2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
inline int read() {
  int x = 0, f = 1;
  char c = getchar();
  while (c < '0' || c > '9') {
    if (c == '-') f = -1;
    c = getchar();
  }
  while (c >= '0' && c <= '9')
    x = (x << 3) + (x << 1) + (c ^ '0'), c = getchar();
  return x * f;
}
const int N = 1 << 21, mod = 1e9 + 7, S = 1 << 20;
inline int inc(int x, int y) {
  x += y - mod;
  return x + (x >> 31 & mod);
}
inline void Inc(int &x, int y) {
  x += y - mod;
  x += (x >> 31 & mod);
}
inline void Del(int &x, int y) {
  x -= y;
  x += (x >> 31 & mod);
}
int n, f[N], cnt[N], bit[N], ans;
int main() {
  n = read();
  bit[0] = 1;
  for (int i = 1; i <= n; i++) bit[i] = inc(bit[i - 1], bit[i - 1]);
  for (int i = 1; i <= n; i++) f[read()]++;
  for (int i = 0; i < 20; i++)
    for (int s = 0; s < S; s++)
      if (s >> i & 1) f[s ^ (1 << i)] += f[s];
  ans = bit[n] - 1;
  for (int i = 1; i < S; i++) {
    cnt[i] = cnt[i >> 1] + (i & 1);
    (cnt[i] & 1) ? Del(ans, bit[f[i]] - 1) : Inc(ans, bit[f[i]] - 1);
  }
  printf("%d\n", ans);
  return 0;
}
