2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = 1e9 + 7;
const int maxn = 1 << 20;
int n, a[maxn], f[21][maxn], p2[maxn], ans;
int main() {
  scanf("%d", &n);
  for (int i = 1; i <= n; i++) {
    scanf("%d", &a[i]);
    f[0][a[i]]++;
  }
  for (int i = 1; i <= 20; i++) {
    for (int j = 0; j < (1 << 20); j++) {
      if ((j >> (i - 1)) & 1) {
        f[i][j] = f[i - 1][j];
      } else {
        f[i][j] = f[i - 1][j] + f[i - 1][j + (1 << (i - 1))];
        f[i][j] -= (f[i][j] >= mod) ? mod : 0;
      }
    }
  }
  p2[0] = 1;
  for (int i = 1; i <= n; i++)
    p2[i] = p2[i - 1] + p2[i - 1], p2[i] -= (p2[i] >= mod) ? mod : 0;
  for (int i = 0; i < (1 << 20); i++)
    if (__builtin_popcount(i) & 1) {
      ans -= p2[f[20][i]];
      if (ans < 0) ans += mod;
    } else {
      ans += p2[f[20][i]];
      ans -= (ans >= mod) ? mod : 0;
    }
  printf("%d", ans);
}
