2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
using ll = long long;
using vi = vector<int>;
using ii = pair<int, int>;
const int oo = 0x3f3f3f3f;
const ll OO = ll(oo) * oo;
const int N = 1 << 20;
const ll M = 1000000007;
ll A[N];
ll f[N];
ll p2[N];
void add(ll& x, ll y) {
  x += y;
  if (x >= M) x -= M;
  if (x < 0) x += M;
}
int main() {
  ios_base::sync_with_stdio(false);
  cin.tie(0);
  cout.tie(0);
  int n;
  cin >> n;
  for (int i = 0; i < n; i++) {
    cin >> A[i];
    f[A[i]]++;
  }
  p2[0] = 1;
  for (int i = 1; i < N; i++) p2[i] = p2[i - 1] * 2 % M;
  for (int b = 1; b < N; b <<= 1) {
    for (int u = 0; u < N; u += (b << 1)) {
      for (int l = 0; l < b; l++) {
        add(f[u | l], f[u | l | b]);
      }
    }
  }
  for (int i = 0; i < N; i++) {
    f[i] = p2[f[i]] - 1;
  }
  for (int b = 1; b < N; b <<= 1) {
    for (int u = 0; u < N; u += (b << 1)) {
      for (int l = 0; l < b; l++) {
        add(f[u | l], -f[u | l | b]);
      }
    }
  }
  cout << f[0] << '\n';
  return 0;
}
