2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0


import java.io.BufferedOutputStream;
import java.io.BufferedReader;
import java.io.InputStreamReader;
import java.io.PrintWriter;
import java.util.StringTokenizer;

public class Round257Div1D {

	public static long mod = (long)1e9+7;
	
	public static void solve() {
		int n = s.nextInt(); 
		int m = 20;
		int size = 1<<m;
		int[] dp = new int[size];
		for(int i = 0 ;i<n;i++) {
			int x = s.nextInt();
			dp[x]++;
		}
		for(int i=0;i<m;i++) {
			for(int mask = 0;mask<size;mask++) {
				if((mask & (1<<i))==0) {
					dp[mask]+=dp[mask|(1<<i)];
				}
			}
		}
		long ans = 0;
		for(int i=0;i<size;i++) {
			int bits = Integer.bitCount(i);
			if((bits&1)==0) {
				ans = ans + fast(2,dp[i]);
				ans%=mod;
			}else {
				ans = ans - fast(2,dp[i]);
				ans%=mod;
				if(ans<0) {
					ans+=mod;
				}
			}
		}
		out.println(ans);
	}

	public static long fast(long a,long n) {
		if(n == 1) {
			return a%mod;
		}else if(n==0) {
			return 1;
		}
		long ans= fast(a,n/2);
		ans = ans * ans;
		ans%=mod;
		if((n&1)==1) {
			ans = ans * a;
			ans%=mod;
		}
		return ans;
	}
	
	public static void main(String[] args) {
		out = new PrintWriter(new BufferedOutputStream(System.out));
		s = new FastReader();
		solve();
		out.close();
	}

	public static FastReader s;
	public static PrintWriter out;

	public static class FastReader {
		BufferedReader br;
		StringTokenizer st;

		public FastReader() {
			br = new BufferedReader(new InputStreamReader(System.in));
		}

		String next() {
			while (st == null || !st.hasMoreTokens()) {
				try {
					st = new StringTokenizer(br.readLine());
				} catch (Exception e) {
					e.printStackTrace();
				}
			}
			return st.nextToken();
		}

		int nextInt() {
			return Integer.parseInt(next());
		}

		double nextDouble() {
			return Double.parseDouble(next());
		}

		long nextLong() {
			return Long.parseLong(next());
		}

		String nextLine() {
			String str = "";
			try {
				str = br.readLine();
			} catch (Exception e) {
				e.printStackTrace();
			}
			return str;
		}
	}

	
}
