An optical non-contact surface profiler (10) for determining (i) the surface profile of a transparent layer (F) on a light-absorbing or opaque substrate (W), (ii) the surface profile of a light-absorbing or opaque substrate (W) through a transparent layer, and (iii) the thickness profile of a transparent layer (F) on a light-absorbing or opaque surface (W). A microscope alternatively configured in interferometric mode and in spectrophotometric mode provides phase data from an interference pattern and reflectance data from a reflectance pattern, respectively. A photo-sensing device (28) receives the interference patterns and reflectance patterns and inputs the corresponding phase data and reflectance data to a computing device (32). The computing device (32) processes the data to determine the appropriate surface or film thickness profiles.
NON-CONTACT SURFACE PROFILER