Reflection-type Coherent anti-Stokes Ramen scattering (CARS) is preferable for surface state measurement due to its signal strength, but it is difficult to identify a surface position because the topographical information is not obtained. The reflection-type CARS microscopy and a high resolution phase sensor are combined. The phase sensor identifies the surface position, and reflected CARS derived from the surface is detected to perform compositional analysis.
LIGHT MEASURING DEVICE AND LIGHT MEASURING METHOD