2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
extern inline char gc() {
  static char RR[23456], *S = RR + 23333, *T = RR + 23333;
  if (S == T) fread(RR, 1, 23333, stdin), S = RR;
  return *S++;
}
inline int read() {
  int p = 0, w = 1;
  char c = gc();
  while (c > '9' || c < '0') {
    if (c == '-') w = -1;
    c = gc();
  }
  while (c >= '0' && c <= '9') p = p * 10 + c - '0', c = gc();
  return p * w;
}
int n;
int f[2105000], bit[2105000], ans;
int main() {
  n = read();
  for (register int i = 1; i <= n; i++) f[read()]++;
  bit[0] = 1;
  for (register int i = 1; i <= 1000000; i++)
    bit[i] = 1ll * 2 * bit[i - 1] % 1000000007;
  for (register int i = 0; i <= 19; i++)
    for (register int j = 0; j <= 1000000; j++)
      if (!(j & bit[i])) f[j] += f[j ^ bit[i]];
  for (register int i = 0; i <= 1000000; i++) {
    int cnt = 1;
    for (register int j = 0; j <= 19; j++)
      if (i & bit[j]) cnt = -cnt;
    int tmp = cnt * (bit[f[i]] - 1) % 1000000007;
    ans = ((ans + tmp) % 1000000007 + 1000000007) % 1000000007;
  }
  printf("%d\n", ans);
  return 0;
}
