2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int up = (1 << 20);
const int MOD = (int)1e9 + 7;
int dp[2][up];
int modExp(int a, int b) {
  long long t = 1, y = a;
  while (b) {
    if (b & 1) t = t * y % MOD;
    y = y * y % MOD;
    b >>= 1;
  }
  return (int)t;
}
int main() {
  int n, t, ans = 0;
  scanf("%d", &n);
  int pre = 0, now = 1;
  for (int i = 0; i < n; i++) {
    scanf("%d", &t);
    dp[pre][t]++;
  }
  for (int i = 0; i < 20; i++) {
    memset(dp[now], 0, sizeof(dp[now]));
    for (int j = 0; j < up; j++) {
      if (j >> i & 1) {
        dp[now][j] = dp[pre][j];
      } else {
        dp[now][j] = dp[pre][j] + dp[pre][j + (1 << i)];
        dp[now][j] %= MOD;
      }
    }
    pre ^= 1, now ^= 1;
  }
  for (int i = 0; i < up; i++) {
    int cnt = __builtin_popcount(i);
    int res = modExp(2, dp[pre][i]);
    ans += (cnt & 1) ? -res : res;
    ans = (ans % MOD + MOD) % MOD;
  }
  printf("%d\n", ans);
  return 0;
}
