2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int L = 20, N = 1e6 + 5;
const long long MOD = 1e9 + 7;
int dp[1 << L], n;
long long pow2[N];
int main() {
  scanf("%d", &n);
  int a;
  for (int i = (int)1; i <= n; i++) {
    scanf("%d", &a);
    dp[a]++;
  }
  pow2[0] = 1;
  for (int i = (int)1; i <= N - 1; i++) pow2[i] = pow2[i - 1] * 2 % MOD;
  for (int i = (int)0; i <= L - 1; i++)
    for (int msk = (int)0; msk <= (1 << L) - 1; msk++)
      if (msk >> i & 1 ^ 1) dp[msk] += dp[msk ^ (1 << i)];
  for (int msk = (int)0; msk <= (1 << L) - 1; msk++) {
  }
  long long ans = (pow2[dp[0]] - 1 + MOD) % MOD;
  for (int msk = (int)1; msk <= (1 << L) - 1; msk++) {
    if (dp[msk] == 0) continue;
    if (__builtin_popcount(msk) % 2) {
      ans = (ans - pow2[dp[msk]] + 1 + MOD) % MOD;
    } else {
      ans = (ans + pow2[dp[msk]] - 1 + MOD) % MOD;
    }
  }
  cout << ans << endl;
  return 0;
}
