2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long N = 1 << 20, mod = 1e9 + 7;
long long dp[2][N];
long long modexp(long long a, long long n) {
  if (n == 0) return 1;
  if (n == 1) return a;
  long long x = modexp(a, n / 2);
  x = (x * x) % mod;
  if (n & 1) x = (x * a) % mod;
  return x;
}
int32_t main() {
  ios ::sync_with_stdio(0);
  cin.tie(0);
  long long n;
  cin >> n;
  for (long long i = 0; i < n; i++) {
    long long p;
    cin >> p;
    dp[1][p]++;
  }
  for (long long i = 19; i >= 0; i--) {
    long long cur = i & 1;
    for (long long mask = 0; mask < N; mask++) {
      dp[cur ^ 1][mask] = dp[cur][mask];
      if (mask & (1 << i)) {
        dp[cur ^ 1][mask ^ (1 << i)] += dp[cur][mask];
      }
    }
  }
  long long ans = 0;
  for (long long i = 0; i < N; i++) {
    if (__builtin_popcount(i) % 2) {
      ans -= modexp(2, dp[1][i]) - 1;
    } else {
      ans += modexp(2, dp[1][i]) - 1;
    }
    ans = (ans + mod) % mod;
  }
  cout << ans;
  return 0;
}
