2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long N = 2e5 + 30, Mod = 1e9 + 7;
const long long SQ = 330;
const long long LOG = 22;
long long dp[(1 << LOG) + 30], p2[N];
inline long long mod(long long x) {
  while (x < 0) x += Mod;
  while (x >= Mod) x -= Mod;
  return x;
}
inline long long _Sum(long long x, long long y) {
  x = mod(x);
  y = mod(y);
  return mod(x + y);
}
int main() {
  ios::sync_with_stdio(0), cin.tie(0);
  long long n;
  cin >> n;
  for (int i = 0; i < n; i++) {
    long long x;
    cin >> x;
    dp[x]++;
  }
  p2[0] = 1;
  for (int i = 1; i < N; i++) p2[i] = (2 * p2[i - 1]) % Mod;
  for (int bit = 0; bit < 21; bit++)
    for (int mask = 0; mask < (1 << 21); mask++)
      if (mask & (1 << bit))
        dp[mask xor (1 << bit)] = _Sum(dp[mask xor (1 << bit)], dp[mask]);
  long long ans = 0;
  for (int mask = 0; mask < (1 << 21); mask++) {
    if (__builtin_popcount(mask) & 1)
      ans = _Sum(ans, -p2[dp[mask]]);
    else
      ans = _Sum(ans, p2[dp[mask]]);
  }
  cout << ans;
  return (0);
}
