2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
void read(int &x) {
  x = 0;
  char c = getchar();
  for (; c < 48; c = getchar())
    ;
  for (; c > 47; c = getchar()) x = (x << 1) + (x << 3) + (c ^ 48);
}
const int M = 1 << 20;
long long po[M];
int dp[2][M], cnt[M], sz = sizeof(dp[0]), op[M];
int main() {
  int n;
  read(n);
  int i, x, now = 0;
  po[0] = 1;
  for (i = 1; i <= n; i++) po[i] = (po[i - 1] * 2) % 1000000007;
  long long res = 0;
  for (; n--;) {
    read(x);
    cnt[x]++;
    if (x & 1) {
      dp[now][x]++;
      dp[now][x ^ 1]++;
    } else {
      dp[now][x]++;
    }
  }
  int tmp, j;
  for (i = 1; i < 20; i++) {
    tmp = 1 << i;
    now = !now;
    memset(dp[now], 0, sz);
    for (j = 0; j < M; j++) {
      (dp[now][j] += dp[!now][j]) %= 1000000007;
      if (j & tmp) (dp[now][j ^ tmp] += dp[!now][j]) %= 1000000007;
    }
  }
  op[0] = 1;
  for (i = 0; i < M; i++) {
    if (i) op[i] = -op[i ^ (i & (-i))];
    res = (res + op[i] * (po[dp[now][i]] - 1)) % 1000000007;
  }
  printf("%lld\n", (res + 1000000007) % 1000000007);
  return 0;
}
