2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long mod = 1e9 + 7;
const int N = 2e6 + 9;
int n, f[N], a[N];
long long qpow(long long x, long long y) {
  long long t = 1;
  while (y) {
    if (y & 1) (t *= x) %= mod;
    y >>= 1, (x *= x) %= mod;
  }
  return t;
}
long long g[N], t[N];
int lowbit(int x) { return x & (-x); }
int main() {
  scanf("%d", &n);
  int M = 0;
  for (int i = 1; i <= n; i++) {
    scanf("%d", &a[i]);
    f[a[i]]++;
    M = max(M, a[i]);
  }
  for (int i = 0; i < 20; i++)
    for (int j = M - (1 << i); j >= 0; j--)
      if (!(j & (1 << i))) f[j] += f[j | (1 << i)];
  for (int i = (1 << 20) - 1; i >= 0; i--)
    g[i] = ((qpow(2, f[i]) - 1) % mod + mod) % mod;
  t[0] = 0;
  for (int i = 1; i < (1 << 20); i++) t[i] = t[i - lowbit(i)] + 1;
  long long ans = qpow(2, n);
  for (int i = 1; i < (1 << 20); i++) {
    long long k = (t[i] % 2 == 1) ? (-1) : 1;
    ans = ((ans + k * g[i] % mod) % mod + mod) % mod;
  }
  printf("%lld\n", ans - 1);
  return 0;
}
