Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
1,099,900 | lotA4373 | MFCEFlow_STEP_MEAN | 81.006593 | RecipeC1 | WaferB72974 | 10 | 2023-11-11 03:59:09.712 |
1,099,901 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.972168 | RecipeC1 | WaferB72974 | 7 | 2023-11-11 03:59:14.714 |
1,099,902 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.88 | RecipeC1 | WaferB72974 | 7 | 2023-11-11 03:59:14.714 |
1,099,903 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 12.015381 | RecipeC1 | WaferB72974 | 8 | 2023-11-11 03:59:16.711 |
1,099,904 | lotA4373 | UPC1-Flow_STEP_MEAN | 637.136404 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,905 | lotA4373 | MFCKFlow_STEP_MEAN | 60.043069 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,906 | lotA4373 | MFCNFlow_STEP_MEAN | 134.920908 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,907 | lotA4373 | MFCGFlow_STEP_MEAN | 74.992178 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,908 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.940984 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,909 | lotA4373 | MFCEFlow_STEP_MEAN | 81.019777 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,910 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.998991 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,911 | lotA4373 | MFCXFlow_STEP_MEAN | 0.002254 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,912 | lotA4373 | MFC5Flow_STEP_MEAN | 81.051459 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,913 | lotA4373 | MFC2Flow_STEP_MEAN | 75.047124 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,914 | lotA4373 | MFCJFlow_STEP_MEAN | 60.05517 | RecipeC1 | WaferB72975 | 10 | 2023-11-11 04:00:52.706 |
1,099,915 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.928223 | RecipeC1 | WaferB72975 | 7 | 2023-11-11 04:00:57.706 |
1,099,916 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.88 | RecipeC1 | WaferB72975 | 7 | 2023-11-11 04:00:57.706 |
1,099,917 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.99707 | RecipeC1 | WaferB72975 | 8 | 2023-11-11 04:00:59.735 |
1,099,918 | lotA4373 | MFC5Flow_STEP_MEAN | 81.057129 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,919 | lotA4373 | MFC2Flow_STEP_MEAN | 75.055412 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,920 | lotA4373 | MFCXFlow_STEP_MEAN | 0 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,921 | lotA4373 | MFCJFlow_STEP_MEAN | 60.053792 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,922 | lotA4373 | MFCNFlow_STEP_MEAN | 134.899117 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,923 | lotA4373 | MFCKFlow_STEP_MEAN | 60.044514 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,924 | lotA4373 | MFCEFlow_STEP_MEAN | 81.007192 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,925 | lotA4373 | UPC1-Flow_STEP_MEAN | 635.369317 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,926 | lotA4373 | MFCGFlow_STEP_MEAN | 75.009228 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,927 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 12.001273 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,928 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.879016 | RecipeC1 | WaferB72976 | 10 | 2023-11-11 04:02:48.740 |
1,099,929 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.82 | RecipeC1 | WaferB72976 | 7 | 2023-11-11 04:02:54.709 |
1,099,930 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.934082 | RecipeC1 | WaferB72976 | 7 | 2023-11-11 04:02:54.709 |
1,099,931 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.967774 | RecipeC1 | WaferB72976 | 8 | 2023-11-11 04:02:55.709 |
1,099,932 | lotA4373 | MFCNFlow_STEP_MEAN | 134.894759 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,933 | lotA4373 | MFC5Flow_STEP_MEAN | 81.046143 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,934 | lotA4373 | MFC2Flow_STEP_MEAN | 75.023442 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,935 | lotA4373 | MFCXFlow_STEP_MEAN | 0 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,936 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 12.000432 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,937 | lotA4373 | MFCEFlow_STEP_MEAN | 81.013185 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,938 | lotA4373 | UPC1-Flow_STEP_MEAN | 634.892052 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,939 | lotA4373 | MFCKFlow_STEP_MEAN | 60.042863 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,940 | lotA4373 | MFCGFlow_STEP_MEAN | 75.01207 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,941 | lotA4373 | MFCJFlow_STEP_MEAN | 60.052351 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,942 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 6.01918 | RecipeC1 | WaferB72977 | 10 | 2023-11-11 04:04:44.713 |
1,099,943 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 4.92 | RecipeC1 | WaferB72977 | 7 | 2023-11-11 04:04:49.723 |
1,099,944 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.931152 | RecipeC1 | WaferB72977 | 7 | 2023-11-11 04:04:49.723 |
1,099,945 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.975098 | RecipeC1 | WaferB72977 | 8 | 2023-11-11 04:04:51.713 |
