2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

//package codeforces;

import java.io.BufferedReader;
import java.io.IOException;
import java.io.InputStreamReader;
import java.io.PrintWriter;
import java.util.*;

public class D {
    BufferedReader reader = new BufferedReader(new InputStreamReader(System.in));
    PrintWriter writer = new PrintWriter(System.out);
    StringTokenizer stringTokenizer;

    String next() throws IOException {
        while (stringTokenizer == null || !stringTokenizer.hasMoreTokens()) {
            stringTokenizer = new StringTokenizer(reader.readLine());
        }
        return stringTokenizer.nextToken();
    }

    int nextInt() throws IOException {
        return Integer.parseInt(next());
    }

    long nextLong() throws IOException {
        return Long.parseLong(next());
    }

    void solve() throws IOException {
        int n = nextInt();
        int[] f = new int[1 << 20];
        for(int i = 0; i < n; i++) {
            f[nextInt()]++;
        }
        for(int k = 0; k < 20; k++) {
            for(int i = 0; i < 1 << 20; i++) {
                int mask = 1 << k;
                if(((i & mask) > 0)) {
                    f[i ^ mask] += f[i];
                }
            }
        }
        int mod = 1000 * 1000 * 1000 + 7;
        int[] pow2 = new int[n + 1];
        pow2[0] = 1;
        for(int i = 1; i <= n; i++) {
            pow2[i] = pow2[i - 1] * 2;
            if(pow2[i] >= mod) {
                pow2[i] -= mod;
            }
        }
        long ans = 0;
        for(int i = 0; i < 1 << 20; i++) {
            if(Integer.bitCount(i) % 2 == 0) {
                ans += pow2[f[i]];
            } else {
                ans += mod - pow2[f[i]];
            }
        }
        writer.println(ans % mod);
        writer.close();
    }

    public static void main(String[] args) throws IOException {
        new D().solve();
    }
}
