2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = 1 << 20;
const int mod = 1e9 + 7;
int A[maxn], dp[maxn];
int main(void) {
  int n, a;
  cin >> n;
  for (int i = 1; i <= n; i++) scanf("%d", &a), dp[a]++;
  int all = (1 << 20);
  for (int i = 0; i < 20; i++) {
    for (int s = all - 1; s >= 0; s--) {
      if ((s >> i & 1) == 0) dp[s] += dp[s | (1 << i)];
    }
  }
  A[0] = 1;
  for (int i = 1; i < maxn; i++) A[i] = A[i - 1] * 2 % mod;
  long long res = 0;
  for (int i = 0; i < all; i++) {
    int t = 1;
    for (int j = 0; j < 20; j++) {
      if (i & (1 << j)) t = -t;
    }
    res = (res + t * (A[dp[i]] - 1) + mod) % mod;
  }
  cout << res;
}
