2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = 1000000007;
int a[1 << 20] = {}, t, n, p[1 << 20] = {1}, f[1 << 20] = {};
int precal(int n) {
  for (int i = 0; i < n; i++) {
    p[i + 1] = p[i] * 2 % mod;
  }
}
int main() {
  int n, x;
  cin >> n;
  for (int i = 0; i < n; i++) {
    cin >> x;
    f[x]++;
  }
  precal(n);
  for (int i = 0; i < 20; i++) {
    for (int j = 0; j < (1 << 20); j++) {
      if (!(j >> i & 1)) {
        f[j] += f[j + (1 << i)];
      } else
        a[j] ^= 1;
    }
  }
  long long int ans = 0;
  for (int i = 0; i < (1 << 20); i++) {
    ans = (ans + (p[f[i]]) * (a[i] ? -1 : 1)) % mod;
  }
  cout << ans;
  return 0;
}
