2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long inf = 1000000007;
int cnt[1024 * 1024 + 10][21];
int one[1024 * 1024 + 10];
void init() {
  vector<int> vt;
  for (int i = 1000000; i > 0; --i) {
    for (int j = 2; j < 21; ++j) cnt[i][j] /= j;
    vt.clear();
    for (int j = 0; j < 20; ++j)
      if (i & (1 << j)) one[i]++, vt.push_back(1 << j);
    for (int j = 0; j < 20; ++j)
      if (cnt[i][j])
        for (int k = 0; k < vt.size(); ++k) cnt[i ^ vt[k]][j + 1] += cnt[i][j];
  }
}
int prm[1024 * 1024 + 10];
int main() {
  prm[0] = 1;
  for (int i = 1; i < 1000010; ++i) prm[i] = prm[i - 1] * 2 % inf;
  int n, x;
  scanf("%d", &n);
  long long res = prm[n] - 1;
  while (n--) {
    scanf("%d", &x);
    cnt[x][0]++;
  }
  init();
  for (int i = 1; i <= 1000000; ++i) {
    int tmp = cnt[i][0];
    for (int j = 1; j <= 20; ++j) tmp += cnt[i][j];
    if (one[i] & 1)
      res = res - prm[tmp] + 1;
    else
      res = res + prm[tmp] - 1;
    if (res < 0)
      res += inf;
    else if (res >= inf)
      res -= inf;
  }
  cout << res << endl;
  return 0;
}
