2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MAXN = 1100000;
const int MOD = 1e9 + 7;
int val[MAXN];
int dp[21][(1 << 21)];
int GetLen(int x) {
  int rnt = 0;
  for (int i = 0; i < 20; i++)
    if ((1 << i) & x) rnt++;
  return rnt;
}
long long Pow(int x) {
  long long rnt = 1, mulv = 2;
  while (x) {
    if (x & 1) rnt *= mulv;
    rnt %= MOD;
    mulv *= mulv;
    mulv %= MOD;
    x >>= 1;
  }
  return rnt;
}
int main() {
  int n;
  scanf("%d", &n);
  for (int i = 1; i <= n; i++) {
    scanf("%d", &val[i]);
    dp[0][val[i]]++;
  }
  for (register int i = 0; i < 20; ++i) {
    for (register int j = 0; j < (1 << 20); ++j) {
      if ((1 << i) & j)
        dp[i + 1][j] = dp[i][j];
      else
        dp[i + 1][j] = (dp[i][j] + dp[i][j + (1 << i)]) % MOD;
    }
  }
  long long ans = 0;
  for (register int i = 0; i < (1 << 20); ++i) {
    int len = GetLen(i);
    ans += Pow(dp[20][i]) * (len & 1 == 1 ? -1 : 1);
    ans %= MOD;
  }
  printf("%lld", ans);
  return 0;
}
