2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1000002;
int n, first[N], twoPower[N];
int main() {
  twoPower[0] = 1;
  for (int i = 1; i <= N - 1; ++i)
    twoPower[i] = twoPower[i - 1] * 2 % 1000000007;
  scanf("%d", &n);
  for (int i = 1; i <= n; ++i) {
    int a;
    scanf("%d", &a);
    ++first[a];
  }
  for (int i = N - 2; i >= 1; --i)
    for (int j = 0; j <= 19; ++j)
      if (i & (1 << j)) first[i ^ (1 << j)] += first[i];
  long long complement = 0;
  for (int i = 1; i <= N - 1; ++i) {
    int sign = __builtin_popcount(i) & 1 ? 1 : -1;
    complement = (complement + sign * (twoPower[first[i]] - 1) % 1000000007) %
                 1000000007;
  }
  cout << ((1ll << n) - 1 - complement + 1000000007) % 1000000007;
}
