2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
void read(int &x) {
  char ch = getchar();
  int f = 1;
  while ((ch != '-') && (ch < '0' || ch > '9')) ch = getchar();
  if (ch == '-')
    f = -1, x = 0;
  else
    x = ch - 48;
  ch = getchar();
  while (ch >= '0' && ch <= '9') x = x * 10 + ch - 48, ch = getchar();
  x *= f;
}
void read(long long &x) {
  char ch = getchar();
  int f = 1;
  while ((ch != '-') && (ch < '0' || ch > '9')) ch = getchar();
  if (ch == '-')
    f = -1, x = 0;
  else
    x = ch - 48;
  ch = getchar();
  while (ch >= '0' && ch <= '9') x = x * 10LL + ch - 48, ch = getchar();
  x *= f;
}
void _print(const int &x) {
  if (x < 10)
    putchar(48 + x);
  else
    _print(x / 10), _print(x % 10);
}
void _print(const long long &x) {
  if (x < 10)
    putchar(48 + x);
  else
    _print(x / 10), _print(x % 10);
}
void print(const int &x) {
  if (x < 0)
    putchar('-'), _print(-x);
  else
    _print(x);
}
void print(const long long &x) {
  if (x < 0)
    putchar('-'), _print(-x);
  else
    _print(x);
}
void println(const int &x) {
  print(x);
  putchar('\n');
}
void println(const long long &x) {
  print(x);
  putchar('\n');
}
int n, x, a[1 << 20], p2[1 << 20];
int main() {
  read(n);
  p2[0] = 1;
  for (int i = (1); i <= (n); i++)
    read(x), a[x]++, p2[i] = 1ll * p2[i - 1] * 2 % 1000000007;
  for (int i = (0); i <= (19); i++)
    for (int j = (0); j <= ((1 << 20) - 1); j++)
      if (!(j & 1 << i)) a[j] += a[j + (1 << i)];
  int ans = 0;
  for (int i = (0); i <= ((1 << 20) - 1); i++)
    if (__builtin_popcount(i) & 1)
      (ans -= p2[a[i]]) % 1000000007;
    else
      (ans += p2[a[i]]) % 1000000007;
  println((ans + 1000000007) % 1000000007);
  return 0;
}
