2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
long long int a[2000009];
long long int fac[2000009];
long long int power(long long int x, long long int y) {
  long long int res = 1;
  while (y > 0) {
    if (y & 1) res = res * x;
    res %= 1000000007;
    y = y >> 1;
    x = x * x;
    x %= 1000000007;
  }
  return res;
}
long long int inv(long long int x) { return power(x, 1000000007 - 2); }
long long int ncr(long long int n, long long int r) {
  long long int res = fac[n];
  res *= inv(fac[r]);
  res %= 1000000007;
  res *= inv(fac[n - r]);
  res %= 1000000007;
  return res;
}
void solve() {
  long long int n;
  cin >> n;
  fac[0] = 1;
  for (long long int i = 1; i <= n; i++) {
    fac[i] = fac[i - 1] * i;
    fac[i] %= 1000000007;
  }
  long long int p = power(2, 19);
  long long int x;
  for (long long int i = 0; i < n; i++) {
    cin >> x;
    a[x]++;
  }
  long long int ans = power(2, n);
  ans--;
  long long int z = power(2, 20);
  z--;
  for (long long int j = 0; j < 20; j++) {
    long long int b = 0;
    for (long long int i = 1; i <= z; i++) {
      long long int x = i | ((long long int)1 << j);
      if (x != i) a[i] += a[x];
    }
  }
  for (long long int i = z; i > 0; i--) {
    long long int b = 0;
    for (long long int j = 0; j < 20; j++) {
      long long int x = i | ((long long int)1 << j);
      if (x == i) b++;
    }
    long long int t = power(2, a[i]);
    t--;
    t %= 1000000007;
    if (b % 2 == 0) {
      ans += t;
    } else {
      ans -= t;
      ans %= 1000000007;
      ans += 1000000007;
    }
    ans %= 1000000007;
  }
  cout << ans;
}
int main() {
  ios_base::sync_with_stdio(false);
  cin.tie(NULL);
  long long int t = 1;
  for (long long int i = 0; i < t; i++) {
    solve();
  }
}
