2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = 1e9 + 7;
int dp[(1 << 21)][21];
int n;
int arr[1000001];
int power(int x, int y) {
  if (y == 0) return 1;
  int a = power(x, y / 2);
  a = (1LL * a * a) % mod;
  if (y % 2) a = (1LL * a * x) % mod;
  return a;
}
int main() {
  ios_base::sync_with_stdio(false);
  cin.tie(0);
  cout.tie(0);
  cin >> n;
  for (int i = 1; i <= n; i++) cin >> arr[i];
  for (int i = 1; i <= n; i++) dp[arr[i]][0]++;
  int tot = 0;
  for (int k = 1; k <= 20; k++) {
    for (int i = 0; i < (1 << 20); i++) {
      dp[i][k] = dp[i][k - 1];
      if ((i & (1 << (k - 1))) == 0) dp[i][k] += dp[i + (1 << (k - 1))][k - 1];
    }
  }
  for (int i = 0; i <= 1000000; i++) {
    if (dp[i][20] == 0) continue;
    int val = power(2, dp[i][20]);
    val--;
    if (val < 0) val += mod;
    if (__builtin_popcount(i) % 2) {
      tot -= val;
      if (tot < 0) tot += mod;
    } else {
      tot += val;
      tot %= mod;
    }
  }
  cout << tot;
}
