2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const int N = 2e6 + 10;
const int B = 20;
long long mod = 1e9 + 7;
long long po[N];
long long f[N];
int main() {
  int n;
  scanf("%d", &n);
  po[0] = 1;
  for (int i = 1; i <= n; i++) {
    int x;
    scanf("%d", &x);
    f[x]++;
    po[i] = (po[i - 1] << 1) % mod;
  }
  for (int i = 0; i < B; i++)
    for (int mask = 0; mask < (1 << B); mask++)
      if (!(mask & (1 << i))) f[mask] += f[mask ^ (1 << i)];
  long long ans = 0;
  for (int mask = 1; mask < (1 << B); mask++) {
    long long cur = po[f[mask]] - 1 + mod;
    cur %= mod;
    int cnt = __builtin_popcount(mask);
    if (!(cnt & 1)) cur = mod - cur;
    ans = (ans + cur) % mod;
  }
  ans = po[n] - 1 + mod - ans;
  ans %= mod;
  printf("%I64d\n", ans);
}
