2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int inf = 1 << 28;
const int mod = (int)1e9 + 7;
int n, m, k;
int dp[1 << 20];
long long p[1000010];
int main() {
  cin >> n;
  int x;
  p[0] = 1;
  for (int i = 1; i <= n; i++) {
    p[i] = p[i - 1] * 2 % mod;
    scanf("%d", &x);
    dp[x]++;
  }
  for (int i = 0; i < 20; i++) {
    for (int j = 0; j < (1 << 20); j++) {
      if (j >> i & 1) dp[j - (1 << i)] += dp[j];
    }
  }
  long long ans = p[n];
  for (int i = 1; i < (1 << 20); i++) {
    int num = __builtin_popcount(i);
    if (num & 1)
      ans += mod - p[dp[i]];
    else
      ans += p[dp[i]];
    if (ans >= mod) ans -= mod;
  }
  cout << ans << endl;
  return 0;
}
