2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MAXN = 4000100;
const long long mod = 1000000007;
long long powmod(long long a, long long b) {
  long long res = 1;
  while (b > 0) {
    if (b % 2 == 0)
      a *= a, a %= mod, b /= 2;
    else
      res *= a, res %= mod, b--;
  }
  return res;
}
long long v[MAXN];
long long memo[MAXN];
long long bc(long long x) {
  long long res = 0;
  while (x > 0) res++, x -= (x & -x);
  return res;
}
signed main() {
  memset(memo, 0, sizeof memo);
  long long n;
  cin >> n;
  for (long long i = 1; i <= n; i++) cin >> v[i], memo[v[i]]++;
  for (long long i = 0; i <= 20; i++) {
    for (long long j = 0; j < (1 << 20); j++) {
      if ((j & (1 << i)) != 0) continue;
      memo[j] += memo[j ^ (1 << i)];
    }
  }
  long long res = 0;
  for (long long i = 1; i < 1000000; i++) {
    if (memo[i] == 0) continue;
    long long x = bc(i);
    if (x % 2 == 0)
      res -= powmod(2, memo[i]) - 1;
    else
      res += powmod(2, memo[i]) - 1;
    res %= mod;
  }
  res++;
  res = powmod(2, n) - res, res %= mod;
  cout << (res + mod) % mod << endl;
}
