2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 20, P = 1000000007;
int n;
int f[1 << N], pw[1 << N];
int norm(int x) { return x >= P ? (x - P) : x; }
int main() {
  int m, mx = 0;
  scanf("%d", &m);
  pw[0] = 1;
  for (int rep = 1; rep <= m; ++rep) {
    pw[rep] = norm(pw[rep - 1] << 1);
    int a;
    scanf("%d", &a);
    ++f[a];
    mx = max(mx, a);
  }
  while ((1 << n) <= mx) ++n;
  for (int i = 0; i < n; ++i)
    for (int s = (1 << n) - 1; s >= 0; --s)
      if (!(s >> i & 1)) f[s] += f[s | 1 << i];
  int ans = 0;
  for (int s = 0; s < 1 << n; ++s)
    if (__builtin_parity(s))
      ans = norm(ans + P - pw[f[s]]);
    else
      ans = norm(ans + pw[f[s]]);
  printf("%d\n", ans);
  return 0;
}
