2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int i, j, k, n, m, an;
int f[1 << 20], h[1 << 20];
int main() {
  scanf("%d", &n);
  for (i = 1; i <= n; i++) scanf("%d", &k), f[k]++;
  m = 1 << 20 - 1;
  for (i = 0; i <= 19; i++)
    for (j = m; j >= 0; j--)
      if (!(j & (1 << i))) f[j] += f[j | (1 << i)];
  h[0] = 1;
  for (i = 1; i <= 1 << 20 - 1; i++) h[i] = h[i - 1] * 2 % 1000000007;
  for (i = 0; i <= m; i++) {
    int s = 0;
    for (j = 0; j <= 19; j++) s += i >> j & 1;
    if (f[i]) an = ((s & 1 ? -1 : 1) * (h[f[i]] - 1) + an) % 1000000007;
  }
  if (an < 0) an += 1000000007;
  printf("%d\n", an);
  return 0;
}
