2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int cnt[2000010];
inline int inn() {
  int x, ch;
  while ((ch = getchar()) < '0' || ch > '9')
    ;
  x = ch ^ '0';
  while ((ch = getchar()) >= '0' && ch <= '9')
    x = (x << 1) + (x << 3) + (ch ^ '0');
  return x;
}
inline void fwt(int *a, int n) {
  for (int i = 1; i < n; i <<= 1)
    for (int j = 0, p = i << 1; j < n; j += p)
      for (int k = 0; k < i; k++) (a[j + k] += a[j + k + i]) %= 1000000007;
}
inline int solve(int x, int s) {
  int res = 0;
  while (s) res ^= s & 1, s >>= 1;
  return res ? (1000000007 - x) % 1000000007 : x;
}
inline int fast_pow(int x, int k, int ans = 1) {
  for (; k; k >>= 1, x = (long long)x * x % 1000000007)
    (k & 1) ? ans = (long long)ans * x % 1000000007 : 0;
  return ans;
}
int main() {
  int n = inn(), A = 0, m = 1, ans = 0;
  for (int i = 1, x; i <= n; i++) cnt[x = inn()]++, A = max(A, x);
  while (m <= A) m <<= 1;
  fwt(cnt, m);
  for (int i = 0; i < m; i++)
    (ans += solve(fast_pow(2, cnt[i]), i)) %= 1000000007;
  if (!A) ans--;
  if (ans < 0) ans += 1000000007;
  return !printf("%d\n", ans);
}
