2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int inf = 1e9, mod = 1e9 + 7;
const int N = 2e6 + 5;
int P[N], n, a[N], i, j, k, m, dp[N];
long long ans;
int main() {
  scanf("%d", &n);
  for (int i = 1; i <= n; i++) {
    scanf("%d", &a[i]);
    dp[a[i]]++;
  }
  P[0] = 1;
  for (int i = 1; i <= n; i++) P[i] = P[i - 1] * 2 % mod;
  for (int j = 0; j <= 19; j++)
    for (int i = (1 << 20) - 1; i >= 0; i--)
      if ((i & (1 << j))) dp[i - (1 << j)] += dp[i];
  for (int i = (1 << 20) - 1; i >= 0; i--) {
    int t = __builtin_popcount(i);
    if (t % 2)
      ans = (ans - P[dp[i]] + 1 + mod) % mod;
    else
      ans = (ans + P[dp[i]] - 1) % mod;
  }
  cout << ans << '\n';
  return 0;
}
