2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int n, dp[1 << 20], num[1 << 20], mi[1 << 20];
long long ans;
int main() {
  scanf("%d", &n);
  for (int i = 1; i <= n; i++) {
    int x;
    scanf("%d", &x);
    dp[x]++;
  }
  mi[0] = 1;
  for (int i = 1; i < 1 << 20; i++)
    num[i] = num[i >> 1] + (i & 1), mi[i] = mi[i - 1] * 2 % 1000000007;
  for (int j = 1; j <= 20; j++)
    for (int i = 0; i < 1 << 20; i++)
      if (i & (1 << j - 1)) dp[i ^ (1 << j - 1)] += dp[i];
  for (int i = 0; i < 1 << 20; i++) {
    if (num[i] & 1)
      ans = (ans - 1ll * mi[dp[i]] + 1) % 1000000007;
    else
      ans = (ans + 1ll * mi[dp[i]] - 1) % 1000000007;
  }
  printf("%lld", (ans + 1000000007) % 1000000007);
  return 0;
}
