2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int sz = 20, mod = 1e9 + 7;
int dp[1 << sz], st[1 << sz];
int main() {
  int n, an = 0;
  cin >> n;
  for (int a = 0; a < n; a++) {
    int x;
    scanf("%d", &x);
    dp[x]++;
    st[a + 1] = (st[a] * 2 + 1) % mod;
  }
  for (int i = 0; i < sz; i++) {
    for (int mask = 0; mask < (1 << sz); mask++) {
      if ((mask & (1 << i)) == 0) dp[mask] += dp[mask + (1 << i)];
    }
  }
  for (int mask = 0; mask < (1 << sz); mask++) {
    int q = __builtin_popcount(mask);
    if (q & 1)
      an -= st[dp[mask]];
    else
      an += st[dp[mask]];
    if (an < 0) an += mod;
    if (an >= mod) an -= mod;
  }
  cout << an;
}
