2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = (1 << 20);
int cnt[maxn];
long long f[maxn];
const long long MOD = 1e9 + 7;
long long pw(long long a, long long b) {
  long long res = 1;
  while (b) {
    if (b & 1) res = res * a % MOD;
    b >>= 1;
    a = a * a % MOD;
  }
  return res;
}
int sign(int i) {
  if (i & 1) return -1;
  return 1;
}
int main() {
  ios_base::sync_with_stdio(0);
  cin.tie(0);
  cout.tie(0);
  int n;
  cin >> n;
  for (int i = 1; i <= n; ++i) {
    int a;
    cin >> a;
    ++cnt[a];
  }
  for (int i = 0; i <= 1000000; ++i) f[i] = cnt[i];
  for (int b = 0; b < 20; ++b) {
    for (int i = 0; i <= 1000000; ++i) {
      if (!(i & (1 << b))) f[i] += f[i ^ (1 << b)];
    }
  }
  long long ans = 0;
  for (int i = 0; i <= 1000000; ++i) {
    ans += sign(__builtin_popcount(i)) * (pw(2, f[i]) - 1);
    if (ans < 0) ans += MOD;
    if (ans >= MOD) ans -= MOD;
  }
  cout << ans;
}
