2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1 << 20;
const int MOD = 1000000007;
int f[N], c[N];
long long ans = 0;
long long p[23];
int main() {
  int n, t;
  scanf("%d", &n);
  while (n--) {
    scanf("%d", &t);
    f[t]++;
  }
  p[0] = 1;
  for (int i = 1; i < 20; i++) p[i] = p[i - 1] * 2 % MOD;
  for (int i = 0; i < 20; i++)
    for (int j = 1; j < (1 << 20); j++)
      if ((j >> i & 1)) f[j - (1 << i)] += f[j], c[j]++;
  for (int i = 0; i < (1 << 20); i++) {
    long long t = (p[f[i]] + MOD - 1) % MOD;
    if (c[i] & 1)
      ans = (ans + MOD - t) % MOD;
    else
      ans = (ans + t) % MOD;
  }
  cout << ans << endl;
  return 0;
}
