PURPOSE: To increase sensitivity to radiation and to improve the edge sharpness and resolution of a pattern by using a specified copolymer. CONSTITUTION: This mixture contains a binder and a polymer having 1,2,3- thiadiazole groups. A compd. having a functional group reactive with ketene is used as the binder and a compd. obtd. by polymerizing a compd. represented by the formula is used as the polymer. In the formula, R is preferably vinyl or 2-propenyl. A copolymer of multifunctional alcohol such as hydroxyalkyl methacrylate with a compd. represented by the formula is preferably used as the polymer.
NEGATIVE WORKING RADIOSENSITIVE MIXTURE