2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

import java.io.DataInputStream;
import java.io.FileInputStream;
import java.io.IOException;

public class MainClass
{
    public static void main(String[] args)throws IOException
    {
        Reader in = new Reader();
        int n = in.nextInt();
        int[] A = new int[n];   for (int i=0;i<n;i++)   A[i] = in.nextInt();
        int[] dp = new int[1 << 20];    int univMask = (1 << 20) - 1;
        for (int i=0;i<n;i++) ++dp[univMask ^ A[i]];
        for (int i=0;i<20;i++)
            for (int mask=0;mask<(1 << 20);++ mask)
                if ((mask & (1 << i)) > 0)
                    dp[mask] += dp[mask ^ (1 << i)];
        int[] count = new int[1 << 20];
        for (int mask=0;mask<(1 << 20);mask++)   count[mask] += dp[mask ^ univMask];
        long M = 1_000_000_007;
        long ans = 0L;
        for (int mask = 0;mask < (1 << 20); ++ mask)
        {
            long pow = binPow(count[mask], (int)M);
            int x = Integer.bitCount(mask) % 2; if (x == 1) x = -1; else x = 1;
            ans = (ans + (1L * x * pow) % M) % M;
        }
        System.out.println(ans);
    }
    public static long binPow(int n, int M)
    {
        if (n == 0) return 1;
        long res = binPow(n / 2, M);
        res = (res * res) % M;
        if (n % 2 == 1) res = (res * 2L) % M;
        return res;
    }
}
class Reader
{
    final private int BUFFER_SIZE = 1 << 16;
    private DataInputStream din;
    private byte[] buffer;
    private int bufferPointer, bytesRead;

    public Reader()
    {
        din = new DataInputStream(System.in);
        buffer = new byte[BUFFER_SIZE];
        bufferPointer = bytesRead = 0;
    }

    public Reader(String file_name) throws IOException
    {
        din = new DataInputStream(new FileInputStream(file_name));
        buffer = new byte[BUFFER_SIZE];
        bufferPointer = bytesRead = 0;
    }

    public String readLine() throws IOException
    {
        byte[] buf = new byte[64]; // line length
        int cnt = 0, c;
        while ((c = read()) != -1)
        {
            if (c == '\n')
                break;
            buf[cnt++] = (byte) c;
        }
        return new String(buf, 0, cnt);
    }

    public int nextInt() throws IOException
    {
        int ret = 0;
        byte c = read();
        while (c <= ' ')
            c = read();
        boolean neg = (c == '-');
        if (neg)
            c = read();
        do
        {
            ret = ret * 10 + c - '0';
        }  while ((c = read()) >= '0' && c <= '9');

        if (neg)
            return -ret;
        return ret;
    }

    public long nextLong() throws IOException
    {
        long ret = 0;
        byte c = read();
        while (c <= ' ')
            c = read();
        boolean neg = (c == '-');
        if (neg)
            c = read();
        do {
            ret = ret * 10 + c - '0';
        }
        while ((c = read()) >= '0' && c <= '9');
        if (neg)
            return -ret;
        return ret;
    }

    public double nextDouble() throws IOException
    {
        double ret = 0, div = 1;
        byte c = read();
        while (c <= ' ')
            c = read();
        boolean neg = (c == '-');
        if (neg)
            c = read();

        do {
            ret = ret * 10 + c - '0';
        }
        while ((c = read()) >= '0' && c <= '9');

        if (c == '.')
        {
            while ((c = read()) >= '0' && c <= '9')
            {
                ret += (c - '0') / (div *= 10);
            }
        }

        if (neg)
            return -ret;
        return ret;
    }

    private void fillBuffer() throws IOException
    {
        bytesRead = din.read(buffer, bufferPointer = 0, BUFFER_SIZE);
        if (bytesRead == -1)
            buffer[0] = -1;
    }

    private byte read() throws IOException
    {
        if (bufferPointer == bytesRead)
            fillBuffer();
        return buffer[bufferPointer++];
    }

    public void close() throws IOException
    {
        if (din == null)
            return;
        din.close();
    }
}
