2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = 1e6 + 5;
const int MOD = 1e9 + 7;
int dp[maxn];
int Pow2[maxn] = {1};
int main() {
  for (int i = 1; i <= 1000000; i++) Pow2[i] = (Pow2[i - 1] << 1) % MOD;
  int N;
  while (cin >> N) {
    memset(dp, 0, sizeof dp);
    for (int i = 1; i <= N; i++) {
      int t;
      scanf("%d", &t);
      dp[t]++;
    }
    for (int k = 0; k < 20; k++) {
      for (int i = 0; i <= 15; i++) {
        if (i & (1 << k)) {
          int t = i & (~(1 << k));
          dp[t] += dp[i];
        }
      }
    }
    long long ans = 0;
    for (int i = 0; i <= 1000000; i++) {
      int cnt = __builtin_popcount(i);
      if (cnt & 1)
        ans -= Pow2[dp[i]] - 1;
      else
        ans += Pow2[dp[i]] - 1;
      ans %= MOD;
    }
    ans = (ans + MOD) % MOD;
    cout << ans << endl;
  }
}
