2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = (1 << 20), mod = 1e9 + 7;
int a[maxn], pw[maxn];
int read() {
  int x = 0, y = 1;
  char ch = getchar();
  while (ch < '0' || ch > '9') {
    if (ch == '-') y = -1;
    ch = getchar();
  }
  while (ch >= '0' && ch <= '9')
    x = (x << 3) + (x << 1) + (ch ^ 48), ch = getchar();
  return x * y;
}
inline int add(int x) {
  if (x >= mod) x -= mod;
  return x;
}
void FWTand(int *f, int lim, int opt) {
  opt = add(opt + mod);
  for (int mid = 1; mid < lim; mid <<= 1)
    for (int j = 0; j < lim; j += (mid << 1))
      for (int k = 0; k < mid; k++)
        f[j + k] = add(f[j + k] + 1ll * opt * f[j + k + mid] % mod);
  return;
}
int main() {
  int n, m = 0;
  n = read();
  pw[0] = 1;
  for (int i = 1; i <= n; i++) {
    int v;
    v = read();
    a[v]++;
    m = max(m, v);
    pw[i] = 2ll * pw[i - 1] % mod;
  }
  int lim = 1;
  while (lim < m) lim <<= 1;
  FWTand(a, lim, 1);
  for (int i = 0; i < lim; i++) a[i] = pw[a[i]];
  FWTand(a, lim, -1);
  if (a[0] == pw[n]) a[0]--;
  printf("%d\n", a[0]);
  return 0;
}
