2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long N = 1e6 + 20, MOD = 1e9 + 7;
long long n, a[N], dp[N], cnt, pw[N], ans;
int main() {
  pw[0] = 1;
  for (int i = 1; i < N; i++) pw[i] = (pw[i - 1] * 2) % MOD;
  cin >> n;
  for (int i = 0; i < n; i++) {
    cin >> a[i];
    dp[a[i]]++;
  }
  for (int i = 0; i < 20; i++) {
    for (int j = 0; j < N; j++) {
      if ((pw[i] & j) == 0) {
        if (j + pw[i] < N) dp[j] += dp[j + pw[i]];
        dp[j] %= MOD;
      }
    }
  }
  for (int i = 0; i < N; i++) {
    cnt = __builtin_popcount(i) % 2;
    if (cnt == 1)
      ans -= pw[dp[i]];
    else
      ans += pw[dp[i]];
    ans %= MOD;
  }
  cout << ans;
  return 0;
}
