2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int main() {
  int n;
  scanf("%d", &n);
  vector<vector<int>> dp((1 << 20), vector<int>(20, 0));
  for (int i = 0; i < n; i++) {
    int a;
    scanf("%d", &a);
    dp[a][0]++;
  }
  const long long mod = 1000000007;
  vector<long long> p(n + 1, 1);
  for (int i = 1; i <= n; i++) p[i] = (p[i - 1] * 2) % mod;
  for (int i = (1 << 20) - 1; i >= 0; i--) {
    for (int j = 1; j < 20; j++) {
      dp[i][j] = dp[i][j - 1];
      if ((i & (1 << (j - 1))) == 0 && (i + (1 << (j - 1)) < (1 << 20)))
        dp[i][j] += dp[i + (1 << (j - 1))][j];
    }
  }
  long long res = 0;
  for (int i = 0; i < (1 << 20); i++) {
    int c = __builtin_popcount(i);
    if (c & 1)
      res = (res - p[dp[i][19]] + mod) % mod;
    else
      res = (res + p[dp[i][19]]) % mod;
  }
  printf("%I64d\n", res);
  return 0;
}
