2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 1e6 + 5;
const int mod = 1e9 + 7;
int n;
int cnt[1 << 22], two[N];
template <typename T>
inline void chkmax(T &x, T y) {
  x = max(x, y);
}
template <typename T>
inline void chkmin(T &x, T y) {
  x = min(x, y);
}
template <typename T>
inline void read(T &x) {
  T f = 1;
  x = 0;
  char c = getchar();
  for (; !isdigit(c); c = getchar())
    if (c == '-') f = -f;
  for (; isdigit(c); c = getchar()) x = (x << 3) + (x << 1) + c - '0';
  x *= f;
}
inline void inc(int &x, int y) { x = x + y < mod ? x + y : x + y - mod; }
inline void dec(int &x, int y) { x = x - y >= 0 ? x - y : x - y + mod; }
int main() {
  read(n);
  for (int i = 1; i <= n; ++i) {
    int x;
    read(x);
    ++cnt[x];
  }
  two[0] = 1;
  for (int i = 1; i <= n; ++i) two[i] = 2ll * two[i - 1] % mod;
  for (int i = 0; i <= 20; ++i)
    for (int s = 0; s < (1 << 20); ++s)
      if (s >> i & 1) cnt[s ^ (1 << i)] += cnt[s];
  int ans = 0;
  for (int s = 0; s < (1 << 20); ++s)
    if (__builtin_popcount(s) & 1)
      dec(ans, (two[cnt[s]] - 1 + mod) % mod);
    else
      inc(ans, (two[cnt[s]] - 1 + mod) % mod);
  printf("%d\n", ans);
  return 0;
}
