2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int M = (1 << 20);
const long long MOD = 1e9 + 7;
int dp[M];
long long p2[M], ans;
int32_t main() {
  int n;
  scanf("%d", &n);
  p2[0] = 1;
  for (int i = 0; i < n; i++) {
    int x;
    scanf("%d", &x);
    dp[x]++;
    p2[i + 1] = (p2[i] * 2ll) % MOD;
  }
  for (int i = 20; ~i; i--)
    for (int mask = M; --mask;)
      if (mask & (1 << i)) dp[mask ^ (1 << i)] += dp[mask];
  for (int i = 0; i < M; i++)
    ans += p2[dp[i]] * ((int)__builtin_popcount(i) & 1 ? -1 : 1) + MOD,
        ans %= MOD;
  return cout << ans << endl, 0;
}
