2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
#pragma comment(linker, "/STACK:102400000,102400000")
int cnt[3000000], tmp[3000000];
long long work(int x) {
  long long ret = 1;
  for (int i = 1; i <= x; i++) ret = (ret * 2) % 1000000007;
  return (ret - 1 + 1000000007) % 1000000007;
}
int main() {
  int n;
  cin >> n;
  memset(cnt, 0, sizeof(cnt));
  for (int i = 1; i <= n; i++) {
    int x;
    scanf("%d", &x);
    cnt[x]++;
  }
  memset(tmp, 0, sizeof(tmp));
  for (int i = 1; i < 1 << 17; i++) tmp[i] = cnt[i];
  for (int i = 1 << 17; i > 0; i--)
    for (int j = (i - 1) & i; j > 0; j = (j - 1) & i) tmp[j] += cnt[i];
  int ans = 0;
  for (int i = 0; i < 1 << 17; i++) {
    int go = 0;
    for (int j = 0; j <= 17; j++)
      if ((i & (1 << j)) != 0) go++;
    if (go % 2 == 1)
      ans = (ans + work(tmp[i])) % 1000000007;
    else
      ans = (ans - work(tmp[i]) + 1000000007) % 1000000007;
  }
  cout << (work(n) - ans + 1000000007) % 1000000007 << endl;
}
