Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
200 | lotA0 | MFCGFlow_STEP_MEAN | 74.987226 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
201 | lotA0 | UPC1-Flow_STEP_MEAN | 669.72657 | RecipeC0 | WaferB11 | 12 | 2023-01-01 01:33:43.268 |
202 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.961914 | RecipeC0 | WaferB11 | 7 | 2023-01-01 01:33:48.267 |
203 | lotA0 | UPC1-Flow_STEP_MEAN | 42.978515 | RecipeC0 | WaferB11 | 7 | 2023-01-01 01:33:48.267 |
204 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.91 | RecipeC0 | WaferB11 | 7 | 2023-01-01 01:33:48.267 |
205 | lotA0 | UPC1-Flow_STEP_MEAN | -3.515625 | RecipeC0 | WaferB11 | 8 | 2023-01-01 01:33:50.270 |
206 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.000733 | RecipeC0 | WaferB11 | 8 | 2023-01-01 01:33:50.270 |
207 | lotA0 | UPC1-Flow_STEP_MEAN | 3.076172 | RecipeC0 | WaferB12 | 9 | 2023-01-01 01:34:00.267 |
208 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.94541 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
209 | lotA0 | UPC1-Flow_STEP_MEAN | 675.007205 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
210 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.999832 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
211 | lotA0 | MFCJFlow_STEP_MEAN | 60.053657 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
212 | lotA0 | MFC5Flow_STEP_MEAN | 81.066016 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
213 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
214 | lotA0 | MFCEFlow_STEP_MEAN | 81.086028 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
215 | lotA0 | MFC2Flow_STEP_MEAN | 75.03125 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
216 | lotA0 | MFCXFlow_STEP_MEAN | 0.002235 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
217 | lotA0 | MFCGFlow_STEP_MEAN | 75.001581 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
218 | lotA0 | MFCKFlow_STEP_MEAN | 60.050632 | RecipeC0 | WaferB12 | 10 | 2023-01-01 01:35:01.264 |
219 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.94 | RecipeC0 | WaferB12 | 7 | 2023-01-01 01:35:06.264 |
220 | lotA0 | UPC1-Flow_STEP_MEAN | 66.181641 | RecipeC0 | WaferB12 | 7 | 2023-01-01 01:35:06.264 |
221 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.989746 | RecipeC0 | WaferB12 | 7 | 2023-01-01 01:35:06.264 |
222 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.000733 | RecipeC0 | WaferB12 | 8 | 2023-01-01 01:35:08.274 |
223 | lotA0 | UPC1-Flow_STEP_MEAN | -3.735352 | RecipeC0 | WaferB12 | 8 | 2023-01-01 01:35:08.274 |
224 | lotA0 | UPC1-Flow_STEP_MEAN | 3.076172 | RecipeC0 | WaferB13 | 8 | 2023-01-01 01:35:18.264 |
225 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.989746 | RecipeC0 | WaferB13 | 8 | 2023-01-01 01:35:18.264 |
226 | lotA0 | UPC1-Flow_STEP_MEAN | 662.140596 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
227 | lotA0 | MFCEFlow_STEP_MEAN | 81.08174 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
228 | lotA0 | MFC5Flow_STEP_MEAN | 81.066171 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
229 | lotA0 | MFC2Flow_STEP_MEAN | 75.032447 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
230 | lotA0 | MFCJFlow_STEP_MEAN | 60.053657 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
231 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.930164 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
232 | lotA0 | MFCNFlow_STEP_MEAN | 134.935338 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
233 | lotA0 | MFCKFlow_STEP_MEAN | 60.046094 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
234 | lotA0 | MFCXFlow_STEP_MEAN | 0.002235 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
235 | lotA0 | MFCGFlow_STEP_MEAN | 74.995839 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
236 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.998271 | RecipeC0 | WaferB13 | 10 | 2023-01-01 01:36:19.262 |
237 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.94 | RecipeC0 | WaferB13 | 7 | 2023-01-01 01:36:24.262 |
238 | lotA0 | UPC1-Flow_STEP_MEAN | 86.83594 | RecipeC0 | WaferB13 | 7 | 2023-01-01 01:36:24.262 |
239 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.978027 | RecipeC0 | WaferB13 | 7 | 2023-01-01 01:36:24.262 |
240 | lotA0 | UPC1-Flow_STEP_MEAN | -3.735352 | RecipeC0 | WaferB13 | 8 | 2023-01-01 01:36:26.261 |
241 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.008057 | RecipeC0 | WaferB13 | 8 | 2023-01-01 01:36:26.261 |
242 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.99707 | RecipeC0 | WaferB14 | 7 | 2023-01-01 01:36:36.271 |
243 | lotA0 | UPC1-Flow_STEP_MEAN | 3.515625 | RecipeC0 | WaferB14 | 7 | 2023-01-01 01:36:36.271 |
244 | lotA0 | MFCNFlow_STEP_MEAN | 134.932252 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
245 | lotA0 | MFC2Flow_STEP_MEAN | 75.03125 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
246 | lotA0 | MFCEFlow_STEP_MEAN | 81.086028 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
247 | lotA0 | UPC1-Flow_STEP_MEAN | 660.094615 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
248 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
249 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.943443 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
