2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
#include <ext/pb_ds/assoc_container.hpp>
#include <ext/pb_ds/tree_policy.hpp>

using namespace std;
using namespace __gnu_pbds;
typedef tree<int, null_type, less<int>, rb_tree_tag,tree_order_statistics_node_update> ordered_set;

#define scan(x) do{while((x=getchar())<'0'); for(x-='0'; '0'<=(_=getchar()); x=(x<<3)+(x<<1)+_-'0');}while(0)
char _;
#define complete_unique(a) a.erase(unique(a.begin(),a.end()),a.end())
#define all(a) a.begin(),a.end()
#define println printf("\n");
#define readln(x) getline(cin,x);
#define pb push_back
#define endl "\n"
#define INT_INF 0x3f3f3f3f
#define LL_INF 0x3f3f3f3f3f3f3f3f
#define MOD 1000000007
#define MOD2 1190492669
#define SEED 131
#define mp make_pair
#define fastio cin.tie(0); cin.sync_with_stdio(0);

#define MAXN 1000005
#define LOGN 22

typedef unsigned long long ull;
typedef long long ll;
typedef long double ld;
typedef unordered_map<int,int> umii;
typedef pair<int,int> pii;
typedef pair<double,double> pdd;
typedef pair<ll,ll> pll;
typedef pair<int,pii> triple;
typedef int8_t byte;

mt19937 g1(time(0));

int randint(int a, int b){return uniform_int_distribution<int>(a, b)(g1);}
ll randlong(ll a,ll b){return uniform_int_distribution<long long>(a, b)(g1);}

ll gcd(ll a, ll b){return b == 0 ? a : gcd(b, a % b);}
ll lcm(ll a, ll b){return a*b/gcd(a,b);}
ll fpow(ll  b, ll exp, ll mod){if(exp == 0) return 1;ll t = fpow(b,exp/2,mod);if(exp&1) return t*t%mod*b%mod;return t*t%mod;}
ll divmod(ll i, ll j, ll mod){i%=mod,j%=mod;return i*fpow(j,mod-2,mod)%mod;}

int len,arr[MAXN],dp[LOGN][MAXN],mx,lg;
ll res;

int main(){
	scanf("%d",&len);
	for(int i=1; i<=len; i++){
		scanf(" %d",&arr[i]);
		dp[0][arr[i]]++;
		mx = max(mx,arr[i]);
	}
	lg = (int)log2(mx)+1;
	for(int i=1; i<=lg; i++){
		for(int k=0; k<=mx; k++){
			if(k&(1<<(i-1))) dp[i][k] = dp[i-1][k];
			else dp[i][k] = (dp[i-1][k]+dp[i-1][k|(1<<(i-1))])%MOD;
		}
	}
	for(int k=1; k<=mx; k++){
		int c_i = dp[lg][k];
		ll v1 = (fpow(2,c_i,MOD)-1+MOD)%MOD;
		if(__builtin_popcount(k)%2) res = (res+v1)%MOD;
		else res = (res-v1+MOD)%MOD;
	}
	printf("%lld\n",(fpow(2,len,MOD)-1-res+MOD)%MOD);
}