2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = 1200 * 1000 + 10, mod = 1000000007, maxk = 21;
int tvn[maxn], n, a, t[maxn], dp[maxn][maxk];
long long ans;
bool b[maxk];
int main() {
  scanf("%d", &n);
  for (int i = 0; i < n; i++) {
    scanf("%d", &a);
    t[a]++;
  }
  for (int i = 1; i < maxn; i++) tvn[i] = (((2 * tvn[i - 1]) % mod) + 1) % mod;
  for (int i = (1 << (maxk - 1)) - 1; i >= 1; i--) {
    a = i;
    for (int j = maxk - 1; j >= 1; j--) {
      b[j] = a & 1;
      a >>= 1;
    }
    dp[i][0] = t[i];
    for (int j = 1; j < maxk; j++) {
      dp[i][j] = dp[i][j - 1];
      if (!b[j]) dp[i][j] += dp[i ^ (1 << (maxk - j - 1))][j - 1];
    }
    if (__builtin_popcount(i) & 1)
      ans = (ans + tvn[dp[i][maxk - 1]]) % mod;
    else
      ans = (ans + mod - tvn[dp[i][maxk - 1]]) % mod;
  }
  printf("%I64d", (tvn[n] + mod - ans) % mod);
  return 0;
}
