2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = (int)1e9 + 7;
long long dp[1 << 20];
long long exp(long long a, int b) {
  long long ans = 1;
  while (b) {
    if (b & 1) ans = (ans * a) % mod;
    a = (a * a) % mod;
    b >>= 1;
  }
  return ans;
}
int main() {
  int n;
  scanf("%d", &n);
  for (int i = 0; i < n; i++) {
    int a;
    scanf("%d", &a);
    dp[a]++;
  }
  for (int i = 0; i < 20; i++) {
    for (int mask = 0; mask < (1 << 20); mask++) {
      if (mask & (1 << i)) {
        dp[mask ^ (1 << i)] += dp[mask];
        dp[mask] %= mod;
      }
    }
  }
  long long ans = 0;
  for (int mask = 0; mask < (1 << 20); mask++) {
    if (dp[mask] == 0) continue;
    if (__builtin_popcount(mask) & 1)
      ans = (ans - (exp(2LL, dp[mask]) - 1) + mod) % mod;
    else
      ans = (ans + exp(2LL, dp[mask]) - 1) % mod;
  }
  printf("%lld\n", ans);
  return 0;
}