250 | lotA0 | MFCJFlow_STEP_MEAN | 60.052145 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
251 | lotA0 | MFCXFlow_STEP_MEAN | 0.006823 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
252 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.000432 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
253 | lotA0 | MFC5Flow_STEP_MEAN | 81.070509 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
254 | lotA0 | MFCGFlow_STEP_MEAN | 75.001581 | RecipeC0 | WaferB14 | 10 | 2023-01-01 01:37:37.269 |
255 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.97 | RecipeC0 | WaferB14 | 7 | 2023-01-01 01:37:43.268 |
256 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.995606 | RecipeC0 | WaferB14 | 7 | 2023-01-01 01:37:43.268 |
257 | lotA0 | UPC1-Flow_STEP_MEAN | 21.796875 | RecipeC0 | WaferB14 | 7 | 2023-01-01 01:37:43.268 |
258 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.011719 | RecipeC0 | WaferB14 | 8 | 2023-01-01 01:37:44.468 |
259 | lotA0 | UPC1-Flow_STEP_MEAN | -3.955078 | RecipeC0 | WaferB14 | 8 | 2023-01-01 01:37:44.468 |
260 | lotA0 | MFCXFlow_STEP_MEAN | 0 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
261 | lotA0 | MFC5Flow_STEP_MEAN | 81.072755 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
262 | lotA0 | UPC1-Flow_STEP_MEAN | 662.68811 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
263 | lotA0 | MFCGFlow_STEP_MEAN | 75.007323 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
264 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
265 | lotA0 | MFC2Flow_STEP_MEAN | 75.031249 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
266 | lotA0 | MFCEFlow_STEP_MEAN | 81.068263 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
267 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.99695 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
268 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.933115 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
269 | lotA0 | MFCJFlow_STEP_MEAN | 60.056683 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
270 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB15 | 10 | 2023-01-01 01:38:55.408 |
271 | lotA0 | UPC1-Flow_STEP_MEAN | 30.673828 | RecipeC0 | WaferB15 | 7 | 2023-01-01 01:39:01.265 |
272 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.994141 | RecipeC0 | WaferB15 | 7 | 2023-01-01 01:39:01.265 |
273 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.97 | RecipeC0 | WaferB15 | 7 | 2023-01-01 01:39:01.265 |
274 | lotA0 | UPC1-Flow_STEP_MEAN | -3.955078 | RecipeC0 | WaferB15 | 8 | 2023-01-01 01:39:02.275 |
275 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.011719 | RecipeC0 | WaferB15 | 8 | 2023-01-01 01:39:02.275 |
276 | lotA0 | UPC1-Flow_STEP_MEAN | -3.076172 | RecipeC0 | WaferB15 | 9 | 2023-01-01 01:39:11.285 |
277 | lotA0 | MFCKFlow_STEP_MEAN | 60.052246 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
278 | lotA0 | MFCEFlow_STEP_MEAN | 81.061524 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
279 | lotA0 | UPC1-Flow_STEP_MEAN | 661.780387 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
280 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.997551 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
281 | lotA0 | MFCGFlow_STEP_MEAN | 74.999041 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
282 | lotA0 | MFCXFlow_STEP_MEAN | 0.00447 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
283 | lotA0 | MFC5Flow_STEP_MEAN | 81.073142 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
284 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
285 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.938525 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
286 | lotA0 | MFCJFlow_STEP_MEAN | 60.061523 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
287 | lotA0 | MFC2Flow_STEP_MEAN | 75.103027 | RecipeC0 | WaferB16 | 10 | 2023-01-01 01:40:13.363 |
288 | lotA0 | UPC1-Flow_STEP_MEAN | 29.53125 | RecipeC0 | WaferB16 | 7 | 2023-01-01 01:40:19.273 |
289 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.94 | RecipeC0 | WaferB16 | 7 | 2023-01-01 01:40:19.273 |
290 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.982422 | RecipeC0 | WaferB16 | 7 | 2023-01-01 01:40:19.273 |
291 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.004395 | RecipeC0 | WaferB16 | 8 | 2023-01-01 01:40:20.492 |
292 | lotA0 | UPC1-Flow_STEP_MEAN | -3.955078 | RecipeC0 | WaferB16 | 8 | 2023-01-01 01:40:20.492 |
293 | lotA0 | MFCXFlow_STEP_MEAN | 0.002235 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
294 | lotA0 | MFCJFlow_STEP_MEAN | 60.053657 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
295 | lotA0 | MFCGFlow_STEP_MEAN | 74.999041 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
296 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.99743 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
297 | lotA0 | MFC5Flow_STEP_MEAN | 81.070219 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
298 | lotA0 | MFC2Flow_STEP_MEAN | 75.019287 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
299 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.932623 | RecipeC0 | WaferB17 | 10 | 2023-01-01 01:41:31.272 |
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