2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int mod = 1e9 + 7;
int N;
int A[1 << 20], f[1 << 20], g[1 << 20];
long long ans, pw[1 << 20];
int main(void) {
  scanf("%d", &N);
  pw[0] = 1;
  for (int i = 1; i <= N; i++) {
    pw[i] = (pw[i - 1] * 2) % mod;
  }
  for (int i = 0; i < N; i++) {
    scanf("%d", &A[i]);
    f[A[i]]++;
  }
  for (int i = 0; i < 20; i++) {
    for (int j = (1 << 20) - 1; j >= 0; j--) {
      if ((j & (1 << i)) == 0) {
        f[j] += f[j | (1 << i)];
      }
    }
  }
  for (int i = 0; i < (1 << 20); i++) {
    g[i] = __builtin_popcount(i);
    if (g[i] & 1)
      g[i] = -1;
    else
      g[i] = 1;
    ans += g[i] * pw[f[i]];
    ans %= mod;
    if (ans < 0) ans += mod;
  }
  printf("%lld\n", ans);
}
