PURPOSE: An integrated visual imaging and electronic sensing inspection system is provided to perform integrated inspection and test for LCD(Liquid Crystal Display) active plates. CONSTITUTION: The integrated inspection and test system combines visual imaging inspection and an electronic sensing such as voltage imaging, electron beam sensing or charge sensing. Potential defect information obtained by the visual inspection system is combined with potential defect information obtained by the electronic sensing system to produce a defect report. One or more high-resolution visual cameras are scanned over a stationary plate, and image data from the camera is processed to detect potential defects. A high-resolution electronic sensing system examines the stationary plate, and the image data from the sensor is processed to detect potential defects. Potential defects from the visual image data and electronic sensing image data are processed to produce final defect information.
INTEGRATED VISUAL IMAGING AND ELECTRONIC SENSING INSPECTION SYSTEMS