2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

import java.io.BufferedReader;
import java.io.IOException;
import java.io.InputStream;
import java.io.InputStreamReader;
import java.io.OutputStream;
import java.io.PrintWriter;
import java.math.BigDecimal;
import java.math.BigInteger;
import java.util.StringTokenizer;


public class Main {
    public static void main(String[] args) {
        InputStream inputStream = System.in;
        OutputStream outputStream = System.out;
        InputReader in = new InputReader(inputStream);
        PrintWriter out = new PrintWriter(outputStream);
        Task solver = new Task();
        solver.solve(1, in, out);
        out.close();
    }


    static class Task {
        private static final long MOD = (long)1e9 + 7;
        long[] dp = new long[(1 << 20) + 10];
        public void solve(int testNumber, InputReader in, PrintWriter out) {
            /*
            try{

            }catch(RuntimeException e){
                return;
            }
            */
            long n = in.nextLong();
            for(int i = 0; i < n; i++){
                dp[in.nextInt()]++;
            }
            long ans = 0;
            fun(1);
            for(int i = 0; i < (1 << 20); i++)dp[i] = pow(dp[i]);
            fun(-1);
            out.println(dp[0]);
        }
        long mod(final long x){
            return ((x % MOD) + MOD) % MOD;
        }
        long pow(long exp){
            long ans = 1, a = 2;
            while(exp > 0){
                if(exp % 2 == 1)ans = mod(ans * a);
                a = mod(a * a);
                exp >>= 1;
            }
            return ans;
        }
        void fun(final int op){
            for(int i = 0; i < 20; i++){
                for(int j = (1 << 20) - 1; j >= 0; j--) {
                    if((~j & (1 << i)) != 0) dp[j] = mod(dp[j] + dp[j | (1 << i)] * op);
                }
            }
        }
    }


    static class InputReader {
        public BufferedReader reader;
        public StringTokenizer tokenizer;
        public InputReader(InputStream stream) {
            reader = new BufferedReader(new InputStreamReader(stream), 32768);
            tokenizer = null;
        }

        public String next() {
            while (tokenizer == null || !tokenizer.hasMoreTokens()) {
                try {
                    tokenizer = new StringTokenizer(reader.readLine());
                } catch (IOException e) {
                    throw new RuntimeException(e);
                }
            }
            return tokenizer.nextToken();
        }

        public int nextInt() {
            return Integer.parseInt(next());
        }

        public long nextLong() {
            return Long.parseLong(next());
        }

        public BigInteger nextBigInteger() {
            return new BigInteger(next());
        }

        public BigDecimal nextBigDecimal() {
            return new BigDecimal(next());
        }

        public double nextDouble() {
            return Double.parseDouble(next());
        }
    }
}