2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int n, m;
long long f[21][1 << 20];
long long pow2[1 << 20];
int main() {
  for (int i = 0; i < (int)(1 << 20); i++) {
    if (i == 0)
      pow2[0] = 1;
    else
      pow2[i] = (pow2[i - 1] * 2) % (1000000007L);
  }
  memset(f, 0, sizeof f);
  scanf("%d", &n);
  int x, maxi = 0;
  for (int i = 0; i < (int)n; i++) {
    scanf("%d", &x);
    maxi = max(maxi, x);
    f[0][x]++;
  }
  m = 0;
  while (maxi > 0) {
    maxi = maxi >> 1;
    m++;
  }
  for (int k = 1; k <= m; k++) {
    for (int i = 0; i < (1 << 20); i++) {
      if (((i >> k - 1) & 1)) {
        f[k][i] = f[k - 1][i];
      } else {
        f[k][i] = (f[k - 1][i] + f[k - 1][(i | ((1 << k - 1)))]) %
                  ((1000000007L) - 1);
      }
    }
  }
  long long sum = 0;
  for (int i = 0; i < (1 << 20); i++) {
    if (__builtin_popcount(i) % 2 == 0) {
      sum = (sum + (pow2[f[m][i]] - 1)) % (1000000007L);
    } else
      sum = (sum - (pow2[f[m][i]] - 1)) % (1000000007L);
  }
  sum = (sum + (1000000007L)) % (1000000007L);
  cout << sum << endl;
}
