2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int inf = 0x3f3f3f3f;
const long long linf = 0x3f3f3f3f3f3f3f3f;
const long long mod = 1e9 + 7;
const int maxn = 1e6 + 5;
int n;
long long sum[maxn], dig[maxn];
void init() {
  for (int i = 0; i < maxn; ++i) {
    dig[i] = __builtin_popcount(i);
  }
}
long long pw2(long long x) {
  long long ret = 1, bs = 2;
  while (x > 0) {
    if ((x & 1) == 1) ret = ret * bs % mod;
    bs = bs * bs % mod;
    x >>= 1;
  }
  return ret;
}
void read(int& x) {
  x = 0;
  char ch = getchar();
  while (ch < '0' || ch > '9') ch = getchar();
  while (ch >= '0' && ch <= '9') {
    x = x * 10 + (ch - '0');
    ch = getchar();
  }
}
void GetSum(int n, int mx) {
  for (int i = 0; i < n; ++i) {
    for (int j = mx; j >= 0; --j) {
      if (((j >> i) & 1) == 0) continue;
      int num = (j ^ (1 << i));
      sum[num] += sum[j];
    }
  }
}
int main() {
  init();
  while (scanf("%d", &n) != EOF) {
    for (int i = 0; i < maxn; ++i) {
      sum[i] = 0;
    }
    for (int i = 0; i < n; ++i) {
      int x;
      read(x);
      ++sum[x];
    }
    long long ans = 0;
    GetSum(ceil(log2(n)), n);
    for (int i = 0; i <= 1000000; ++i) {
      if ((dig[i] & 1) == 1)
        ans = ((ans - pw2(sum[i]) + 1) % mod + mod) % mod;
      else
        ans = ((ans + pw2(sum[i]) - 1) % mod + mod) % mod;
    }
    printf("%lld\n", ans);
  }
  return 0;
}
