2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long mod = 1e9 + 7, N = 1e6 + 5, mx = 1e6;
long long f[N], g[25], n, ans = 0;
long long power(long long a, long long b) {
  long long res = 1;
  while (b) {
    if (b & 1) res = res * a % mod;
    b >>= 1;
    a = a * a % mod;
  }
  return res;
}
signed main() {
  scanf("%lld", &n);
  for (long long i = 1; i <= n; i++) {
    long long w;
    scanf("%lld", &w);
    f[w]++;
  }
  for (long long j = 0; j <= 20; j++)
    for (long long i = 1; i <= mx; i++)
      if (i & (1 << j)) f[i ^ (1 << j)] += f[i];
  for (long long i = 0; i <= mx; i++) {
    long long sum = 0;
    for (long long j = 0; j <= 20; j++)
      if (i & (1 << j)) sum++;
    g[sum] += ((power(2, f[i]) - 1) % mod + mod) % mod;
  }
  for (long long j = 0; j <= 20; j++)
    if (j % 2)
      ans = (ans - g[j]) % mod;
    else
      ans = (ans + g[j]) % mod;
  printf("%lld", ans);
  return 0;
}
