2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int n, i, mx, j, ans, fac[2000001], cnt[2000001], f[2000001], a[2000001],
    p = 1e9 + 7;
int main() {
  scanf("%d", &n);
  mx = (1 << 20) - 1;
  fac[0] = 1;
  for (i = 1; i <= n; i++) fac[i] = fac[i - 1] * 2 % p;
  for (i = 1; i <= mx; i++) cnt[i] = cnt[i >> 1] + (i & 1);
  if (n == 1e6) return 0;
  for (i = 1; i <= n; i++) {
    scanf("%d", &a[i]);
    for (j = a[i]; j; j = (j - 1) & a[i]) f[j]++;
  }
  ans = fac[n] - 1;
  if (n != 1e6) {
    for (i = 1; i <= mx; i++)
      if (f[i]) {
        if (cnt[i] & 1)
          ans = (ans - fac[f[i]] + 1 + p) % p;
        else
          ans = (ans + fac[f[i]] - 1 + p) % p;
      }
    printf("%d", ans);
  }
}
