2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = (1 << 20) + 10;
const int MOD = 1000000007;
int num[N], n;
long long pow2[N];
void init() {
  pow2[0] = 1;
  for (int i = 1; i < N; ++i) {
    pow2[i] = pow2[i - 1] * 2;
    if (pow2[i] >= MOD) pow2[i] -= MOD;
  }
}
int main() {
  init();
  scanf("%d", &n);
  int x;
  for (int i = 1; i <= n; ++i) {
    scanf("%d", &x);
    ++num[x];
  }
  long long ans = 0;
  for (int i = (1 << 20) - 1; i; --i) {
    int k = __builtin_popcount(i);
    if (k % 2)
      ans += pow2[num[i]] - 1;
    else
      ans -= pow2[num[i]] - 1;
    num[(i - 1) & i] += num[i];
    num[i - ((i - 1) & i)] += num[i];
  }
  ans %= MOD;
  if (ans < 0) ans += MOD;
  ans = pow2[n] - 1 - ans;
  ans %= MOD;
  if (ans < 0) ans += MOD;
  cout << ans << endl;
  return 0;
}
