2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long MAXN = 4e6 + 7;
const long long P = 1e9 + 7;
long long a[MAXN];
long long ans, n;
inline void FWT(long long *F, long long len) {
  register long long mid, j, k;
  for (mid = 1; mid < len; mid <<= 1) {
    for (j = 0; j < len; j += (mid << 1)) {
      for (k = 0; k < mid; ++k) {
        F[j + k] = (F[j + k] + F[j + k + mid] % P) % P;
      }
    }
  }
}
inline long long ksm(long long x, long long y) {
  long long ans = 1;
  while (y) {
    if (y & 1) ans = ans * x % P;
    x = x * x % P;
    y >>= 1;
  }
  return ans;
}
signed main() {
  scanf("%lld", &n);
  long long MAXS = 0;
  for (long long i = 1, x; i <= n; ++i) {
    scanf("%lld", &x);
    if (MAXS < x) MAXS = x;
    a[x]++;
  }
  long long L = 0;
  while (MAXS) MAXS >>= 1, ++L;
  ++L;
  MAXS = (1 << L) - 1;
  FWT(a, (1 << L));
  a[0] = ksm(2, n) - 1;
  for (long long i = 1; i <= MAXS; ++i) {
    a[i] = ksm(2, a[i]) - 1;
  }
  for (long long S = 0, ccnt; S <= MAXS; ++S) {
    ccnt = 1;
    for (long long i = 0; i <= L; ++i) {
      if (S & (1 << i)) ccnt *= -1;
    }
    ans = (ans + (1ll * a[S] * ccnt % P)) % P;
  }
  printf("%lld\n", ans);
  return 0;
}
