2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 21;
const int M = 1e6 + 1;
int mod = 1e9 + 7;
int m[N][M], B[M], C[N];
int main() {
  int n;
  int a;
  scanf("%d", &n);
  for (int i = 0; i < n; i++) scanf("%d", &a), m[0][a]++;
  B[0] = 1;
  for (int i = 1; i <= n; i++) B[i] = 1ll * 2 * B[i - 1] % mod;
  for (int i = 0; i <= n; i++) B[i] = (mod + B[i] - 1) % mod;
  for (int i = M - 1; i > -1; i--) {
    int cur = 0;
    for (int j = 1; j < N; j++) m[j][i] /= j, cur += m[j][i];
    for (int k = 0; k < N; k++) {
      if (((i >> k) & 1))
        for (int j = 0; j < N - 1; j++) m[j + 1][i - (1 << k)] += m[j][i];
    }
    m[0][i] += cur;
  }
  int ans = 0;
  for (int i = 0; i < M; i++) {
    int cur = m[0][i];
    if (__builtin_popcount(i) % 2 == 1)
      ans = (ans + mod - B[cur]) % mod;
    else
      ans = (ans + B[cur]) % mod;
  }
  printf("%d", ans);
}
