A label-free RF MEMS-based biosensor is described for detecting biomarkers in a given environment. The biosensor is capable of sensing the presence of biomarkers by exploiting both its mechanical and electrical characteristics. In addition, the method employed for detecting mechanical deflections due to antigen-antibody binding uses a simple electrical circuitry which allows the sensor to be used at any location and time. Such a sensor, when placed in a matrix like structure allows for the detection of multiple biomarkers simultaneously.
3D RF MEMS biosensor for multiplexed label free detection