A spherical optical element surface defect evaluation system and a method therefor. The evaluation system (100) comprises a defect imaging sub-system (200) and a control sub-system (700); the defect imaging sub-system (200) is used for acquiring a microscopic scattering dark field image applicable to digital image processing; the control sub-system (700) is used for controlling the motion of various components in the defect imaging sub-system to achieve the collection of a spherical optical element surface image; the defect imaging sub-system (200) comprises an illumination unit (300), a microscopic scattering dark field imaging unit (400), a space pose adjustment unit (500) and a spherical centring unit (600); and the motion and adjustment of the illumination unit (300), the microscopic scattering dark field imaging unit (400), the space pose adjustment unit (500) and the spherical centring unit (600) are all completed under the driving and control of the control sub-system (700). Therefore, the automated quantitative detection of a spherical optical element surface defect is achieved, and the detection efficiency and detection accuracy are improved.
SPHERICAL OPTICAL ELEMENT SURFACE DEFECT EVALUATION SYSTEM AND METHOD THEREFOR