2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long mod = 1e9 + 7, limit = (1 << 21);
const int maxn = 2300000;
int n, a[maxn], f[21][maxn], g[maxn];
long long ans;
long long qpow(long long a, long long b) {
  long long res = 1;
  while (b) {
    if (b & 1) res = res * a % mod;
    a = a * a % mod;
    b >>= 1;
  }
  return res;
}
long long get(long long x) {
  long long res = 0;
  for (long long i = 0; i < 21; i++)
    if (x >> i & 1) res++;
  return res;
}
int main() {
  scanf("%d", &n);
  for (long long i = 1; i <= n; i++) {
    long long t;
    scanf("%lld", &t);
    f[0][t]++;
  }
  for (long long i = 1; i <= 21; i++)
    for (long long j = 0; j <= limit; j++) {
      f[i][j] = f[i - 1][j];
      if (!(j >> (i - 1) & 1)) (f[i][j] += f[i - 1][j | (1 << (i - 1))]) %= mod;
    }
  for (long long i = 0; i <= limit; i++) g[i] = f[21][i];
  for (long long i = 0; i < limit; i++) {
    long long temp = qpow(-1, get(i));
    temp = temp * (qpow(2, g[i]) - 1 + mod) % mod;
    ans = (ans + temp + mod) % mod;
  }
  printf("%lld\n", (ans + mod) % mod);
  return 0;
}
