2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

// luogu-judger-enable-o2
#include <cstdio>
#include <queue>
#include <algorithm>
#include <cstring>
#define N 2500005
#define eps 1e-6
#define ll long long
#define rint register int
#define db double
using namespace std;
inline int read (){
	register int num,sign=1;register char c;
	while (((c=getchar())<'0'||c>'9')&&c!='-');c=='-'?num=sign=0:num=c-48;
	while ((c=getchar())>='0'&&c<='9')num=(num<<3)+(num<<1)+(c-48);
	return sign?num:-num;
}
int n,ok,len;
int  A[N],ans,f[N];
int mod=1000000007;
inline void fwt(int *A,rint s,int Mod){
	for(rint i=1;i<len;i<<=1)
		for(rint j=0;j<len;j+=i<<1)
			for(rint k=0;k<i;++k)
				A[j+k]=(A[j+k]+(s*A[i+j+k]+Mod)%Mod)%Mod;
}
int main(){len=1;
	n=read();f[0]=1;
	while(len<=n)len<<=1;
	for(rint i=0;i<n;++i)A[read()]++;
	for(rint i=1;i<=len;++i)f[i]=(f[i-1]+f[i-1])%mod;
	fwt(A,1,mod-1);
	for(rint i=0;i<len;++i)A[i]=f[A[i]];
	fwt(A,-1,mod);
	if(A[0]==f[n])printf("%d ",A[0]-1);
	else printf("%d ",A[0]);
}
