2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
#pragma GCC optimize("O3")
using namespace std;
const long long mod = 1000000007;
mt19937 rng(chrono::steady_clock::now().time_since_epoch().count());
long long powm(long long a, long long b, long long m);
int a[1048576], p2[1048576];
void solve() {
  int n, te;
  scanf("%d", &n);
  for (int i = 1; i <= n; i++) {
    scanf("%d", &te);
    a[te]++;
  }
  for (int j = 0; j < 20; j++)
    for (int i = 1000000; i > 0; i--)
      if (i & (1 << j)) {
        a[i ^ (1 << j)] += a[i];
        if (a[i ^ (1 << j)] >= mod) a[i ^ (1 << j)] -= mod;
      }
  p2[0] = 1;
  for (int i = 1; i <= 1000000; i++) {
    p2[i] = (p2[i - 1] << 1);
    if (p2[i] >= mod) p2[i] -= mod;
  }
  int ans = 0, x;
  for (int i = 0; i < 1048576; i++) {
    x = 1;
    for (int j = 0; j < 20; j++)
      if (i & (1 << j)) x *= -1;
    ans += (x * p2[a[i]]);
  }
  cout << (ans % mod + mod) % mod << '\n';
}
signed main() {
  ios_base::sync_with_stdio(0), cin.tie(0), cout.tie(0);
  srand(chrono::steady_clock::now().time_since_epoch().count());
  int t = 1;
  while (t--) solve();
  return 0;
}
long long powm(long long a, long long b, long long m) {
  long long te = 1;
  while (b) {
    if (b & 1) te = (te * a) % m;
    a = (a * a) % m;
    b >>= 1;
  }
  return te;
}
