2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = 1e9 + 7, mxN = 1e6 + 3;
long long n, dp[(1 << 20)];
const int k = 20, e = (1 << 20);
long long pc(int x) {
  long long res = 0;
  while (x > 0) res += (x & 1), x /= 2;
  return res;
}
long long po(long long x, long long y) {
  long long res = 1;
  while (y) {
    if (y & 1) res = res * x % mod;
    x = x * x % mod;
    y /= 2;
  }
  return res;
}
int main() {
  cin >> n;
  for (int i = 0, x; i < n; i++) {
    cin >> x;
    dp[x]++;
  }
  for (int i = 0; i < k; i++)
    for (long long j = 0; j < e; j++) {
      int g = j ^ (1 << i);
      if (j & (1 << i)) dp[g] += dp[j];
    }
  long long ans = 0;
  for (int i = 0; i < e; i++) {
    long long cnt = po(2, dp[i]) - 1;
    ans = (ans + ((pc(i) % 2) ? -cnt : cnt)) % mod;
  }
  cout << (ans + mod) % mod;
}
