2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MAXN = 1048576 + 50;
const int mod = 1e9 + 7;
int n, f[MAXN], pw[MAXN];
void fwt(int *a, int len, int flg) {
  for (int i = 2; i <= len; i <<= 1)
    for (int j = 0; j < len; j += i)
      for (int k = j; k < j + i / 2; ++k)
        a[k] = (a[k] + 1ll * (flg == 1 ? 1 : mod - 1) * a[k + i / 2]) % mod;
}
int main() {
  scanf("%d", &n);
  int len = pw[0] = 1;
  for (int i = 1, x; i <= n; ++i) {
    scanf("%d", &x), ++f[x];
    while (len <= x) len <<= 1;
    pw[i] = pw[i - 1] * 2ll % mod;
  }
  fwt(f, len, 1);
  for (int i = 0; i < len; ++i) f[i] = pw[f[i]];
  fwt(f, len, -1);
  printf("%d\n", f[0] == pw[n] ? f[0] - 1 : f[0]);
}
