2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long INF = 1e18, MOD = 1e9 + 7, MOD2 = 1e6 + 3;
const int M = 1e6;
int cnt[1 << 20], cnt_r[1 << 20], n, d[1 << 20];
int bin[1000000];
int main() {
  cin >> n;
  for (int i = 0; i < n; i++) {
    int a;
    cin >> a;
    d[a]++;
  }
  bin[0] = 1;
  for (int i = 1; i <= n; i++) {
    bin[i] = bin[i - 1] + bin[i - 1];
    if (bin[i] >= MOD) bin[i] -= MOD;
  }
  int m = 20;
  for (int i = 0; i < (1 << m); i++) {
    if (!d[i]) continue;
    for (int j = i; j & ((1 << 10) - 1); j = (i & (j - 1))) {
      cnt_r[j] += d[i];
    }
  }
  for (int i = 0; i < (1 << 20); i++) {
    if (cnt_r[i] == 0) continue;
    int hi = (i >> 10), lo = (i & ((1 << 10) - 1));
    for (int j = hi; j; j = (hi & (j - 1))) cnt[(j << 10) + lo] += cnt_r[i];
    cnt[lo] += cnt_r[i];
  }
  long long ans = bin[n] - 1;
  for (int i = 1; i < (1 << 20); i++) {
    if (!cnt[i]) continue;
    if (__builtin_popcount(i) & 1)
      ans += MOD - bin[cnt[i]] + 1;
    else
      ans += bin[cnt[i]] - 1;
    if (ans >= MOD) ans -= MOD;
  }
  cout << ans;
}
