2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1e6 + 5;
const int lim = 1e6;
const int mod = 1e9 + 7;
long long dp[(1 << 20) + 1], a[N];
long long binpow(long long u, long long p) {
  if (p == 0) return 1;
  if (p == 1) return u;
  long long t = binpow(u, p / 2);
  if (p & 1)
    return t * t % mod * u % mod;
  else
    return t * t % mod;
}
int main() {
  ios_base::sync_with_stdio(false);
  cin.tie(0);
  if (fopen("A.inp", "r")) {
    freopen("test.inp", "r", stdin);
    freopen("test.ans", "w", stdout);
  }
  long long n;
  cin >> n;
  for (int i = 1; i <= n; i++) cin >> a[i], dp[a[i]]++;
  for (int i = 19; i >= 0; --i) {
    for (int j = 0; j <= lim; ++j) {
      if (j & (1 << i)) {
        dp[j ^ (1 << i)] += dp[j];
      }
    }
  }
  long long ans = 0;
  for (int i = 0; i <= lim; i++) {
    long long x = __builtin_popcount(i);
    if (x & 1) {
      ans = (ans - binpow(2ll, dp[i]) + 1 + mod) % mod;
    } else {
      ans = (ans + binpow(2ll, dp[i]) - 1 + mod) % mod;
    }
  }
  cout << ans;
}
