2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

import java.io.*; import java.util.*;
public class CF0449D {
   
    static int MXBIT=20;
    static int MAXN=1<<20;
    static int MOD=1000000007;
    static class FastReader 
    { 
        BufferedReader br; 
        StringTokenizer st; 
  
        public FastReader() 
        { 
            br = new BufferedReader(new
                     InputStreamReader(System.in)); 
        } 
  
        String next() 
        { 
            while (st == null || !st.hasMoreElements()) 
            { 
                try
                { 
                    st = new StringTokenizer(br.readLine()); 
                } 
                catch (IOException  e) 
                { 
                    e.printStackTrace(); 
                } 
            } 
            return st.nextToken(); 
        } 
  
        int nextInt() 
        { 
            return Integer.parseInt(next()); 
        } 
  
        
    } 
    public static void main(String[] args) {
        int[] pow2=new int[MAXN+1];
        pow2[0]=1;
        for (int i = 1; i <=MAXN; i++) {
            pow2[i]=(pow2[i-1]*2)%MOD;
        }
        FastReader br=new FastReader();
        int N=br.nextInt();
        
        int[] dp=new int[MAXN];
        for (int i = 0; i < N; i++) {
            dp[br.nextInt()]++;
            //Evaluates f(mask,0)
        }
        for (int i = 0; i < MXBIT; i++) {
            for (int mask = 0; mask < MAXN; mask++) {//Memory compressed:
                //After processing i, everything is updated
                if((mask&(1<<i))==0){
                    dp[mask]+=dp[mask|(1<<i)];
                }
            }
        }
        int ans=0; 
        for (int mask = 0; mask < MAXN; mask++) {
            
            if(Integer.bitCount(mask)%2==1){
                ans-=pow2[dp[mask]]; 
            }else{
                ans+=pow2[dp[mask]]; 
            }
            ans%=MOD;
        }
        if(ans<0){
            ans+=MOD;
        }
        
        System.out.println(ans);
    }
    
}
