2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
inline int read() {
  int x = 0;
  char c = getchar();
  for (; c < 48 || c > 57; c = getchar())
    ;
  for (; c >= 48 && c <= 57; c = getchar()) x = x * 10 + (c ^ 48);
  return x;
}
const int N = 1e6 + 5, Mod = 1e9 + 7;
int n, dp[N], g[22], fac[N];
int main() {
  n = read(), fac[0] = 1;
  for (int i = 1; i < N; ++i) fac[i] = 2LL * fac[i - 1] % Mod;
  for (int i = 1; i <= n; ++i) {
    int x = read();
    ++dp[x];
  }
  for (int i = N - 1; i; --i)
    for (int j = 0; j <= 20; ++j)
      if ((i >> j) & 1) dp[i ^ (1 << j)] += dp[i];
  for (int i = 0; i < N; ++i) {
    int cnt = 0;
    for (int j = 0; j <= 20; ++j)
      if ((i >> j) & 1) ++cnt;
    g[cnt] = (g[cnt] + 1LL * (fac[dp[i]] - 1) % Mod + Mod) % Mod;
  }
  int ans = 0;
  for (int i = 0; i <= 20; ++i)
    if (i & 1)
      ans = 1LL * (ans - g[i] + Mod) % Mod;
    else
      ans = (ans + g[i]) % Mod;
  printf("%d\n", (ans + Mod) % Mod);
  return 0;
}
