2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
#pragma GCC optimize("Ofast")
using namespace std;
const long double eps = 1e-7;
const int inf = 1000000010;
const long long INF = 10000000000000010LL;
const int mod = 1000000007;
const int MAXN = 1000010;
long long n, m, k, u, v, x, y, t, a, b, ans;
int A[MAXN];
long long cnt[MAXN];
long long tav[MAXN];
int main() {
  ios_base::sync_with_stdio(false);
  cin.tie(0);
  cout.tie(0);
  for (int i = 1; i < MAXN; i++) tav[i] = (tav[i - 1] * 2 + 1) % mod;
  cin >> n;
  for (int i = 0; i < n; i++) {
    cin >> A[i];
    cnt[A[i]]++;
  }
  for (int j = 0; j < 20; j++)
    for (int i = 0; i < MAXN; i++)
      if (i & (1 << j)) cnt[i ^ (1 << j)] += cnt[i];
  for (int i = 0; i < MAXN; i++) {
    if (__builtin_popcount(i) & 1)
      ans = (ans - tav[cnt[i]]) % mod;
    else
      ans = (ans + tav[cnt[i]]) % mod;
  }
  cout << (ans + mod) % mod << endl;
  return 0;
}
