2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
long long const mod = (1e9) + 7;
int const N = 1 << 20;
long long a[N], b[N], c[N];
inline int lowbit(int x) { return x & -x; }
int main() {
  int n, x;
  scanf("%d", &n);
  for (int i = 0; i < (n); ++i) {
    scanf("%d", &x);
    ++a[x];
  }
  for (int i = (1 << 20) - 1; i > 0; --i)
    if (a[i] > 0) {
      c[i] += a[i];
      int u = i - lowbit(i);
      int v = u - lowbit(u) + lowbit(i);
      int w = u - lowbit(u);
      a[u] += a[i], a[v] += a[i], a[w] -= a[i];
    }
  b[0] = 1;
  for (int i = 1; i <= ((1 << 20) - 1); ++i) b[i] = b[i - 1] * 2LL % mod;
  long long ans = 0;
  for (int i = 1; i <= ((1 << 20) - 1); ++i)
    if (c[i] > 0) {
      if (__builtin_popcount(i) & 1) {
        ans += b[c[i]] - 1;
      } else {
        ans -= b[c[i]] - 1;
      }
    }
  ans %= mod;
  ans = b[n] - ans - 1;
  ans %= mod;
  if (ans < 0) ans += mod;
  printf("%I64d\n", ans);
  return 0;
}
