2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int INF = 1e9, MOD = INF + 7;
const int N = 1e6 + 20, M = 2e1 + 2;
int a[N], dp[N], pw[N];
int32_t main() {
  ios::sync_with_stdio(0), cin.tie(0), cout.tie(0);
  int n;
  cin >> n;
  for (int i = 1; i <= n; i++) cin >> a[i], dp[a[i]]++;
  for (int i = 1; i < N; i++) pw[i] = (pw[i - 1] * 2 + 1) % MOD;
  for (int i = 0; i < M; i++)
    for (int j = 0; j < N; j++)
      if ((1 << i) & j) dp[j ^ (1 << i)] = (dp[j ^ (1 << i)] + dp[j]) % MOD;
  int ans = 0;
  for (int i = 0; i < N; i++) {
    ans = (ans + (pw[dp[i]] * (__builtin_popcountll(i) & 1 ? -1 : +1))) % MOD;
  }
  cout << ans << "\n";
  return 0;
}
