2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long mk = 1 << 21;
const long long logn = 29;
const long long mod = 1e9 + 7;
long long n, num[mk];
long long f[mk], qpow[mk], g[mk], ans;
signed main() {
  cin >> n;
  int mx = 1000000;
  qpow[0] = 1;
  for (int a, i = 1; i <= n; i++) {
    scanf("%d", &a), f[a]++;
    qpow[i] = (qpow[i - 1] << 1) % mod;
  }
  for (int i = 0; i <= 20; i++) {
    for (int j = 1; j <= mx; j++)
      if (j & (1 << i)) f[j ^ (1 << i)] += f[j];
  }
  for (int i = 0; i <= mx; i++) {
    num[i] = num[i >> 1] + (i & 1);
    g[num[i]] = (g[num[i]] + qpow[f[i]] - 1) % mod;
  }
  for (int i = 0; i <= 20; i++) {
    if (i & 1)
      ans = (ans - g[i] + mod) % mod;
    else
      ans = (ans + g[i]) % mod;
  }
  cout << ans;
}
