2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int MAX = 1048600;
const int mod = 1e9 + 7;
int n;
int a;
int h[MAX];
int dp[30][MAX];
int d[MAX];
long long int ans = 0;
int main() {
  cin >> n;
  for (int i = 1; i <= n; i++) scanf("%d", &a), h[a]++;
  for (int k = 0; k <= 20; k++)
    for (int x = 0; x <= (1 << 20); x++) {
      if (!k)
        dp[k][x] = h[x];
      else if (x & (1 << (k - 1)))
        dp[k][x] = dp[k - 1][x] % mod;
      else {
        dp[k][x] = (dp[k - 1][x] % mod);
        if (x + 1 << (k - 1) <= MAX)
          dp[k][x] += dp[k - 1][x + (1 << (k - 1))] % mod;
      }
      dp[k][x] %= mod;
    }
  for (int i = 1; i <= (1 << 20); i++) d[i] = d[i >> 1] + (i % 2);
  for (int x = 0; x <= (1 << 20); x++) {
    ans += ((d[x] % 2 ? -1 : 1) * (((1 << dp[20][x]) - 1) % mod) + mod) % mod;
    ans %= mod;
  }
  cout << ans;
}