1,099,946 | lotA4373 | MFCNFlow_STEP_MEAN | 134.920908 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,947 | lotA4373 | MFCJFlow_STEP_MEAN | 60.052145 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,948 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.893065 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,949 | lotA4373 | MFCKFlow_STEP_MEAN | 60.046094 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,950 | lotA4373 | MFCXFlow_STEP_MEAN | 0 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,951 | lotA4373 | MFCEFlow_STEP_MEAN | 81.013185 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,952 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.999669 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,953 | lotA4373 | MFCGFlow_STEP_MEAN | 75.012507 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,954 | lotA4373 | MFC2Flow_STEP_MEAN | 75.081568 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,955 | lotA4373 | MFC5Flow_STEP_MEAN | 81.057838 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,956 | lotA4373 | UPC1-Flow_STEP_MEAN | 636.559414 | RecipeC1 | WaferB72978 | 10 | 2023-11-11 04:06:43.707 |
1,099,957 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.90918 | RecipeC1 | WaferB72978 | 7 | 2023-11-11 04:06:48.716 |
1,099,958 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.88 | RecipeC1 | WaferB72978 | 7 | 2023-11-11 04:06:48.716 |
1,099,959 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.90918 | RecipeC1 | WaferB72978 | 8 | 2023-11-11 04:06:49.729 |
1,099,960 | lotA4373 | UPC1-Flow_STEP_MEAN | 634.837123 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,961 | lotA4373 | MFCEFlow_STEP_MEAN | 81.013185 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,962 | lotA4373 | MFCXFlow_STEP_MEAN | 0.002254 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,963 | lotA4373 | MFCGFlow_STEP_MEAN | 75.009228 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,964 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.998391 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,965 | lotA4373 | MFCKFlow_STEP_MEAN | 60.044514 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,966 | lotA4373 | MFC2Flow_STEP_MEAN | 75.055412 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,967 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.886393 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,968 | lotA4373 | MFCJFlow_STEP_MEAN | 60.050699 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,969 | lotA4373 | MFCNFlow_STEP_MEAN | 134.899114 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,970 | lotA4373 | MFC5Flow_STEP_MEAN | 81.046143 | RecipeC1 | WaferB72979 | 10 | 2023-11-11 04:08:39.710 |
1,099,971 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.944336 | RecipeC1 | WaferB72979 | 7 | 2023-11-11 04:08:45.710 |
1,099,972 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.91 | RecipeC1 | WaferB72979 | 7 | 2023-11-11 04:08:45.710 |
1,099,973 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.916504 | RecipeC1 | WaferB72979 | 8 | 2023-11-11 04:08:46.710 |
1,099,974 | lotA4373 | MFCNFlow_STEP_MEAN | 134.894759 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,975 | lotA4373 | UPC1-Flow_STEP_MEAN | 636.092703 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,976 | lotA4373 | MFCEFlow_STEP_MEAN | 81.013185 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,977 | lotA4373 | MFCXFlow_STEP_MEAN | 0 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,978 | lotA4373 | MFCGFlow_STEP_MEAN | 75.01207 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,979 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.898689 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,980 | lotA4373 | MFC2Flow_STEP_MEAN | 75.108694 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,981 | lotA4373 | MFC5Flow_STEP_MEAN | 81.047206 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,982 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.999472 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,983 | lotA4373 | MFCJFlow_STEP_MEAN | 60.049153 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,984 | lotA4373 | MFCKFlow_STEP_MEAN | 60.042968 | RecipeC1 | WaferB72980 | 10 | 2023-11-11 04:10:37.704 |
1,099,985 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.983887 | RecipeC1 | WaferB72980 | 7 | 2023-11-11 04:10:42.714 |
1,099,986 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.9325 | RecipeC1 | WaferB72980 | 7 | 2023-11-11 04:10:42.714 |
1,099,987 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 12.015381 | RecipeC1 | WaferB72980 | 8 | 2023-11-11 04:10:44.714 |
1,099,988 | lotA4373 | MFC5Flow_STEP_MEAN | 81.059326 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
1,099,989 | lotA4373 | MFCJFlow_STEP_MEAN | 60.05517 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
1,099,990 | lotA4373 | ThrottleValveAngle_STEP_MEAN | 5.914426 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
1,099,991 | lotA4373 | MFCNFlow_STEP_MEAN | 134.877326 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
1,099,992 | lotA4373 | MFCKFlow_STEP_MEAN | 60.040043 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
1,099,993 | lotA4373 | MFCEFlow_STEP_MEAN | 81.013185 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
1,099,994 | lotA4373 | MFCGFlow_STEP_MEAN | 74.99502 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
1,099,995 | lotA4373 | MFCXFlow_STEP_MEAN | 0.004508 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
1,099,996 | lotA4373 | MFC2Flow_STEP_MEAN | 75.034097 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
1,099,997 | lotA4373 | UPC1-Flow_STEP_MEAN | 635.464911 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
1,099,998 | lotA4373 | Pressure100TorrManometer_STEP_MEAN | 11.997791 | RecipeC1 | WaferB72981 | 10 | 2023-11-11 04:12:35.978 |
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