3000000];
long long ans = 0;
int main() {
  scanf("%d", &n);
  int mx = (1 << 20) - 1;
  for (int i = 1; i <= n; i++) dp[read()]++;
  f[0] = 1;
  for (int i = 1; i <= n; i++) f[i] = (f[i - 1] << 1) % 1000000007;
  for (int i = 1; i <= 20; i++)
    for (int j = 0; j <= mx; j++)
      if (j & (1 << i - 1)) {
        dp[j ^ (1 << i - 1)] += dp[j];
      }
  ans = f[n] - 1;
  for (int i = 1; i <= mx; i++) {
    g[i] = g[i >> 1] + (1 & i);
    if (g[i] & 1)
      ans = (ans - f[dp[i]] + 1 + 1000000007) % 1000000007;
    else
      ans = (ans + f[dp[i]] - 1 + 1000000007) % 1000000007;
  }
  printf("%lld\n", ans);
  return 0;
}
