2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long mod = 1000000007ll;
long long dp[(1 << 20)][21], p[(1 << 20)], a[(1 << 20)];
inline long long add(long long p, long long q) {
  long long ret = p + q;
  return ((ret >= mod) ? ret - mod : ret);
}
int main() {
  int n, l, lim;
  scanf("%d", &n);
  l = log2(n);
  lim = (1 << (l + 1));
  p[0] = 1;
  for (int i = 1; i <= n; ++i) p[i] = (p[i - 1] << 1) % mod;
  for (int i = 0; i < n; ++i) {
    int b;
    scanf("%d", &b);
    a[b]++;
  }
  for (int i = 0; i < lim; ++i) {
    if (i & 1)
      dp[i][0] = a[i];
    else
      dp[i][0] = a[i] + a[i ^ 1];
  }
  for (int i = 1; i <= l; ++i) {
    for (int j = 0; j < lim; ++j) {
      if (j & p[i])
        dp[j][i] = dp[j][i - 1];
      else
        dp[j][i] = add(dp[j][i - 1], dp[j ^ p[i]][i - 1]);
    }
  }
  long long ans = 0;
  for (int i = 0; i < lim; ++i) {
    if (__builtin_popcount(i) & 1)
      ans = add(ans, mod - p[dp[i][l]]);
    else
      ans = add(ans, p[dp[i][l]]);
  }
  printf("%lld\n", ans);
  return 0;
}
