2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

import java.io.*;
import java.util.*;

public class D {
	static final long MOD = (long) (1e9 + 7);
	public static void main(String[] args) {
		MyScanner in = new MyScanner();
		int n = in.nextInt();
		int[] supersets = new int[1 << 20];
		for (int i = 0; i < n; i++)
			supersets[in.nextInt()]++;
		for (int i = 0; i < 20; i++) {
			for (int mask = 0; mask < supersets.length; mask++) {
				if (((1 << i) & mask) != 0) {
					supersets[mask ^ (1 << i)] += supersets[mask];
				}
			}
		}
		long[] pow2 = new long[n + 1];
		pow2[0] = 1;
		for (int i = 1; i < n + 1; i++)
			pow2[i] = (pow2[i - 1] * 2) % MOD;
		long ans = 0;
		for (int i = 0; i < supersets.length; i++) {
			ans += pow2[supersets[i]] * (Integer.bitCount(i) % 2 == 0 ? 1 : -1);
			ans = (ans + MOD) % MOD;
		}
		System.out.println(ans);
	}

	private static class MyScanner {
		BufferedReader br;
		StringTokenizer st;

		public MyScanner() {
			br = new BufferedReader(new InputStreamReader(System.in));
		}

		String next() {
			while (st == null || !st.hasMoreElements()) {
				try {
					st = new StringTokenizer(br.readLine());
				} catch (IOException e) {
					e.printStackTrace();
				}
			}
			return st.nextToken();
		}

		int nextInt() {
			return Integer.parseInt(next());
		}
	}
}