2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
inline long long mod(long long n, long long m) {
  long long ret = n % m;
  if (ret < 0) ret += m;
  return ret;
}
long long gcd(long long a, long long b) {
  return (b == 0LL ? a : gcd(b, a % b));
}
long long exp(long long a, long long b, long long m) {
  if (b == 0LL) return 1LL;
  if (b == 1LL) return mod(a, m);
  long long k = mod(exp(a, b / 2, m), m);
  if (b & 1LL) {
    return mod(a * mod(k * k, m), m);
  } else
    return mod(k * k, m);
}
const long long N = (1 << 20) + 5, L = 20;
const long long M = 1000000007;
long long a[N];
long long pot[(1 << 20) + 10];
long long F[(1 << 20) + 100];
int32_t main() {
  ios_base::sync_with_stdio(0);
  cin.tie(0);
  cout.tie(0);
  ;
  long long n;
  cin >> n;
  for (long long i = 0; i < n; i++) {
    cin >> a[i];
    F[a[i]]++;
  }
  long long full = (1LL << 20) - 1;
  for (long long i = 0; i < L; i++) {
    for (long long msk = 0; msk < (1 << 20); msk++) {
      if (msk & (1 << i)) F[msk ^ (1 << i)] += F[msk];
    }
  }
  pot[0] = 1;
  for (long long i = 1; i <= N; i++) pot[i] = (2LL * pot[i - 1]) % M;
  long long res = 0;
  for (long long i = 0; i < (1 << 20); i++) {
    if (__builtin_popcount(i) & 1) {
      res = (res - pot[F[i]]) % M;
    } else
      res = (res + pot[F[i]]) % M;
  }
  res %= M;
  if (res < 0) res += M;
  cout << res << "\n";
}
