2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 2e6 + 5;
const int mod = 1e9 + 7;
int n, a[N], pw[N];
long long ans;
int main() {
  pw[0] = 1;
  for (int i = 1; i < N; i++) {
    pw[i] = (pw[i - 1] * 2ll) % mod;
  }
  cin >> n;
  for (int i = 1; i <= n; i++) {
    int x;
    cin >> x;
    a[x]++;
  }
  for (int j = 0; j < 20; j++) {
    for (int i = (1 << 20) - 1; i >= 0; i--) {
      if (i & (1 << j)) {
        a[i - (1 << j)] += a[i];
      }
    }
  }
  for (int i = 0; i < pw[20]; i++) {
    int bit = __builtin_popcount(i);
    if (bit & 1)
      ans -= pw[a[i]], ans = (ans + mod) % mod;
    else
      ans += pw[a[i]], ans = (ans + mod) % mod;
  }
  cout << ans << endl;
}
