2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
const long long Mod = 1000000007;
long long f[2000005], bin[2000005];
int n;
int read() {
  int t = 0, f = 1;
  char ch = getchar();
  while (ch < '0' || ch > '9') {
    if (ch == '-') f = -1;
    ch = getchar();
  }
  while ('0' <= ch && ch <= '9') {
    t = t * 10 + ch - '0';
    ch = getchar();
  }
  return t * f;
}
void solve() {
  for (int i = 0; i <= 1000000; i++)
    for (int j = 0; j < 20; j++)
      if ((1 << j) & i) (f[i ^ (1 << j)] += f[i]) %= Mod;
  long long ans = 0;
  for (int i = 0; i <= 1000000; i++) {
    int cnt = 1;
    for (int j = 0; j < 20; j++)
      if ((1 << j) & i) cnt = -cnt;
    ans = ((ans + (cnt * (bin[f[i]] - 1) % Mod)) % Mod) % Mod;
  }
  printf("%I64d\n", ans);
}
int main() {
  n = read();
  bin[0] = 1;
  for (int i = 1; i <= 1000000; i++) bin[i] = (bin[i - 1] * 2) % Mod;
  for (int i = 1; i <= n; i++) f[read()]++;
  solve();
}
