2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int n, a[4000010], F[4000010], limit, ans = 0;
void FWT_AND(int *A, int type) {
  for (register int mid = 1; mid < limit; mid <<= 1) {
    for (register int R = (mid << 1), j = 0; j < limit; j += R) {
      for (register int k = 0; k < mid; k++) {
        if (type)
          A[j + k] = (A[j + k] + A[j + k + mid]) % 1000000007;
        else
          A[j + k] = (A[j + k] - A[j + k + mid] + 1000000007) % 1000000007;
      }
    }
  }
}
int fpm(int x, int y) {
  int res = 1;
  while (y) {
    if (y & 1) res = 1ll * res * x % 1000000007;
    x = 1ll * x * x % 1000000007;
    y >>= 1;
  }
  return res;
}
int main() {
  scanf("%d", &n);
  limit = (1 << 20);
  for (register int i = 1; i <= n; ++i) scanf("%d", &a[i]);
  for (register int i = 1; i <= n; ++i) F[a[i]]++;
  FWT_AND(F, 1);
  for (register int i = 0; i < limit; ++i) {
    int cnt = 0, x = i;
    while (x) {
      cnt += (x & 1);
      x >>= 1;
    }
    if (cnt & 1)
      ans = (ans - fpm(2, F[i]) + 1000000007) % 1000000007;
    else
      ans = (ans + fpm(2, F[i])) % 1000000007;
  }
  printf("%d\n", ans);
  return 0;
}
