2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = 1048576 + 10, M = 19, MOD = 1000000007;
int n, ans, f[maxn];
int Pow(long long a, int b) {
  long long res = 1;
  for (; b; b >>= 1, a = a * a % MOD)
    if (b & 1) res = (res * a) % MOD;
  return res;
}
int main() {
  scanf("%d", &n);
  for (int i = 1; i <= n; i++) {
    int x;
    scanf("%d", &x);
    f[x]++;
  }
  for (int i = 0; i <= M; i++)
    for (int j = 0; j <= (1 << M + 1) - 1; j++)
      if (!((j >> i) & 1)) (f[j] += f[j | (1 << i)]) %= MOD;
  for (int i = 0; i <= (1 << M + 1) - 1; i++) {
    int cnt = 0;
    for (int j = 0; j <= M; j++)
      if ((i >> j) & 1) cnt++;
    (ans += ((cnt & 1) ? -1 : 1) * (Pow(2, f[i]) - 1)) %= MOD;
  }
  printf("%d\n", (ans + MOD) % MOD);
  return 0;
}
