2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long maxn = 1e6 + 11, lg = 20;
const long long inf = 1e18 + 10;
const long long mod = 1e9 + 7;
long long n, p[maxn], a[maxn], cnt[(1 << lg)], dp[(1 << lg)][lg];
void PG() {
  p[0] = 1;
  for (long long i = 1; i < maxn; i++) p[i] = (p[i - 1] * 2) % mod;
  for (long long mask = (1 << lg) - 1; mask >= 0; mask--) {
    dp[mask][0] = cnt[mask];
    for (long long i = 1; i < lg; i++) {
      if (mask & (1 << (i - 1))) {
        dp[mask][i] = dp[mask][i - 1];
      } else {
        dp[mask][i] = dp[mask][i - 1] + dp[mask ^ (1 << (i - 1))][i - 1];
      }
    }
  }
}
bool moubios_tor_ta_koon_hosein_besozeee(long long mask) {
  long long cntt = 0;
  while (mask) {
    if (mask & 1) cntt++;
    mask >>= 1;
  }
  if (cntt & 1)
    return 1;
  else
    return 0;
}
int32_t main() {
  ios::sync_with_stdio(0), cin.tie(0), cout.tie(0);
  cin >> n;
  for (long long i = 0; i < n; i++) cin >> a[i], cnt[a[i]]++;
  PG();
  long long ans = 0;
  for (long long mask = 0; mask < (1 << lg); mask++) {
    if (moubios_tor_ta_koon_hosein_besozeee(mask)) {
      ans = ans - p[dp[mask][lg - 1]];
      while (ans < 0) ans += mod;
      ans = (ans + 1) % mod;
    } else {
      ans = (ans + p[dp[mask][lg - 1]]) % mod;
      ans = (ans - 1 + mod) % mod;
    }
  }
  cout << ans << "\n";
  return 0;
}
