2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
int dp[21][1048580];
long long bigmod(int b, int i) {
  long long r = 1;
  for (int j = (29); j >= (0); j--) {
    r = r * r % 1000000007;
    if ((i >> j) & 1) r = r * b % 1000000007;
  }
  return r;
}
int main() {
  int n;
  scanf("%d", &n);
  int mx = 0;
  for (int i = (1); i <= (n); i++) {
    int t;
    scanf("%d", &t);
    dp[0][t]++;
    mx = max(mx, t);
  }
  for (int i = (1); i <= (20); i++) {
    for (int j = (0); j <= (mx); j++) {
      if ((j >> (i - 1)) & 1)
        dp[i][j] = dp[i - 1][j];
      else
        dp[i][j] = dp[i - 1][j] + dp[i - 1][j | (1 << (i - 1))];
    }
  }
  long long ans = 0;
  for (int j = (0); j <= (mx); j++) {
    int b = __builtin_popcount(j);
    long long r = bigmod(2, dp[20][j]);
    if (b & 1)
      ans = (ans - r + 1000000007) % 1000000007;
    else
      ans = (ans + r) % 1000000007;
  }
  printf("%lld\n", ans);
  return 0;
}
