2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MOD = 1000000007;
const double eps = 1e-8;
const int nm = 1100005;
int n, k, m, t;
long long res;
int cnt[nm], f[nm][23];
int POW(int x, int z) {
  if (z == 0) return 1;
  if (z == 1) return x % MOD;
  int u = POW(x, z >> 1);
  u = ((long long)u * u) % MOD;
  if (z % 2) u = ((long long)u * x) % MOD;
  return u;
}
int main() {
  int i, j, x, y, z, w;
  scanf("%d", &n);
  for (i = 1; i <= n; i++) {
    scanf("%d", &x);
    cnt[x]++;
  }
  for (i = (1 << 20) - 1; i >= 0; i--) {
    if (i & 1)
      f[i][0] = cnt[i];
    else
      f[i][0] = cnt[i] + cnt[i + 1];
    for (j = 1; j < 20; j++) {
      if (i & (1 << j))
        f[i][j] = f[i][j - 1];
      else
        f[i][j] = f[i][j - 1] + f[i + (1 << j)][j - 1];
    }
  }
  for (i = (1 << 20) - 1; i >= 0; i--) {
    x = __builtin_popcount(i);
    if (x & 1)
      res -= POW(2, f[i][19]);
    else
      res += POW(2, f[i][19]);
    res = (res + MOD) % MOD;
  }
  cout << res;
  return 0;
}
