2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = (int)1e6 + (int)1e5, mod = (int)1e9 + 7;
int n, a;
int cnt[N], f[22][N];
int pw2[N];
int count_1(int x) {
  int res = 0;
  while (x > 0) {
    res += x % 2;
    x /= 2;
  }
  return res;
}
int main() {
  scanf("%d", &n);
  for (int i = 0; i < n; i++) {
    scanf("%d", &a);
    cnt[a]++;
  }
  pw2[0] = 1;
  for (int i = 1; i < (1 << 20); i++) pw2[i] = (pw2[i - 1] * 2) % mod;
  for (int j = 0; j <= (1 << 20); j++) f[20][j] = cnt[j];
  for (int i = 19; i >= 0; i--) {
    for (int j = 0; j <= (1 << 20); j++) {
      if (j & (1 << i))
        f[i][j] = f[i + 1][j];
      else
        f[i][j] = (f[i + 1][j] + f[i + 1][j + (1 << i)]);
    }
  }
  int ans = 0;
  for (int i = 0; i <= (1 << 20); i++) {
    int cur = (count_1(i) % 2 ? -pw2[f[0][i]] : pw2[f[0][i]]);
    ans = (ans + cur + mod) % mod;
  }
  printf("%d", ans);
}
