Advances in Silicon Carbide Processing and Applications
Stephen E. Saddow, Anant Agarwal
Artech House
Written by and for electrical engineers, this volume focuses on two of the most promising applications of SiC technology: gas and chemical sensing, and electric vehicle motor drive and control. The contributors also address in some detail the underlying device and processing issues that enable these applications areas to be served by this technology. After reviewing the status of the technology as of 2003, they take the two application areas in turn. Then they step back and explore SiC implantation technology, which they identify as key because the properties of the SiC lattice precludes using thermal diffusion to achieve planar selective doping over the surface of single-crystal wafers.