2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
long long n, i, j, mx, now, ans, f[2000001], a[2000001], cnt[2000001], fac[201],
    p = 1e9 + 7;
int main() {
  scanf("%lld", &n);
  mx = 1ll << 20;
  for (i = 1; i <= n; i++) {
    scanf("%lld", &a[i]);
    a[i] = a[i] ^ (mx - 1);
    f[a[i]]++;
  }
  fac[0] = 1;
  for (i = 1; i <= 20; i++) fac[i] = fac[i - 1] * 2;
  for (i = 0; i < 20; i++)
    for (j = 1; j < mx; j++)
      if (j & (1ll << i)) f[j] += f[j ^ (1ll << i)];
  for (i = 1; i < mx; i++) cnt[i] = cnt[i >> 1] + (i % 2);
  for (i = 0; i < mx; i++) {
    now = fac[f[i]];
    if (cnt[i] % 2 == 0)
      ans = (ans + now) % p;
    else
      ans = (ans - now + p) % p;
  }
  printf("%lld", ans);
}
