2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include<bits/stdc++.h>

typedef long long int lli;
typedef unsigned long long int ulli;
typedef long double ldb;

#include <ext/pb_ds/assoc_container.hpp>
#include <ext/pb_ds/tree_policy.hpp>
using namespace __gnu_pbds;
using namespace std;
#define pb push_back
#define popb pop_back()
#define pf push_front
#define popf pop_front()
#define si size()
#define be begin()
#define en end()
#define all(v) v.be, v.en
#define le length()
#define mp make_pair
#define mt make_tuple
#define acc(v) accumulate(all(v), 0)
#define F first
#define S second
#define INF lli(1e19)

#define forz(i, n) for (lli i = 0; i < n; i++)
#define fore(i, m, n) for (lli i = m; i < n; i++)
#define rforz(i, n) for (lli i = n - 1; i >= 0; i--)
#define rfore(i, m, n) for (lli i = n - 1; i >= m; i--)
#define deci(n) fixed << setprecision(n)
#define high(n) __builtin_popcount(n)
#define highll(n) __builtin_popcountll(n)
#define parity(n) __builtin_parity(n)
#define ctz(n) __builtin_ctz(n)
#define lb lower_bound
#define ub upper_bound
#define er equal_range
#define maxe *max_element
#define mine *min_element
#define mod 1000000007
#define mod2 998244353
#define gcd __gcd
#define kira ios::sync_with_stdio(0), cin.tie(0), cout.tie(0)
#define newline cout<<endl;
//#define endl "\n"



inline lli power(lli x, lli y, lli p = mod)
{
    lli res = 1;
    x = x % p;
    while (y > 0)
    {
        if (y & 1)
            res = (res * x) % p;
        y = y >> 1;
        x = (x * x) % p;
    }
    return res;
}

inline lli modadd(lli a, lli b, lli m = mod)
{
    a += b;
    if (a >= m)
        a -= m;
    return a;
}

inline lli modmul(lli a, lli b, lli m = mod)
{
    return ((a % m) * (b % m)) % m;
}

inline lli modi(lli a, lli m = mod) { return power(a, m - 2, m); }
inline lli md(lli x) {if(x>=0)return x; return -x;}
///////////////////////////////////////////////////////////////////////////////////////////////////////
//////////////////////////////////////////////////////////////////////////////////////////////////////
lli n,m,k,r;



int32_t main()
{
    kira;

    lli T=1;
    //cin>>T;

    while(T--)
    {
        cin>>n;
        vector<lli> z(1<<20,0);
        forz(i,n) cin>>k, z[k]++;
        forz(i,20)forz(mask,1<<20)
            if(!(mask & (1<<i)))
                z[mask] += z[mask^(1<<i)];
        r = 0;
        forz(i,1<<20)
        {
            r = (r + power(-1,high(i))*power(2,z[i]))% mod;
        }
        cout<<r<<endl;
    }
    return 0;
}
