2
1 31
 2
1 0
 10
450661 128600 993228 725823 293549 33490 843121 903634 556169 448234
 1
1
 5
1 3 5 7 9
 6
524 529 5249 524 529 529
 3
1 2 3
 2
0 1
 55
0 1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 2 3 4 5 6 7 8 9 3 4 5 6 7 8 9 4 5 6 7 8 9 5 6 7 8 9 6 7 8 9 7 8 9 8 9 9
 16
0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
 3
128 1024 2048
 10
3 3 3 5 5 3 3 3 3 5
 1
0
 2
1 2
 2
0 0
 2
1 1

0
 2
 632
 0
 0
 24
 2
 2
 621247139
 64594
 4
 0
 1
 1
 3
 0

#include <bits/stdc++.h>
using namespace std;
const double pi = acos(-1.0);
const int N = 20;
const int M = 1000005;
int n, ans = 0;
int F[M], a[M];
void calculateF() {
  for (int i = 0; i < N; i += 1) {
    for (int mask = M; mask >= 0; mask -= 1) {
      if (mask & (1 << i)) {
        (F[1 << i ^ mask] += F[mask]) %= 1000000007;
      }
    }
  }
  for (int i = M; i >= 0; i -= 1) {
    (ans += 1ll * (__builtin_popcount(i) % 2 ? -1 : 1) * (a[F[i]] - 1)) %=
        1000000007;
  }
}
int main() {
  ios::sync_with_stdio(false);
  cin.tie(0);
  cout.tie(0);
  cin >> n;
  memset(F, (0), sizeof(F));
  memset(a, (0), sizeof(a));
  for (int i = 0; i < n; i += 1) {
    int x;
    cin >> x;
    F[x]++;
  }
  a[0] = 1;
  for (int i = 0; i < n + 1; i += 1) {
    if (i == 0) continue;
    a[i] = (a[i - 1] << 1) % 1000000007;
  }
  calculateF();
  cout << ((ans + 1000000007) % 1000000007);
  return 0;
}
