2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long p = 1e9 + 7;
inline long long read() {
  long long neg = 1, num = 0;
  char c = getchar();
  for (; !isdigit(c); c = getchar())
    if (c == '-') neg = -1;
  for (; isdigit(c); c = getchar()) num = (num << 1) + (num << 3) + c - '0';
  return neg * num;
}
long long n, ans, a[300010], f[2000010], g[2000010];
inline long long Pow(long long x, long long y) {
  long long sum = 1;
  for (; y; y >>= 1, x = x * x % p)
    if (y & 1) sum = sum * x % p;
  return sum % p;
}
inline long long Calc(long long x) {
  long long sum = 0;
  while (x) x -= (x & -x), sum++;
  return (sum & 1) ? -1 : 1;
}
signed main() {
  n = read();
  long long M = (1 << 20) - 1;
  for (long long i = 1; i <= n; i++) a[i] = read(), f[a[i]]++;
  for (long long i = 0; i <= 19; i++)
    for (long long j = 0; j <= M; j++)
      if (!(j & (1 << i))) f[j] += f[j | (1 << i)];
  for (long long i = 0; i <= M; i++) g[i] = (Pow(2, f[i]) - 1 + p) % p;
  for (long long i = 0; i <= M; i++) ans = (ans + Calc(i) * g[i]) % p;
  printf("%lld", (ans + p) % p);
  return 0;
}
