2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = 1e9 + 7;
const int max_n = 1e6 + 5;
int dp[max_n];
long long f[21], b[max_n];
int main() {
  int n;
  scanf("%d", &n);
  memset(dp, 0, sizeof dp);
  int mx = 0;
  b[0] = 1;
  for (int i = 1; i <= n; i++) b[i] = (b[i - 1] << 1) % mod;
  for (int i = 1; i <= n; i++) {
    int a_i;
    scanf("%d", &a_i);
    mx = max(mx, a_i);
    dp[a_i]++;
  }
  for (int j = 0; j <= 20; j++) {
    for (int i = 1; i <= mx; i++)
      if (dp[i]) {
        if (i & (1 << j)) {
          dp[i ^ (1 << j)] += dp[i];
        }
      }
  }
  for (int i = 0; i <= mx; i++) {
    int cnt = 0;
    for (int j = 0; j <= 20; j++) {
      if (i & (1 << j)) cnt++;
    }
    f[cnt] = (f[cnt] + (b[dp[i]] - 1) % mod) % mod;
  }
  long long sum = 0;
  for (int i = 0; i <= 20; i++) {
    if (i % 2 == 0)
      sum = (sum + f[i]) % mod;
    else
      sum = (sum - f[i] + mod) % mod;
  }
  printf("%lld\n", sum);
  return 0;
}
