2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
long long mask[(1LL << 20)];
long long p[(1LL << 20)];
int main() {
  ios_base::sync_with_stdio(false), cin.tie(0), cout.tie(0);
  srand(time(NULL));
  ;
  long long n;
  cin >> n;
  long long a[n];
  p[0] = 1;
  for (long long i = 0; i < n; i++) {
    cin >> a[i];
    mask[a[i]]++;
    if (i != 0) p[i] = (p[i - 1] * 2) % 1000000007;
  }
  p[n] = (p[n - 1] * 2) % 1000000007;
  for (long long i = 0; i < 20; i++) {
    for (long long j = 0; j < (1LL << 20); j++) {
      if (!(j & (1 << i))) {
        mask[j] += mask[j ^ (1 << i)];
      }
    }
  }
  for (long long i = 0; i < (1LL << 20); i++) {
    mask[i] = (p[mask[i]] - 1 + 1000000007) % 1000000007;
  }
  for (long long i = 0; i < 20; i++) {
    for (long long j = 0; j < (1LL << 20); j++) {
      if (!(j & (1LL << i))) {
        mask[j] = (mask[j] - mask[j ^ (1LL << i)] + 1000000007) % 1000000007;
      }
    }
  }
  cout << mask[0] << " ";
  return 0;
}
