Unnamed: 0
int64 0
1.1M
| lot_id
stringlengths 5
8
| parameter
stringclasses 11
values | value
float64 -4.83
711
| recipe_id
stringclasses 10
values | substrate_id
stringlengths 7
11
| step_id
int64 1
12
| sum_dtts
stringdate 2023-01-01 01:19:32
2023-11-11 04:12:35
|
|---|---|---|---|---|---|---|---|
100 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.986084 | RecipeC0 | WaferB5 | 8 | 2023-01-01 01:26:01.265 |
101 | lotA0 | UPC1-Flow_STEP_MEAN | -3.295898 | RecipeC0 | WaferB5 | 8 | 2023-01-01 01:26:01.265 |
102 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.989746 | RecipeC0 | WaferB6 | 8 | 2023-01-01 01:26:11.265 |
103 | lotA0 | UPC1-Flow_STEP_MEAN | 3.515625 | RecipeC0 | WaferB6 | 8 | 2023-01-01 01:26:11.265 |
104 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.99695 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
105 | lotA0 | MFCJFlow_STEP_MEAN | 60.052351 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
106 | lotA0 | UPC1-Flow_STEP_MEAN | 667.313171 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
107 | lotA0 | MFCEFlow_STEP_MEAN | 81.061524 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
108 | lotA0 | MFCGFlow_STEP_MEAN | 74.995839 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
109 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.943934 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
110 | lotA0 | MFCKFlow_STEP_MEAN | 60.046026 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
111 | lotA0 | MFC2Flow_STEP_MEAN | 75.016296 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
112 | lotA0 | MFC5Flow_STEP_MEAN | 81.068263 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
113 | lotA0 | MFCNFlow_STEP_MEAN | 134.932252 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
114 | lotA0 | MFCXFlow_STEP_MEAN | 0.002235 | RecipeC0 | WaferB6 | 10 | 2023-01-01 01:27:12.275 |
115 | lotA0 | ThrottleValveAngle_STEP_MEAN | 6 | RecipeC0 | WaferB6 | 7 | 2023-01-01 01:27:17.262 |
116 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.976563 | RecipeC0 | WaferB6 | 7 | 2023-01-01 01:27:17.262 |
117 | lotA0 | UPC1-Flow_STEP_MEAN | 95.449218 | RecipeC0 | WaferB6 | 7 | 2023-01-01 01:27:17.262 |
118 | lotA0 | UPC1-Flow_STEP_MEAN | -3.295898 | RecipeC0 | WaferB6 | 8 | 2023-01-01 01:27:19.262 |
119 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.011719 | RecipeC0 | WaferB6 | 8 | 2023-01-01 01:27:19.262 |
120 | lotA0 | UPC1-Flow_STEP_MEAN | 3.515625 | RecipeC0 | WaferB7 | 7 | 2023-01-01 01:27:29.262 |
121 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.989746 | RecipeC0 | WaferB7 | 7 | 2023-01-01 01:27:29.262 |
122 | lotA0 | MFC2Flow_STEP_MEAN | 75.222656 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
123 | lotA0 | MFC5Flow_STEP_MEAN | 81.072755 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
124 | lotA0 | UPC1-Flow_STEP_MEAN | 659.70559 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
125 | lotA0 | MFCJFlow_STEP_MEAN | 60.056884 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
126 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.939016 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
127 | lotA0 | MFCNFlow_STEP_MEAN | 134.92793 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
128 | lotA0 | MFCEFlow_STEP_MEAN | 81.073776 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
129 | lotA0 | MFCXFlow_STEP_MEAN | 0 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
130 | lotA0 | MFCKFlow_STEP_MEAN | 60.052246 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
131 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.000672 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
132 | lotA0 | MFCGFlow_STEP_MEAN | 75.001581 | RecipeC0 | WaferB7 | 10 | 2023-01-01 01:28:30.269 |
133 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.95166 | RecipeC0 | WaferB7 | 7 | 2023-01-01 01:28:35.259 |
134 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.97 | RecipeC0 | WaferB7 | 7 | 2023-01-01 01:28:35.259 |
135 | lotA0 | UPC1-Flow_STEP_MEAN | 151.962892 | RecipeC0 | WaferB7 | 7 | 2023-01-01 01:28:35.259 |
136 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.000732 | RecipeC0 | WaferB7 | 8 | 2023-01-01 01:28:37.259 |
137 | lotA0 | UPC1-Flow_STEP_MEAN | -3.515625 | RecipeC0 | WaferB7 | 8 | 2023-01-01 01:28:37.259 |
138 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.99707 | RecipeC0 | WaferB8 | 7 | 2023-01-01 01:28:47.269 |
139 | lotA0 | UPC1-Flow_STEP_MEAN | 3.515625 | RecipeC0 | WaferB8 | 7 | 2023-01-01 01:28:47.269 |
140 | lotA0 | UPC1-Flow_STEP_MEAN | 661.304912 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
141 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.934098 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
142 | lotA0 | MFCKFlow_STEP_MEAN | 60.049153 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
143 | lotA0 | MFCNFlow_STEP_MEAN | 134.979786 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
144 | lotA0 | MFCJFlow_STEP_MEAN | 60.053792 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
145 | lotA0 | MFCXFlow_STEP_MEAN | 0.002274 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
146 | lotA0 | MFC2Flow_STEP_MEAN | 75.002838 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
147 | lotA0 | MFCEFlow_STEP_MEAN | 81.075001 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
