A Y stage is capable of translational driving in the Y-axial direction, by independently controllable Y1 linear motor and Y2 linear motor. The amount of movement of the Y stage is detected by a Y1 linear encoder and Y2 linear encoder, and fed back to a Y control system and theta control system. The Y control system outputs a translational thrust command value, by receiving the average value of each positional detecting value measured by the Y1 linear encoder and Y2 linear encoder as the stage translational direction position feedback value. The theta control system receives the difference between each position detecting value as a stage yawing direction position feedback value, and outputs a yawing direction thrust command value. A non-interference block outputs Y1 linear motor thrust command value and Y2 linear motor thrust command value, by the use of the translational thrust command value and the thrust command value. Thus, the movement of the Y stage can be divided into translational direction movement and yawing direction movement, and independently controlled and compensated.
Stage position control method and stage position control apparatus capable of improving positioning precision