2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const long long mod = 1e9 + 7;
int main() {
  ios::sync_with_stdio(false);
  cin.tie(0), cout.tie(0);
  int n, bit;
  cin >> n;
  vector<int> a(n);
  vector<long long> p(n + 1);
  p[0] = 1;
  int mx = 0;
  for (int i = 0; i < n; i++) {
    cin >> a[i];
    mx = max(mx, a[i]);
    p[i + 1] = p[i] * 2 % mod;
  }
  bit = log2(mx) + 1;
  vector<int> f(1 << bit);
  for (auto x : a) {
    f[x]++;
  }
  for (int i = 0; i < bit; i++) {
    for (int mask = 0; mask < 1 << bit; mask++) {
      if (mask >> i & 1) {
        f[mask ^ (1 << i)] += f[mask];
      }
    }
  }
  long long ans = p[n] - 1;
  for (int i = 1; i <= mx; i++) {
    if (__builtin_popcount(i) & 1) {
      ans = (ans - p[f[i]] + 1) % mod;
    } else {
      ans = (ans + p[f[i]] - 1) % mod;
    }
  }
  cout << (ans + mod) % mod << endl;
  return 0;
}