148 | lotA0 | MFC5Flow_STEP_MEAN | 81.066016 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
149 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.997671 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
150 | lotA0 | MFCGFlow_STEP_MEAN | 75.001581 | RecipeC0 | WaferB8 | 10 | 2023-01-01 01:29:48.266 |
151 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.94 | RecipeC0 | WaferB8 | 7 | 2023-01-01 01:29:54.267 |
152 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.022705 | RecipeC0 | WaferB8 | 7 | 2023-01-01 01:29:54.267 |
153 | lotA0 | UPC1-Flow_STEP_MEAN | 85.107423 | RecipeC0 | WaferB8 | 7 | 2023-01-01 01:29:54.267 |
154 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.99707 | RecipeC0 | WaferB8 | 8 | 2023-01-01 01:29:55.286 |
155 | lotA0 | UPC1-Flow_STEP_MEAN | -3.515625 | RecipeC0 | WaferB8 | 8 | 2023-01-01 01:29:55.286 |
156 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
157 | lotA0 | MFCKFlow_STEP_MEAN | 60.047607 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
158 | lotA0 | MFCJFlow_STEP_MEAN | 60.052246 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
159 | lotA0 | MFCEFlow_STEP_MEAN | 81.07837 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
160 | lotA0 | UPC1-Flow_STEP_MEAN | 658.805072 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
161 | lotA0 | MFCGFlow_STEP_MEAN | 74.99871 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
162 | lotA0 | MFC5Flow_STEP_MEAN | 81.066016 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
163 | lotA0 | MFCXFlow_STEP_MEAN | 0 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
164 | lotA0 | MFC2Flow_STEP_MEAN | 75.234618 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
165 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.000072 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
166 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.939508 | RecipeC0 | WaferB9 | 10 | 2023-01-01 01:31:06.273 |
167 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.985 | RecipeC0 | WaferB9 | 7 | 2023-01-01 01:31:12.263 |
168 | lotA0 | UPC1-Flow_STEP_MEAN | 125.610352 | RecipeC0 | WaferB9 | 7 | 2023-01-01 01:31:12.263 |
169 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.975098 | RecipeC0 | WaferB9 | 7 | 2023-01-01 01:31:12.263 |
170 | lotA0 | UPC1-Flow_STEP_MEAN | -3.515625 | RecipeC0 | WaferB9 | 8 | 2023-01-01 01:31:13.303 |
171 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.99707 | RecipeC0 | WaferB9 | 8 | 2023-01-01 01:31:13.303 |
172 | lotA0 | MFCKFlow_STEP_MEAN | 60.050699 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
173 | lotA0 | MFCJFlow_STEP_MEAN | 60.050699 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
174 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.930164 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
175 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
176 | lotA0 | UPC1-Flow_STEP_MEAN | 659.936126 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
177 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.998631 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
178 | lotA0 | MFCGFlow_STEP_MEAN | 74.99871 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
179 | lotA0 | MFCXFlow_STEP_MEAN | 0 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
180 | lotA0 | MFC2Flow_STEP_MEAN | 75.029754 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
181 | lotA0 | MFC5Flow_STEP_MEAN | 81.072393 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
182 | lotA0 | MFCEFlow_STEP_MEAN | 81.086028 | RecipeC0 | WaferB10 | 10 | 2023-01-01 01:32:24.273 |
183 | lotA0 | UPC1-Flow_STEP_MEAN | 669.72657 | RecipeC0 | WaferB10 | 1 | 2023-01-01 01:32:25.260 |
184 | lotA0 | UPC1-Flow_STEP_MEAN | 25.664062 | RecipeC0 | WaferB10 | 7 | 2023-01-01 01:32:30.270 |
185 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.94 | RecipeC0 | WaferB10 | 7 | 2023-01-01 01:32:30.270 |
186 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.972168 | RecipeC0 | WaferB10 | 7 | 2023-01-01 01:32:30.270 |
187 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 12.004395 | RecipeC0 | WaferB10 | 8 | 2023-01-01 01:32:31.500 |
188 | lotA0 | UPC1-Flow_STEP_MEAN | -3.515625 | RecipeC0 | WaferB10 | 8 | 2023-01-01 01:32:31.500 |
189 | lotA0 | UPC1-Flow_STEP_MEAN | 3.076172 | RecipeC0 | WaferB11 | 9 | 2023-01-01 01:32:41.270 |
190 | lotA0 | MFCJFlow_STEP_MEAN | 60.053792 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
191 | lotA0 | ThrottleValveAngle_STEP_MEAN | 5.936066 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
192 | lotA0 | MFC2Flow_STEP_MEAN | 75.043213 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
193 | lotA0 | MFCNFlow_STEP_MEAN | 134.95386 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
194 | lotA0 | MFC5Flow_STEP_MEAN | 81.072393 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
195 | lotA0 | MFCKFlow_STEP_MEAN | 60.049153 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
196 | lotA0 | MFCXFlow_STEP_MEAN | 0.002274 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
197 | lotA0 | UPC1-Flow_STEP_MEAN | 663.826363 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
198 | lotA0 | MFCEFlow_STEP_MEAN | 81.075001 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
199 | lotA0 | Pressure100TorrManometer_STEP_MEAN | 11.997671 | RecipeC0 | WaferB11 | 10 | 2023-01-01 01:33:42.267 |
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