2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int maxn = (1 << 20) + 1e5;
const long long mode = 1e9 + 7;
int dp[maxn];
long long powerFun(int fi, int se) {
  if (se == 0) return 1;
  long long ret = powerFun(fi, se / 2);
  ret = (ret * ret) % mode;
  if (se % 2 == 0)
    return ret;
  else
    return (ret * 2) % mode;
}
int main() {
  ios_base::sync_with_stdio(false);
  int n;
  cin >> n;
  for (int i = 1; i <= n; i++) {
    int x;
    cin >> x;
    dp[x]++;
  }
  for (int i = 0; i < 20; i++)
    for (int mask = (1 << 20) - 1; mask >= 0; mask--)
      if (mask & (1 << i)) dp[mask ^ (1 << i)] += dp[mask];
  long long ans = powerFun(2, n);
  for (int mask = 1; mask < (1 << 20); mask++) {
    if (__builtin_popcount(mask) % 2 == 1)
      ans -= powerFun(2, dp[mask]);
    else
      ans += powerFun(2, dp[mask]);
    if (ans >= mode) ans -= mode;
    if (ans < 0) ans += mode;
  }
  cout << ans << endl;
}
