2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int n;
int num;
const int bits = 20;
vector<int> v[1500000];
int pow2[1500000];
int ones[2000000];
int nums[2000000][21];
int sum[2000000];
int ans;
int main() {
  for (int bmask = 0; bmask < ((1 << bits)); bmask++) {
    for (int b = 0; b < (bits); b++) {
      if (bmask & (1 << b)) ones[bmask]++;
    }
  }
  pow2[0] = 1;
  for (int i = 0; i < (1000000); i++) pow2[i + 1] = (pow2[i] * 2) % 1000000007;
  scanf("%d", &n);
  for (int i = 0; i < (n); i++) {
    scanf("%d", &num);
    nums[num][ones[num]]++;
  }
  for (int bmask = ((1 << bits) - 2); bmask >= (0); bmask--) {
    for (int b = 0; b < (bits); b++) {
      if (!(bmask & (1 << b))) {
        for (int o = (ones[bmask] + 1); o <= (bits); o++) {
          nums[bmask][o] += nums[bmask + (1 << b)][o];
        }
      }
    }
    sum[bmask] = nums[bmask][ones[bmask]];
    for (int o = (ones[bmask] + 1); o <= (bits); o++) {
      nums[bmask][o] /= (o - ones[bmask]);
      sum[bmask] += nums[bmask][o];
    }
  }
  ans = 0;
  for (int bmask = 0; bmask < ((1 << bits)); bmask++) {
    ans += (ones[bmask] % 2 ? -1 : 1) * (pow2[sum[bmask]] - 1);
    ans = (ans + 1000000007) % 1000000007;
  }
  printf("%d\n", ans);
  return 0;
}
